KR101358698B1 - 유량 센서 및 유량 검출 장치 - Google Patents

유량 센서 및 유량 검출 장치 Download PDF

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Publication number
KR101358698B1
KR101358698B1 KR1020127023206A KR20127023206A KR101358698B1 KR 101358698 B1 KR101358698 B1 KR 101358698B1 KR 1020127023206 A KR1020127023206 A KR 1020127023206A KR 20127023206 A KR20127023206 A KR 20127023206A KR 101358698 B1 KR101358698 B1 KR 101358698B1
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KR
South Korea
Prior art keywords
membrane
sensor
flow
flow rate
flow path
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Expired - Fee Related
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KR1020127023206A
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English (en)
Korean (ko)
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KR20130038805A (ko
Inventor
야스나리 가바사와
지로 오오카
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가부시키가이샤 기쿠치 세이사쿠쇼
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/46—Pitot tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
KR1020127023206A 2010-03-30 2010-09-16 유량 센서 및 유량 검출 장치 Expired - Fee Related KR101358698B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010077699A JP4979788B2 (ja) 2010-03-30 2010-03-30 流量センサーおよび流量検出装置
JPJP-P-2010-077699 2010-03-30
PCT/JP2010/005658 WO2011121680A1 (ja) 2010-03-30 2010-09-16 流量センサーおよび流量検出装置

Publications (2)

Publication Number Publication Date
KR20130038805A KR20130038805A (ko) 2013-04-18
KR101358698B1 true KR101358698B1 (ko) 2014-02-07

Family

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Family Applications (1)

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KR1020127023206A Expired - Fee Related KR101358698B1 (ko) 2010-03-30 2010-09-16 유량 센서 및 유량 검출 장치

Country Status (7)

Country Link
US (1) US20130008263A1 (https=)
EP (1) EP2554952A4 (https=)
JP (1) JP4979788B2 (https=)
KR (1) KR101358698B1 (https=)
CN (1) CN102792130A (https=)
CA (1) CA2794467A1 (https=)
WO (1) WO2011121680A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102611068B1 (ko) 2023-08-18 2023-12-06 (주)한울인텍스 온도센서 일체형 차압식 유량계
KR20250027166A (ko) 2023-08-18 2025-02-25 (주)한울인텍스 다배관 유량 측정 시스템

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JP6252241B2 (ja) 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
JP6548067B2 (ja) * 2014-05-02 2019-07-24 国立大学法人 東京大学 ジャイロセンサ
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EP3112819B1 (en) 2015-06-30 2020-03-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives Miniature differential pressure flow sensor
US10139256B2 (en) 2015-08-03 2018-11-27 Aceinna, Inc. MEMS flow sensor
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US9659838B1 (en) * 2016-03-28 2017-05-23 Lockheed Martin Corporation Integration of chip level micro-fluidic cooling in chip packages for heat flux removal
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EP4701393A2 (en) 2017-02-09 2026-02-25 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
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WO2019023309A1 (en) 2017-07-25 2019-01-31 Nextinput, Inc. FORCE SENSOR AND INTEGRATED FINGERPRINTS
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CN108254031B (zh) * 2017-12-28 2020-07-10 上海工程技术大学 压差式气体微流量传感器及其制作方法
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EP3680211B1 (en) * 2019-01-10 2024-03-06 TE Connectivity Solutions GmbH Sensor unit and method of interconnecting a substrate and a carrier
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US11300535B2 (en) * 2019-04-05 2022-04-12 Honeywell International Inc. Integrated sensor apparatus with pressure sensing element and flow sensing element
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JP7333409B2 (ja) * 2019-11-14 2023-08-24 日立Astemo株式会社 物理量検出装置
EP4078102B1 (en) * 2019-12-20 2025-09-03 Ezmems Ltd. System and methods of measuring properties of fluids
CN111551759A (zh) * 2020-04-13 2020-08-18 中国电子科技集团公司第四十九研究所 一种用于热膜式风速传感器单元的测试夹具
TWI720878B (zh) * 2020-04-24 2021-03-01 研能科技股份有限公司 致動傳感模組
CN111927751B (zh) * 2020-07-14 2021-07-02 西安交通大学 一种隔膜压缩机膜片位移无损监测系统及方法
CN112729426B (zh) * 2020-12-25 2021-08-27 江苏海讯环境技术有限公司 一种烟气流量流速监控系统
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CN116296358B (zh) * 2023-05-22 2024-02-20 四川弥韧科技有限公司 一种自闭阀自动检测设备及检测方法
US20240390568A1 (en) * 2023-05-25 2024-11-28 Honeywell International Inc. Devices for delivering at least one flowing media, associated sensor modules, and associated methods of mechanically and electrically coupling a sensor module to a device for delivering at least one flowing media
CN116399578B (zh) * 2023-06-07 2023-08-25 宁波瑞丰汽车零部件有限公司 减震器活塞主体的流量检测装置
CN118960873B (zh) * 2024-10-17 2024-12-27 上海芯龙半导体技术股份有限公司 进风量监测传感器

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Publication number Priority date Publication date Assignee Title
KR102611068B1 (ko) 2023-08-18 2023-12-06 (주)한울인텍스 온도센서 일체형 차압식 유량계
KR20250027166A (ko) 2023-08-18 2025-02-25 (주)한울인텍스 다배관 유량 측정 시스템

Also Published As

Publication number Publication date
WO2011121680A1 (ja) 2011-10-06
CA2794467A1 (en) 2011-10-06
JP2011209130A (ja) 2011-10-20
CN102792130A (zh) 2012-11-21
US20130008263A1 (en) 2013-01-10
EP2554952A1 (en) 2013-02-06
EP2554952A4 (en) 2014-06-18
JP4979788B2 (ja) 2012-07-18
KR20130038805A (ko) 2013-04-18

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