KR102426267B1 - 펌프, 펌프 장치 및 액 공급 시스템 - Google Patents

펌프, 펌프 장치 및 액 공급 시스템 Download PDF

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Publication number
KR102426267B1
KR102426267B1 KR1020150146396A KR20150146396A KR102426267B1 KR 102426267 B1 KR102426267 B1 KR 102426267B1 KR 1020150146396 A KR1020150146396 A KR 1020150146396A KR 20150146396 A KR20150146396 A KR 20150146396A KR 102426267 B1 KR102426267 B1 KR 102426267B1
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KR
South Korea
Prior art keywords
tube
liquid
pump
housing
unit
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KR1020150146396A
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English (en)
Korean (ko)
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KR20160047997A (ko
Inventor
타카시 사사
다이스케 이시마루
타카히로 오쿠보
토모유키 유모토
토모히코 무타
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도쿄엘렉트론가부시키가이샤
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Publication of KR20160047997A publication Critical patent/KR20160047997A/ko
Application granted granted Critical
Publication of KR102426267B1 publication Critical patent/KR102426267B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Reciprocating Pumps (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
KR1020150146396A 2014-10-23 2015-10-21 펌프, 펌프 장치 및 액 공급 시스템 KR102426267B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2014-216312 2014-10-23
JP2014216312 2014-10-23
JPJP-P-2015-144946 2015-07-22
JP2015144946A JP6442377B2 (ja) 2014-10-23 2015-07-22 ポンプ装置セット及び液供給システム

Publications (2)

Publication Number Publication Date
KR20160047997A KR20160047997A (ko) 2016-05-03
KR102426267B1 true KR102426267B1 (ko) 2022-07-28

Family

ID=55971676

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150146396A KR102426267B1 (ko) 2014-10-23 2015-10-21 펌프, 펌프 장치 및 액 공급 시스템

Country Status (3)

Country Link
JP (1) JP6442377B2 (ja)
KR (1) KR102426267B1 (ja)
TW (1) TWI623355B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6809887B2 (ja) * 2016-12-12 2021-01-06 株式会社リコー 流体搬送システム、画像形成装置及び流体搬送方法
JP6966265B2 (ja) * 2017-08-31 2021-11-10 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置、処理液供給装置、基板処理装置、液抜き方法および液置換方法
JP7042639B2 (ja) * 2018-02-07 2022-03-28 株式会社コガネイ 液体供給装置
CN114930027A (zh) * 2019-12-27 2022-08-19 学校法人中央大学 泵单元、泵以及输送物的特性检测方法
JP2022105836A (ja) 2021-01-05 2022-07-15 東京エレクトロン株式会社 液供給装置、液供給方法及びコンピュータ記憶媒体
KR102666311B1 (ko) 2022-04-05 2024-05-16 세메스 주식회사 펌프, 액 공급장치 및 기판처리장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001520723A (ja) * 1998-02-05 2001-10-30 バクスター インターナショナル インコーポレイテッド 精度を向上させた蠕動ポンプのためのチューブ復元バンパー

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197597U (ja) * 1985-11-15 1986-06-23
JPH07324680A (ja) * 1994-05-30 1995-12-12 Hitachi Ltd 流動体供給方法および装置
JPH09183467A (ja) * 1995-12-29 1997-07-15 Umezawa Seisakusho:Kk 吐出用容器装置
TWM243720U (en) * 2003-07-02 2004-09-11 Wan-Chiuan Tzeng Wireless transmission device between computer and computer peripheral equipment
JP4124712B2 (ja) * 2003-09-11 2008-07-23 株式会社コガネイ 薬液供給用の可撓性チューブ
TWI281457B (en) * 2004-12-31 2007-05-21 Ind Tech Res Inst Microfluidic driving and speed controlling apparatus and application thereof
JP4425807B2 (ja) * 2005-02-02 2010-03-03 東京エレクトロン株式会社 塗布液供給装置および塗布処理装置
JP4794401B2 (ja) * 2006-09-28 2011-10-19 シャープ株式会社 マイクロポンプ及びそれを備えた徐放装置
JP5018255B2 (ja) 2007-06-07 2012-09-05 東京エレクトロン株式会社 薬液供給システム及び薬液供給方法並びに記憶媒体
JP5416672B2 (ja) * 2010-09-28 2014-02-12 株式会社コガネイ 薬液供給装置
TWM405643U (en) * 2010-12-17 2011-06-11 jun-ming Lai Light emitting diode spraying device
JP5255660B2 (ja) 2011-01-18 2013-08-07 東京エレクトロン株式会社 薬液供給方法及び薬液供給システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001520723A (ja) * 1998-02-05 2001-10-30 バクスター インターナショナル インコーポレイテッド 精度を向上させた蠕動ポンプのためのチューブ復元バンパー

Also Published As

Publication number Publication date
KR20160047997A (ko) 2016-05-03
TW201632266A (zh) 2016-09-16
TWI623355B (zh) 2018-05-11
JP6442377B2 (ja) 2018-12-19
JP2016084803A (ja) 2016-05-19

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