KR101456564B1 - Ｓｏｉ 기판의 제조 방법 및 반도체장치의 제조 방법 - Google Patents

Ｓｏｉ 기판의 제조 방법 및 반도체장치의 제조 방법 Download PDF

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Publication number
KR101456564B1
KR101456564B1 KR1020080075877A KR20080075877A KR101456564B1 KR 101456564 B1 KR101456564 B1 KR 101456564B1 KR 1020080075877 A KR1020080075877 A KR 1020080075877A KR 20080075877 A KR20080075877 A KR 20080075877A KR 101456564 B1 KR101456564 B1 KR 101456564B1
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South Korea
Prior art keywords
single crystal
crystal semiconductor
substrate
semiconductor film
seed substrate
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Korean (ko)
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KR20090016391A (ko
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토모아키 모리와카
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가부시키가이샤 한도오따이 에네루기 켄큐쇼
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)
  • Element Separation (AREA)
KR1020080075877A 2007-08-10 2008-08-04 Ｓｏｉ 기판의 제조 방법 및 반도체장치의 제조 방법 Expired - Fee Related KR101456564B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00208932 2007-08-10
JP2007208932 2007-08-10

Publications (2)

Publication Number Publication Date
KR20090016391A KR20090016391A (ko) 2009-02-13
KR101456564B1 true KR101456564B1 (ko) 2014-10-31

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KR1020080075877A Expired - Fee Related KR101456564B1 (ko) 2007-08-10 2008-08-04 Ｓｏｉ 기판의 제조 방법 및 반도체장치의 제조 방법

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US (2) US7795114B2 (enExample)
JP (1) JP5500798B2 (enExample)
KR (1) KR101456564B1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088500A (ja) * 2007-09-14 2009-04-23 Semiconductor Energy Lab Co Ltd Ｓｏｉ基板の作製方法
JP5654206B2 (ja) * 2008-03-26 2015-01-14 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法及び該ｓｏｉ基板を用いた半導体装置
US8048754B2 (en) * 2008-09-29 2011-11-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer
JP5611571B2 (ja) * 2008-11-27 2014-10-22 株式会社半導体エネルギー研究所 半導体基板の作製方法及び半導体装置の作製方法
US8048773B2 (en) * 2009-03-24 2011-11-01 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
JP5593107B2 (ja) * 2009-04-02 2014-09-17 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5866088B2 (ja) * 2009-11-24 2016-02-17 株式会社半導体エネルギー研究所 Ｓｏｉ基板の作製方法
JP5755931B2 (ja) 2010-04-28 2015-07-29 株式会社半導体エネルギー研究所 半導体膜の作製方法、電極の作製方法、２次電池の作製方法、および太陽電池の作製方法
US8896964B1 (en) 2013-05-16 2014-11-25 Seagate Technology Llc Enlarged substrate for magnetic recording medium

Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2003068592A (ja) 2001-08-22 2003-03-07 Toshiba Corp エピタキシャル基板の製造方法、半導体素子の製造方法、及びエピタキシャル基板
JP2003324188A (ja) 2002-04-30 2003-11-14 Ishikawajima Harima Heavy Ind Co Ltd 大面積単結晶シリコン基板の製造方法
KR20050083687A (ko) * 2002-09-12 2005-08-26 어플라이드 머티어리얼스, 인코포레이티드 공통 유리 기판상에 타일링된 실리콘 웨이퍼 및 그 제조방법
WO2007061563A1 (en) 2005-11-22 2007-05-31 Corning Incorporated Large area semiconductor on glass insulator

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JPS6461943A (en) 1987-09-02 1989-03-08 Seiko Epson Corp Semiconductor device and manufacture thereof
JPH0618926A (ja) 1992-07-02 1994-01-28 Sharp Corp 液晶表示用大型基板およびその製造方法
US6534409B1 (en) 1996-12-04 2003-03-18 Micron Technology, Inc. Silicon oxide co-deposition/etching process
US6534380B1 (en) 1997-07-18 2003-03-18 Denso Corporation Semiconductor substrate and method of manufacturing the same
JPH11163363A (ja) 1997-11-22 1999-06-18 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP2000012864A (ja) 1998-06-22 2000-01-14 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JP2000124092A (ja) 1998-10-16 2000-04-28 Shin Etsu Handotai Co Ltd 水素イオン注入剥離法によってｓｏｉウエーハを製造する方法およびこの方法で製造されたｓｏｉウエーハ
JP2003031779A (ja) * 2001-07-13 2003-01-31 Mitsubishi Electric Corp Ｓｏｉウェハの製造方法
JP4772258B2 (ja) * 2002-08-23 2011-09-14 シャープ株式会社 Ｓｏｉ基板の製造方法
US7119365B2 (en) 2002-03-26 2006-10-10 Sharp Kabushiki Kaisha Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
JP2004025360A (ja) 2002-06-25 2004-01-29 Nakamura Tome Precision Ind Co Ltd 微細作業用３次元動作機構
JP2004134675A (ja) 2002-10-11 2004-04-30 Sharp Corp Ｓｏｉ基板、表示装置およびｓｏｉ基板の製造方法
US7508034B2 (en) 2002-09-25 2009-03-24 Sharp Kabushiki Kaisha Single-crystal silicon substrate, SOI substrate, semiconductor device, display device, and manufacturing method of semiconductor device
US7176528B2 (en) * 2003-02-18 2007-02-13 Corning Incorporated Glass-based SOI structures
FR2855909B1 (fr) * 2003-06-06 2005-08-26 Soitec Silicon On Insulator Procede d'obtention concomitante d'au moins une paire de structures comprenant au moins une couche utile reportee sur un substrat
US7199397B2 (en) 2004-05-05 2007-04-03 Au Optronics Corporation AMOLED circuit layout
JP3998677B2 (ja) 2004-10-19 2007-10-31 株式会社東芝 半導体ウェハの製造方法
US7456080B2 (en) 2005-12-19 2008-11-25 Corning Incorporated Semiconductor on glass insulator made using improved ion implantation process
US7608521B2 (en) 2006-05-31 2009-10-27 Corning Incorporated Producing SOI structure using high-purity ion shower
US20080248629A1 (en) 2007-04-06 2008-10-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003068592A (ja) 2001-08-22 2003-03-07 Toshiba Corp エピタキシャル基板の製造方法、半導体素子の製造方法、及びエピタキシャル基板
JP2003324188A (ja) 2002-04-30 2003-11-14 Ishikawajima Harima Heavy Ind Co Ltd 大面積単結晶シリコン基板の製造方法
KR20050083687A (ko) * 2002-09-12 2005-08-26 어플라이드 머티어리얼스, 인코포레이티드 공통 유리 기판상에 타일링된 실리콘 웨이퍼 및 그 제조방법
WO2007061563A1 (en) 2005-11-22 2007-05-31 Corning Incorporated Large area semiconductor on glass insulator

Also Published As

Publication number Publication date
JP2009065134A (ja) 2009-03-26
JP5500798B2 (ja) 2014-05-21
US7994023B2 (en) 2011-08-09
KR20090016391A (ko) 2009-02-13
US7795114B2 (en) 2010-09-14
US20090042362A1 (en) 2009-02-12
US20110008946A1 (en) 2011-01-13

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