KR101451549B1 - 회로 패턴 검사 장치 - Google Patents

회로 패턴 검사 장치 Download PDF

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Publication number
KR101451549B1
KR101451549B1 KR1020140007137A KR20140007137A KR101451549B1 KR 101451549 B1 KR101451549 B1 KR 101451549B1 KR 1020140007137 A KR1020140007137 A KR 1020140007137A KR 20140007137 A KR20140007137 A KR 20140007137A KR 101451549 B1 KR101451549 B1 KR 101451549B1
Authority
KR
South Korea
Prior art keywords
inspection
conductor pattern
electrodes
sensor
circuit board
Prior art date
Application number
KR1020140007137A
Other languages
English (en)
Korean (ko)
Other versions
KR20140117258A (ko
Inventor
히로시 하모리
Original Assignee
오에이치티 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 오에이치티 가부시끼가이샤 filed Critical 오에이치티 가부시끼가이샤
Publication of KR20140117258A publication Critical patent/KR20140117258A/ko
Application granted granted Critical
Publication of KR101451549B1 publication Critical patent/KR101451549B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Liquid Crystal (AREA)
KR1020140007137A 2013-03-26 2014-01-21 회로 패턴 검사 장치 KR101451549B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2013-064394 2013-03-26
JP2013064394A JP5433876B1 (ja) 2013-03-26 2013-03-26 回路パターン検査装置

Publications (2)

Publication Number Publication Date
KR20140117258A KR20140117258A (ko) 2014-10-07
KR101451549B1 true KR101451549B1 (ko) 2014-10-15

Family

ID=50396613

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140007137A KR101451549B1 (ko) 2013-03-26 2014-01-21 회로 패턴 검사 장치

Country Status (4)

Country Link
JP (1) JP5433876B1 (zh)
KR (1) KR101451549B1 (zh)
CN (1) CN104076236B (zh)
TW (1) TWI449928B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102239999B1 (ko) * 2013-12-24 2021-04-15 엘지디스플레이 주식회사 기판 검사 장치
JP6014950B1 (ja) 2015-12-22 2016-10-26 オー・エイチ・ティー株式会社 導電体パターン検査装置
CN109782152B (zh) * 2017-11-14 2024-03-12 合肥欣奕华智能机器股份有限公司 基板检测装置及其检测基板的方法
WO2020059014A1 (ja) * 2018-09-18 2020-03-26 国立大学法人東北大学 容量検出エリアセンサ及び、その容量検出エリアセンサを有する導電パターン検査装置
CN109683081A (zh) * 2018-12-24 2019-04-26 安徽省大富光电科技有限公司 一种跟踪式柔性电路板导电图形在线监测装置
CN109725228A (zh) * 2018-12-24 2019-05-07 安徽省大富光电科技有限公司 一种柔性电路板导电图形在线监测装置
CN110095704B (zh) * 2019-04-17 2022-02-22 深圳市华星光电半导体显示技术有限公司 检测阵列基板中电路缺陷的装置及方法
CN113447858B (zh) * 2020-11-11 2022-11-11 重庆康佳光电技术研究院有限公司 电路背板检测装置及检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070056950A (ko) * 2005-11-29 2007-06-04 가부시키가이샤 니혼 마이크로닉스 센서기판과 이것을 이용하는 검사 방법 및 장치
JP2008076187A (ja) 2006-09-20 2008-04-03 Oht Inc 回路パターン検査装置
KR20110014107A (ko) * 2009-08-04 2011-02-10 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 검사 방법
JP2012150078A (ja) 2011-01-21 2012-08-09 Oht Inc 回路パターン検査装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060043153A1 (en) * 2002-11-30 2006-03-02 Shuji Yamaoka Circuit pattern inspection device and circuit pattern inspection method
US7304492B2 (en) * 2006-03-06 2007-12-04 Chunghwa Picture Tubes, Ltd. Inspecting circuit layout for LCD panel and fabricating method for LCD panel
JP2009080042A (ja) * 2007-09-26 2009-04-16 Oht Inc 回路パターン検査装置
KR101052490B1 (ko) * 2009-12-31 2011-07-29 주식회사 탑 엔지니어링 어레이 테스트 장치
KR101191343B1 (ko) * 2010-12-30 2012-10-16 주식회사 탑 엔지니어링 어레이 테스트 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070056950A (ko) * 2005-11-29 2007-06-04 가부시키가이샤 니혼 마이크로닉스 센서기판과 이것을 이용하는 검사 방법 및 장치
JP2008076187A (ja) 2006-09-20 2008-04-03 Oht Inc 回路パターン検査装置
KR20110014107A (ko) * 2009-08-04 2011-02-10 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 검사 방법
JP2012150078A (ja) 2011-01-21 2012-08-09 Oht Inc 回路パターン検査装置

Also Published As

Publication number Publication date
JP2014190743A (ja) 2014-10-06
KR20140117258A (ko) 2014-10-07
TWI449928B (zh) 2014-08-21
JP5433876B1 (ja) 2014-03-05
TW201432272A (zh) 2014-08-16
CN104076236A (zh) 2014-10-01
CN104076236B (zh) 2016-04-27

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