KR102522823B1 - 고전도성 구리 필름의 제조 - Google Patents
고전도성 구리 필름의 제조 Download PDFInfo
- Publication number
- KR102522823B1 KR102522823B1 KR1020187000929A KR20187000929A KR102522823B1 KR 102522823 B1 KR102522823 B1 KR 102522823B1 KR 1020187000929 A KR1020187000929 A KR 1020187000929A KR 20187000929 A KR20187000929 A KR 20187000929A KR 102522823 B1 KR102522823 B1 KR 102522823B1
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- KR
- South Korea
- Prior art keywords
- copper
- ink
- composition
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- complex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/52—Electrically conductive inks
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/043—Improving the adhesiveness of the coatings per se, e.g. forming primers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/044—Forming conductive coatings; Forming coatings having anti-static properties
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
- C08J7/065—Low-molecular-weight organic substances, e.g. absorption of additives in the surface of the article
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/08—Heat treatment
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/02—Printing inks
- C09D11/03—Printing inks characterised by features other than the chemical nature of the binder
- C09D11/033—Printing inks characterised by features other than the chemical nature of the binder characterised by the solvent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/02—Printing inks
- C09D11/03—Printing inks characterised by features other than the chemical nature of the binder
- C09D11/037—Printing inks characterised by features other than the chemical nature of the binder characterised by the pigment
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
- C09D11/32—Inkjet printing inks characterised by colouring agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D11/00—Inks
- C09D11/30—Inkjet printing inks
- C09D11/36—Inkjet printing inks based on non-aqueous solvents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0393—Flexible materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0145—Polyester, e.g. polyethylene terephthalate [PET], polyethylene naphthalate [PEN]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0158—Polyalkene or polyolefin, e.g. polyethylene [PE], polypropylene [PP]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0162—Silicon containing polymer, e.g. silicone
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- General Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
- Conductive Materials (AREA)
- Hydrogenated Pyridines (AREA)
- Pyridine Compounds (AREA)
- Manufacturing Of Electric Cables (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562174426P | 2015-06-11 | 2015-06-11 | |
| US62/174,426 | 2015-06-11 | ||
| PCT/CA2016/050091 WO2016197234A1 (en) | 2015-06-11 | 2016-02-02 | Preparation of high conductivity copper films |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180018694A KR20180018694A (ko) | 2018-02-21 |
| KR102522823B1 true KR102522823B1 (ko) | 2023-04-18 |
Family
ID=57502729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187000929A Active KR102522823B1 (ko) | 2015-06-11 | 2016-02-02 | 고전도성 구리 필름의 제조 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10954406B2 (https=) |
| EP (1) | EP3307705B1 (https=) |
| JP (1) | JP6775531B2 (https=) |
| KR (1) | KR102522823B1 (https=) |
| CN (1) | CN107614481B (https=) |
| CA (1) | CA2988797C (https=) |
| TW (1) | TWI680134B (https=) |
| WO (1) | WO2016197234A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018118460A1 (en) | 2016-12-24 | 2018-06-28 | Electroninks Incorporated | Copper based conductive ink composition and method of making the same |
| US11993719B2 (en) | 2017-10-27 | 2024-05-28 | National Research Council Of Canada | Boron nitride nanotube coated substrates for sintering of metallic traces by intense pulse light |
| KR20190131242A (ko) * | 2018-05-16 | 2019-11-26 | 도레이첨단소재 주식회사 | 전도성 섬유집합체 및 그 제조방법 |
| TWI853828B (zh) | 2018-08-07 | 2024-09-01 | 加拿大國家研究委員會 | 包覆成型的印刷電子零件和其製造方法 |
| US12528959B2 (en) | 2018-10-18 | 2026-01-20 | National Research Council Of Canada | Conductive inks with neoprene binder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015025157A (ja) * | 2013-07-25 | 2015-02-05 | 株式会社Adeka | 銅膜形成用組成物及びそれを用いた銅膜の製造方法 |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5413260B2 (https=) | 1973-09-04 | 1979-05-29 | ||
| DE3810958A1 (de) | 1988-03-31 | 1989-10-12 | Basf Ag | Tinten fuer ink-jet-aufzeichnungsverfahren |
| CN1071182A (zh) | 1991-09-28 | 1993-04-21 | 胡贵友 | 热敏变色油墨 |
| JP3912844B2 (ja) | 1997-04-09 | 2007-05-09 | キヤノン株式会社 | 有機金属を含有するインク並びに電極、電子放出素子および画像形成装置の製造方法 |
| US5980622A (en) | 1997-08-29 | 1999-11-09 | Hewlett-Packard Company | Magenta dyes for ink-jet inks |
| JP3813750B2 (ja) | 1998-08-27 | 2006-08-23 | 大日精化工業株式会社 | カラーフィルターの製造方法及びカラーフィルター |
| DE50000718D1 (de) | 1999-09-27 | 2002-12-12 | Ciba Sc Holding Ag | Magentafärbende Tinten enthaltend Kupferkomplexazofarbstoffe auf der Bais von 1-Naphthol-di-oder trisulfonsäuren |
| US6369256B1 (en) * | 2000-06-09 | 2002-04-09 | National Research Council Of Canada | Self-reducible copper(II) source reagents for chemical vapor deposition of copper metal |
| US7629017B2 (en) * | 2001-10-05 | 2009-12-08 | Cabot Corporation | Methods for the deposition of conductive electronic features |
| US6770122B2 (en) | 2001-12-12 | 2004-08-03 | E. I. Du Pont De Nemours And Company | Copper deposition using copper formate complexes |
| US6939578B2 (en) * | 2002-01-18 | 2005-09-06 | E. I. Du Pont De Nemours And Company | Volatile copper(II) complexes for deposition of copper films by atomic layer deposition |
| KR20060012253A (ko) * | 2002-08-09 | 2006-02-07 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 구리 금속 증착을 위한 구리의 피롤릴 착물 |
| TW200416261A (en) | 2002-10-18 | 2004-09-01 | Nippon Kayaku Kk | Phthalocyanine compound for ink-jet printing, water-soluble green ink composition containing such compound and coloring substance using such composition |
| JP2004162110A (ja) | 2002-11-12 | 2004-06-10 | Mitsubishi Paper Mills Ltd | 銅/アミン組成物 |
| JP4964152B2 (ja) | 2005-03-04 | 2012-06-27 | インクテック カンパニー リミテッド | 導電性インク組成物及びこの製造方法 |
| JP5205717B2 (ja) * | 2006-07-04 | 2013-06-05 | セイコーエプソン株式会社 | ギ酸銅錯体、銅粒子の製造方法および配線基板の製造方法 |
| JP5045015B2 (ja) * | 2006-07-28 | 2012-10-10 | セイコーエプソン株式会社 | ギ酸銅の製造方法、銅粒子の製造方法および配線基板の製造方法 |
| JP2008205430A (ja) | 2007-01-26 | 2008-09-04 | Konica Minolta Holdings Inc | 金属パターン形成方法及び金属塩混合物 |
| KR20080083790A (ko) | 2007-03-13 | 2008-09-19 | 삼성전자주식회사 | 무전해 구리 도금액, 그의 제조방법 및 무전해 구리도금방법 |
| CN101519356A (zh) * | 2008-02-28 | 2009-09-02 | 华东理工大学 | 螺环双亚胺和制备方法及其应用 |
| JP2009256218A (ja) | 2008-04-14 | 2009-11-05 | Toray Ind Inc | 銅前駆体組成物およびそれを用いた銅膜の製造方法。 |
| US9095898B2 (en) * | 2008-09-15 | 2015-08-04 | Lockheed Martin Corporation | Stabilized metal nanoparticles and methods for production thereof |
| US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
| KR20120036476A (ko) * | 2010-10-08 | 2012-04-18 | 에스케이이노베이션 주식회사 | 구리(ⅱ) 포르메이트 착제를 포함하는 잉크 조성물의 제조방법 |
| CN102605355B (zh) * | 2012-02-21 | 2014-07-02 | 北京化工大学 | 基材表面的铜膜、其制备方法及应用 |
| JP5876749B2 (ja) * | 2012-02-29 | 2016-03-02 | 国立大学法人広島大学 | 導電性物質前駆体組成物、及びそれを用いた導電性物質の製造方法 |
| KR20150006091A (ko) * | 2012-02-29 | 2015-01-15 | 이슘 리서치 디벨롭먼트 컴퍼니 오브 더 히브루 유니버시티 오브 예루살렘, 엘티디. | 금속 전구체 나노입자들을 함유한 잉크 |
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| JP2013206722A (ja) * | 2012-03-28 | 2013-10-07 | Fujifilm Corp | 液状組成物、金属銅膜、及び導体配線、並びに金属銅膜の製造方法 |
| US10405422B2 (en) | 2012-07-09 | 2019-09-03 | Shikoku Chemicals Corporation | Copper film-forming agent and method for forming copper film |
| KR101288106B1 (ko) * | 2012-12-20 | 2013-07-26 | (주)피이솔브 | 금속 전구체 및 이를 이용한 금속 전구체 잉크 |
| JP2014182913A (ja) * | 2013-03-19 | 2014-09-29 | Fujifilm Corp | 導電膜形成用組成物およびこれを用いる導電膜の製造方法 |
| KR20140142406A (ko) * | 2013-06-03 | 2014-12-12 | 고성국 | 유기 동 전구체를 사용한 잉크 조성물 및 그 제조방법 |
| CN104341860B (zh) * | 2013-08-01 | 2019-04-09 | 索尼公司 | 纳米导电墨水及其制备方法 |
| KR102233293B1 (ko) * | 2014-01-15 | 2021-03-29 | (주)창성 | 구리포메이트-아민 컴플렉스를 포함하는 잉크 조성물의 제조방법 |
| JP6468889B2 (ja) * | 2014-03-11 | 2019-02-13 | 三井金属鉱業株式会社 | 導電性組成物、及びそれを用いた導電体の製造方法 |
| WO2015192248A1 (en) * | 2014-06-19 | 2015-12-23 | National Research Council Of Canada | Molecular inks |
| US20160057866A1 (en) * | 2014-08-19 | 2016-02-25 | Jsr Corporation | Metal film forming method and conductive ink used in said method |
| US9809489B2 (en) * | 2014-09-12 | 2017-11-07 | Jsr Corporation | Composition for forming a conductive film, a conductive film, a method for producing a plating film, a plating film, and an electronic device |
| JP7186709B2 (ja) * | 2016-10-25 | 2022-12-09 | イー2アイピー テクノロジーズ インコーポレイテッド | プリンテッド・エレクトロニクス |
-
2016
- 2016-02-02 JP JP2017563208A patent/JP6775531B2/ja active Active
- 2016-02-02 EP EP16806465.7A patent/EP3307705B1/en active Active
- 2016-02-02 CN CN201680032492.XA patent/CN107614481B/zh active Active
- 2016-02-02 WO PCT/CA2016/050091 patent/WO2016197234A1/en not_active Ceased
- 2016-02-02 CA CA2988797A patent/CA2988797C/en active Active
- 2016-02-02 KR KR1020187000929A patent/KR102522823B1/ko active Active
- 2016-02-02 US US15/835,688 patent/US10954406B2/en active Active
- 2016-02-05 TW TW105104063A patent/TWI680134B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015025157A (ja) * | 2013-07-25 | 2015-02-05 | 株式会社Adeka | 銅膜形成用組成物及びそれを用いた銅膜の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2988797C (en) | 2023-08-01 |
| JP2018525770A (ja) | 2018-09-06 |
| WO2016197234A1 (en) | 2016-12-15 |
| CA2988797A1 (en) | 2016-12-15 |
| US10954406B2 (en) | 2021-03-23 |
| CN107614481B (zh) | 2021-05-07 |
| TW201643172A (zh) | 2016-12-16 |
| CN107614481A (zh) | 2018-01-19 |
| KR20180018694A (ko) | 2018-02-21 |
| EP3307705B1 (en) | 2021-05-05 |
| EP3307705A4 (en) | 2019-01-23 |
| TWI680134B (zh) | 2019-12-21 |
| US20180134909A1 (en) | 2018-05-17 |
| JP6775531B2 (ja) | 2020-10-28 |
| EP3307705A1 (en) | 2018-04-18 |
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