KR101799598B1 - 쿨런트 회수 방법 - Google Patents

쿨런트 회수 방법 Download PDF

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Publication number
KR101799598B1
KR101799598B1 KR1020110058125A KR20110058125A KR101799598B1 KR 101799598 B1 KR101799598 B1 KR 101799598B1 KR 1020110058125 A KR1020110058125 A KR 1020110058125A KR 20110058125 A KR20110058125 A KR 20110058125A KR 101799598 B1 KR101799598 B1 KR 101799598B1
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South Korea
Prior art keywords
coolant
filtration
thickener
ingot
ceramic film
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KR1020110058125A
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English (en)
Korean (ko)
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KR20120000502A (ko
Inventor
히데오 아마이케
신이티 고사카
가투후미 구보타
Original Assignee
엔지케이 인슐레이터 엘티디
엔지케이 필테크 가부시키가이샤
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Publication of KR20120000502A publication Critical patent/KR20120000502A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
KR1020110058125A 2010-06-25 2011-06-15 쿨런트 회수 방법 Active KR101799598B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010144448A JP5640260B2 (ja) 2010-06-25 2010-06-25 クーラント回収方法
JPJP-P-2010-144448 2010-06-25

Publications (2)

Publication Number Publication Date
KR20120000502A KR20120000502A (ko) 2012-01-02
KR101799598B1 true KR101799598B1 (ko) 2017-11-20

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ID=45355551

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KR1020110058125A Active KR101799598B1 (ko) 2010-06-25 2011-06-15 쿨런트 회수 방법

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JP (1) JP5640260B2 (enrdf_load_stackoverflow)
KR (1) KR101799598B1 (enrdf_load_stackoverflow)
CN (1) CN102294758B (enrdf_load_stackoverflow)
TW (1) TWI501838B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013248707A (ja) * 2012-05-31 2013-12-12 Panasonic Corp クーラント廃液の再生方法、クーラント廃液の処理方法、クーラント廃液の処理システム、及び再生クーラント液の製造方法
JP6331474B2 (ja) * 2014-02-28 2018-05-30 ブラザー工業株式会社 工作機械の洗浄液濾過装置
CN105174522B (zh) * 2015-10-09 2017-11-17 浙江瑞翌新材料科技股份有限公司 一种金刚线切割废冷却液的回收方法及系统
CN117774150A (zh) * 2022-09-22 2024-03-29 内蒙古中环光伏材料有限公司 一种去除硅单晶金刚线切片用冷却液中硅粉的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100441648B1 (ko) * 1996-02-21 2004-10-06 미마스 한도타이 고교 가부시키가이샤 수용성슬러리폐액의재이용시스템
WO2010071873A2 (en) * 2008-12-20 2010-06-24 Cabot Microelectronics Corporation Wiresaw cutting method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5664990A (en) * 1996-07-29 1997-09-09 Integrated Process Equipment Corp. Slurry recycling in CMP apparatus
JP3816200B2 (ja) * 1997-07-18 2006-08-30 東芝セラミックス株式会社 微細粒子を含む液体の処理方法および処理装置
JP3389141B2 (ja) * 1999-04-26 2003-03-24 株式会社スーパーシリコン研究所 スライシング用スラリーの評価方法及びスラリー
JP3314921B2 (ja) * 1999-06-08 2002-08-19 三菱住友シリコン株式会社 半導体材料の切断・加工方法
JP4369054B2 (ja) * 1999-07-01 2009-11-18 エムイーエムシー・エレクトロニック・マテリアルズ・ソシエタ・ペル・アチオニ 使用済グリコール系スラリーの分離、再生および再使用法
JP4609675B2 (ja) * 2007-08-16 2011-01-12 オルガノ株式会社 メタル研磨ｃｍｐ工程排水処理装置及び方法
JP5173945B2 (ja) * 2008-07-02 2013-04-03 シャープ株式会社 クーラント再生方法およびスラリー再生方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100441648B1 (ko) * 1996-02-21 2004-10-06 미마스 한도타이 고교 가부시키가이샤 수용성슬러리폐액의재이용시스템
WO2010071873A2 (en) * 2008-12-20 2010-06-24 Cabot Microelectronics Corporation Wiresaw cutting method

Also Published As

Publication number Publication date
CN102294758A (zh) 2011-12-28
JP5640260B2 (ja) 2014-12-17
JP2012006115A (ja) 2012-01-12
TWI501838B (zh) 2015-10-01
KR20120000502A (ko) 2012-01-02
TW201208814A (en) 2012-03-01
CN102294758B (zh) 2015-08-05

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