KR102166583B1 - 파티클 카운터 - Google Patents

파티클 카운터 Download PDF

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KR102166583B1
KR102166583B1 KR1020190024719A KR20190024719A KR102166583B1 KR 102166583 B1 KR102166583 B1 KR 102166583B1 KR 1020190024719 A KR1020190024719 A KR 1020190024719A KR 20190024719 A KR20190024719 A KR 20190024719A KR 102166583 B1 KR102166583 B1 KR 102166583B1
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South Korea
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light
optical path
particles
path length
detection
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KR20190106724A (ko
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토모노부 마츠다
마사키 신무라
미츠아키 사이토
유키 야마카와
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리온 가부시키가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493—Particle size

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020190024719A 2018-03-09 2019-03-04 파티클 카운터 Active KR102166583B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-043571 2018-03-09
JP2018043571A JP7071849B2 (ja) 2018-03-09 2018-03-09 パーティクルカウンタ

Publications (2)

Publication Number Publication Date
KR20190106724A KR20190106724A (ko) 2019-09-18
KR102166583B1 true KR102166583B1 (ko) 2020-10-16

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Family Applications (1)

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Country Status (5)

Country Link
US (1) US10705010B2 (https=)
JP (1) JP7071849B2 (https=)
KR (1) KR102166583B1 (https=)
CN (1) CN110243729B (https=)
TW (1) TWI685650B (https=)

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US10928297B2 (en) 2019-01-09 2021-02-23 University Of Washington Method for determining detection angle of optical particle sizer
CN113692529A (zh) 2019-04-25 2021-11-23 粒子监测系统有限公司 用于轴上粒子检测和/或差分检测的粒子检测系统和方法
US11988593B2 (en) 2019-11-22 2024-05-21 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
JP7420551B2 (ja) * 2019-12-27 2024-01-23 リオン株式会社 粒子測定装置
CN115836205A (zh) 2020-06-09 2023-03-21 粒子监测系统有限公司 经由与入射光组合的散射光的颗粒检测
KR102622195B1 (ko) * 2021-12-02 2024-01-05 세메스 주식회사 약액 검사 장치와, 이를 포함하는 기판 처리 장치 및 기판을 처리하는 약액을 검사하는 방법
KR20240135793A (ko) * 2022-01-21 2024-09-12 파티클 머슈어링 시스템즈, 인크. 향상된 이중 통과 및 다중 통과 입자 검출
CN121336102A (zh) * 2023-06-06 2026-01-13 恩特格里斯公司 光学颗粒计数器及方法
TW202507254A (zh) * 2023-06-06 2025-02-16 美商恩特葛瑞斯股份有限公司 光學顆粒計數器及方法
US12461010B2 (en) 2023-11-16 2025-11-04 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector

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JP2002333304A (ja) 2001-05-08 2002-11-22 Canon Inc 光ヘテロダイン干渉計装置
JP2003121338A (ja) 2001-10-12 2003-04-23 Nikkiso Co Ltd 粒度分布測定方法および装置

Also Published As

Publication number Publication date
JP7071849B2 (ja) 2022-05-19
JP2019158478A (ja) 2019-09-19
US20190277745A1 (en) 2019-09-12
CN110243729B (zh) 2022-07-15
TW201939011A (zh) 2019-10-01
US10705010B2 (en) 2020-07-07
KR20190106724A (ko) 2019-09-18
TWI685650B (zh) 2020-02-21
CN110243729A (zh) 2019-09-17

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