KR101384965B1 - 경사 구동을 이용하는 게이트 밸브 - Google Patents

경사 구동을 이용하는 게이트 밸브 Download PDF

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Publication number
KR101384965B1
KR101384965B1 KR1020120080082A KR20120080082A KR101384965B1 KR 101384965 B1 KR101384965 B1 KR 101384965B1 KR 1020120080082 A KR1020120080082 A KR 1020120080082A KR 20120080082 A KR20120080082 A KR 20120080082A KR 101384965 B1 KR101384965 B1 KR 101384965B1
Authority
KR
South Korea
Prior art keywords
opening
gate
chamber
axis
gate valve
Prior art date
Application number
KR1020120080082A
Other languages
English (en)
Korean (ko)
Other versions
KR20140012841A (ko
Inventor
금우락
김석
강순봉
Original Assignee
에스엔유 프리시젼 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엔유 프리시젼 주식회사 filed Critical 에스엔유 프리시젼 주식회사
Priority to KR1020120080082A priority Critical patent/KR101384965B1/ko
Priority to CN201210356945.8A priority patent/CN103574083A/zh
Priority to TW101134637A priority patent/TWI527982B/zh
Priority to JP2012209343A priority patent/JP5568118B2/ja
Publication of KR20140012841A publication Critical patent/KR20140012841A/ko
Application granted granted Critical
Publication of KR101384965B1 publication Critical patent/KR101384965B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/12—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with wedge-shaped arrangements of sealing faces
    • F16K3/14—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with wedge-shaped arrangements of sealing faces with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
KR1020120080082A 2012-07-23 2012-07-23 경사 구동을 이용하는 게이트 밸브 KR101384965B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020120080082A KR101384965B1 (ko) 2012-07-23 2012-07-23 경사 구동을 이용하는 게이트 밸브
CN201210356945.8A CN103574083A (zh) 2012-07-23 2012-09-21 利用倾斜驱动的闸门阀
TW101134637A TWI527982B (zh) 2012-07-23 2012-09-21 利用傾斜驅動的閘門閥
JP2012209343A JP5568118B2 (ja) 2012-07-23 2012-09-24 傾斜駆動を用いるゲートバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120080082A KR101384965B1 (ko) 2012-07-23 2012-07-23 경사 구동을 이용하는 게이트 밸브

Publications (2)

Publication Number Publication Date
KR20140012841A KR20140012841A (ko) 2014-02-04
KR101384965B1 true KR101384965B1 (ko) 2014-04-14

Family

ID=50046522

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120080082A KR101384965B1 (ko) 2012-07-23 2012-07-23 경사 구동을 이용하는 게이트 밸브

Country Status (4)

Country Link
JP (1) JP5568118B2 (zh)
KR (1) KR101384965B1 (zh)
CN (1) CN103574083A (zh)
TW (1) TWI527982B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230032195A (ko) * 2021-08-30 2023-03-07 주식회사 엘에이티 유체 조절 슬롯 밸브

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6679594B2 (ja) 2014-12-19 2020-04-15 バット ホールディング アーゲー 真空チャンバのチャンバ壁内のチャンバ開口を閉鎖するドア
KR101725251B1 (ko) * 2015-05-04 2017-04-11 프리시스 주식회사 진공밸브
CN106704600B (zh) * 2015-11-13 2019-03-12 北京北方华创微电子装备有限公司 阀门机构及半导体加工设备
KR102499323B1 (ko) * 2021-06-28 2023-02-15 주식회사 씰테크 반도체 진공용 밸브

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
KR20110014118A (ko) * 2009-08-04 2011-02-10 도쿄엘렉트론가부시키가이샤 게이트 밸브 및 그것을 이용한 기판 처리 시스템
KR20110028434A (ko) * 2008-06-12 2011-03-18 배트 홀딩 아게 슬라이드 밸브

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1250010A (fr) * 1959-11-27 1961-01-06 Thomson Houston Comp Francaise Vanne étanche pour conduites de fluides (liquides, gaz, vapeurs) ou conduites de vide
JPS5597563A (en) * 1979-01-13 1980-07-24 Rikagaku Kenkyusho Gate valve
JPS58118388A (ja) * 1981-12-29 1983-07-14 Hitachi Ltd 真空用ゲ−トバルブ
JPH074966U (ja) * 1993-06-28 1995-01-24 株式会社大阪真空機器製作所 ゲートバルブ装置
JP3310578B2 (ja) * 1996-12-13 2002-08-05 エヌオーケー株式会社 ゲートバルブ
JP3033529B2 (ja) * 1997-06-13 2000-04-17 日本電気株式会社 真空用ゲートバルブ
JP4304365B2 (ja) * 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
CN201944318U (zh) * 2011-03-11 2011-08-24 上海华尔德电站阀门有限公司 一种新型闸阀

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
JPH05196150A (ja) * 1991-09-30 1993-08-06 Tokyo Electron Yamanashi Kk ゲートバルブ
KR20110028434A (ko) * 2008-06-12 2011-03-18 배트 홀딩 아게 슬라이드 밸브
KR20110014118A (ko) * 2009-08-04 2011-02-10 도쿄엘렉트론가부시키가이샤 게이트 밸브 및 그것을 이용한 기판 처리 시스템

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230032195A (ko) * 2021-08-30 2023-03-07 주식회사 엘에이티 유체 조절 슬롯 밸브
KR102524474B1 (ko) * 2021-08-30 2023-04-24 주식회사 엘에이티 유체 조절 슬롯 밸브

Also Published As

Publication number Publication date
CN103574083A (zh) 2014-02-12
KR20140012841A (ko) 2014-02-04
JP2014020552A (ja) 2014-02-03
TW201405037A (zh) 2014-02-01
JP5568118B2 (ja) 2014-08-06
TWI527982B (zh) 2016-04-01

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