KR102232403B1 - 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 - Google Patents
수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 Download PDFInfo
- Publication number
- KR102232403B1 KR102232403B1 KR1020180023367A KR20180023367A KR102232403B1 KR 102232403 B1 KR102232403 B1 KR 102232403B1 KR 1020180023367 A KR1020180023367 A KR 1020180023367A KR 20180023367 A KR20180023367 A KR 20180023367A KR 102232403 B1 KR102232403 B1 KR 102232403B1
- Authority
- KR
- South Korea
- Prior art keywords
- gas flow
- vacuum
- resin
- flow path
- molding module
- Prior art date
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 147
- 239000011347 resin Substances 0.000 title claims abstract description 147
- 238000000465 moulding Methods 0.000 title claims abstract description 114
- 238000007789 sealing Methods 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000006837 decompression Effects 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 10
- 230000000903 blocking effect Effects 0.000 description 9
- 238000000748 compression moulding Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000005187 foaming Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 239000013067 intermediate product Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/56—Compression moulding under special conditions, e.g. vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/58—Measuring, controlling or regulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
- H01L21/566—Release layers for moulds, e.g. release layers, layers against residue during moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/56—Compression moulding under special conditions, e.g. vacuum
- B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/56—Compression moulding under special conditions, e.g. vacuum
- B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
- B29C2043/563—Compression moulding under special conditions, e.g. vacuum under vacuum conditions combined with mechanical pressure, i.e. mould plates, rams, stampers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C2791/00—Shaping characteristics in general
- B29C2791/004—Shaping under special conditions
- B29C2791/006—Using vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017042616A JP6785690B2 (ja) | 2017-03-07 | 2017-03-07 | 樹脂封止装置、樹脂成形方法および樹脂成形品の製造方法 |
JPJP-P-2017-042616 | 2017-03-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20180102494A KR20180102494A (ko) | 2018-09-17 |
KR102232403B1 true KR102232403B1 (ko) | 2021-03-26 |
Family
ID=63575873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020180023367A KR102232403B1 (ko) | 2017-03-07 | 2018-02-27 | 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6785690B2 (zh) |
KR (1) | KR102232403B1 (zh) |
CN (1) | CN108568928B (zh) |
TW (1) | TWI666105B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7345322B2 (ja) | 2019-09-03 | 2023-09-15 | 株式会社ディスコ | 樹脂の被覆方法及び樹脂被覆装置 |
CN111906982B (zh) * | 2020-07-21 | 2021-04-02 | 南昌华越塑料制品有限公司 | 一种可调节输出塑料量的挤压装置 |
KR20240142460A (ko) * | 2022-01-31 | 2024-09-30 | 가부시키가이샤 후지 키코 | 진공 감압 장치와, 진공 감압 장치를 사용한 언더필 충전 방법 및 탈포 충전 방법 |
WO2024111255A1 (ja) * | 2022-11-21 | 2024-05-30 | 株式会社村田製作所 | 圧縮樹脂封止成形装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000073102A (ja) | 1998-08-28 | 2000-03-07 | Toyota Motor Corp | 減圧ガス濃度推定方法およびガス濃度推定を利用したガス経路切替方法 |
JP2008302535A (ja) * | 2007-06-06 | 2008-12-18 | Sumitomo Heavy Ind Ltd | 樹脂封止装置および樹脂封止方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5723152A (en) * | 1995-08-01 | 1998-03-03 | Bridgestone Corporation | Apparatus for vacuum molding expanded synthetic resin parts |
JP3581759B2 (ja) * | 1996-04-26 | 2004-10-27 | Towa株式会社 | 電子部品の樹脂封止成形方法及び装置 |
JP3539100B2 (ja) * | 1996-10-24 | 2004-06-14 | 株式会社ブリヂストン | 合成樹脂発泡成形品の成形金型及び成形方法 |
JPH1119967A (ja) * | 1997-06-30 | 1999-01-26 | Dainippon Printing Co Ltd | 射出成形同時絵付け装置及びその方法 |
JP4990039B2 (ja) * | 2007-06-18 | 2012-08-01 | 大亜真空株式会社 | 圧力センサの出力補正方法及び圧力センサの出力補正装置 |
JP4551931B2 (ja) * | 2008-01-08 | 2010-09-29 | 住友重機械工業株式会社 | 樹脂封止方法 |
KR20110082422A (ko) * | 2010-01-11 | 2011-07-19 | 삼성전자주식회사 | 몰딩 장치 및 몰딩 방법 |
WO2014019104A1 (en) * | 2012-07-31 | 2014-02-06 | Bayer Materialscience Ag | Vacuum-supported method for production of polyurethane foam |
JP6598477B2 (ja) * | 2015-03-11 | 2019-10-30 | 株式会社Subaru | 複合材の成形装置及び複合材の成形方法 |
JP6491508B2 (ja) * | 2015-03-23 | 2019-03-27 | Towa株式会社 | 樹脂封止装置及び樹脂成形品の製造方法 |
-
2017
- 2017-03-07 JP JP2017042616A patent/JP6785690B2/ja active Active
-
2018
- 2018-02-27 KR KR1020180023367A patent/KR102232403B1/ko active IP Right Grant
- 2018-03-06 CN CN201810181874.XA patent/CN108568928B/zh active Active
- 2018-03-07 TW TW107107504A patent/TWI666105B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000073102A (ja) | 1998-08-28 | 2000-03-07 | Toyota Motor Corp | 減圧ガス濃度推定方法およびガス濃度推定を利用したガス経路切替方法 |
JP2008302535A (ja) * | 2007-06-06 | 2008-12-18 | Sumitomo Heavy Ind Ltd | 樹脂封止装置および樹脂封止方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI666105B (zh) | 2019-07-21 |
JP6785690B2 (ja) | 2020-11-18 |
KR20180102494A (ko) | 2018-09-17 |
CN108568928B (zh) | 2021-02-02 |
JP2018144371A (ja) | 2018-09-20 |
CN108568928A (zh) | 2018-09-25 |
TW201832895A (zh) | 2018-09-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102232403B1 (ko) | 수지 밀봉 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 | |
JP4519398B2 (ja) | 樹脂封止方法及び半導体装置の製造方法 | |
CN110137101B (zh) | 切断装置以及切断品的制造方法 | |
US6797542B2 (en) | Fabrication method of semiconductor integrated circuit device | |
EP2474401A2 (en) | Method of resin molding and resin molding apparatus | |
TW201722681A (zh) | 樹脂封裝裝置以及樹脂封裝方法 | |
JP5148175B2 (ja) | 樹脂封止装置および樹脂封止方法 | |
TW201717337A (zh) | 樹脂封裝裝置以及樹脂封裝方法 | |
JP2018144371A5 (zh) | ||
KR102288168B1 (ko) | 수지 성형 장치 및 수지 성형품의 제조 방법 | |
WO2018146755A1 (ja) | 樹脂封止装置及び樹脂封止方法 | |
JP6438772B2 (ja) | 樹脂成形装置 | |
JP2005324341A (ja) | 樹脂モールド方法および樹脂モールド装置 | |
WO2018138915A1 (ja) | 樹脂封止装置及び樹脂封止方法 | |
JP2006295010A (ja) | モールド成型装置およびモールド成型方法 | |
KR102237170B1 (ko) | 수지 성형 장치, 성형틀, 및 수지 성형품의 제조 방법 | |
TWI663039B (zh) | 壓縮成型裝置、壓縮成型方法、及壓縮成型品的製造方法 | |
JP5513337B2 (ja) | 樹脂封止成形型装置及び該樹脂封止成形型装置用外気遮断部材 | |
US20050062199A1 (en) | Method and device for encapsulating electronic components while exerting fluid pressure | |
EP1187201A1 (en) | Multiple-chip module | |
KR101703852B1 (ko) | 실리콘 수지용 컴프레션 방식 몰딩장치 및 그 제어방법 | |
JP2006245151A (ja) | 封止成型方法 | |
JP2004066536A (ja) | 樹脂封止装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant |