KR102438577B1 - 고 품질 fcvd 막들을 위한 진보된 프로세스 플로우 - Google Patents

고 품질 fcvd 막들을 위한 진보된 프로세스 플로우 Download PDF

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KR102438577B1
KR102438577B1 KR1020177021938A KR20177021938A KR102438577B1 KR 102438577 B1 KR102438577 B1 KR 102438577B1 KR 1020177021938 A KR1020177021938 A KR 1020177021938A KR 20177021938 A KR20177021938 A KR 20177021938A KR 102438577 B1 KR102438577 B1 KR 102438577B1
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film
fcvd
ion implantation
forming
dielectric film
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KR20170101997A (ko
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스리니바스 디. 네마니
에리카 첸
루도빅 고데트
준 수에
엘리 와이. 이에
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어플라이드 머티어리얼스, 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020177021938A 2015-01-07 2015-12-15 고 품질 fcvd 막들을 위한 진보된 프로세스 플로우 Active KR102438577B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562100888P 2015-01-07 2015-01-07
US62/100,888 2015-01-07
US14/635,589 2015-03-02
US14/635,589 US9777378B2 (en) 2015-01-07 2015-03-02 Advanced process flow for high quality FCVD films
PCT/US2015/065846 WO2016111815A1 (en) 2015-01-07 2015-12-15 Advanced process flow for high quality fcvd films

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KR20170101997A KR20170101997A (ko) 2017-09-06
KR102438577B1 true KR102438577B1 (ko) 2022-08-30

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US (1) US9777378B2 (enExample)
JP (2) JP6782702B2 (enExample)
KR (1) KR102438577B1 (enExample)
CN (1) CN107109643B (enExample)
TW (1) TWI676700B (enExample)
WO (1) WO2016111815A1 (enExample)

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KR102536820B1 (ko) 2018-03-09 2023-05-24 어플라이드 머티어리얼스, 인코포레이티드 금속 함유 재료들을 위한 고압 어닐링 프로세스
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Publication number Publication date
JP2018503259A (ja) 2018-02-01
CN107109643A (zh) 2017-08-29
KR20170101997A (ko) 2017-09-06
JP2021044555A (ja) 2021-03-18
US20160194758A1 (en) 2016-07-07
JP6782702B2 (ja) 2020-11-11
US9777378B2 (en) 2017-10-03
TWI676700B (zh) 2019-11-11
TW201629254A (zh) 2016-08-16
WO2016111815A1 (en) 2016-07-14
CN107109643B (zh) 2019-09-24

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