KR101359163B1 - 고순도 지르코늄, 하프늄, 탄탈 및 니오브 알콕사이드의제조 방법 - Google Patents

고순도 지르코늄, 하프늄, 탄탈 및 니오브 알콕사이드의제조 방법 Download PDF

Info

Publication number
KR101359163B1
KR101359163B1 KR1020060080846A KR20060080846A KR101359163B1 KR 101359163 B1 KR101359163 B1 KR 101359163B1 KR 1020060080846 A KR1020060080846 A KR 1020060080846A KR 20060080846 A KR20060080846 A KR 20060080846A KR 101359163 B1 KR101359163 B1 KR 101359163B1
Authority
KR
South Korea
Prior art keywords
tantalum
hal
halogen
metal alkoxide
crude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060080846A
Other languages
English (en)
Korean (ko)
Other versions
KR20070026039A (ko
Inventor
크누트 로이테르
프리드리히 첼
마르티나 에브네르
Original Assignee
하.체. 스타르크 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하.체. 스타르크 게엠베하 filed Critical 하.체. 스타르크 게엠베하
Publication of KR20070026039A publication Critical patent/KR20070026039A/ko
Application granted granted Critical
Publication of KR101359163B1 publication Critical patent/KR101359163B1/ko
Assigned to 헤레우스 프레셔스 메탈스 게엠베하 운트 코. 카게 reassignment 헤레우스 프레셔스 메탈스 게엠베하 운트 코. 카게 권리의 전부이전등록 Assignors: 하.체. 스타르크 게엠베하
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
    • C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
    • C07C29/88—Separation; Purification; Use of additives, e.g. for stabilisation by treatment giving rise to a chemical modification of at least one compound
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
    • C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
    • C07C29/76—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment
    • C07C29/80—Separation; Purification; Use of additives, e.g. for stabilisation by physical treatment by distillation
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
    • C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
    • C07C29/94—Use of additives, e.g. for stabilisation
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F17/00—Metallocenes
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/003—Compounds containing elements of Groups 4 or 14 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/005—Compounds of elements of Group 5 of the Periodic Table without metal-carbon linkages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
KR1020060080846A 2005-08-27 2006-08-25 고순도 지르코늄, 하프늄, 탄탈 및 니오브 알콕사이드의제조 방법 Expired - Fee Related KR101359163B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102005040618 2005-08-27
DE1020050406181 2005-08-27
DE102005052444A DE102005052444A1 (de) 2005-08-27 2005-11-03 Verfahren zur Herstellung hochreiner Zirkonium-, Hafnium-, Tantal- und Niobalkoxide
DE1020050524443 2005-11-03

Publications (2)

Publication Number Publication Date
KR20070026039A KR20070026039A (ko) 2007-03-08
KR101359163B1 true KR101359163B1 (ko) 2014-02-05

Family

ID=37692570

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060080846A Expired - Fee Related KR101359163B1 (ko) 2005-08-27 2006-08-25 고순도 지르코늄, 하프늄, 탄탈 및 니오브 알콕사이드의제조 방법

Country Status (10)

Country Link
US (1) US7273943B2 (https=)
EP (1) EP1764354B1 (https=)
JP (2) JP5591437B2 (https=)
KR (1) KR101359163B1 (https=)
CN (2) CN1919813B (https=)
AT (1) ATE531682T1 (https=)
DE (1) DE102005052444A1 (https=)
IL (1) IL177687A (https=)
MY (1) MY140577A (https=)
TW (1) TWI399340B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006043042A1 (de) * 2006-09-14 2008-03-27 H.C. Starck Gmbh Verfahren zur Herstellung von hochreinen Niobalkoxiden
US20090134369A1 (en) * 2007-11-26 2009-05-28 Applied Nanoworks, Inc. Metal alkoxides, apparatus for manufacturing metal alkoxides, related methods and uses thereof
CN102040478B (zh) * 2010-12-22 2013-03-13 南京大学 四乙氧基铪的合成方法
JP2012201630A (ja) * 2011-03-25 2012-10-22 Ube Industries Ltd 金属テトラ（１−アルキルイソブチルアルコキシド）の製造方法
JP2012201629A (ja) * 2011-03-25 2012-10-22 Ube Industries Ltd 高純度ジルコニウムアルコキシド原料及びその製造方法、並びに当該原料の分析方法
CN102766154B (zh) * 2012-07-28 2015-04-22 山东大学 一步溶剂法制备氧化锆纤维生产用有机聚锆前驱体或其甩丝液的方法
WO2017058160A1 (en) 2015-09-29 2017-04-06 Pryog, Llc Metal compositions and methods of making same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2831431B2 (ja) * 1990-04-10 1998-12-02 株式会社ジャパンエナジー 高純度金属アルコキサイドの製造方法
JP2001114791A (ja) 1999-10-14 2001-04-24 Showa Denko Kk 高純度ペンタアルコキシタンタルおよびその製造方法
KR20040015069A (ko) * 2001-03-19 2004-02-18 하.체. 스타르크 게엠베하 탄탈륨 알콕시드 및 니오븀 알콕시드의 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4741894A (en) * 1986-06-03 1988-05-03 Morton Thiokol, Inc. Method of producing halide-free metal and hydroxides
JP2599855B2 (ja) 1991-11-25 1997-04-16 株式会社ジャパンエナジー タンタルアルコキシドの精製方法
JP2575562B2 (ja) 1991-11-25 1997-01-29 株式会社ジャパンエナジー タンタルアルコキシドの精製方法
IT1271425B (it) * 1993-01-13 1997-05-28 Himont Inc Componenti e catalizzatori per la polimerizzazione di etilene
JPH1036299A (ja) 1996-07-25 1998-02-10 Wako Pure Chem Ind Ltd 金属アルコキシドの精製方法
JP3911740B2 (ja) * 1996-11-18 2007-05-09 昭和電工株式会社 タンタルアルコキシドの製造方法
JP2002161059A (ja) 2000-11-27 2002-06-04 Kojundo Chem Lab Co Ltd タンタルアルコキシドの精製方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2831431B2 (ja) * 1990-04-10 1998-12-02 株式会社ジャパンエナジー 高純度金属アルコキサイドの製造方法
JP2001114791A (ja) 1999-10-14 2001-04-24 Showa Denko Kk 高純度ペンタアルコキシタンタルおよびその製造方法
KR20040015069A (ko) * 2001-03-19 2004-02-18 하.체. 스타르크 게엠베하 탄탈륨 알콕시드 및 니오븀 알콕시드의 제조 방법
JP2005503334A (ja) * 2001-03-19 2005-02-03 ハー ツェー シュタルク ゲゼルシャフト ミット ベシュレンクテル ハフツング タンタルアルコラート及びニオブアルコラートの製造方法

Also Published As

Publication number Publication date
EP1764354B1 (de) 2011-11-02
JP5591437B2 (ja) 2014-09-17
CN1919813A (zh) 2007-02-28
KR20070026039A (ko) 2007-03-08
EP1764354A1 (de) 2007-03-21
TWI399340B (zh) 2013-06-21
JP2007070357A (ja) 2007-03-22
ATE531682T1 (de) 2011-11-15
IL177687A0 (en) 2006-12-31
JP2013144688A (ja) 2013-07-25
MY140577A (en) 2009-12-31
US20070056468A1 (en) 2007-03-15
US7273943B2 (en) 2007-09-25
DE102005052444A1 (de) 2007-03-01
CN103254035A (zh) 2013-08-21
IL177687A (en) 2010-11-30
CN1919813B (zh) 2013-03-27
TW200720191A (en) 2007-06-01

Similar Documents

Publication Publication Date Title
US7947814B2 (en) Metal complexes of polydentate beta-ketoiminates
JP2013144688A (ja) 高純度ジルコニウム、ハフニウム、タンタル及びニオブアルコキサイドの製造方法
JPWO2005063685A1 (ja) 金属化合物、薄膜形成用原料及び薄膜の製造方法
KR101288919B1 (ko) 금속 함유 막의 증착을 위한 금속 착물
TW200412348A (en) Process for the production and purification of Bis (tertiary-butylamino) silane
EP1466918B1 (en) Novel bismuth compounds, process of producing the same, and process of producing a film
KR101476016B1 (ko) 금속 알콕사이드 화합물 및 당해 화합물을 사용한 금속 함유 박막의 제조법
US8680289B2 (en) Complexes of imidazole ligands
JP2007297389A (ja) ジルコニウムとハフニウムの分離方法
US6376692B1 (en) Zirconium alkoxytris (β-Diketonate), process for manufacturing the same, and liquid composition for formation of PZT film
US6426425B2 (en) Process for purifying gallium alkoxide
JP4006892B2 (ja) ニオブ、タンタルとアルカリ土類金属との液体ダブルアルコキシドの製法及びそれを用いた複合酸化物誘電体の製法
EP4388145A1 (en) Method for making metal trimethylenemethane-carbonyl complexes
US5919963A (en) Process for purifying niobium alkoxides and tantalum alkoxides
KR100830529B1 (ko) 고순도 하프늄아미드의 제조방법
Müller et al. Multidentate aminoalkoxides. Synthesis and complexation behavior to lithium and sodium
JP4513358B2 (ja) 新規ビスマス化合物、その製造方法、および膜の製造方法
임종태 et al. Study on the Development of CVD Precursors II-Synthesis and Properties of New Lathanum β-diketonates
Pochekutova et al. New calсium β-diketonate complexes: The monomeric complexes [Ca (PhCOCHCOCF3) 2 (15-crown-5)],[Ca (AdCOCHCOCF3) 2 (15-crown-5)] and the binuclear hydrated complex [{Ca (adtfa)(18-crown-6)(H2O)}{Ca (adtfa) 3 (H2O)}(EtOH)]. Synthesis, characterization and crystal structure
KR101442057B1 (ko) 고순도 니오브 알콕사이드를 제조하는 방법
JP4266285B2 (ja) バナジウムトリス（β−ジケトネート）の製造方法
WO2005108372A1 (en) Process to make metal complexes with volatile liquid metal compounds
US20220098224A1 (en) Organometallic compounds
JP2005281734A (ja) 有機金属化学気相成長法用原料溶液、Ｐｂ（ｄｐｍ）２錯体の精製方法並びに該原料溶液を用いた誘電体薄膜の成膜方法
KR20040068027A (ko) 반도체 소자 박막용 유기금속 전구체(착물) 및 그의 제조방법

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R14-asn-PN2301

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20170129

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20170129