KR101458990B1 - 정전척 및 기판 온도조절-고정장치 - Google Patents

정전척 및 기판 온도조절-고정장치 Download PDF

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Publication number
KR101458990B1
KR101458990B1 KR1020080133155A KR20080133155A KR101458990B1 KR 101458990 B1 KR101458990 B1 KR 101458990B1 KR 1020080133155 A KR1020080133155 A KR 1020080133155A KR 20080133155 A KR20080133155 A KR 20080133155A KR 101458990 B1 KR101458990 B1 KR 101458990B1
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South Korea
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base body
substrate
electrostatic chuck
substrate temperature
adsorbed
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KR20090071439A (ko
Inventor
도모아키 고야마
고키 다마가와
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신꼬오덴기 고교 가부시키가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020080133155A 2007-12-26 2008-12-24 정전척 및 기판 온도조절-고정장치 Active KR101458990B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-333867 2007-12-26
JP2007333867A JP4974873B2 (ja) 2007-12-26 2007-12-26 静電チャック及び基板温調固定装置

Publications (2)

Publication Number Publication Date
KR20090071439A KR20090071439A (ko) 2009-07-01
KR101458990B1 true KR101458990B1 (ko) 2014-11-07

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KR1020080133155A Active KR101458990B1 (ko) 2007-12-26 2008-12-24 정전척 및 기판 온도조절-고정장치

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US (1) US8199454B2 (https=)
JP (1) JP4974873B2 (https=)
KR (1) KR101458990B1 (https=)
CN (1) CN101471278A (https=)

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JP2002299426A (ja) 2001-03-29 2002-10-11 Toto Ltd 静電チャックユニット
JP2006049357A (ja) 2004-07-30 2006-02-16 Toto Ltd 静電チャックおよび静電チャックを搭載した装置

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Publication number Publication date
JP4974873B2 (ja) 2012-07-11
KR20090071439A (ko) 2009-07-01
CN101471278A (zh) 2009-07-01
JP2009158664A (ja) 2009-07-16
US8199454B2 (en) 2012-06-12
US20090168291A1 (en) 2009-07-02

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