KR102232403B1 - 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 - Google Patents

수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 Download PDF

Info

Publication number
KR102232403B1
KR102232403B1 KR1020180023367A KR20180023367A KR102232403B1 KR 102232403 B1 KR102232403 B1 KR 102232403B1 KR 1020180023367 A KR1020180023367 A KR 1020180023367A KR 20180023367 A KR20180023367 A KR 20180023367A KR 102232403 B1 KR102232403 B1 KR 102232403B1
Authority
KR
South Korea
Prior art keywords
gas flow
vacuum
resin
flow path
molding module
Prior art date
Application number
KR1020180023367A
Other languages
English (en)
Korean (ko)
Other versions
KR20180102494A (ko
Inventor
마사노리 하나사키
요시토 오쿠니시
Original Assignee
토와 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 토와 가부시기가이샤 filed Critical 토와 가부시기가이샤
Publication of KR20180102494A publication Critical patent/KR20180102494A/ko
Application granted granted Critical
Publication of KR102232403B1 publication Critical patent/KR102232403B1/ko

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/56Compression moulding under special conditions, e.g. vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • H01L21/566Release layers for moulds, e.g. release layers, layers against residue during moulding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B29C2043/181Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/56Compression moulding under special conditions, e.g. vacuum
    • B29C2043/561Compression moulding under special conditions, e.g. vacuum under vacuum conditions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/56Compression moulding under special conditions, e.g. vacuum
    • B29C2043/561Compression moulding under special conditions, e.g. vacuum under vacuum conditions
    • B29C2043/563Compression moulding under special conditions, e.g. vacuum under vacuum conditions combined with mechanical pressure, i.e. mould plates, rams, stampers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00Shaping characteristics in general
    • B29C2791/004Shaping under special conditions
    • B29C2791/006Using vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
KR1020180023367A 2017-03-07 2018-02-27 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 KR102232403B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017042616A JP6785690B2 (ja) 2017-03-07 2017-03-07 樹脂封止装置、樹脂成形方法および樹脂成形品の製造方法
JPJP-P-2017-042616 2017-03-07

Publications (2)

Publication Number Publication Date
KR20180102494A KR20180102494A (ko) 2018-09-17
KR102232403B1 true KR102232403B1 (ko) 2021-03-26

Family

ID=63575873

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180023367A KR102232403B1 (ko) 2017-03-07 2018-02-27 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법

Country Status (4)

Country Link
JP (1) JP6785690B2 (zh)
KR (1) KR102232403B1 (zh)
CN (1) CN108568928B (zh)
TW (1) TWI666105B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7345322B2 (ja) 2019-09-03 2023-09-15 株式会社ディスコ 樹脂の被覆方法及び樹脂被覆装置
CN111906982B (zh) * 2020-07-21 2021-04-02 南昌华越塑料制品有限公司 一种可调节输出塑料量的挤压装置
KR20240142460A (ko) * 2022-01-31 2024-09-30 가부시키가이샤 후지 키코 진공 감압 장치와, 진공 감압 장치를 사용한 언더필 충전 방법 및 탈포 충전 방법
WO2024111255A1 (ja) * 2022-11-21 2024-05-30 株式会社村田製作所 圧縮樹脂封止成形装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073102A (ja) 1998-08-28 2000-03-07 Toyota Motor Corp 減圧ガス濃度推定方法およびガス濃度推定を利用したガス経路切替方法
JP2008302535A (ja) * 2007-06-06 2008-12-18 Sumitomo Heavy Ind Ltd 樹脂封止装置および樹脂封止方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5723152A (en) * 1995-08-01 1998-03-03 Bridgestone Corporation Apparatus for vacuum molding expanded synthetic resin parts
JP3581759B2 (ja) * 1996-04-26 2004-10-27 Towa株式会社 電子部品の樹脂封止成形方法及び装置
JP3539100B2 (ja) * 1996-10-24 2004-06-14 株式会社ブリヂストン 合成樹脂発泡成形品の成形金型及び成形方法
JPH1119967A (ja) * 1997-06-30 1999-01-26 Dainippon Printing Co Ltd 射出成形同時絵付け装置及びその方法
JP4990039B2 (ja) * 2007-06-18 2012-08-01 大亜真空株式会社 圧力センサの出力補正方法及び圧力センサの出力補正装置
JP4551931B2 (ja) * 2008-01-08 2010-09-29 住友重機械工業株式会社 樹脂封止方法
KR20110082422A (ko) * 2010-01-11 2011-07-19 삼성전자주식회사 몰딩 장치 및 몰딩 방법
WO2014019104A1 (en) * 2012-07-31 2014-02-06 Bayer Materialscience Ag Vacuum-supported method for production of polyurethane foam
JP6598477B2 (ja) * 2015-03-11 2019-10-30 株式会社Subaru 複合材の成形装置及び複合材の成形方法
JP6491508B2 (ja) * 2015-03-23 2019-03-27 Towa株式会社 樹脂封止装置及び樹脂成形品の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073102A (ja) 1998-08-28 2000-03-07 Toyota Motor Corp 減圧ガス濃度推定方法およびガス濃度推定を利用したガス経路切替方法
JP2008302535A (ja) * 2007-06-06 2008-12-18 Sumitomo Heavy Ind Ltd 樹脂封止装置および樹脂封止方法

Also Published As

Publication number Publication date
TWI666105B (zh) 2019-07-21
JP6785690B2 (ja) 2020-11-18
KR20180102494A (ko) 2018-09-17
CN108568928B (zh) 2021-02-02
JP2018144371A (ja) 2018-09-20
CN108568928A (zh) 2018-09-25
TW201832895A (zh) 2018-09-16

Similar Documents

Publication Publication Date Title
KR102232403B1 (ko) 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법
JP4519398B2 (ja) 樹脂封止方法及び半導体装置の製造方法
CN110137101B (zh) 切断装置以及切断品的制造方法
US6797542B2 (en) Fabrication method of semiconductor integrated circuit device
EP2474401A2 (en) Method of resin molding and resin molding apparatus
TW201722681A (zh) 樹脂封裝裝置以及樹脂封裝方法
JP5148175B2 (ja) 樹脂封止装置および樹脂封止方法
TW201717337A (zh) 樹脂封裝裝置以及樹脂封裝方法
JP2018144371A5 (zh)
KR102288168B1 (ko) 수지 성형 장치 및 수지 성형품의 제조 방법
WO2018146755A1 (ja) 樹脂封止装置及び樹脂封止方法
JP6438772B2 (ja) 樹脂成形装置
JP2005324341A (ja) 樹脂モールド方法および樹脂モールド装置
WO2018138915A1 (ja) 樹脂封止装置及び樹脂封止方法
JP2006295010A (ja) モールド成型装置およびモールド成型方法
KR102237170B1 (ko) 수지 성형 장치, 성형틀, 및 수지 성형품의 제조 방법
TWI663039B (zh) 壓縮成型裝置、壓縮成型方法、及壓縮成型品的製造方法
JP5513337B2 (ja) 樹脂封止成形型装置及び該樹脂封止成形型装置用外気遮断部材
US20050062199A1 (en) Method and device for encapsulating electronic components while exerting fluid pressure
EP1187201A1 (en) Multiple-chip module
KR101703852B1 (ko) 실리콘 수지용 컴프레션 방식 몰딩장치 및 그 제어방법
JP2006245151A (ja) 封止成型方法
JP2004066536A (ja) 樹脂封止装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant