KR101735579B1 - 자이로스코픽 센서 - Google Patents

자이로스코픽 센서 Download PDF

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Publication number
KR101735579B1
KR101735579B1 KR1020127014148A KR20127014148A KR101735579B1 KR 101735579 B1 KR101735579 B1 KR 101735579B1 KR 1020127014148 A KR1020127014148 A KR 1020127014148A KR 20127014148 A KR20127014148 A KR 20127014148A KR 101735579 B1 KR101735579 B1 KR 101735579B1
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South Korea
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base
electrode carrier
gyroscopic sensor
sensor
electrical
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Korean (ko)
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KR20120094937A (ko
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장 밥티스트 외디흐
크리스토프 마에흐키
티에리 봉주흐
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사겡 데팡스 세큐리떼
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
KR1020127014148A 2009-11-12 2010-11-10 자이로스코픽 센서 Active KR101735579B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FR0905428 2009-11-12
FR0905428A FR2952428B1 (fr) 2009-11-12 2009-11-12 Capteur inertiel
US32455210P 2010-04-15 2010-04-15
US61/324,552 2010-04-15
PCT/EP2010/067217 WO2011058060A1 (en) 2009-11-12 2010-11-10 Gyroscopic sensor

Publications (2)

Publication Number Publication Date
KR20120094937A KR20120094937A (ko) 2012-08-27
KR101735579B1 true KR101735579B1 (ko) 2017-05-24

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ID=42562604

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127014148A Active KR101735579B1 (ko) 2009-11-12 2010-11-10 자이로스코픽 센서

Country Status (8)

Country Link
US (1) US9303995B2 (enExample)
EP (2) EP3569978B1 (enExample)
JP (2) JP5947722B2 (enExample)
KR (1) KR101735579B1 (enExample)
CN (1) CN102695941B (enExample)
FR (1) FR2952428B1 (enExample)
RU (1) RU2540249C2 (enExample)
WO (1) WO2011058060A1 (enExample)

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FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
CN104215235B (zh) * 2013-06-05 2017-08-22 北京信息科技大学 一种新型钟形振子式角速率陀螺
KR101414391B1 (ko) * 2013-06-11 2014-07-02 한국항공우주연구원 반구형 공진 자이로
US9551513B2 (en) * 2014-06-12 2017-01-24 Raytheon Company Frequency-matched cryocooler scaling for low-cost, minimal disturbance space cooling
US10119820B2 (en) * 2015-02-10 2018-11-06 Northrop Grumman Systems Corporation Wide rim vibratory resonant sensors
CN105509724B (zh) * 2015-11-30 2019-09-24 上海新跃仪表厂 集成化金属振动陀螺仪
CN106441258B (zh) * 2016-09-09 2019-07-26 东南大学 微壳体谐振器及其谐振子制备方法
CN105466405B (zh) * 2016-01-07 2018-02-02 东南大学 一种混合式半球谐振微陀螺仪及其加工工艺
CN105628013B (zh) * 2016-01-07 2018-06-19 东南大学 一种组装式半球谐振微陀螺仪及其加工工艺
JP2020071074A (ja) 2018-10-29 2020-05-07 セイコーエプソン株式会社 センサーユニット、電子機器および移動体
US11428531B1 (en) * 2021-03-22 2022-08-30 Northrop Grumman Systems Corporation Diffusion block for an evacuated instrument system
CN114396925B (zh) * 2021-12-01 2023-08-04 上海航天控制技术研究所 一种带有弹簧阻尼结构的半球谐振陀螺
CN114396926B (zh) * 2021-12-01 2024-04-23 上海航天控制技术研究所 一种半球谐振陀螺
US11874112B1 (en) 2022-10-04 2024-01-16 Enertia Microsystems Inc. Vibratory gyroscopes with resonator attachments

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JP2000074770A (ja) * 1998-09-03 2000-03-14 Murata Mfg Co Ltd 減圧パッケージ装置及びその真空度の測定方法
JP2003534534A (ja) * 2000-02-15 2003-11-18 エス・ア・ジェ・ウ・エム・ソシエテ・アノニム ジャイロスコープセンサ
JP3807404B2 (ja) * 2001-11-29 2006-08-09 松下電器産業株式会社 角速度センサ
JP2008185369A (ja) * 2007-01-26 2008-08-14 Sony Corp 角速度センサ、角速度センサの製造方法、電子機器、及び回路基板
US20090031832A1 (en) * 2007-08-03 2009-02-05 Choi Youngmin A Inner-forcer milli-hemispherical resonator gyro

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US4019391A (en) * 1975-07-25 1977-04-26 The Singer Company Vibratory gyroscope
US4068533A (en) * 1976-11-30 1978-01-17 The Singer Company ESG Reflected impedance pickoff
CA1250458A (en) * 1983-10-31 1989-02-28 Edward J. Loper, Jr. Hemispherical resonator gyro
US4951508A (en) * 1983-10-31 1990-08-28 General Motors Corporation Vibratory rotation sensor
JPH0290551A (ja) * 1988-09-27 1990-03-30 Matsushita Electric Works Ltd セラミックパッケージの製法
US5218867A (en) * 1989-07-29 1993-06-15 British Aerospace Public Limited Company Single axis attitude sensor
JPH06260566A (ja) * 1993-03-04 1994-09-16 Sony Corp ランドグリッドアレイパッケージ及びその作製方法、並びに半導体パッケージ
US5712427A (en) * 1995-08-29 1998-01-27 Litton Systems Inc. Vibratory rotation sensor with scanning-tunneling-transducer readout
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
CN2636198Y (zh) * 2003-07-14 2004-08-25 财团法人工业技术研究院 膜式微型陀螺仪及具有该陀螺仪的测量装置
FR2859017B1 (fr) * 2003-08-19 2005-09-30 Sagem Capteur de rotation inertiel a element sensible monte directement sur le corps
JP2005083779A (ja) * 2003-09-05 2005-03-31 Tdk Corp 角速度センサ
JP2005106584A (ja) 2003-09-30 2005-04-21 Mitsubishi Electric Corp 加速度センサユニット
US20050238803A1 (en) * 2003-11-12 2005-10-27 Tremel James D Method for adhering getter material to a surface for use in electronic devices
FI20031796L (fi) * 2003-12-09 2005-06-10 Asperation Oy Menetelmä EMI-suojan rakentamiseksi piirilevylle upotettavan komponentin ympärille
WO2005098359A1 (ja) * 2004-04-07 2005-10-20 Murata Manufacturing Co., Ltd. 角速度計測装置
UA79166C2 (en) * 2005-05-31 2007-05-25 Yurii Oleksiiovych Yatsenko Detecting element of a vibratory gyroscope sensitive to coriolis acceleration
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US7281426B1 (en) * 2006-06-15 2007-10-16 Innalabs Technologies, Inc. Stemless hemispherical resonator gyroscope
JP2008185385A (ja) * 2007-01-29 2008-08-14 Sony Corp 角速度センサ及び電子機器
RU2362121C2 (ru) * 2007-07-09 2009-07-20 Закрытое акционерное общество "Научно-производственное предприятие "Медикон" Малогабаритный твердотелый волновой гироскоп
US8109145B2 (en) * 2007-07-31 2012-02-07 Northrop Grumman Guidance And Electronics Company, Inc. Micro hemispheric resonator gyro
RU2362975C1 (ru) * 2008-01-09 2009-07-27 Сергей Михайлович Бражнев Твердотельный волновой гироскоп

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000074770A (ja) * 1998-09-03 2000-03-14 Murata Mfg Co Ltd 減圧パッケージ装置及びその真空度の測定方法
JP2003534534A (ja) * 2000-02-15 2003-11-18 エス・ア・ジェ・ウ・エム・ソシエテ・アノニム ジャイロスコープセンサ
JP3807404B2 (ja) * 2001-11-29 2006-08-09 松下電器産業株式会社 角速度センサ
JP2008185369A (ja) * 2007-01-26 2008-08-14 Sony Corp 角速度センサ、角速度センサの製造方法、電子機器、及び回路基板
US20090031832A1 (en) * 2007-08-03 2009-02-05 Choi Youngmin A Inner-forcer milli-hemispherical resonator gyro

Also Published As

Publication number Publication date
RU2540249C2 (ru) 2015-02-10
US20120227497A1 (en) 2012-09-13
JP2013511029A (ja) 2013-03-28
RU2012123939A (ru) 2013-12-20
JP5947722B2 (ja) 2016-07-06
EP2499455B1 (en) 2019-09-25
JP2015180893A (ja) 2015-10-15
FR2952428B1 (fr) 2011-12-16
FR2952428A1 (fr) 2011-05-13
KR20120094937A (ko) 2012-08-27
CN102695941B (zh) 2015-11-25
EP2499455A1 (en) 2012-09-19
JP6254120B2 (ja) 2017-12-27
EP3569978B1 (en) 2021-06-16
CN102695941A (zh) 2012-09-26
US9303995B2 (en) 2016-04-05
WO2011058060A1 (en) 2011-05-19
EP3569978A1 (en) 2019-11-20

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