KR101683552B1 - 논슬라이드형 게이트 밸브 - Google Patents

논슬라이드형 게이트 밸브 Download PDF

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Publication number
KR101683552B1
KR101683552B1 KR1020140085286A KR20140085286A KR101683552B1 KR 101683552 B1 KR101683552 B1 KR 101683552B1 KR 1020140085286 A KR1020140085286 A KR 1020140085286A KR 20140085286 A KR20140085286 A KR 20140085286A KR 101683552 B1 KR101683552 B1 KR 101683552B1
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KR
South Korea
Prior art keywords
valve
opening
cam
valve assembly
parallel
Prior art date
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KR1020140085286A
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English (en)
Korean (ko)
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KR20150007240A (ko
Inventor
츠네오 이시가키
히로미 시모다
히로시 오가와
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에스엠시 가부시키가이샤
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Publication of KR20150007240A publication Critical patent/KR20150007240A/ko
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Publication of KR101683552B1 publication Critical patent/KR101683552B1/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide
    • F16K3/3165—Guiding of the slide with rollers or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
KR1020140085286A 2013-07-10 2014-07-08 논슬라이드형 게이트 밸브 Active KR101683552B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013145033A JP5963091B2 (ja) 2013-07-10 2013-07-10 無摺動型ゲートバルブ
JPJP-P-2013-145033 2013-07-10

Publications (2)

Publication Number Publication Date
KR20150007240A KR20150007240A (ko) 2015-01-20
KR101683552B1 true KR101683552B1 (ko) 2016-12-07

Family

ID=52107510

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140085286A Active KR101683552B1 (ko) 2013-07-10 2014-07-08 논슬라이드형 게이트 밸브

Country Status (7)

Country Link
US (1) US9404589B2 (enExample)
JP (1) JP5963091B2 (enExample)
KR (1) KR101683552B1 (enExample)
CN (1) CN104279345B (enExample)
CH (1) CH708350B1 (enExample)
DE (1) DE102014109673B4 (enExample)
TW (1) TWI545282B (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102716628B (zh) * 2012-06-04 2015-02-18 冀州中科能源有限公司 一种颗粒除尘过滤器及除尘过滤方法
KR102396227B1 (ko) * 2014-12-19 2022-05-09 배트 홀딩 아게 진공챔버의 챔버벽 안의 챔버 개구부를 폐쇄하기 위한 도어
WO2016142150A1 (de) 2015-03-09 2016-09-15 Vat Holding Ag Vakuumventil
TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI740981B (zh) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 真空閥
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
KR102478909B1 (ko) * 2017-03-31 2022-12-16 배트 홀딩 아게 밸브, 특히 진공밸브
KR102329142B1 (ko) * 2017-05-30 2021-11-22 주식회사 원익아이피에스 게이트 밸브 조립체
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
JP7385400B2 (ja) * 2018-09-26 2023-11-22 株式会社キッツエスシーティー 真空用ゲートバルブ
JP6938828B2 (ja) * 2018-12-28 2021-09-22 Smc株式会社 低騒音ゲートバルブ
KR20200130075A (ko) * 2019-05-07 2020-11-18 이리에 고켕 가부시키가이샤 게이트 밸브
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
KR102433880B1 (ko) * 2020-04-14 2022-08-18 프리시스 주식회사 게이트 밸브
TWI730808B (zh) * 2020-06-11 2021-06-11 新萊應材科技有限公司 二向移動之閥件驅動裝置
JP7537329B2 (ja) * 2021-03-19 2024-08-21 Smc株式会社 ぶれ防止機構付きゲートバルブ
FR3121134B1 (fr) * 2021-03-29 2023-03-17 Sidel Participations Unité de convoyage d’articles comprenant des dispositifs de transfert à bras extensible
DE102021114422A1 (de) * 2021-06-04 2022-12-08 Vat Holding Ag Vakuumventil
JP7750031B2 (ja) 2021-10-28 2025-10-07 Smc株式会社 ゲートバルブ
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브
TWI840167B (zh) * 2023-03-16 2024-04-21 新萊應材科技有限公司 可提升作動準確度之閘閥
TWI856896B (zh) * 2023-12-08 2024-09-21 日揚科技股份有限公司 L型運動閥
CN120991089B (zh) * 2025-10-24 2025-12-26 温州派凯玫特阀门有限公司 一种阀体抗冲击密封机构及连通管蝶阀

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005076836A (ja) 2003-09-03 2005-03-24 V Tex:Kk ゲートバルブ並びに真空処理容器および真空処理容器のゲート開閉方法
KR100579067B1 (ko) 2003-11-04 2006-05-12 이리에 고켕 가부시키가이샤 게이트 밸브

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5332002A (en) * 1993-09-21 1994-07-26 Dril-Quip, Inc. Gate valve
DE4341816A1 (de) * 1993-12-08 1995-06-14 Vse Vakuumtechn Gmbh Ventilmechanik mit Zwangsführung
JP4304365B2 (ja) * 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
JP5533839B2 (ja) * 2011-11-04 2014-06-25 Ｓｍｃ株式会社 無摺動型ゲートバルブ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005076836A (ja) 2003-09-03 2005-03-24 V Tex:Kk ゲートバルブ並びに真空処理容器および真空処理容器のゲート開閉方法
KR100579067B1 (ko) 2003-11-04 2006-05-12 이리에 고켕 가부시키가이샤 게이트 밸브

Also Published As

Publication number Publication date
CH708350B1 (de) 2016-01-15
TWI545282B (zh) 2016-08-11
DE102014109673B4 (de) 2022-09-15
DE102014109673A1 (de) 2015-01-15
CN104279345A (zh) 2015-01-14
US20150014556A1 (en) 2015-01-15
JP2015017655A (ja) 2015-01-29
CN104279345B (zh) 2017-01-18
TW201516295A (zh) 2015-05-01
JP5963091B2 (ja) 2016-08-03
KR20150007240A (ko) 2015-01-20
CH708350A2 (de) 2015-01-15
US9404589B2 (en) 2016-08-02

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