KR102027645B1 - 마스크 흡착 장치 - Google Patents

마스크 흡착 장치 Download PDF

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Publication number
KR102027645B1
KR102027645B1 KR1020170081318A KR20170081318A KR102027645B1 KR 102027645 B1 KR102027645 B1 KR 102027645B1 KR 1020170081318 A KR1020170081318 A KR 1020170081318A KR 20170081318 A KR20170081318 A KR 20170081318A KR 102027645 B1 KR102027645 B1 KR 102027645B1
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KR
South Korea
Prior art keywords
mask
pole
magnet
substrate
arrangement
Prior art date
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KR1020170081318A
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English (en)
Korean (ko)
Other versions
KR20180004005A (ko
Inventor
다카시 다케미
다이스케 아오누마
Original Assignee
캐논 톡키 가부시키가이샤
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Application filed by 캐논 톡키 가부시키가이샤 filed Critical 캐논 톡키 가부시키가이샤
Publication of KR20180004005A publication Critical patent/KR20180004005A/ko
Application granted granted Critical
Publication of KR102027645B1 publication Critical patent/KR102027645B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)
KR1020170081318A 2016-07-01 2017-06-27 마스크 흡착 장치 KR102027645B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016131735A JP6309048B2 (ja) 2016-07-01 2016-07-01 マスク吸着装置
JPJP-P-2016-131735 2016-07-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020190072230A Division KR20190073334A (ko) 2016-07-01 2019-06-18 마스크 흡착 장치

Publications (2)

Publication Number Publication Date
KR20180004005A KR20180004005A (ko) 2018-01-10
KR102027645B1 true KR102027645B1 (ko) 2019-10-01

Family

ID=60948577

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020170081318A KR102027645B1 (ko) 2016-07-01 2017-06-27 마스크 흡착 장치
KR1020190072230A KR20190073334A (ko) 2016-07-01 2019-06-18 마스크 흡착 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020190072230A KR20190073334A (ko) 2016-07-01 2019-06-18 마스크 흡착 장치

Country Status (3)

Country Link
JP (1) JP6309048B2 (zh)
KR (2) KR102027645B1 (zh)
CN (1) CN107557730B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109295421B (zh) * 2018-10-26 2020-10-27 武汉华星光电半导体显示技术有限公司 蒸镀设备及其调磁装置
KR20240013966A (ko) * 2022-07-22 2024-01-31 삼성디스플레이 주식회사 증착 장치
CN115505871B (zh) * 2022-09-23 2024-03-19 京东方科技集团股份有限公司 掩膜版、磁控溅射设备、发光器件、显示面板和显示装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004146251A (ja) 2002-10-25 2004-05-20 Optrex Corp メタルマスク蒸着方法、配線パターンおよび有機エレクトロルミネッセンス表示素子
JP2004307879A (ja) 2003-04-02 2004-11-04 Mitsubishi Steel Mfg Co Ltd マスキング部品

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11131212A (ja) 1997-10-28 1999-05-18 Canon Inc 枚葉式スパッタ装置、枚葉式スパッタ方法及びスパッタ膜
JP4058149B2 (ja) * 1997-12-01 2008-03-05 キヤノンアネルバ株式会社 真空成膜装置のマスク位置合わせ方法
KR100838065B1 (ko) * 2002-05-31 2008-06-16 삼성에스디아이 주식회사 박막증착기용 고정장치와 이를 이용한 고정방법
JP4609759B2 (ja) * 2005-03-24 2011-01-12 三井造船株式会社 成膜装置
CN101675178A (zh) * 2007-11-30 2010-03-17 佳能安内华股份有限公司 基板处理设备及基板处理方法
CN102011088A (zh) * 2010-12-01 2011-04-13 东莞宏威数码机械有限公司 掩膜板吸附结构及掩膜板贴合的方法
KR101810683B1 (ko) * 2011-02-14 2017-12-20 삼성디스플레이 주식회사 자석 수단의 교체가 가능한 마스크 고정장치 및 이를 포함하는 증착장치
JP2014034722A (ja) * 2012-08-10 2014-02-24 Toyota Motor Corp マスク固定装置
JP2015124394A (ja) 2013-12-25 2015-07-06 株式会社ジャパンディスプレイ 表示装置に製造方法
JP2017115215A (ja) * 2015-12-25 2017-06-29 株式会社ジャパンディスプレイ 有機ｅｌ表示装置の製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004146251A (ja) 2002-10-25 2004-05-20 Optrex Corp メタルマスク蒸着方法、配線パターンおよび有機エレクトロルミネッセンス表示素子
JP2004307879A (ja) 2003-04-02 2004-11-04 Mitsubishi Steel Mfg Co Ltd マスキング部品

Also Published As

Publication number Publication date
CN107557730A (zh) 2018-01-09
KR20180004005A (ko) 2018-01-10
JP2018003095A (ja) 2018-01-11
JP6309048B2 (ja) 2018-04-11
KR20190073334A (ko) 2019-06-26
CN107557730B (zh) 2020-08-28

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