JP5947722B2 - ジャイロセンサ - Google Patents

ジャイロセンサ Download PDF

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Publication number
JP5947722B2
JP5947722B2 JP2012538324A JP2012538324A JP5947722B2 JP 5947722 B2 JP5947722 B2 JP 5947722B2 JP 2012538324 A JP2012538324 A JP 2012538324A JP 2012538324 A JP2012538324 A JP 2012538324A JP 5947722 B2 JP5947722 B2 JP 5947722B2
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Japan
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base
gyro sensor
electrical
electrode
pins
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Japanese (ja)
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JP2013511029A (ja
JP2013511029A5 (enExample
Inventor
ウディエー，ジャン−バプティスト
メルキー，クリストフ
ボンジュール，ティエリー
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サジェム デファンス セキュリテ
サジェム デファンス セキュリテ
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Publication of JP2013511029A5 publication Critical patent/JP2013511029A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2012538324A 2009-11-12 2010-11-10 ジャイロセンサ Active JP5947722B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FR0905428 2009-11-12
FR0905428A FR2952428B1 (fr) 2009-11-12 2009-11-12 Capteur inertiel
US32455210P 2010-04-15 2010-04-15
US61/324,552 2010-04-15
PCT/EP2010/067217 WO2011058060A1 (en) 2009-11-12 2010-11-10 Gyroscopic sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015122378A Division JP6254120B2 (ja) 2009-11-12 2015-06-17 ジャイロセンサ

Publications (3)

Publication Number Publication Date
JP2013511029A JP2013511029A (ja) 2013-03-28
JP2013511029A5 JP2013511029A5 (enExample) 2015-08-06
JP5947722B2 true JP5947722B2 (ja) 2016-07-06

Family

ID=42562604

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012538324A Active JP5947722B2 (ja) 2009-11-12 2010-11-10 ジャイロセンサ
JP2015122378A Active JP6254120B2 (ja) 2009-11-12 2015-06-17 ジャイロセンサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015122378A Active JP6254120B2 (ja) 2009-11-12 2015-06-17 ジャイロセンサ

Country Status (8)

Country Link
US (1) US9303995B2 (enExample)
EP (2) EP3569978B1 (enExample)
JP (2) JP5947722B2 (enExample)
KR (1) KR101735579B1 (enExample)
CN (1) CN102695941B (enExample)
FR (1) FR2952428B1 (enExample)
RU (1) RU2540249C2 (enExample)
WO (1) WO2011058060A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
CN104215235B (zh) * 2013-06-05 2017-08-22 北京信息科技大学 一种新型钟形振子式角速率陀螺
KR101414391B1 (ko) * 2013-06-11 2014-07-02 한국항공우주연구원 반구형 공진 자이로
US9551513B2 (en) * 2014-06-12 2017-01-24 Raytheon Company Frequency-matched cryocooler scaling for low-cost, minimal disturbance space cooling
US10119820B2 (en) * 2015-02-10 2018-11-06 Northrop Grumman Systems Corporation Wide rim vibratory resonant sensors
CN105509724B (zh) * 2015-11-30 2019-09-24 上海新跃仪表厂 集成化金属振动陀螺仪
CN106441258B (zh) * 2016-09-09 2019-07-26 东南大学 微壳体谐振器及其谐振子制备方法
CN105466405B (zh) * 2016-01-07 2018-02-02 东南大学 一种混合式半球谐振微陀螺仪及其加工工艺
CN105628013B (zh) * 2016-01-07 2018-06-19 东南大学 一种组装式半球谐振微陀螺仪及其加工工艺
JP2020071074A (ja) 2018-10-29 2020-05-07 セイコーエプソン株式会社 センサーユニット、電子機器および移動体
US11428531B1 (en) * 2021-03-22 2022-08-30 Northrop Grumman Systems Corporation Diffusion block for an evacuated instrument system
CN114396925B (zh) * 2021-12-01 2023-08-04 上海航天控制技术研究所 一种带有弹簧阻尼结构的半球谐振陀螺
CN114396926B (zh) * 2021-12-01 2024-04-23 上海航天控制技术研究所 一种半球谐振陀螺
US11874112B1 (en) 2022-10-04 2024-01-16 Enertia Microsystems Inc. Vibratory gyroscopes with resonator attachments

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3680391A (en) * 1969-10-06 1972-08-01 Gen Motors Corp Bell gyro and method of making same
US4019391A (en) * 1975-07-25 1977-04-26 The Singer Company Vibratory gyroscope
US4068533A (en) * 1976-11-30 1978-01-17 The Singer Company ESG Reflected impedance pickoff
CA1250458A (en) * 1983-10-31 1989-02-28 Edward J. Loper, Jr. Hemispherical resonator gyro
US4951508A (en) * 1983-10-31 1990-08-28 General Motors Corporation Vibratory rotation sensor
JPH0290551A (ja) * 1988-09-27 1990-03-30 Matsushita Electric Works Ltd セラミックパッケージの製法
US5218867A (en) * 1989-07-29 1993-06-15 British Aerospace Public Limited Company Single axis attitude sensor
JPH06260566A (ja) * 1993-03-04 1994-09-16 Sony Corp ランドグリッドアレイパッケージ及びその作製方法、並びに半導体パッケージ
US5712427A (en) * 1995-08-29 1998-01-27 Litton Systems Inc. Vibratory rotation sensor with scanning-tunneling-transducer readout
JP2000074770A (ja) * 1998-09-03 2000-03-14 Murata Mfg Co Ltd 減圧パッケージ装置及びその真空度の測定方法
FR2805039B1 (fr) * 2000-02-15 2002-04-19 Sagem Capteur gyroscopique
EP1353146B1 (en) * 2001-11-29 2017-05-24 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
CN2636198Y (zh) * 2003-07-14 2004-08-25 财团法人工业技术研究院 膜式微型陀螺仪及具有该陀螺仪的测量装置
FR2859017B1 (fr) * 2003-08-19 2005-09-30 Sagem Capteur de rotation inertiel a element sensible monte directement sur le corps
JP2005083779A (ja) * 2003-09-05 2005-03-31 Tdk Corp 角速度センサ
JP2005106584A (ja) 2003-09-30 2005-04-21 Mitsubishi Electric Corp 加速度センサユニット
US20050238803A1 (en) * 2003-11-12 2005-10-27 Tremel James D Method for adhering getter material to a surface for use in electronic devices
FI20031796L (fi) * 2003-12-09 2005-06-10 Asperation Oy Menetelmä EMI-suojan rakentamiseksi piirilevylle upotettavan komponentin ympärille
WO2005098359A1 (ja) * 2004-04-07 2005-10-20 Murata Manufacturing Co., Ltd. 角速度計測装置
UA79166C2 (en) * 2005-05-31 2007-05-25 Yurii Oleksiiovych Yatsenko Detecting element of a vibratory gyroscope sensitive to coriolis acceleration
US7607350B2 (en) 2005-10-06 2009-10-27 Northrop Grumman Guidance And Electronics Company, Inc. Circuit board mounting for temperature stress reduction
US7281426B1 (en) * 2006-06-15 2007-10-16 Innalabs Technologies, Inc. Stemless hemispherical resonator gyroscope
JP2008185369A (ja) * 2007-01-26 2008-08-14 Sony Corp 角速度センサ、角速度センサの製造方法、電子機器、及び回路基板
JP2008185385A (ja) * 2007-01-29 2008-08-14 Sony Corp 角速度センサ及び電子機器
RU2362121C2 (ru) * 2007-07-09 2009-07-20 Закрытое акционерное общество "Научно-производственное предприятие "Медикон" Малогабаритный твердотелый волновой гироскоп
US8109145B2 (en) * 2007-07-31 2012-02-07 Northrop Grumman Guidance And Electronics Company, Inc. Micro hemispheric resonator gyro
US7839059B2 (en) * 2007-08-03 2010-11-23 Northrop Grumman Guidance And Electronics Company, Inc. Inner-forcer milli-hemispherical resonator gyro
RU2362975C1 (ru) * 2008-01-09 2009-07-27 Сергей Михайлович Бражнев Твердотельный волновой гироскоп

Also Published As

Publication number Publication date
RU2540249C2 (ru) 2015-02-10
US20120227497A1 (en) 2012-09-13
JP2013511029A (ja) 2013-03-28
RU2012123939A (ru) 2013-12-20
EP2499455B1 (en) 2019-09-25
JP2015180893A (ja) 2015-10-15
KR101735579B1 (ko) 2017-05-24
FR2952428B1 (fr) 2011-12-16
FR2952428A1 (fr) 2011-05-13
KR20120094937A (ko) 2012-08-27
CN102695941B (zh) 2015-11-25
EP2499455A1 (en) 2012-09-19
JP6254120B2 (ja) 2017-12-27
EP3569978B1 (en) 2021-06-16
CN102695941A (zh) 2012-09-26
US9303995B2 (en) 2016-04-05
WO2011058060A1 (en) 2011-05-19
EP3569978A1 (en) 2019-11-20

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