KR101707898B1 - 임프린트 리소그래피 시스템에서 경화를 위한 에너지원 - Google Patents

임프린트 리소그래피 시스템에서 경화를 위한 에너지원 Download PDF

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Publication number
KR101707898B1
KR101707898B1 KR1020117007990A KR20117007990A KR101707898B1 KR 101707898 B1 KR101707898 B1 KR 101707898B1 KR 1020117007990 A KR1020117007990 A KR 1020117007990A KR 20117007990 A KR20117007990 A KR 20117007990A KR 101707898 B1 KR101707898 B1 KR 101707898B1
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energy
substrate
lithography system
imprint lithography
template
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KR20110084499A (ko
Inventor
마하데반 가나파티서브라마니안
병진 최
리앙 왕
알렉스 뤼즈
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캐논 나노테크놀로지즈 인코퍼레이티드
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2042—Photolithographic processes using lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020117007990A 2008-10-10 2009-08-04 임프린트 리소그래피 시스템에서 경화를 위한 에너지원 Active KR101707898B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10433108P 2008-10-10 2008-10-10
US61/104,331 2008-10-10
US12/511,593 US8237133B2 (en) 2008-10-10 2009-07-29 Energy sources for curing in an imprint lithography system
US12/511,593 2009-07-29
PCT/US2009/004454 WO2010042141A2 (en) 2008-10-10 2009-08-04 Energy sources for curing in an imprint lithography system

Publications (2)

Publication Number Publication Date
KR20110084499A KR20110084499A (ko) 2011-07-25
KR101707898B1 true KR101707898B1 (ko) 2017-02-17

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KR1020117007990A Active KR101707898B1 (ko) 2008-10-10 2009-08-04 임프린트 리소그래피 시스템에서 경화를 위한 에너지원

Country Status (6)

Country Link
US (1) US8237133B2 (https=)
JP (1) JP5802557B2 (https=)
KR (1) KR101707898B1 (https=)
MY (1) MY155087A (https=)
TW (1) TWI426353B (https=)
WO (1) WO2010042141A2 (https=)

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US11137679B2 (en) 2017-09-18 2021-10-05 SK Hynix Inc. Methods of forming imprinted patterns and imprinting apparatuses used therein

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NL2005254A (en) * 2009-09-22 2011-03-23 Asml Netherlands Bv Imprint lithography method and apparatus.
JP5366735B2 (ja) * 2009-09-24 2013-12-11 東芝機械株式会社 転写装置および転写方法
JP5535164B2 (ja) * 2011-09-22 2014-07-02 株式会社東芝 インプリント方法およびインプリント装置
JP6263930B2 (ja) * 2013-09-30 2018-01-24 大日本印刷株式会社 インプリント装置及びインプリント方法
JP6611450B2 (ja) * 2015-03-31 2019-11-27 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法
US10180248B2 (en) 2015-09-02 2019-01-15 ProPhotonix Limited LED lamp with sensing capabilities
KR102743032B1 (ko) * 2016-10-14 2024-12-17 삼성디스플레이 주식회사 임프린트용 가압 롤러 및 이를 이용한 임프린트 방법
JP2018125377A (ja) * 2017-01-31 2018-08-09 東芝メモリ株式会社 インプリント装置および半導体装置の製造方法
US10754078B2 (en) 2018-12-20 2020-08-25 Canon Kabushiki Kaisha Light source, a shaping system using the light source and an article manufacturing method
US11972976B2 (en) 2021-04-29 2024-04-30 Canon Kabushiki Kaisha Planarization system, planarization process, and method of manufacturing an article
US12027373B2 (en) 2021-05-28 2024-07-02 Canon Kabushiki Kaisha Planarization process, planarization system, and method of manufacturing an article
JP7746784B2 (ja) * 2021-10-06 2025-10-01 ウシオ電機株式会社 光加熱装置、加熱処理方法
JP7750154B2 (ja) * 2022-03-28 2025-10-07 ウシオ電機株式会社 光加熱装置、加熱処理方法
JP7750120B2 (ja) * 2022-01-26 2025-10-07 ウシオ電機株式会社 光加熱装置

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Also Published As

Publication number Publication date
TW201015233A (en) 2010-04-16
KR20110084499A (ko) 2011-07-25
US8237133B2 (en) 2012-08-07
WO2010042141A2 (en) 2010-04-15
TWI426353B (zh) 2014-02-11
JP5802557B2 (ja) 2015-10-28
MY155087A (en) 2015-08-28
US20100090130A1 (en) 2010-04-15
JP2012505544A (ja) 2012-03-01
WO2010042141A3 (en) 2010-06-10

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