TWI292178B - Stacked semiconductor chip package - Google Patents

Stacked semiconductor chip package Download PDF

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Publication number
TWI292178B
TWI292178B TW094122520A TW94122520A TWI292178B TW I292178 B TWI292178 B TW I292178B TW 094122520 A TW094122520 A TW 094122520A TW 94122520 A TW94122520 A TW 94122520A TW I292178 B TWI292178 B TW I292178B
Authority
TW
Taiwan
Prior art keywords
semiconductor wafer
conductive metal
external connection
semiconductor
chip package
Prior art date
Application number
TW094122520A
Other languages
Chinese (zh)
Other versions
TW200703429A (en
Inventor
Yu Nung Shen
Original Assignee
Yu Nung Shen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yu Nung Shen filed Critical Yu Nung Shen
Priority to TW094122520A priority Critical patent/TWI292178B/en
Priority to US11/302,245 priority patent/US7411285B2/en
Priority to US11/375,342 priority patent/US7408370B2/en
Publication of TW200703429A publication Critical patent/TW200703429A/en
Application granted granted Critical
Publication of TWI292178B publication Critical patent/TWI292178B/en

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    • H—ELECTRICITY
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    • H01L25/0657—Stacked arrangements of devices
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Planar Illumination Modules (AREA)
  • Led Device Packages (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Semiconductor Integrated Circuits (AREA)

Description

1292178 九、發明說明：1292178 IX. Description of invention:

C J^ff ]J 發明領域 本發明係有關於一種堆疊式半導體晶片封裝體，更特 5別地，係有關於一種低輪廓堆疊式半導體晶片封裝體。 t先前 發明背景 10 15 近年來’半導體晶片封褒體的微型化及多功能化是為 持續的趨勢。為了滿足此需求，晶片尺寸封裝（csp)技術 及堆疊式封裝技術是應運而生。就半導體記憶體晶片而 言，若把兩個規格相同的晶片堆聶在 认 隹且在一起的話，則最終之 記憶體封裝體的記憶體容量得以増加1而，半導體晶片 被堆¥勢必導致整㈣频的高度増加，如則有違微 型化妳趨勢。 有鑑於此，本案發明人“其從事該行業之多年緩 驗，並本著精益求精之精神，積極研究改良，、篆古太^ 『低輪廓料式半導體晶片封I體』產生… 【明内】 發明概要 本發明之目的是為提供一 裝方法。 種+導體晶片裝置及其之封 根據本發明之一特徵，一藉 包m導體 種&式半導體晶片封裝體 導體曰曰片其具有-個上表面、一個下表 面、及數個安裝於該下表面上的外部連接導電體，於= 20 1292178 一半導體晶片的上表面和下表面上是分別佈設有數條導電 、金屬線，於該第一半導體晶片之下表面上的每條導電金屬 線是與一對應的外部連接導電體電氣連接；一第二半導體 晶片，其具有一個下表面及數個安裝於該下表面上的外部 5連接導電體，該第二半導體晶片安裝於該第一半導體晶片 的上表面上以致於該第二半導體晶片的外部連接導電體是 與在该第一半導體晶片之上表面上之對應的導電金屬線電 氣連接，及數個導電金屬元件，每個導電金屬元件電氣連 接在該第-半導體晶片之上表面上之—對應的導電金屬線 10和在該第-半導體晶片之下表面上之—對應的導電金屬 線〇 15 根據本發明之另一特徵，一種堆疊式半導體晶片封襞 體包a · —第一半導體晶片，其具有一個上表面、一個下 表面及數條分別佈設於該上表面和下表面上的導電金屬 ，’第—半導體晶片，其具有―個下表面及數個安裝於 j面上的外部連接導電體，該第二半導體晶片安裝於 V 半導體曰曰片的上表面上以致於該第二半導體晶片的 =部連接導電體是與在該第_半導體晶片之上表面上之對 =、電金屬線電氣連接；及數個導電金屬it件，每個導 對=屬氣:::：半導_之上一 對應的導=第—半導體晶片之下表面上之一 的外部電路it而且具有—個用於與外部電路電氣連接 根據本發明之又另一特徵，一種堆叠式半導體晶片封 20 1292178 、裝體包含：一第一半導體晶片，其具有一個上表面、一個 • τ表面、及數個安裝於該下表面上的外部連接導電體，於 * 豸第-半導體晶片的上表面和下表面上是分別佈設有數條 電金屬線’於該第-半導體晶片之下表面上的每條導電 5 I屬線是與—對應的外部連接導電體電氣連接，該第一半 導體晶片更具有數個沿著其之邊緣設置之用於把在該上表 Φ上之導電金屬線電氣連接至在該下表面上之對應之導電 > 金屬線的導電半圓形孔；及一第二半導體晶片，其具有一 個下表面及數個安裝於該卞表面上的外部連接導電體，該 10帛二半導體晶片安裝於該第—半導體晶片的上表面上以致 於”亥第一半導體晶片的外部連接導電體是與在該第一半導 體晶片之上表面上之對應的導電金屬線電氣連接。 根據本發明之再又另一特徵，_種堆疊式半導體晶片 封裝體，包含：一基板，該基板具有一個上表面、一個下 15表面、一個矩形的容納穿孔、及數姻貫穿該上和下表面的 電鍍貫孔，於該上表面和下表面上是分別形成有數條導電 金屬連線，每條導電金屬連線是自一對應的電鍍貫孔延伸 到界定該容納穿孔之四個孔壁中之一者附近；一第一半導 體晶片，其具有一個上表面、一個下表面、及數個安裝於 2〇該下表面上的外部連接導電體，於該第一半導體晶片的上 表面和下表面上是分別佈設有數條導電金屬線，於該第一 半導體晶片之下表面上的每條導電金屬線是與一對應的外 部連接導電體電氣連接，該第一半導體晶片是安裝於該基 板的容納穿孔内以致於在該第_半導體晶片之上表面上的 1292178 每-條導電金屬連線是與在該基板之上表面上之一對應的BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stacked semiconductor chip package, and more particularly to a low profile stacked semiconductor chip package. BACKGROUND OF THE INVENTION 10 15 In recent years, miniaturization and multi-functionalization of semiconductor wafer packages have been a continuing trend. In order to meet this demand, wafer size package (csp) technology and stacked package technology have emerged. In the case of a semiconductor memory chip, if two wafers of the same specification are stacked together, the memory capacity of the final memory package can be increased by one, and the semiconductor wafer is piled up. (4) The height of the frequency is increased, if it is against the trend of miniaturization. In view of this, the inventor of the case "has been engaged in the industry for many years of slow-testing, and in the spirit of excellence, actively researching and improving, and 篆古太^ "low-profile semiconductor wafer package I body"... [Ming] SUMMARY OF THE INVENTION The object of the present invention is to provide a mounting method. A +conductor wafer device and a sealing device thereof according to a feature of the present invention, a packaged m conductor species & type semiconductor chip package conductor chip having a An upper surface, a lower surface, and a plurality of external connection conductors mounted on the lower surface, wherein a plurality of conductive and metal wires are respectively disposed on the upper surface and the lower surface of the semiconductor wafer at 20 20292178. Each of the conductive metal lines on the lower surface of the semiconductor wafer is electrically connected to a corresponding external connection conductor; a second semiconductor wafer having a lower surface and a plurality of external 5 connection conductors mounted on the lower surface Installing the second semiconductor wafer on the upper surface of the first semiconductor wafer such that the external connection conductor of the second semiconductor wafer is opposite to the first semiconductor Corresponding conductive metal lines on the upper surface of the wafer are electrically connected, and a plurality of conductive metal elements, each of the conductive metal elements being electrically connected on the upper surface of the first semiconductor wafer - a corresponding conductive metal line 10 and at the - corresponding conductive metal wire 15 on the lower surface of the semiconductor wafer. According to another feature of the invention, a stacked semiconductor wafer package package a - a first semiconductor wafer having an upper surface and a lower surface And a plurality of conductive metals respectively disposed on the upper surface and the lower surface, the first semiconductor wafer having a lower surface and a plurality of external connection conductors mounted on the j surface, the second semiconductor wafer being mounted on The upper surface of the V semiconductor wafer such that the second portion of the second semiconductor wafer is electrically connected to the upper surface of the first semiconductor wafer; the electrical metal line is electrically connected; and the plurality of conductive metal is Piece, each pair of conductors = genus:::: semiconducting _ above a corresponding guiding = first - one of the external circuits on the lower surface of the semiconductor wafer it has one for the external Electrical Connection According to still another feature of the present invention, a stacked semiconductor wafer package 20 1292178 includes a first semiconductor wafer having an upper surface, a τ surface, and a plurality of mounted on the lower surface The externally connected electrical conductors are respectively disposed on the upper surface and the lower surface of the *-th semiconductor wafer with a plurality of electrically conductive metal wires respectively on the lower surface of the first semiconductor wafer. Corresponding external connection conductor electrical connection, the first semiconductor wafer further having a plurality of electrically conductive metal wires disposed along the edge thereof for electrically connecting the conductive metal wire on the upper surface Φ to the corresponding surface a conductive semi-circular hole of the metal wire; and a second semiconductor wafer having a lower surface and a plurality of external connection conductors mounted on the surface of the crucible, the semiconductor chip being mounted on the first The upper surface of the semiconductor wafer is such that the external connection conductor of the first semiconductor wafer is electrically connected to the corresponding conductive metal line on the upper surface of the first semiconductor wafer Connection. According to still another feature of the present invention, a stacked semiconductor chip package includes: a substrate having an upper surface, a lower surface 15, a rectangular receiving opening, and a plurality of passes through the upper and lower portions a plated through hole of the surface, wherein the upper surface and the lower surface are respectively formed with a plurality of conductive metal wires, each of the conductive metal wires extending from a corresponding plated through hole to one of four hole walls defining the receiving through hole In the vicinity of the first semiconductor wafer, having an upper surface, a lower surface, and a plurality of external connection conductors mounted on the lower surface of the second semiconductor wafer, on the upper surface and the lower surface of the first semiconductor wafer Each of the conductive metal wires on the lower surface of the first semiconductor wafer is electrically connected to a corresponding external connection conductor, and the first semiconductor wafer is mounted in the receiving through hole of the substrate. So that the 1292178 per-conductive metal wire on the upper surface of the first semiconductor wafer corresponds to one of the upper surfaces of the substrate.

一半導體晶片之下表面上的每 基板之下表面上之一對應的導 導體晶片，其具有一個下表面 電金屬元件。 圖式簡單說明 5及數個安裝於該下表面上的外部連接導電體，該第二半導 體晶片安裝於該第-半導體晶片的上表面上以致於該第二 半導體晶片的外部連接導電體是與在該第一半導體晶片之 上表面上之對應的導電金屬線電氣連接；及數個用於把在 *亥第-半導體晶片之上和下表面上之導電金屬連線電氣連 10接至在該基板之上和下表面上之對應之導電金屬連線的導 ㈣本發明為達七述目的、特徵所採用的技術手段及 其功效，茲例舉較佳窵施例並配合圖式說明如下： 15,帛-至四®是為_本發明之第—巍實關之堆叠 式半導體晶片封裝體的示意圖； 第五至人@是_示本發明之第二餘實施例之堆叠 式半導體晶片封裝體的示意圖； ，第九和十圖是為顯示本發明之第三較佳實施例之堆叠 20式半導體晶片封裝體的示意圖； 第十-至十四.示本發明之第吨佳實施例之 堆疊式半導體晶片封裝體的示意圖； 帛十五目是為-侧示本發明之第五㈣實施例之堆 叠式半導體晶片封裝體的示意側視圖； 1292178 第十六圖是為一個顯示本發明之第六較佳實施例之堆 、疊式半導體晶片封裝體的示意側視圖； . 第十七圖是為一個顯示本發明之第七較佳實施例之堆 疊式半導體晶片封裝體的示意側視圖； 5 第十八圖是為一個顯示本發明之第八較佳實施例之堆 疊式半導體晶片封裝體的示意側視圖； 第十九圖是為一個顯示本發明之第九較佳實施例之堆 叠式半導體晶片封裝體的示意側視圖；及A corresponding one of the conductive conductor wafers on the lower surface of each substrate on the lower surface of the semiconductor wafer, having a lower surface electrical metal component. The figure briefly illustrates 5 and a plurality of external connection conductors mounted on the lower surface, the second semiconductor wafer being mounted on the upper surface of the first semiconductor wafer such that the external connection conductor of the second semiconductor wafer is Corresponding conductive metal lines on the upper surface of the first semiconductor wafer are electrically connected; and a plurality of electrically conductive metal wires are electrically connected to the upper and lower surfaces of the semiconductor wafer Guides for Corresponding Conductive Metal Connections on the Upper and Lower Surfaces of the Substrate (IV) The present invention is directed to the technical means and functions of the seven objects and features, and the preferred embodiments are illustrated as follows: 15, 帛-至四® is a schematic diagram of a stacked semiconductor chip package of the present invention - 巍实关; fifth to human@ _ shows the stacked semiconductor chip package of the second embodiment of the present invention FIG. 9 and FIG. 10 are schematic diagrams showing a stacked 20 type semiconductor chip package according to a third preferred embodiment of the present invention; 10th to 14th. showing a preferred embodiment of the present invention Stacked half BRIEF DESCRIPTION OF THE DRAWINGS FIG. 15 is a schematic side view of a stacked semiconductor chip package of a fifth (fourth) embodiment of the present invention; 1292178 FIG. 16 is a sixth diagram showing the present invention A schematic side view of a stacked, stacked semiconductor chip package of a preferred embodiment; Fig. 17 is a schematic side view showing a stacked semiconductor chip package of a seventh preferred embodiment of the present invention; 18 is a schematic side view showing a stacked semiconductor chip package of an eighth preferred embodiment of the present invention; and FIG. 19 is a stacked semiconductor wafer showing a ninth preferred embodiment of the present invention; a schematic side view of the package; and

I 第一十圖疋為一個顯示本發明之第十較佳實施例之堆 10疊式半導體晶片封裝體的示意側視圖。 【實施方式】 較佳實施例之詳細說明 在後面之本發明之較佳實施例的詳細說明中，相同或 類似的元件疋由相同的標號標示，而且它們的詳細描述將 …15會被省略。此外，為了清楚揭示本發明的特徵，於圖式中 _ 之元件並非按實際比例描繪。 請參閱第一至四圖所示，本發明之第一較佳實施例之 堆疊式半導體晶片封裝體包括一基板1、一第一半導體晶片 2、及一第二半導體晶片3。 20 該基板1具有一個上表面1〇、一個下表面11、一個矩形 的容納穿孔12、及數個貫穿該上和下表面10和i丨的電鍍貫 孔13 〇數條第一導電金屬連線14是形成於該基板丨的上表面 10上。每條第一導電金屬連線14是自一對應的電鍍貫孔13 延伸到界定該容納穿孔12之四個孔壁中之一者附近。 1292178 、 數條第二導電金屬連線15是形成於該基板1的下表面 11上。母條第一導電金屬連線15是自一對應的電鍍貫孔13 延伸到界定該容納穿孔12之四個孔壁中之一者附近。該等 第一導電金屬連線14是經由對應的電鍍貫孔13來與對應的 5第二導電金屬連線15電氣連接。 該第一半導體晶片2具有一個上表面20、一個下表面 21、及數個安裝於該下表面21上的外部連接導電體22。數 條第三導電金屬連線23是形成於該第一半導體晶片2的上 表面20上。每條第三導電金屬連線23是自該晶片2之邊緣延 10伸到一個相當於一對應之外部連接導電體22的位置。 數條第四導電金屬連線24是形成於該第一半導體晶片 2的下表面21上。每條第四導電金屬連線24是自該晶片2之 邊緣延伸到一對應的外部連接導電體22俾可與該對應的外· 部連接導電體22電氣連接。 ί 15 該第一半導體晶片2是安裝於該基板1的容納穿孔ΐ2·内 以致於在該第一半導體晶片2之上表面20上的每一條第三 導電金屬連線23是與在該基板1之上表面1〇上之一對應的 第一導電金屬連線14銜接而在該第一半導體晶片2之下表 面21上的每一條第四導電金屬連線24是與在該基板丨之下 20表面11上之一對應的第二導電金屬連線15銜接。 為了碟保在該第一半導體晶片2之上和下表面20和21 上之第三和第四導電金屬連線23和24與在該基板1之上和 下表面10和11上之對應之第一和第二導電金屬連線14和15 之間的可靠電氣連接，每兩條對應之導電金屬連線23，24,丨4 10 1292178 和15是由一導電金屬元件4連接。該等導電金屬元件4可以 由任何適合的導電金屬材料製成，例如，錫膏、銀膠、金 屬膠、導線等等。I. Fig. 10 is a schematic side view showing a stacked 10-stack semiconductor chip package of a tenth preferred embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the detailed description of the preferred embodiments of the present invention, the same or similar elements are denoted by the same reference numerals, and their detailed description will be omitted. In addition, in order to clearly clarify the features of the present invention, elements in the drawings are not drawn to scale. Referring to the first to fourth embodiments, the stacked semiconductor chip package of the first preferred embodiment of the present invention comprises a substrate 1, a first semiconductor wafer 2, and a second semiconductor wafer 3. 20 The substrate 1 has an upper surface 1 〇, a lower surface 11, a rectangular receiving through hole 12, and a plurality of plated through holes 13 penetrating the upper and lower surfaces 10 and i 〇 a plurality of first conductive metal wires 14 is formed on the upper surface 10 of the substrate. Each of the first conductive metal wires 14 extends from a corresponding plated through hole 13 to a vicinity of one of the four hole walls defining the receiving through hole 12. 1292178, a plurality of second conductive metal wires 15 are formed on the lower surface 11 of the substrate 1. The busbar first conductive metal wire 15 extends from a corresponding plated through hole 13 to one of the four hole walls defining the receiving through hole 12. The first conductive metal wires 14 are electrically connected to the corresponding fifth second conductive metal wires 15 via corresponding plated through holes 13. The first semiconductor wafer 2 has an upper surface 20, a lower surface 21, and a plurality of external connection conductors 22 mounted on the lower surface 21. A plurality of third conductive metal wires 23 are formed on the upper surface 20 of the first semiconductor wafer 2. Each of the third conductive metal wires 23 extends from the edge of the wafer 2 to a position corresponding to a corresponding external connection conductor 22. A plurality of fourth conductive metal wires 24 are formed on the lower surface 21 of the first semiconductor wafer 2. Each of the fourth conductive metal wires 24 extends from the edge of the wafer 2 to a corresponding outer connecting conductor 22 and is electrically connectable to the corresponding outer connecting conductor 22. The first semiconductor wafer 2 is mounted in the receiving via · 2· of the substrate 1 such that each of the third conductive metal wires 23 on the upper surface 20 of the first semiconductor wafer 2 is on the substrate 1 A first conductive metal wire 14 corresponding to one of the upper surfaces 1 衔 is connected to each of the fourth conductive metal wires 24 on the lower surface 21 of the first semiconductor wafer 2 and under the substrate 20 20 A corresponding one of the second conductive metal wires 15 on the surface 11 is engaged. For the third and fourth conductive metal wires 23 and 24 on the upper and lower surfaces 20 and 21 of the first semiconductor wafer 2 and the corresponding ones on the upper and lower surfaces 10 and 11 of the substrate 1 A reliable electrical connection between the first and second conductive metal wires 14 and 15, each of the two corresponding conductive metal wires 23, 24, 丨 4 10 1292178 and 15 is connected by a conductive metal member 4. The conductive metal members 4 may be made of any suitable conductive metal material such as solder paste, silver paste, metal paste, wires, and the like.

1010

違第一半導體晶片3具有一個下表面31及數個安裝於 忒下表面31上的外部連接導電體32。該第二半導體晶片3是 安裝於該第—半導體晶片2的上表面2〇上以致於該第二半 導體晶片3的外部連接導電體32是與在該第_半導體晶片2 之上表面20上之對應的第三導電金屬連線23電氣連接。如 疋’該第二半導體晶片3的内部電路能夠經由該等外部連接 導電體32、該等第三導電金屬線23、該等錢貫孔13、該 專第四導電金屬、線24、和該等外部連接導電體來與外部 電路電氣連接。 二僻絕緣保護層5 (見第一圖）是形成於該基板丨的上 表面19上在該第：半導體日B…四周。該絕緣保護層5的作 用是在於_該第-和第二半導體晶片2和3及防止會影響 該第一與第二半導體晶片2與3之間之電氣連接的濕氣入 思的疋，㈣苐二半導體晶片3的上表面上; 以佈設有與在第一機晶片2之上表乱. 線類似的導電金屬線俾可進—步疊置另-半導體晶片〉 h或者’端視需要而定，於該第二半導體晶肋的上 上疋可佈設有任何需要的電路軌跡，例如，具有電波 ==的天線迴路、"何生物_探針或感應: 20 1292178 另一方面，第一半導體晶片2和第二半導體晶片3的大 、小、類型、及功能等等可以是不相同的。 第五至八圖疋為顯示本發明之第二較佳實施例之堆疊 式半導體晶片封裝體的圖示。 5 如在第五至八圖中所示，本發明之第二較佺實施例之 堆疊式半導體晶片封裝體包括一第一半導體晶片2和一第 二半導體晶片3。 該第一半導體晶片2具有一個上表面2〇、一個下表面 21、及數個安裝於該下表面21上的外部連接導電體22。數 10條第三導電金屬連線23是形成於該第一半導體晶片2的上 表面20上。每條第三導電金孱連線23是自該晶片2之邊緣延 伸到一個相當於一對應之外部連接導電體22的位置。 數條第四導電金屬連線24是形成於該第一半導體晶片 2的下表面21上。每條第四導電金屬連線24是自該晶片2之 15邊緣延伸到一對應的外部連接導電體22俾可與該對應的外 部連接導電體22電氣連接。 在該第一半導體晶片2之上表面20上的每一條第三導 電金屬連線23是經由一個導電金屬元件4,來與在下表面21 上之一對應的第四導電金屬連線24電氣連接。在本實施例 20中’該等導電金屬元件4’是為大致C形的金屬片而且每個導 電金屬元件4’具有一個置於該第一半導體晶片2之上表面 20上俾可與一對應之第三導電金屬連線23電氣連接的第一 臂部40’、一個置於該第一半導體晶片2之下表面21上俾可 與一對應之第四導電金屬連線24電氣連接的第二臂部 12 1292178 41、及一個連接該第一臂部4〇,和該第二臂部41，的臂連接 ，部 42,。 該第二半導體晶片3具有一個下表面31及數個安裝於 該下表面31上的外部連接導電體32。該第二半導體晶片3是 5安裝於該第一半導體晶片2的上表面20上以致於該第二半 導體晶片3的外部連接導電體32是與在該第一半導體晶片2 之上表面20上之對應的第三導電金屬連線22電氣連接。如 疋，该第一半導體晶片3的内部電路能夠經由該等外部連接 導電體32、該等第三導電金屬線23、該等導電金屬元件4，、 10該等第四導電金屬線24、和該等外部連接導電體22來與外 部電路電氣連接。 第九和十圖是為一個顯示本發明之第三較佳實施例之 堆疊式半導體晶片封裝體的侧視圖。 9 , 如在第九和十圖中所示，與第二較^圭實施例不同，每 15個導電金屬元件4’更包括一個自該臂連接部42,延伸出來侔 可與外部電路（圖中未示）電氣連接的外部電路連接部 43’。由於該等外部電路連接部43,的設置，於在第二較佳實 施例中所示之該第一半導體晶片2之下表面上的導電金屬 連線及外部連接導電體（見第八圖）是可免除。 20 第十一至十四圖是為顯示本發明之第四較佳實施例之 堆叠式半導體晶片封裝體的圖示。 凊參閱第Η 至十四圖所示，本發明之第四較佳實施 例之堆疊式半導體晶片封裝體包括一第一半導體晶片2及 一第二半導體晶片3。 13 1292178 11亥第一半導體晶片2具有一個上表面20、一個下表面 21數個女裝於該下表面21上的外部連接導電體22、及數 個沿著該第一半導體晶片2之邊緣設置的導電半圓形孔 25。該等導電半圓形孔25的形成可以是藉著在該第一半導 5體曰曰片2自一片晶圓切割出來之前先沿著切割線鑽孔並電 鍍形成電鍍貫孔而然後再沿切割線切割來被形成。當然， 該等導電半圓形孔25亦可以藉著任何其他適當的手段來被 形成，例如，以導電膠填充俾形成導電膠-填充貫孔來代替 以電鍍形成電鍍貫孔。 1〇 數條第三導電金屬連線23是形成於該第一半導體晶片 2的上表面20上。每條第三導電金屬連線”是自一個相當於 一對應之外部連接導電體22之位置延伸到一個對應的導電 半圓形孔25 〇 •. 數條第四導電金屬連線24是形成於該第一半導體晶片 15 2的下表面21上。每條第四導電金屬連線料是自一個對應的 外部連接導電體22延伸到一個對應的導電半圓形孔25俾可 與該對應的外部連接導電體22電氣連接。 該第二半導體晶片3具有一個下表面31及數個安裝於 該下表面31上的外部連接導電體32。該第二半導體晶片3是 20女裝於該第一半導體晶片2的上表面20上以致於該第二半 導體晶片3的外部連接導電體32是與在該第一半導體晶片2 之上表面20上之對應的第三導電金屬連線23電氣連接。如 是，該第二半導體晶片3的内部電路能夠經由該等外部連接 導電體32、該等第三導電金屬線23、該等第四導電金屬線 14 1292178 24、和該等外部連接導電體22來與外部電路電氣連接。 帛十五圖是為-個㈣本發明之第五較佳實施例之堆 叠式半導體晶片封裝體的示意側示圖。 如在第十五圖中所示，本較佳實施例之堆疊式半導體 5晶片封裝體包括一基板^、一第一半導體晶片2、一第二半 導體晶片3、及一保護層5。 豸基板1’具有-個上表面1G、—個下表㈣、數個貫 穿該上和下表面的電鑛貫孔13、及數個設置於該基 板1，之下表面11上的外部連接導電體14。祕與第一較佳 1〇實施例相似的第-導電金屬連線（圖中未示）是形成於該 基板1’的上表面10上。每條第—導屬連線是自一對應 的電鍍貫孔13延伸到一預定的位置。 祕與第-較佳實施例相似的第二導電金屬連線（圖 中未示）是形成於該基扣，的下表面11±。每條第二導電金 15屬連線是自一對應的電鑛貫孔13延伸到一對應的外部連接 導電體14俾可與該對應的外部連接導電體14電氣連接。該 等第-導電金屬連線!4是經由對應的電鑛貫孔时與對應 的第二導電金屬連線15電氣連接。 該第-半導體晶片2是與在第四較佳實施例中所示的 20相同而因此，其之詳細描述於此恕不再資述。該第一半導 體晶片2是被設置於該基板！，的上表面1〇上以致於該第一 半導體晶片2的外部連接導電體22是與在該基板1，之上表 面10上的第一導電金屬連線電氣連接。 該第二半導體晶片3是與在第四較佳實施例中所示的 15 78 相同而且是以與在第四較佳實施例中所述之形式相同的形 ’式設置於該第一半導體晶片2上。 該絕緣保護層5是形成於該基板1，的上表面1〇上俾可 覆蓋該等半導體晶片2和3。 5 第十六圖是為一個顯示本發明之第六較佳實施例之堆 疊式半導體晶片封裝體的示意側示圖。與第五較佳實施例 不同，本較佳實施例包含四個堆疊設置的半導體晶片。 第十七圖是為-個顯示本發明之第七較佳實施例之堆 叠式半導體晶片封裝體的示意側示圖。 如在第十七圖中所示，本較佳實施例之堆疊式半導體 '晶片封裝體包括-第-基幻，、一第二基板6、一第三基板 j7、一第一半導體晶片2、—第二半導體晶片3、及—保護層 5 ° 祕板Γ是與在第五較佳實施射所述的相^j而因此 15其之詳細描述於此不再贅述。 該第二基板6是與在第_較佳實施例中所述的相同而 因此其之詳細描述於此不再贅述。 該第半導體晶片2是與在第-較佳實施例中所示的 相同而且是以與在第一較佳實施例中所述相同的形式安裝 於’一基板6，因此，其之詳細描述於此恕不再資述。 、“第一基板7疋與該第二基板6相同而因此其之詳細描 述於此不再贅述。 該第二半導體晶片3是與在第 一較佳實施例中所示的 θ —較佳實施例巾所述之形式相同的形 16 1292178 式安裝於該第三基板7及設置於該第一半導體晶片2上。 ， 該絕緣保護層5是形成於該基板1’的上表面1〇上俾可 覆蓋該等半導體晶片2和3。 第十八圖是為-個顯示本發明之第八較佳實施例之堆 5疊式半導體晶片封裝體的示意側示圖。與第七較佳實施例 不同，本較佳實施例包含四個堆疊設置的半導體晶片。 帛十九圖是為-個顯林發明之第九較佳實施例之堆 疊式半導體晶片封裝體的示意側示圖。 如在第十九圖中所示，本較佳實施例之堆疊式半導體 10晶片封裝體包括一基板1，、一第一半導體晶片2、一第二半 導體晶片3、及一保護層5。 該基板1，是與在第五較佳實施例中所述的相同而因此 其之詳細描述於此不再贅述。。 9 . <該第一半導體晶片2和該第二半導體晶片3是與在第二 15較隹實施例中所示的相同而且是以與在第二較佳實施例中 所述之相同的形式堆疊並且設置於該基板丨，上，因此，其 之詳細描述於此恕不再贅述。 該絕緣保護層5是形成於該基，的上表面1()上俾可 覆蓋該等半導體晶片2和3。 2〇 第二十圖是為一個顯示本發明之第十較佳實施例之堆 疊式半導體晶片封裝體的示意侧示圖。與第九較佳實施例 不同’本較佳實施例包含四個堆疊設置的半導趙晶片。 綜上所述，本發明之『低輪廓堆叠式半導體晶片封裂 體』’確能藉上述所揭露之構造、裝置’達到預期之目的 17 1292178 與功效，且申請前未見於刊物亦未公開使用，符合發明專 、利之新穎、進步等要件。 - 惟，上述所揭之圖式及說明，僅為本發明之實施例而 - 已，非為限定本發明之實施例；大凡熟悉該項技藝之人仕， 5其所依本發明之特徵範疇，所作之其他等效變化或修飾， 皆應涵蓋在以下本案之申請專利範圍内。 【圖式簡單說明】 鲁第一至四圖是為顯示本發明之第一較佳實施例之堆疊 式半導體晶片封裝體的示意圖； 1〇 你 第五至八圖疋為顯示本發明之第二較佳實施例之堆整 式半導體晶片封裝體的示意圖；、 第九和十圖是為顯示本發明之第三較佳實施例之堆整 、，.· · 式半導體晶片封裝體的示意圖； i 第十一至十四圖是為顯示本發明之第四較佳實施例之 15堆疊式半導體晶片封裝體的示意圖 鲁第十五圖是為一個顯示本發明之第五較佳實施例之堆 叠式半導體晶片封裝體的示意側視圖； 第十六圖是為一個顯示本發明之第六較佳實施例之堆 疊式半導體晶片封裝體的示意侧視圖； 20 第十七圖是為一個顯示本發明之第七較佳實施例之堆 叠式半導體晶片封裝體的示意側視圖； 第十八圖是為一個顯不本發明之第八較佳實施例之堆 疊式半導體晶片封裝體的示意側視圖； 第十九圖是為一個顯示本發明之第九較佳實施例之堆 18The first semiconductor wafer 3 has a lower surface 31 and a plurality of external connection conductors 32 mounted on the crotch surface 31. The second semiconductor wafer 3 is mounted on the upper surface 2 of the first semiconductor wafer 2 such that the external connection conductor 32 of the second semiconductor wafer 3 is on the upper surface 20 of the first semiconductor wafer 2. The corresponding third conductive metal wire 23 is electrically connected. For example, the internal circuit of the second semiconductor wafer 3 can connect the conductors 32, the third conductive metal wires 23, the money holes 13, the fourth conductive metal, the wires 24, and the The external connection conductors are electrically connected to an external circuit. The second insulating protective layer 5 (see the first figure) is formed on the upper surface 19 of the substrate 在 on the periphery of the first semiconductor day B. The insulating protective layer 5 functions to prevent the moisture of the first and second semiconductor wafers 2 and 3 and the electrical connection between the first and second semiconductor wafers 2 and 3, (4) On the upper surface of the semiconductor wafer 3; the conductive metal wire similar to the wire on the first machine chip 2 is disposed to be stacked on the other side of the semiconductor wafer > h or 'end as needed The upper upper layer of the second semiconductor rib can be provided with any required circuit traces, for example, an antenna loop with electric wave ==, "he bio_probe or induction: 20 1292178 The size, size, type, function, and the like of the semiconductor wafer 2 and the second semiconductor wafer 3 may be different. 5 to 8 are views showing a stacked semiconductor chip package of a second preferred embodiment of the present invention. As shown in the fifth to eighth embodiments, the stacked semiconductor chip package of the second comparative embodiment of the present invention comprises a first semiconductor wafer 2 and a second semiconductor wafer 3. The first semiconductor wafer 2 has an upper surface 2A, a lower surface 21, and a plurality of external connection conductors 22 mounted on the lower surface 21. A plurality of ten third conductive metal wires 23 are formed on the upper surface 20 of the first semiconductor wafer 2. Each of the third conductive gold wires 23 extends from the edge of the wafer 2 to a position corresponding to a corresponding external connection conductor 22. A plurality of fourth conductive metal wires 24 are formed on the lower surface 21 of the first semiconductor wafer 2. Each of the fourth conductive metal wires 24 extends from the edge of the wafer 2 to a corresponding outer connecting conductor 22 and is electrically connectable to the corresponding outer connecting conductor 22. Each of the third conductive metal wires 23 on the upper surface 20 of the first semiconductor wafer 2 is electrically connected to a fourth conductive metal wire 24 corresponding to one of the lower surfaces 21 via a conductive metal member 4. In the present embodiment 20, the conductive metal members 4' are substantially C-shaped metal sheets and each of the conductive metal members 4' has a surface disposed on the upper surface 20 of the first semiconductor wafer 2 to correspond to a corresponding one. a first arm portion 40' electrically connected to the third conductive metal wire 23, a second portion disposed on the lower surface 21 of the first semiconductor wafer 2 and electrically connectable to a corresponding fourth conductive metal wire 24 The arm portion 12 1292178 41 and an arm connecting the first arm portion 4 and the second arm portion 41 are connected to each other. The second semiconductor wafer 3 has a lower surface 31 and a plurality of external connection conductors 32 mounted on the lower surface 31. The second semiconductor wafer 3 is mounted on the upper surface 20 of the first semiconductor wafer 2 such that the external connection conductor 32 of the second semiconductor wafer 3 is on the upper surface 20 of the first semiconductor wafer 2. The corresponding third conductive metal wire 22 is electrically connected. For example, the internal circuit of the first semiconductor wafer 3 can connect the conductors 32, the third conductive metal lines 23, the conductive metal elements 4, 10, the fourth conductive metal lines 24, and the like through the external connections. The externally connected electrical conductors 22 are electrically connected to external circuitry. The ninth and tenth views are side views showing a stacked semiconductor chip package showing a third preferred embodiment of the present invention. 9 , as shown in the ninth and tenth embodiments, unlike the second embodiment, each of the 15 conductive metal elements 4 ′ further includes an extension from the arm connection portion 42 and an external circuit ( FIG. The external circuit connection portion 43' that is electrically connected is not shown. Due to the arrangement of the external circuit connecting portions 43, the conductive metal wires and the external connecting conductors on the lower surface of the first semiconductor wafer 2 shown in the second preferred embodiment (see FIG. 8) It is exempt. 20 to 11 are diagrams showing a stacked semiconductor chip package of a fourth preferred embodiment of the present invention. Referring to Figures 1-4, the stacked semiconductor chip package of the fourth preferred embodiment of the present invention includes a first semiconductor wafer 2 and a second semiconductor wafer 3. 13 1292178 11H first semiconductor wafer 2 has an upper surface 20, a lower surface 21, a plurality of external connection conductors 22 on the lower surface 21, and a plurality of outer semiconductors 22 disposed along the edge of the first semiconductor wafer 2 Conductive semi-circular aperture 25. The conductive semi-circular holes 25 may be formed by drilling and electroplating along the cutting line to form a plated through hole before the first semiconductive 5 body piece 2 is cut out from a wafer, and then A cutting line is cut to be formed. Of course, the conductive semi-circular holes 25 can also be formed by any other suitable means, for example, filling the conductive paste with a conductive paste to form a conductive paste-filling through-hole instead of forming a plated through-hole by electroplating. A plurality of third conductive metal wires 23 are formed on the upper surface 20 of the first semiconductor wafer 2. Each of the third conductive metal wires extends from a position corresponding to a corresponding outer connecting conductor 22 to a corresponding conductive semicircular hole 25 数. A plurality of fourth conductive metal wires 24 are formed in The lower surface 21 of the first semiconductor wafer 15 2 . Each of the fourth conductive metal wires extends from a corresponding outer connecting conductor 22 to a corresponding conductive semicircular aperture 25 俾 corresponding to the outer portion The second semiconductor wafer 3 has a lower surface 31 and a plurality of external connection conductors 32 mounted on the lower surface 31. The second semiconductor wafer 3 is 20 The upper surface 20 of the wafer 2 is such that the external connection conductor 32 of the second semiconductor wafer 3 is electrically connected to a corresponding third conductive metal connection 23 on the upper surface 20 of the first semiconductor wafer 2. If so, The internal circuit of the second semiconductor wafer 3 can be connected via the external connection conductors 32, the third conductive metal lines 23, the fourth conductive metal lines 14 1292178 24, and the external connection conductors 22 The external circuit is electrically connected. The fifteenth diagram is a schematic side view of the stacked semiconductor chip package of the fifth preferred embodiment of the present invention. As shown in the fifteenth figure, the preferred embodiment The stacked semiconductor 5 chip package comprises a substrate, a first semiconductor wafer 2, a second semiconductor wafer 3, and a protective layer 5. The germanium substrate 1' has an upper surface 1G, a lower table (four) And a plurality of electroporation through holes 13 penetrating the upper and lower surfaces, and a plurality of external connection conductors 14 disposed on the lower surface 11 of the substrate 1. The same as the first preferred embodiment - a conductive metal wiring (not shown) is formed on the upper surface 10 of the substrate 1'. Each of the first conductive lines extends from a corresponding plated through hole 13 to a predetermined position. A second conductive metal wiring (not shown) similar to the first preferred embodiment is formed on the lower surface 11± of the base buckle. Each of the second conductive gold 15 is connected to a corresponding electric mine. The through hole 13 extends to a corresponding external connection conductor 14 and can be connected to the corresponding external conductor 14 Electrically connected. The first conductive metal wires! 4 are electrically connected to the corresponding second conductive metal wires 15 through the corresponding electrowell holes. The first semiconductor wafer 2 is in the fourth preferred embodiment 20 is the same and therefore, a detailed description thereof will not be described here. The first semiconductor wafer 2 is disposed on the upper surface 1 of the substrate, so that the first semiconductor wafer 2 is The external connection conductor 22 is electrically connected to a first conductive metal line on the upper surface 10 of the substrate 1. The second semiconductor wafer 3 is the same as the 1578 shown in the fourth preferred embodiment and The first semiconductor wafer 2 is disposed in the same shape as that described in the fourth preferred embodiment. The insulating protective layer 5 is formed on the upper surface 1 of the substrate 1, and covers the semiconductor wafers 2 and 3. Figure 16 is a schematic side view showing a stacked semiconductor chip package showing a sixth preferred embodiment of the present invention. Unlike the fifth preferred embodiment, the preferred embodiment includes four stacked semiconductor wafers. Figure 17 is a schematic side view showing a stacked semiconductor chip package of a seventh preferred embodiment of the present invention. As shown in FIG. 17, the stacked semiconductor 'chip package of the preferred embodiment includes a - singular phantom, a second substrate 6, a third substrate j7, and a first semiconductor wafer 2. The second semiconductor wafer 3, and the protective layer 5° are the same as those described in the fifth preferred embodiment, and thus the detailed description thereof will not be repeated here. The second substrate 6 is the same as that described in the preferred embodiment, and thus a detailed description thereof will not be repeated herein. The second semiconductor wafer 2 is the same as that shown in the first preferred embodiment and is mounted on the 'substrate 6' in the same manner as described in the first preferred embodiment, and thus, it is described in detail in This is no longer a statement. The first substrate 7 is the same as the second substrate 6 and thus its detailed description will not be repeated here. The second semiconductor wafer 3 is preferably implemented as θ in the first preferred embodiment. The same shape 16 1292178 is mounted on the third substrate 7 and disposed on the first semiconductor wafer 2. The insulating protective layer 5 is formed on the upper surface 1 of the substrate 1'. The semiconductor wafers 2 and 3 can be covered. Fig. 18 is a schematic side view showing a stacked 5-stack semiconductor chip package of an eighth preferred embodiment of the present invention. Differently, the preferred embodiment comprises four stacked semiconductor wafers. The nineteenth embodiment is a schematic side view of a stacked semiconductor chip package of a ninth preferred embodiment of the invention. As shown in FIG. 19, the stacked semiconductor 10 chip package of the preferred embodiment includes a substrate 1, a first semiconductor wafer 2, a second semiconductor wafer 3, and a protective layer 5. Is the same as described in the fifth preferred embodiment The detailed description thereof will not be repeated here. 9. The first semiconductor wafer 2 and the second semiconductor wafer 3 are the same as those shown in the second embodiment and are in the second The same form as described in the preferred embodiment is stacked and disposed on the substrate, and therefore, a detailed description thereof will not be repeated here. The insulating protective layer 5 is formed on the upper surface 1 of the substrate ( The upper layer may cover the semiconductor wafers 2 and 3. 2. The twentieth drawing is a schematic side view showing a stacked semiconductor chip package of the tenth preferred embodiment of the present invention. Different Embodiments The present preferred embodiment includes four semiconductor wafers arranged in a stack. In summary, the "low profile stacked semiconductor wafer cracker" of the present invention can be constructed by the above disclosed structure and device. 'To achieve the intended purpose 17 1292178 and efficacy, and not seen in the publication before the application is also not publicly available, in line with the invention, the benefits of novelty, progress and other requirements. - However, the above drawings and descriptions are only the implementation of the present invention. Example - already, non The embodiments of the present invention are defined; those who are familiar with the art, and other equivalent changes or modifications made by the present invention within the scope of the present invention should be covered by the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 to FIG. 4 are schematic diagrams showing a stacked semiconductor chip package of a first preferred embodiment of the present invention; FIG. 5 to 8 are a second preferred embodiment of the present invention. A schematic diagram of a stacked semiconductor wafer package; and ninth and tenth views are schematic views showing a stacked, semiconductor semiconductor package of a third preferred embodiment of the present invention; 14 is a schematic view showing a stacked semiconductor chip package of a fourth preferred embodiment of the present invention. FIG. 15 is a stacked semiconductor chip package showing a fifth preferred embodiment of the present invention. Figure 16 is a schematic side view showing a stacked semiconductor chip package of a sixth preferred embodiment of the present invention; A schematic side view of a stacked semiconductor chip package of a seventh preferred embodiment; FIG. 18 is a schematic side view of a stacked semiconductor chip package of the eighth preferred embodiment of the present invention; Figure 19 is a stack 18 showing a ninth preferred embodiment of the present invention.

Claims (1)

1292178 十、申請專利範圍： 、1.一種堆疊式半導體晶片封裝體，包含： 一第一半導體晶片，其具有一個上表面、一個下表 面、及數個安裝於該下表面上的外部連接導電體，於該 5 第一半導體晶片的上表面和下表面上是分別佈設有數條 導電金屬線，於該第一半導體晶片之下表面上的每條導 電金屬線是與一對應的外部連接導電體電氣連接； 一第二半導體晶片，其具有一個下表面及數個安裝 於該下表面上的外部連接導電體，該第二半導體晶片安 10 裝於該第一半導體晶片的上表面上以致於該第二半導體 晶片的外部連接導電體是與在該第一半導體晶片之上表 面上之對應的導電金屬線電氣連接；及 數個導電金屬元件，每個導電金屬元件電氣連接在 9 . 該第一半導體晶片之上表面|之一對應的導電金屬線和 15 在該第一半導體晶片之下表面上之一對應的導電金屬 線。 2.如申請專利範圍第1項所述之堆疊式半導體晶片封裝 體，更包含形成於該第二半導體晶片之上表面上的導電 金屬線。 20 3. —種堆疊式半導體晶片封裝體，包含： 一第一半導體晶片，其具有一個上表面、一個下表 面、及數條分別佈設於該上表面和下表面上的導電金屬 線； 一第二半導體晶片，其具有一個下表面及數個安裝 20 1292178 於該下表面上的外部 51292178 X. Patent Application Range: 1. A stacked semiconductor chip package comprising: a first semiconductor wafer having an upper surface, a lower surface, and a plurality of external connection conductors mounted on the lower surface On the upper surface and the lower surface of the fifth semiconductor wafer, a plurality of conductive metal wires are respectively disposed, and each of the conductive metal wires on the lower surface of the first semiconductor wafer is electrically connected to a corresponding external connection conductor. a second semiconductor wafer having a lower surface and a plurality of external connection conductors mounted on the lower surface, the second semiconductor wafer 10 being mounted on the upper surface of the first semiconductor wafer such that the second semiconductor wafer The external connection conductors of the two semiconductor wafers are electrically connected to corresponding conductive metal lines on the upper surface of the first semiconductor wafer; and a plurality of conductive metal elements each electrically connected at 9. The first semiconductor One of the upper surface of the wafer|corresponding to the conductive metal line and 15 corresponding to one of the lower surfaces of the first semiconductor wafer Conductive metal wire. 2. The stacked semiconductor chip package of claim 1, further comprising a conductive metal line formed on an upper surface of the second semiconductor wafer. 20 — A stacked semiconductor chip package comprising: a first semiconductor wafer having an upper surface, a lower surface, and a plurality of conductive metal lines respectively disposed on the upper surface and the lower surface; a semiconductor wafer having a lower surface and a plurality of outer portions of the mounting surface 20 1292178 裝於該第-半導體a接導電體’該第二半導體晶片安 晶片的外部連接導^的上表面上以致於該第二半導趙 面上之對應的導電J是與在該第一半導體晶片之上表 數個導電金Γ:線電氣連接;及 該第一半導體晶片ΓΓ每個導電金屬元件電氣連接在 + 4筮一 t 上表面上之一對應的導電金屬線和 、導體日曰片之下表面上之一對應的導電金屬線 ^ Μ 卜部電路電氣連接的外部電路連接 部0 10 4•如申請專利範圍第3項所述之堆疊式半導體晶片封裝 體’更包含形成於該第二半導體晶片之上表面上的導電 金屬線。 5.一種堆叠式半導體晶片封裝體，包含： 第半導體晶片，其具有一個上表面、一個下表 15Mounted on the upper surface of the external connection of the second semiconductor wafer to the first semiconductor wafer, so that the corresponding conductive J on the second semiconductor surface is opposite to the first semiconductor wafer a plurality of conductive gold wires on the upper surface: wire electrical connection; and the first semiconductor wafer ΓΓ each conductive metal component is electrically connected to a conductive metal wire corresponding to one of the upper surfaces of the + 4 筮 t A corresponding one of the conductive metal wires on the lower surface is electrically connected to the external circuit of the circuit. The stacked semiconductor chip package of the third aspect of the invention is further included in the second semiconductor. a conductive metal line on the upper surface of the wafer. A stacked semiconductor chip package comprising: a semiconductor wafer having an upper surface and a lower surface 15 第-半導體晶#的上表面和下表面上是分別佈設有數條 導電金屬線’於該第-半導體晶片之下表面上的每條導 電金>1線是與-對應的外部連接導f體電氣連接 ，該第 -半導體晶片更具有數個沿著其之邊緣設置之用於把在 20 該上表面上之導電金屬線電氣連接至在該下表面上之對 應之導電金屬線的導電半圓形孔；及 一第一半導體晶片，其具有一個下表面及數個安裝 於該下表面上的外部連接導電體，該第二半導體晶片安 裝於該第一半導體晶片的上表面上以致於該第二半導體 21 1292178 晶片的外部連接導電體是與在該第一半導體晶片之上表 ' 面上之對應的導電金屬線電氣連接。 6·如申請專利範圍第5項所述之堆疊式半導體晶片封裝 體，更包含形成於該第二半導體晶片之上表面上的導電 5 金屬線。 7· —種堆疊式半導體晶片封裝體，包含： 一基板，該基板具有一個上表面、一個下表面、一個 矩形的容納穿孔、及數個貫穿該上和下表面的電鍍貫/ 孔’於該上表面和下表面上是分卿成有數條導電金屬 10 連線’每條導電金屬連線是自-對應的電鍵貫孔延伸到 界定該容納穿孔之四個孔壁中之一者附近； -第-半導體晶片，其具有一個上表面、一個下表 面、及數個安裝於該下表面上的外部連接導電體，於該 第-半導體晶#的上表面和下表面±是分別佈設有數條 15導電金屬線，於該第-半導體晶片之下表面上的每條導 電金屬線是與-對應的外部連接導電體電氣連接，該第 半導υ τξ：*裝於該基板的容納穿孔内以致於在該 第半導體曰曰片之上表面上的每一條導電金屬連線是齊 纟祕板之上表Φ上之—對應的導電金屬連線銜接而在 20該第一半導體晶片之下表面上的每一條導電金屬連線是 與在該基板之下表面上之—對應的導電金屬連線銜接； -第一半導體晶片，其具有一個下表面及數個安裝 m表面上的外部連接導電體，該第二半導體晶片安 裝於該第半導體晶㈣上表面上以致於該第二半導體 22 1292178 晶片的外部連接導電體是與在該第—半導體晶片之上表 面上之對應的導電金屬線電氣連接；及 數個用於把在該第-半導體晶片之上和下表面上之 導電金屬連線電氣連接至在該基板之上和下表面上之對 5 應之導電金屬連線的導電金屬元件。 8.如中請專利範圍第7項所述之堆疊式半導體晶片封裝 體，其中，該等導電金屬元件是為導電金屬勝。 9·如中請專利範圍第7項所述之堆#式半導體晶片封裝 體’更包含形成於該第二半導體晶片之上表面上的導電 10 金屬線。 10·如申請專利範圍第！項所述之堆疊式半導體晶片封裝 帛，更包含-個安裝基板，該安裝基板具有—個上表面、 #下表面、數個貫穿該上和下表面的電錄貫孔、及數 個^置於該基板之下表Φ上的外部連接導電體，於該安 15 裝基板之上表面上是形成有數條自_對應之電鐘貫孔延 伸到預疋之位置的導電金屬連線，於該安裝基板之下 表面上疋形成有數條自一對應之電锻貫孔延伸到一對應 之外部連接導電體俾可與該對應的外部連接導電體電氣 連接的導電金屬連線，該第一半導體晶片是設置於該安 20 裝基板的上表面上以致於該第一半導體晶片的外部連接 導電體是與在該安裝基板之上表面上之對應的導電金屬 連線電氣連接。 11·如申請專利範圍第5項所述之堆疊式半導體晶片封裝 體，更包含一個安裝基板，該安裝基板具有一個上表面、 23 1292178 …-個下表面、數個貫穿該上和下表面的電鍍貫孔、及數 個設置於該基板之下表面上的外部連接導電體，於該安 裝基板之上表面上㈣成有數條自—對應之電鑛貫孔延 伸到-預定之位置的導電金屬連線，於該安裝基板之下 5 表面上是形成有數條自—對應之電錄貫孔延伸到一對應 之外部連接導電體俾可與該對應的外部連接導電體電氣 連接的導電金屬連線，該第—半導體晶片是設置於該安 裝基板的上表面上以致於該第—半導體晶片的外部連接 導電Hi在該安裝基板之上表面上之對躺導電金屬 10 連線電氣連接。 12·如申請專利範圍第7項所述之堆疊式半導體晶片封裝 體，更包含一個安裝基板，該安裝基板具有一個上表面、 一個下表面、數個貫穿該上和下表面的電鍍貫孔、及數 個設置於該基板之下表面上的外部連接導電體，於該安 15 裝基板之上表面上是形成有數條自一對應之電鍍貫孔延 伸到一預定之位置的導電金屬連線，於該安裝基板之下 表面上是形成有數條自一對應之電鍍貫孔延伸到一對應 之外部連接導電體俾可與該對應的外部連接導電體電氣 連接的導電金屬連線，該第一半導體晶片是設置於該安 20 裝基板的上表面上以致於該第一半導體晶片的外部連接 導電體是與在該安裝基板之上表面上之對應的導電金屬 連線電氣連接。 24On the upper surface and the lower surface of the first semiconductor crystal # are a plurality of conductive metal wires respectively disposed on the lower surface of the first semiconductor wafer, and each of the conductive golds is a corresponding external connection body. Electrically connected, the first semiconductor wafer further has a plurality of conductive semicircles disposed along an edge thereof for electrically connecting the conductive metal wires on the upper surface to corresponding conductive wires on the lower surface And a first semiconductor wafer having a lower surface and a plurality of external connection conductors mounted on the lower surface, the second semiconductor wafer being mounted on the upper surface of the first semiconductor wafer such that the first The external connection conductor of the second semiconductor 21 1292178 wafer is electrically connected to a corresponding conductive metal line on the surface of the first semiconductor wafer. 6. The stacked semiconductor chip package of claim 5, further comprising a conductive 5 metal line formed on an upper surface of the second semiconductor wafer. 7. A stacked semiconductor chip package comprising: a substrate having an upper surface, a lower surface, a rectangular receiving through hole, and a plurality of plating holes/holes extending through the upper and lower surfaces The upper surface and the lower surface are divided into a plurality of conductive metal 10 wires. Each of the conductive metal wires extends from the corresponding-corresponding pin hole to one of the four hole walls defining the receiving hole; a semiconductor wafer having an upper surface, a lower surface, and a plurality of external connection conductors mounted on the lower surface, wherein the upper and lower surfaces of the first semiconductor wafer # are respectively provided with a plurality of 15 conductive metals a wire, each of the conductive metal lines on the lower surface of the first semiconductor wafer is electrically connected to a corresponding external connection conductor, the first semiconductor υ ξ: * is mounted in the receiving hole of the substrate so that Each of the conductive metal wires on the upper surface of the semiconductor wafer is on the upper surface of the top plate Φ - the corresponding conductive metal wire is bonded to the lower surface of the first semiconductor wafer Each of the conductive metal wires is connected to a corresponding conductive metal wire on a lower surface of the substrate; - a first semiconductor wafer having a lower surface and a plurality of external connection conductors on the surface of the mounting m, Mounting a second semiconductor wafer on the upper surface of the semiconductor substrate (4) such that the external connection conductor of the second semiconductor 22 1292178 is electrically connected to a corresponding conductive metal line on the upper surface of the first semiconductor wafer; A plurality of electrically conductive metal members for electrically connecting the conductive metal wires on the upper and lower surfaces of the first semiconductor wafer to the pair of conductive metal wires on the upper and lower surfaces of the substrate. 8. The stacked semiconductor chip package of claim 7, wherein the conductive metal component is a conductive metal. 9. The stack-type semiconductor chip package of claim 7 further comprising a conductive 10 metal line formed on an upper surface of the second semiconductor wafer. 10. If you apply for a patent scope! The stacked semiconductor chip package further includes a mounting substrate having an upper surface, a #lower surface, a plurality of electrical recording through holes extending through the upper and lower surfaces, and a plurality of mounting holes An external connection conductor on the surface Φ of the substrate, on the upper surface of the mounting substrate, a plurality of conductive metal wires formed from the corresponding electric clock holes extending to the pre-turn position. The lower surface of the mounting substrate is formed with a plurality of electrically conductive metal wires extending from a corresponding electric forging hole to a corresponding external connection conductor and electrically connectable to the corresponding external connection conductor, the first semiconductor wafer And being disposed on the upper surface of the mounting substrate such that the external connection conductor of the first semiconductor wafer is electrically connected to the corresponding conductive metal wiring on the upper surface of the mounting substrate. The stacked semiconductor chip package of claim 5, further comprising a mounting substrate having an upper surface, 23 1292178 ... a lower surface, and a plurality of through the upper and lower surfaces a plated through hole, and a plurality of external connecting conductors disposed on a lower surface of the substrate, and on the upper surface of the mounting substrate, a plurality of conductive metals extending from the corresponding electro-permeability through holes to a predetermined position Connecting, on the surface of the lower surface of the mounting substrate 5, a plurality of self-corresponding galvanic vias extend to a corresponding external connection conductor, and a conductive metal connection electrically connectable to the corresponding external connection conductor The first semiconductor wafer is disposed on the upper surface of the mounting substrate such that the external connection of the first semiconductor wafer is electrically connected to the electrically conductive metal 10 on the upper surface of the mounting substrate. 12. The stacked semiconductor chip package of claim 7, further comprising a mounting substrate having an upper surface, a lower surface, and a plurality of plated through holes extending through the upper and lower surfaces, And a plurality of external connecting conductors disposed on the lower surface of the substrate, wherein the surface of the mounting substrate is formed with a plurality of conductive metal wires extending from a corresponding plating through hole to a predetermined position. On the lower surface of the mounting substrate, a plurality of conductive metal wires extending from a corresponding plated through hole to a corresponding external connection conductor and electrically connectable to the corresponding external connection conductor are formed. The first semiconductor The wafer is disposed on the upper surface of the mounting substrate such that the external connection conductor of the first semiconductor wafer is electrically connected to a corresponding conductive metal wiring on the upper surface of the mounting substrate. twenty four
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