KR101496673B1 - 샌드위치 구조물을 갖춘 열 복사 검출 장치, 그 장치의 제조 방법 및 용도 - Google Patents

샌드위치 구조물을 갖춘 열 복사 검출 장치, 그 장치의 제조 방법 및 용도 Download PDF

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KR101496673B1
KR101496673B1 KR1020097027216A KR20097027216A KR101496673B1 KR 101496673 B1 KR101496673 B1 KR 101496673B1 KR 1020097027216 A KR1020097027216 A KR 1020097027216A KR 20097027216 A KR20097027216 A KR 20097027216A KR 101496673 B1 KR101496673 B1 KR 101496673B1
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South Korea
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detector
support
cover
thermal radiation
circuit
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Expired - Fee Related
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KR1020097027216A
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English (en)
Korean (ko)
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KR20100023008A (ko
Inventor
카르스텐 기베러
마티아스 슈라이터
죄르그 자프페
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파이레오스 엘티디.
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/804—Containers or encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Radiation Pyrometers (AREA)
  • Measurement Of Radiation (AREA)
KR1020097027216A 2007-05-29 2008-05-28 샌드위치 구조물을 갖춘 열 복사 검출 장치, 그 장치의 제조 방법 및 용도 Expired - Fee Related KR101496673B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007024903A DE102007024903B4 (de) 2007-05-29 2007-05-29 Vorrichtung mit Sandwichstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung
DE102007024903.0 2007-05-29
PCT/EP2008/004247 WO2008145354A1 (de) 2007-05-29 2008-05-28 Vorrichtung mit sandwichtstruktur zur detektion von wärmestrahlung, verfahren zum herstellen und verwendung der vorrichtung

Publications (2)

Publication Number Publication Date
KR20100023008A KR20100023008A (ko) 2010-03-03
KR101496673B1 true KR101496673B1 (ko) 2015-02-27

Family

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Family Applications (1)

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KR1020097027216A Expired - Fee Related KR101496673B1 (ko) 2007-05-29 2008-05-28 샌드위치 구조물을 갖춘 열 복사 검출 장치, 그 장치의 제조 방법 및 용도

Country Status (10)

Country Link
US (1) US8487257B2 (enExample)
EP (1) EP2153188B1 (enExample)
JP (1) JP5455239B2 (enExample)
KR (1) KR101496673B1 (enExample)
CN (1) CN101688811B (enExample)
AU (1) AU2008256414A1 (enExample)
BR (1) BRPI0812098B1 (enExample)
DE (1) DE102007024903B4 (enExample)
RU (1) RU2465685C2 (enExample)
WO (1) WO2008145354A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007062688B3 (de) * 2007-12-17 2009-02-05 Pyreos Ltd. Vorrichtung mit einer abgeschirmten Sandwichstruktur zur Detektion von Wärmestrahlung und Verwendung der Vorrichtung
DE102009013336A1 (de) * 2009-03-16 2010-09-23 Perkinelmer Optoelectronics Gmbh & Co.Kg Pyroelektrisches Material, Strahlungssensor, Verfahren zur Herstellung eines Strahlungssensors und Verwendung von Lithiumtantalat und Lithiumniobat
US9118132B2 (en) * 2011-09-08 2015-08-25 Bae Systems Information And Electronic Systems Integration Vacuum compatible high-density electrical interconnect system
DE102012216618A1 (de) * 2012-09-18 2014-03-20 Robert Bosch Gmbh Anordnung von mindestens zwei Wafern zum Detektieren von elektromagnetischer Strahlung und Verfahren zum Herstellen der Anordnung
DE102015208701A1 (de) * 2015-05-11 2016-11-17 Infratec Gmbh Vorrichtung zur gleichzeitigen Bestimmung mehrerer unterschiedlicher Stoffe und/oder Stoffkonzentrationen
FR3080705B1 (fr) * 2018-04-27 2020-10-30 Tn Int Emballage de transport et/ou d'entreposage de matieres radioactives permettant une fabrication facilitee ainsi qu'une amelioration de la conduction thermique

Citations (2)

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Publication number Priority date Publication date Assignee Title
EP0453372A1 (en) * 1990-04-18 1991-10-23 Terumo Kabushiki Kaisha Infrared ray sensor
US20040173751A1 (en) 2001-06-11 2004-09-09 Hiroyoshi Komobuchi Electronic device and method for manufacturing the same

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JPH0219725A (ja) * 1988-07-07 1990-01-23 Matsushita Electric Ind Co Ltd 焦電形赤外検出素子アレイ、焦電形赤外検出器およびそれらの製法
JP3181363B2 (ja) * 1992-04-17 2001-07-03 テルモ株式会社 赤外線センサおよびその製造方法
EP0566156B1 (en) * 1992-04-17 1997-08-27 Terumo Kabushiki Kaisha Infrared sensor and method for production thereof
DE19525071A1 (de) * 1995-07-10 1997-01-16 Siemens Ag Pyroelektrisches Bauelement und Verfahren zur Herstellung
US5729019A (en) * 1995-12-29 1998-03-17 Honeywell Inc. Split field-of-view uncooled infrared sensor
US5962854A (en) * 1996-06-12 1999-10-05 Ishizuka Electronics Corporation Infrared sensor and infrared detector
JP2000298063A (ja) * 1999-04-14 2000-10-24 Tdk Corp 赤外線検出器
DE19932308C2 (de) * 1999-07-10 2001-10-25 Bosch Gmbh Robert Sensor, insbesondere Thermosensor
JP2001174324A (ja) 1999-12-17 2001-06-29 Tdk Corp 赤外線検出器および赤外線検出装置
DE10004216C2 (de) * 2000-02-01 2002-09-19 Siemens Ag Vorrichtung zur Detektion von Wärmestrahlung und Verwendung der Vorrichtung
RU2180098C2 (ru) * 2000-02-29 2002-02-27 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П. Королева" Устройство определения интенсивности инфракрасного облучения
DE10058861A1 (de) * 2000-11-27 2002-06-13 Siemens Ag Infrarotsensor für hochauflösende Infrarot-Detektoranordnungen und Verfahren zu seiner Herstellung
JP3519720B2 (ja) * 2001-06-11 2004-04-19 松下電器産業株式会社 電子デバイス
WO2004015764A2 (en) * 2002-08-08 2004-02-19 Leedy Glenn J Vertical system integration
DE102004020685B3 (de) * 2004-04-28 2005-09-01 Robert Bosch Gmbh Infrarotsensor mit Getterschicht
JP4385255B2 (ja) * 2004-06-10 2009-12-16 日本電気株式会社 ボロメータ型赤外線検出器及び残像の低減方法
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
JP2008544263A (ja) * 2005-06-27 2008-12-04 エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 電磁波検出用装置及びそのような装置製造のための方法

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Publication number Priority date Publication date Assignee Title
EP0453372A1 (en) * 1990-04-18 1991-10-23 Terumo Kabushiki Kaisha Infrared ray sensor
US20040173751A1 (en) 2001-06-11 2004-09-09 Hiroyoshi Komobuchi Electronic device and method for manufacturing the same

Also Published As

Publication number Publication date
JP5455239B2 (ja) 2014-03-26
DE102007024903A1 (de) 2008-12-11
JP2010528301A (ja) 2010-08-19
CN101688811B (zh) 2013-10-23
US8487257B2 (en) 2013-07-16
DE102007024903B4 (de) 2009-05-07
CN101688811A (zh) 2010-03-31
WO2008145354A1 (de) 2008-12-04
US20100264311A1 (en) 2010-10-21
RU2009144002A (ru) 2011-07-10
AU2008256414A1 (en) 2008-12-04
KR20100023008A (ko) 2010-03-03
BRPI0812098B1 (pt) 2018-06-19
BRPI0812098A2 (pt) 2014-11-25
RU2465685C2 (ru) 2012-10-27
EP2153188A1 (de) 2010-02-17
EP2153188B1 (de) 2012-05-16

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