KR101986159B1 - 극저온 펌프 - Google Patents

극저온 펌프 Download PDF

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Publication number
KR101986159B1
KR101986159B1 KR1020137023831A KR20137023831A KR101986159B1 KR 101986159 B1 KR101986159 B1 KR 101986159B1 KR 1020137023831 A KR1020137023831 A KR 1020137023831A KR 20137023831 A KR20137023831 A KR 20137023831A KR 101986159 B1 KR101986159 B1 KR 101986159B1
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KR
South Korea
Prior art keywords
front baffle
baffle plate
plate
orifice
cryogenic pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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KR1020137023831A
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English (en)
Korean (ko)
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KR20140006021A (ko
Inventor
세르게이 시소에브
알렌 제이. 바틀레트
존 제이. 카셀로
제프리 에이. 웰스
미카헬 제이. 이코바찌
Original Assignee
브룩스 오토메이션, 인크.
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Application filed by 브룩스 오토메이션, 인크. filed Critical 브룩스 오토메이션, 인크.
Publication of KR20140006021A publication Critical patent/KR20140006021A/ko
Application granted granted Critical
Publication of KR101986159B1 publication Critical patent/KR101986159B1/ko
Assigned to 에드워즈 배큠 엘엘시 reassignment 에드워즈 배큠 엘엘시 권리의 전부이전등록 Assignors: 브룩스 오토메이션, 인크.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making
    • Y10T29/49236—Fluid pump or compressor making

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020137023831A 2011-02-09 2012-02-08 극저온 펌프 Active KR101986159B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161441027P 2011-02-09 2011-02-09
US61/441,027 2011-02-09
PCT/US2012/024243 WO2012109304A2 (en) 2011-02-09 2012-02-08 Cryopump

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020187034235A Division KR102033142B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Publications (2)

Publication Number Publication Date
KR20140006021A KR20140006021A (ko) 2014-01-15
KR101986159B1 true KR101986159B1 (ko) 2019-06-05

Family

ID=45757776

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020137023831A Active KR101986159B1 (ko) 2011-02-09 2012-02-08 극저온 펌프
KR1020187034235A Active KR102033142B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020187034235A Active KR102033142B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Country Status (5)

Country Link
US (2) US9266038B2 (enExample)
JP (2) JP6031451B2 (enExample)
KR (2) KR101986159B1 (enExample)
TW (2) TWI639769B (enExample)
WO (1) WO2012109304A2 (enExample)

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JPH089522B2 (ja) 1991-11-22 1996-01-31 扶桑化学工業株式会社 殺藻剤および海苔養殖法
WO2012109304A2 (en) 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
JP5557786B2 (ja) * 2011-04-05 2014-07-23 住友重機械工業株式会社 クライオポンプのための蓋構造、クライオポンプ、クライオポンプの立ち上げ方法、及びクライオポンプの保管方法
JP6053552B2 (ja) 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ
JP6076843B2 (ja) 2013-06-14 2017-02-08 住友重機械工業株式会社 クライオポンプ
TWI580865B (zh) * 2013-03-25 2017-05-01 Sumitomo Heavy Industries Low temperature pump
JP6338403B2 (ja) * 2013-03-25 2018-06-06 住友重機械工業株式会社 クライオポンプ及び真空排気方法
WO2015143219A1 (en) * 2014-03-21 2015-09-24 Brooks Automation, Inc. Cryopump hybrid frontal array
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
JP6466225B2 (ja) * 2015-03-31 2019-02-06 住友重機械工業株式会社 クライオポンプ
CN106014917B (zh) * 2015-03-31 2018-07-17 住友重机械工业株式会社 低温泵
JP6639129B2 (ja) * 2015-07-13 2020-02-05 アルバック・クライオ株式会社 クライオトラップ
JP6857046B2 (ja) * 2016-03-29 2021-04-14 住友重機械工業株式会社 クライオポンプ
KR102136290B1 (ko) * 2017-11-28 2020-08-26 주식회사 엔바이온 에너지 절감형 농축로터 및 이를 포함하는 폐가스 처리 시스템
CN112601889B (zh) * 2018-09-06 2023-02-28 住友重机械工业株式会社 低温泵
GB2596831A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2600479A (en) * 2020-11-02 2022-05-04 Edwards Vacuum Llc Cryopumps and inlet flow restrictors for cryopumps
KR102381667B1 (ko) 2020-11-17 2022-03-31 박희주 외부 열침입 저감 구조를 적용한 극저온 왕복동 펌프
JP7500403B2 (ja) * 2020-11-24 2024-06-17 アルバック・クライオ株式会社 クライオポンプ
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity
WO2023145296A1 (ja) * 2022-01-26 2023-08-03 住友重機械工業株式会社 クライオポンプ
JP2025093787A (ja) * 2023-12-12 2025-06-24 住友重機械工業株式会社 クライオポンプ

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FR2114039A5 (enExample) * 1970-11-13 1972-06-30 Air Liquide
DE2620880C2 (de) 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
US4295338A (en) 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
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JPS58124679A (ja) 1982-01-20 1983-07-25 Fuji Xerox Co Ltd サ−マルヘツド駆動方式
JPS58124679U (ja) * 1982-02-19 1983-08-24 日本電子株式会社 クライオポンプ
DE3216591A1 (de) 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
US4449373A (en) * 1983-02-28 1984-05-22 Helix Technology Corporation Reduced vacuum cryopump
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US4555907A (en) 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
JPS6138179A (ja) * 1984-07-31 1986-02-24 Hitachi Ltd クライオポンプ
JPS6251777A (ja) * 1985-08-28 1987-03-06 バリアン・アソシエイツ・インコ−ポレイテツド 真空ポンプ装置内へのガス流を制御するためのオリフイス板
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
JPS63501585A (ja) * 1985-10-31 1988-06-16 ヘリツクス　テクノロジ−　コ−ポレ−シヨン 迅速吸着クライオポンプ
US4785666A (en) * 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
JPS63112282U (enExample) * 1987-01-14 1988-07-19
US4896511A (en) * 1987-01-27 1990-01-30 Lessard Philip A Optimally staged cryopump
CA1315111C (en) * 1987-01-27 1993-03-30 Philip A. Lessard Optimally staged cryopump
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3062706B2 (ja) 1991-08-13 2000-07-12 アルバック・クライオ株式会社 低温トラップ付クライオポンプ
US5301511A (en) 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
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WO2005050018A1 (ja) * 2003-11-20 2005-06-02 Sumitomo Heavy Industries, Ltd. クライオポンプ
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
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JP2008297927A (ja) * 2007-05-29 2008-12-11 Sumitomo Heavy Ind Ltd クライオパネルの製造方法およびクライオポンプ
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JP4521047B2 (ja) * 2008-05-16 2010-08-11 住友重機械工業株式会社 クライオポンプ
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Also Published As

Publication number Publication date
JP6475211B2 (ja) 2019-02-27
KR20140006021A (ko) 2014-01-15
TWI557320B (zh) 2016-11-11
JP2017015098A (ja) 2017-01-19
WO2012109304A3 (en) 2012-11-29
JP2014509365A (ja) 2014-04-17
JP6031451B2 (ja) 2016-11-24
WO2012109304A2 (en) 2012-08-16
KR102033142B1 (ko) 2019-10-16
TWI639769B (zh) 2018-11-01
TW201239196A (en) 2012-10-01
US9266038B2 (en) 2016-02-23
TW201700864A (zh) 2017-01-01
US9926919B2 (en) 2018-03-27
US20130312431A1 (en) 2013-11-28
US20160146200A1 (en) 2016-05-26
KR20180129975A (ko) 2018-12-05

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