KR102245508B1 - 벌크 탄화규소를 제조하기 위한 장치 - Google Patents

벌크 탄화규소를 제조하기 위한 장치 Download PDF

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KR102245508B1
KR102245508B1 KR1020167008944A KR20167008944A KR102245508B1 KR 102245508 B1 KR102245508 B1 KR 102245508B1 KR 1020167008944 A KR1020167008944 A KR 1020167008944A KR 20167008944 A KR20167008944 A KR 20167008944A KR 102245508 B1 KR102245508 B1 KR 102245508B1
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silicon carbide
seed
crucible
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precursor
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KR20160050087A (ko
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로먼 브이. 드라체브
빠르티싸르티 산타나라가반
안드리히 엠. 안드루크히브
데이비드 에스. 리틀
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지티에이티 코포레이션
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C30B23/025—Epitaxial-layer growth characterised by the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1020167008944A 2013-09-06 2014-09-05 벌크 탄화규소를 제조하기 위한 장치 Active KR102245508B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361874633P 2013-09-06 2013-09-06
US61/874,633 2013-09-06
PCT/US2014/054293 WO2015035163A1 (en) 2013-09-06 2014-09-05 Apparatus for producing bulk silicon carbide

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KR20160050087A KR20160050087A (ko) 2016-05-10
KR102245508B1 true KR102245508B1 (ko) 2021-04-28

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US (2) US10851473B2 (enExample)
JP (2) JP6535005B2 (enExample)
KR (1) KR102245508B1 (enExample)
CN (2) CN110878430B (enExample)
DE (1) DE112014004073T5 (enExample)
TW (3) TWI721452B (enExample)
WO (1) WO2015035163A1 (enExample)

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KR102245506B1 (ko) * 2013-09-06 2021-04-28 지티에이티 코포레이션 탄화규소 전구체로부터 벌크 탄화규소를 제조하기 위한 방법 및 장치
CN105174296B (zh) * 2015-05-22 2016-12-07 鸿福晶体科技(安徽)有限公司 一种氢氧化铝焙烧专用组合坩埚盖
US10142086B2 (en) 2015-06-11 2018-11-27 At&T Intellectual Property I, L.P. Repeater and methods for use therewith
CN105543966A (zh) * 2016-02-02 2016-05-04 北京华进创威电子有限公司 一种碳化硅单晶生长用复合保温结构
TW201807272A (zh) * 2016-08-26 2018-03-01 國家中山科學研究院 一種用於成長單晶晶體之裝置
CN108946735B (zh) * 2017-05-19 2022-11-11 新疆天科合达蓝光半导体有限公司 一种碳化硅晶体生长用大粒径碳化硅粉料的合成方法
EP3666933A4 (en) * 2018-10-16 2020-12-30 SICC Co., Ltd HIGH PURITY AND LARGE SIZE SILICON CARBIDE MONOCRISTAL, ASSOCIATED SUBSTRATE, PREPARATION PROCESS AND PREPARATION DEVICE
JP2023508691A (ja) 2019-12-27 2023-03-03 ウルフスピード インコーポレイテッド 大口径炭化ケイ素ウェハ
DE102020117661A1 (de) * 2020-07-03 2022-01-20 Friedrich-Alexander-Universität Erlangen-Nürnberg Kristallzüchtungsanlage zur Herstellung eines Einkristalls
US12125701B2 (en) * 2020-12-15 2024-10-22 Wolfspeed, Inc. Large dimension silicon carbide single crystalline materials with reduced crystallographic stress
TWI774523B (zh) 2021-08-19 2022-08-11 鴻海精密工業股份有限公司 單晶成長的方法
CN114990690B (zh) * 2022-06-30 2024-02-27 武汉大学 一种用于气相升华法制备碳化硅单晶的坩埚装置

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US20030094132A1 (en) 2001-02-14 2003-05-22 Vodakov Yury Alexandrovich Apparatus for growing low defect density silicon carbide
US20070283880A1 (en) 2005-03-24 2007-12-13 Tsvetkov Valeri F Apparatus and method for the production of bulk silicon carbide single crystals
US20120325150A1 (en) 2010-01-15 2012-12-27 Bridgestone Corporation Apparatus for producing silicon carbide single crystal

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JPH06316499A (ja) 1993-04-30 1994-11-15 Sharp Corp 炭化珪素単結晶の製造方法
US5944890A (en) * 1996-03-29 1999-08-31 Denso Corporation Method of producing single crystals and a seed crystal used in the method
JP2001063020A (ja) 1999-08-26 2001-03-13 Ricoh Co Ltd インクジェット記録装置
JP4450118B2 (ja) * 1999-10-15 2010-04-14 株式会社デンソー 炭化珪素単結晶の製造方法
US6451112B1 (en) * 1999-10-15 2002-09-17 Denso Corporation Method and apparatus for fabricating high quality single crystal
JP4880164B2 (ja) 2000-02-15 2012-02-22 ザ フォックス グループ，インコーポレイティド 低欠陥密度炭化ケイ素材料
JP4275308B2 (ja) * 2000-12-28 2009-06-10 株式会社デンソー 炭化珪素単結晶の製造方法およびその製造装置
EP1471168B2 (en) * 2003-04-24 2011-08-10 Norstel AB Device and method for producing single crystals by vapour deposition
JP2007314358A (ja) * 2006-05-23 2007-12-06 Bridgestone Corp 炭化ケイ素単結晶の製造装置及びその製造方法
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CN101580964B (zh) * 2008-05-12 2012-02-01 中国科学院物理研究所 一种用于生长高质量碳化硅晶体的籽晶托
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Publication number Priority date Publication date Assignee Title
US20030094132A1 (en) 2001-02-14 2003-05-22 Vodakov Yury Alexandrovich Apparatus for growing low defect density silicon carbide
US20070283880A1 (en) 2005-03-24 2007-12-13 Tsvetkov Valeri F Apparatus and method for the production of bulk silicon carbide single crystals
US20120325150A1 (en) 2010-01-15 2012-12-27 Bridgestone Corporation Apparatus for producing silicon carbide single crystal

Also Published As

Publication number Publication date
TWI721452B (zh) 2021-03-11
US10851473B2 (en) 2020-12-01
CN110878430B (zh) 2021-10-22
TWI671443B (zh) 2019-09-11
TWI652381B (zh) 2019-03-01
CN105531405A (zh) 2016-04-27
TW201942425A (zh) 2019-11-01
JP6712759B2 (ja) 2020-06-24
WO2015035163A1 (en) 2015-03-12
JP2019163206A (ja) 2019-09-26
TW201923173A (zh) 2019-06-16
US20150068457A1 (en) 2015-03-12
TW201520385A (zh) 2015-06-01
US11591714B2 (en) 2023-02-28
JP2016532630A (ja) 2016-10-20
DE112014004073T5 (de) 2016-06-09
KR20160050087A (ko) 2016-05-10
JP6535005B2 (ja) 2019-06-26
CN110878430A (zh) 2020-03-13
US20210087706A1 (en) 2021-03-25
CN105531405B (zh) 2019-11-15

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