KR102157533B1 - 보유 지지 부재, 보유 지지 부재의 제조 방법, 보유 지지 기구 및 제품의 제조 장치 - Google Patents
보유 지지 부재, 보유 지지 부재의 제조 방법, 보유 지지 기구 및 제품의 제조 장치 Download PDFInfo
- Publication number
- KR102157533B1 KR102157533B1 KR1020180080962A KR20180080962A KR102157533B1 KR 102157533 B1 KR102157533 B1 KR 102157533B1 KR 1020180080962 A KR1020180080962 A KR 1020180080962A KR 20180080962 A KR20180080962 A KR 20180080962A KR 102157533 B1 KR102157533 B1 KR 102157533B1
- Authority
- KR
- South Korea
- Prior art keywords
- holding member
- holding
- bga
- cured resin
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 56
- 230000007246 mechanism Effects 0.000 title claims description 37
- 229920005989 resin Polymers 0.000 claims abstract description 192
- 239000011347 resin Substances 0.000 claims abstract description 192
- 239000000463 material Substances 0.000 claims abstract description 54
- 238000000034 method Methods 0.000 claims abstract description 47
- 230000008569 process Effects 0.000 claims abstract description 33
- 238000000465 moulding Methods 0.000 claims abstract description 31
- 238000003825 pressing Methods 0.000 claims abstract description 6
- 238000005520 cutting process Methods 0.000 claims description 106
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 107
- 239000000047 product Substances 0.000 description 48
- 238000007689 inspection Methods 0.000 description 18
- 238000007789 sealing Methods 0.000 description 18
- 238000003860 storage Methods 0.000 description 18
- 230000006870 function Effects 0.000 description 16
- 229910000679 solder Inorganic materials 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 238000001179 sorption measurement Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 230000003014 reinforcing effect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000013067 intermediate product Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000006837 decompression Effects 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/853—Encapsulations characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0362—Manufacture or treatment of packages of encapsulations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Dicing (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2017-177223 | 2017-09-15 | ||
| JP2017177223A JP6861602B2 (ja) | 2017-09-15 | 2017-09-15 | 保持部材、保持部材の製造方法、保持機構及び製品の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20190031130A KR20190031130A (ko) | 2019-03-25 |
| KR102157533B1 true KR102157533B1 (ko) | 2020-09-18 |
Family
ID=65745574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020180080962A Active KR102157533B1 (ko) | 2017-09-15 | 2018-07-12 | 보유 지지 부재, 보유 지지 부재의 제조 방법, 보유 지지 기구 및 제품의 제조 장치 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6861602B2 (enExample) |
| KR (1) | KR102157533B1 (enExample) |
| CN (1) | CN109509708B (enExample) |
| TW (1) | TWI726230B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6952737B2 (ja) * | 2019-05-24 | 2021-10-20 | Towa株式会社 | 保持部材、検査機構、切断装置、保持対象物の製造方法及び保持部材の製造方法 |
| CN110853507B (zh) * | 2019-06-14 | 2022-08-09 | 荣耀终端有限公司 | 一种显示屏和电子设备 |
| KR102888135B1 (ko) * | 2021-03-18 | 2025-11-19 | 토와 가부시기가이샤 | 가공 장치 및 가공품의 제조 방법 |
| JP7464575B2 (ja) * | 2021-12-14 | 2024-04-09 | Towa株式会社 | 切断装置、及び切断品の製造方法 |
| JP7586067B2 (ja) * | 2021-12-23 | 2024-11-19 | 三菱電機株式会社 | チップトレイおよび半導体装置の製造方法 |
| KR20240030352A (ko) * | 2022-08-30 | 2024-03-07 | 삼성전자주식회사 | 솔더볼 부착 장치 |
| JP2025018098A (ja) * | 2023-07-26 | 2025-02-06 | Towa株式会社 | 保持部材、搬送装置、切断用テーブル、切断装置、半導体製造装置、保持部材の製造方法、及び、半導体装置の製造方法 |
| CN119451321B (zh) * | 2025-01-03 | 2025-10-17 | 惠州市弘正光电有限公司 | Smd-led灯珠及其封装工艺 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001139089A (ja) | 1999-11-17 | 2001-05-22 | Nec Corp | 半導体パッケージの収納トレー |
| KR100390324B1 (ko) | 1999-04-30 | 2003-07-16 | 스미또모 가가꾸 고오교오 가부시끼가이샤 | 반도체 집적회로장치용 트레이 |
| JP2010040681A (ja) * | 2008-08-04 | 2010-02-18 | Seiko Npc Corp | チップ収納トレイ |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2801655B2 (ja) | 1989-07-03 | 1998-09-21 | 電気化学工業株式会社 | 半導体集積回路装置搬送用トレーの製造法 |
| JPH10209260A (ja) * | 1997-01-20 | 1998-08-07 | Kyokuto Shokai:Kk | シンジオタクチックスポリスチレンを用いた半導体用搬送トレー |
| JP5366452B2 (ja) * | 2008-06-23 | 2013-12-11 | 東芝機械株式会社 | 被成型品の成型方法および成型装置 |
| WO2010114483A1 (en) * | 2009-04-03 | 2010-10-07 | Ether Precision, Inc. | Methods and devices for manufacturing an array of lenses |
| KR20130066234A (ko) * | 2011-12-12 | 2013-06-20 | 삼성전자주식회사 | 반도체 장치의 제조 방법 및 이에 사용되는 반도체 장치의 픽업 장치 |
| JP5627618B2 (ja) * | 2012-02-23 | 2014-11-19 | Towa株式会社 | 固定治具の製造方法及び固定治具 |
| JP5918003B2 (ja) * | 2012-04-27 | 2016-05-18 | Towa株式会社 | 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法 |
| JP6000902B2 (ja) * | 2013-06-24 | 2016-10-05 | Towa株式会社 | 電子部品用の収容治具、その製造方法及び個片化装置 |
| JP6333648B2 (ja) * | 2014-07-16 | 2018-05-30 | Towa株式会社 | 個片化物品の移送方法、製造方法及び製造装置 |
-
2017
- 2017-09-15 JP JP2017177223A patent/JP6861602B2/ja active Active
-
2018
- 2018-07-12 KR KR1020180080962A patent/KR102157533B1/ko active Active
- 2018-08-07 CN CN201810889280.4A patent/CN109509708B/zh active Active
- 2018-08-14 TW TW107128275A patent/TWI726230B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100390324B1 (ko) | 1999-04-30 | 2003-07-16 | 스미또모 가가꾸 고오교오 가부시끼가이샤 | 반도체 집적회로장치용 트레이 |
| JP2001139089A (ja) | 1999-11-17 | 2001-05-22 | Nec Corp | 半導体パッケージの収納トレー |
| JP2010040681A (ja) * | 2008-08-04 | 2010-02-18 | Seiko Npc Corp | チップ収納トレイ |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201914797A (zh) | 2019-04-16 |
| JP6861602B2 (ja) | 2021-04-21 |
| CN109509708A (zh) | 2019-03-22 |
| TWI726230B (zh) | 2021-05-01 |
| KR20190031130A (ko) | 2019-03-25 |
| CN109509708B (zh) | 2022-07-12 |
| JP2019051645A (ja) | 2019-04-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102157533B1 (ko) | 보유 지지 부재, 보유 지지 부재의 제조 방법, 보유 지지 기구 및 제품의 제조 장치 | |
| KR101739199B1 (ko) | 워크 흡착판, 워크 절단 장치, 워크 절단 방법 및 워크 흡착판의 제조 방법 | |
| KR102157530B1 (ko) | 보유 지지 부재의 제조 방법 | |
| CN107533965B (zh) | 吸附机构、吸附方法、制造装置及制造方法 | |
| JP6000902B2 (ja) | 電子部品用の収容治具、その製造方法及び個片化装置 | |
| CN1638071A (zh) | 半导体器件的制造方法 | |
| JP2015211091A (ja) | 樹脂封止電子部品の製造方法、突起電極付き板状部材、及び樹脂封止電子部品 | |
| KR20190073353A (ko) | 유지 장치, 검사 장치, 검사 방법, 수지 밀봉 장치, 수지 밀봉 방법 및 수지 밀봉품의 제조 방법 | |
| KR102813002B1 (ko) | 캐리어판의 제거 방법 | |
| CN103325713A (zh) | 切割装置及切割方法 | |
| TWI718447B (zh) | 成型模、樹脂成型裝置及樹脂成型品的製造方法 | |
| JP7068409B2 (ja) | 切断装置及び切断品の製造方法 | |
| KR102477355B1 (ko) | 캐리어 기판 및 이를 이용한 기판 처리 장치 | |
| KR20220120319A (ko) | 기판 공급용 로딩 유닛 | |
| KR20220026496A (ko) | 수지 성형 장치 및 수지 성형품의 제조 방법 | |
| KR102890672B1 (ko) | 보유 지지 부재, 반송 장치, 절단용 테이블, 절단 장치, 반도체 제조 장치, 보유 지지 부재의 제조 방법 및 반도체 장치의 제조 방법 | |
| KR102890671B1 (ko) | 보유 지지 부재, 절단용 테이블, 절단 장치, 및 반도체 장치의 제조 방법 | |
| JP2023090298A (ja) | デバイスパッケージの製造方法 | |
| KR100889591B1 (ko) | 반도체 패키지 이송장치용 흡착패드 | |
| KR20020058212A (ko) | 반도체 패키지용 다이 본딩장치의 히트 블록 구조 | |
| KR20200067747A (ko) | 가공 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20180712 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20190111 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20180712 Comment text: Patent Application |
|
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20200330 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20200729 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20200914 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20200915 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration |