JPS63112282U - - Google Patents
Info
- Publication number
- JPS63112282U JPS63112282U JP286187U JP286187U JPS63112282U JP S63112282 U JPS63112282 U JP S63112282U JP 286187 U JP286187 U JP 286187U JP 286187 U JP286187 U JP 286187U JP S63112282 U JPS63112282 U JP S63112282U
- Authority
- JP
- Japan
- Prior art keywords
- panel
- baffle
- closed
- vacuum state
- low temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP286187U JPS63112282U (enExample) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP286187U JPS63112282U (enExample) | 1987-01-14 | 1987-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112282U true JPS63112282U (enExample) | 1988-07-19 |
Family
ID=30782093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP286187U Pending JPS63112282U (enExample) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112282U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101576A (ja) * | 2006-10-20 | 2008-05-01 | Toppan Printing Co Ltd | クライオポンプ及びそれを用いた真空装置 |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
-
1987
- 1987-01-14 JP JP286187U patent/JPS63112282U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101576A (ja) * | 2006-10-20 | 2008-05-01 | Toppan Printing Co Ltd | クライオポンプ及びそれを用いた真空装置 |
| JP2014509365A (ja) * | 2011-02-09 | 2014-04-17 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| JP2017015098A (ja) * | 2011-02-09 | 2017-01-19 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| US9926919B2 (en) | 2011-02-09 | 2018-03-27 | Brooks Automation, Inc. | Cryopump |