KR101453419B1 - 2차원 인장 가능하고 구부릴 수 있는 장치 - Google Patents
2차원 인장 가능하고 구부릴 수 있는 장치 Download PDFInfo
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- KR101453419B1 KR101453419B1 KR20097007081A KR20097007081A KR101453419B1 KR 101453419 B1 KR101453419 B1 KR 101453419B1 KR 20097007081 A KR20097007081 A KR 20097007081A KR 20097007081 A KR20097007081 A KR 20097007081A KR 101453419 B1 KR101453419 B1 KR 101453419B1
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
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- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
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- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Ceramic Engineering (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Led Device Packages (AREA)
- Thin Film Transistor (AREA)
- Micromachines (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electroluminescent Light Sources (AREA)
- Light Receiving Elements (AREA)
- Optical Integrated Circuits (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Pressure Sensors (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Structure Of Printed Boards (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82468306P | 2006-09-06 | 2006-09-06 | |
| US60/824,683 | 2006-09-06 | ||
| US94462607P | 2007-06-18 | 2007-06-18 | |
| US60/944,626 | 2007-06-18 | ||
| PCT/US2007/077759 WO2008030960A2 (en) | 2006-09-06 | 2007-09-06 | Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147006478A Division KR101612749B1 (ko) | 2006-09-06 | 2007-09-06 | 2차원 인장 가능하고 구부릴 수 있는 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090086199A KR20090086199A (ko) | 2009-08-11 |
| KR101453419B1 true KR101453419B1 (ko) | 2014-10-23 |
Family
ID=39158048
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR20097007081A Active KR101453419B1 (ko) | 2006-09-06 | 2007-09-06 | 2차원 인장 가능하고 구부릴 수 있는 장치 |
| KR1020147031584A Active KR101689747B1 (ko) | 2006-09-06 | 2007-09-06 | 2차원 인장 가능하고 구부릴 수 있는 장치 |
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| KR20150003308A (ko) | 2015-01-08 |
| KR20180002083A (ko) | 2018-01-05 |
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| JP2015216365A (ja) | 2015-12-03 |
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| MY172115A (en) | 2019-11-14 |
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| JP5578509B2 (ja) | 2014-08-27 |
| KR101689747B1 (ko) | 2016-12-27 |
| CN101681695A (zh) | 2010-03-24 |
| EP2064710A4 (en) | 2011-05-04 |
| KR101612749B1 (ko) | 2016-04-27 |
| KR102087337B1 (ko) | 2020-03-11 |
| KR20160140962A (ko) | 2016-12-07 |
| WO2008030960A3 (en) | 2008-07-24 |
| JP2013239716A (ja) | 2013-11-28 |
| JP2010503238A (ja) | 2010-01-28 |
| CN103213935B (zh) | 2017-03-01 |
| KR20090086199A (ko) | 2009-08-11 |
| TWI654770B (zh) | 2019-03-21 |
| TWI485863B (zh) | 2015-05-21 |
| WO2008030960A2 (en) | 2008-03-13 |
| KR20140043244A (ko) | 2014-04-08 |
| CN101681695B (zh) | 2013-04-10 |
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