KR101983855B1 - 기억 소자, 기억 장치 - Google Patents
기억 소자, 기억 장치 Download PDFInfo
- Publication number
- KR101983855B1 KR101983855B1 KR1020120050309A KR20120050309A KR101983855B1 KR 101983855 B1 KR101983855 B1 KR 101983855B1 KR 1020120050309 A KR1020120050309 A KR 1020120050309A KR 20120050309 A KR20120050309 A KR 20120050309A KR 101983855 B1 KR101983855 B1 KR 101983855B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- magnetization
- storage
- film
- magnetic coupling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Materials of the active region
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/933—Spintronics or quantum computing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/933—Spintronics or quantum computing
- Y10S977/935—Spin dependent tunnel, SDT, junction, e.g. tunneling magnetoresistance, TMR
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120050309A KR101983855B1 (ko) | 2011-05-19 | 2012-05-11 | 기억 소자, 기억 장치 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011112219A JP5768494B2 (ja) | 2011-05-19 | 2011-05-19 | 記憶素子、記憶装置 |
| JPJP-P-2011-112219 | 2011-05-19 | ||
| KR1020120050309A KR101983855B1 (ko) | 2011-05-19 | 2012-05-11 | 기억 소자, 기억 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20120129772A KR20120129772A (ko) | 2012-11-28 |
| KR101983855B1 true KR101983855B1 (ko) | 2019-05-29 |
Family
ID=47155515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120050309A Active KR101983855B1 (ko) | 2011-05-19 | 2012-05-11 | 기억 소자, 기억 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US8923037B2 (https=) |
| JP (1) | JP5768494B2 (https=) |
| KR (1) | KR101983855B1 (https=) |
| CN (2) | CN102790171B (https=) |
| TW (2) | TWI514637B (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012182217A (ja) | 2011-02-28 | 2012-09-20 | Toshiba Corp | 半導体記憶装置 |
| JP5824907B2 (ja) * | 2011-06-24 | 2015-12-02 | 富士通株式会社 | 磁気抵抗素子及び磁気記憶装置 |
| JP5728311B2 (ja) * | 2011-07-04 | 2015-06-03 | 株式会社東芝 | 磁気抵抗素子及び磁気メモリ |
| JP5722140B2 (ja) | 2011-07-04 | 2015-05-20 | 株式会社東芝 | 磁気抵抗素子及び磁気メモリ |
| US8946837B2 (en) | 2011-07-04 | 2015-02-03 | Kabushiki Kaisha Toshiba | Semiconductor storage device with magnetoresistive element |
| US9837602B2 (en) | 2015-12-16 | 2017-12-05 | Western Digital Technologies, Inc. | Spin-orbit torque bit design for improved switching efficiency |
| JP2017139399A (ja) * | 2016-02-05 | 2017-08-10 | Tdk株式会社 | 磁気メモリ |
| JPWO2017169291A1 (ja) * | 2016-03-30 | 2019-02-07 | ソニー株式会社 | 磁気抵抗素子、メモリ素子及び電子機器 |
| EP3442030B1 (en) * | 2017-02-27 | 2021-04-07 | TDK Corporation | Spin current magnetization rotating element, magnetoresistive effect element and magnetic memory |
| EP3442042B1 (en) * | 2017-08-10 | 2020-12-09 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Synthetic antiferromagnetic layer, magnetic tunnel junction and spintronic device using said synthetic antiferromagnetic layer |
| US10840259B2 (en) | 2018-08-13 | 2020-11-17 | Sandisk Technologies Llc | Three-dimensional memory device including liner free molybdenum word lines and methods of making the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090256220A1 (en) * | 2008-04-09 | 2009-10-15 | Magic Technologies, Inc. | Low switching current MTJ element for ultra-high STT-RAM and a method for making the same |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6611405B1 (en) * | 1999-09-16 | 2003-08-26 | Kabushiki Kaisha Toshiba | Magnetoresistive element and magnetic memory device |
| JP2001308413A (ja) | 2000-02-18 | 2001-11-02 | Sony Corp | 磁気抵抗効果薄膜、磁気抵抗効果素子及び磁気抵抗効果型磁気ヘッド |
| JP2002329905A (ja) * | 2001-05-02 | 2002-11-15 | Fujitsu Ltd | Cpp構造磁気抵抗効果素子およびその製造方法 |
| JP2003152240A (ja) | 2001-11-13 | 2003-05-23 | Hitachi Ltd | 酸化物層を含んだ積層体及びこれを用いた磁気抵抗効果型ヘッド、磁気記録再生装置 |
| DE10214159B4 (de) * | 2002-03-28 | 2008-03-20 | Qimonda Ag | Verfahren zur Herstellung einer Referenzschicht für MRAM-Speicherzellen |
| AU2003221188A1 (en) * | 2002-04-22 | 2003-11-03 | Matsushita Electric Industrial Co., Ltd. | Magnetoresistance effect element, magnetic head comprising it, magnetic memory, and magnetic recorder |
| JP3788964B2 (ja) | 2002-09-10 | 2006-06-21 | 株式会社東芝 | 磁気ランダムアクセスメモリ |
| JP4371781B2 (ja) | 2002-11-26 | 2009-11-25 | 株式会社東芝 | 磁気セル及び磁気メモリ |
| WO2004055906A1 (ja) * | 2002-12-13 | 2004-07-01 | Japan Science And Technology Agency | スピン注入デバイス及びこれを用いた磁気装置並びにこれらに用いられる磁性薄膜 |
| JP2004200245A (ja) * | 2002-12-16 | 2004-07-15 | Nec Corp | 磁気抵抗素子及び磁気抵抗素子の製造方法 |
| US6845038B1 (en) * | 2003-02-01 | 2005-01-18 | Alla Mikhailovna Shukh | Magnetic tunnel junction memory device |
| JP3831353B2 (ja) * | 2003-03-27 | 2006-10-11 | 株式会社東芝 | 磁気ランダムアクセスメモリ |
| JP2005064050A (ja) * | 2003-08-14 | 2005-03-10 | Toshiba Corp | 半導体記憶装置及びそのデータ書き込み方法 |
| US6943040B2 (en) * | 2003-08-28 | 2005-09-13 | Headway Technologes, Inc. | Magnetic random access memory designs with controlled magnetic switching mechanism by magnetostatic coupling |
| US6946697B2 (en) | 2003-12-18 | 2005-09-20 | Freescale Semiconductor, Inc. | Synthetic antiferromagnet structures for use in MTJs in MRAM technology |
| US7576956B2 (en) * | 2004-07-26 | 2009-08-18 | Grandis Inc. | Magnetic tunnel junction having diffusion stop layer |
| US7859034B2 (en) * | 2005-09-20 | 2010-12-28 | Grandis Inc. | Magnetic devices having oxide antiferromagnetic layer next to free ferromagnetic layer |
| JP4518049B2 (ja) * | 2006-07-03 | 2010-08-04 | ソニー株式会社 | 記憶装置 |
| JP4771222B2 (ja) * | 2006-09-13 | 2011-09-14 | 富士電機デバイステクノロジー株式会社 | 垂直磁気記録媒体 |
| JP4380693B2 (ja) * | 2006-12-12 | 2009-12-09 | ソニー株式会社 | 記憶素子、メモリ |
| JP2008160031A (ja) | 2006-12-26 | 2008-07-10 | Sony Corp | 記憶素子及びメモリ |
| JPWO2008155995A1 (ja) * | 2007-06-19 | 2010-08-26 | キヤノンアネルバ株式会社 | トンネル磁気抵抗薄膜及び磁性多層膜作製装置 |
| JP4874884B2 (ja) * | 2007-07-11 | 2012-02-15 | 株式会社東芝 | 磁気記録素子及び磁気記録装置 |
| JP2009081215A (ja) | 2007-09-25 | 2009-04-16 | Toshiba Corp | 磁気抵抗効果素子およびそれを用いた磁気ランダムアクセスメモリ |
| JP4599425B2 (ja) * | 2008-03-27 | 2010-12-15 | 株式会社東芝 | 磁気抵抗素子及び磁気メモリ |
| JP2010109319A (ja) * | 2008-09-30 | 2010-05-13 | Canon Anelva Corp | 磁気抵抗素子の製造法および記憶媒体 |
| US8102700B2 (en) * | 2008-09-30 | 2012-01-24 | Micron Technology, Inc. | Unidirectional spin torque transfer magnetic memory cell structure |
| WO2010064476A1 (ja) * | 2008-12-02 | 2010-06-10 | 富士電機ホールディングス株式会社 | 磁気メモリー素子及び不揮発性記憶装置 |
| WO2010137679A1 (ja) * | 2009-05-28 | 2010-12-02 | 株式会社日立製作所 | 磁気抵抗効果素子及びそれを用いたランダムアクセスメモリ |
-
2011
- 2011-05-19 JP JP2011112219A patent/JP5768494B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-29 TW TW103134444A patent/TWI514637B/zh active
- 2012-03-29 TW TW101111175A patent/TWI467703B/zh active
- 2012-05-07 US US13/465,755 patent/US8923037B2/en active Active
- 2012-05-09 CN CN201210143618.4A patent/CN102790171B/zh not_active Expired - Fee Related
- 2012-05-09 CN CN201610305766.XA patent/CN105825882B/zh active Active
- 2012-05-11 KR KR1020120050309A patent/KR101983855B1/ko active Active
-
2014
- 2014-12-03 US US14/559,167 patent/US9099642B2/en active Active
-
2015
- 2015-06-26 US US14/752,126 patent/US9257635B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090256220A1 (en) * | 2008-04-09 | 2009-10-15 | Magic Technologies, Inc. | Low switching current MTJ element for ultra-high STT-RAM and a method for making the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105825882A (zh) | 2016-08-03 |
| JP5768494B2 (ja) | 2015-08-26 |
| TWI467703B (zh) | 2015-01-01 |
| JP2012243933A (ja) | 2012-12-10 |
| US9257635B2 (en) | 2016-02-09 |
| CN102790171B (zh) | 2016-06-29 |
| US20120294079A1 (en) | 2012-11-22 |
| US20150295169A1 (en) | 2015-10-15 |
| US9099642B2 (en) | 2015-08-04 |
| US20150137288A1 (en) | 2015-05-21 |
| TW201248788A (en) | 2012-12-01 |
| KR20120129772A (ko) | 2012-11-28 |
| TW201519484A (zh) | 2015-05-16 |
| CN102790171A (zh) | 2012-11-21 |
| TWI514637B (zh) | 2015-12-21 |
| CN105825882B (zh) | 2018-06-12 |
| US8923037B2 (en) | 2014-12-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20120511 |
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| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20170421 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20120511 Comment text: Patent Application |
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Comment text: Notification of reason for refusal Patent event date: 20180816 Patent event code: PE09021S01D |
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| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20190227 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20190523 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
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