CN102792130A - 流量传感器及流量检测装置 - Google Patents

流量传感器及流量检测装置 Download PDF

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Publication number
CN102792130A
CN102792130A CN2010800654299A CN201080065429A CN102792130A CN 102792130 A CN102792130 A CN 102792130A CN 2010800654299 A CN2010800654299 A CN 2010800654299A CN 201080065429 A CN201080065429 A CN 201080065429A CN 102792130 A CN102792130 A CN 102792130A
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CN
China
Prior art keywords
flow
diaphragm
sensor
flow sensor
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800654299A
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English (en)
Chinese (zh)
Inventor
椛泽康成
大冈二郎
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KIKUIKE MANUFACTURING Co Ltd
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KIKUIKE MANUFACTURING Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIKUIKE MANUFACTURING Co Ltd filed Critical KIKUIKE MANUFACTURING Co Ltd
Publication of CN102792130A publication Critical patent/CN102792130A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/46—Pitot tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/14—Casings, e.g. of special material

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
CN2010800654299A 2010-03-30 2010-09-16 流量传感器及流量检测装置 Pending CN102792130A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010077699A JP4979788B2 (ja) 2010-03-30 2010-03-30 流量センサーおよび流量検出装置
JP2010-077699 2010-03-30
PCT/JP2010/005658 WO2011121680A1 (ja) 2010-03-30 2010-09-16 流量センサーおよび流量検出装置

Publications (1)

Publication Number Publication Date
CN102792130A true CN102792130A (zh) 2012-11-21

Family

ID=44711477

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800654299A Pending CN102792130A (zh) 2010-03-30 2010-09-16 流量传感器及流量检测装置

Country Status (7)

Country Link
US (1) US20130008263A1 (https=)
EP (1) EP2554952A4 (https=)
JP (1) JP4979788B2 (https=)
KR (1) KR101358698B1 (https=)
CN (1) CN102792130A (https=)
CA (1) CA2794467A1 (https=)
WO (1) WO2011121680A1 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
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CN108254031A (zh) * 2017-12-28 2018-07-06 上海工程技术大学 压差式气体微流量传感器及其制作方法
CN109579928A (zh) * 2018-11-23 2019-04-05 北京控制工程研究所 一种热式微流量测量传感器流道及密封结构
CN111551759A (zh) * 2020-04-13 2020-08-18 中国电子科技集团公司第四十九研究所 一种用于热膜式风速传感器单元的测试夹具
CN111927751A (zh) * 2020-07-14 2020-11-13 西安交通大学 一种隔膜压缩机膜片位移无损监测系统及方法
CN114729829A (zh) * 2019-11-14 2022-07-08 日立安斯泰莫株式会社 物理量检测装置
CN114945806A (zh) * 2019-10-21 2022-08-26 弗卢斯索有限公司 传感器组件

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JP6252241B2 (ja) 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
JP6548067B2 (ja) * 2014-05-02 2019-07-24 国立大学法人 東京大学 ジャイロセンサ
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JP6760253B2 (ja) * 2017-07-24 2020-09-23 株式会社デンソー 物理量計測装置及び物理量計測装置の製造方法
WO2019023309A1 (en) 2017-07-25 2019-01-31 Nextinput, Inc. FORCE SENSOR AND INTEGRATED FINGERPRINTS
WO2019023552A1 (en) 2017-07-27 2019-01-31 Nextinput, Inc. PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME
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US11300535B2 (en) * 2019-04-05 2022-04-12 Honeywell International Inc. Integrated sensor apparatus with pressure sensing element and flow sensing element
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TWI720878B (zh) * 2020-04-24 2021-03-01 研能科技股份有限公司 致動傳感模組
CN112729426B (zh) * 2020-12-25 2021-08-27 江苏海讯环境技术有限公司 一种烟气流量流速监控系统
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CN116296358B (zh) * 2023-05-22 2024-02-20 四川弥韧科技有限公司 一种自闭阀自动检测设备及检测方法
US20240390568A1 (en) * 2023-05-25 2024-11-28 Honeywell International Inc. Devices for delivering at least one flowing media, associated sensor modules, and associated methods of mechanically and electrically coupling a sensor module to a device for delivering at least one flowing media
CN116399578B (zh) * 2023-06-07 2023-08-25 宁波瑞丰汽车零部件有限公司 减震器活塞主体的流量检测装置
KR102794902B1 (ko) 2023-08-18 2025-04-10 (주)한울인텍스 다배관 유량 측정 시스템
KR102611068B1 (ko) 2023-08-18 2023-12-06 (주)한울인텍스 온도센서 일체형 차압식 유량계
CN118960873B (zh) * 2024-10-17 2024-12-27 上海芯龙半导体技术股份有限公司 进风量监测传感器

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108254031A (zh) * 2017-12-28 2018-07-06 上海工程技术大学 压差式气体微流量传感器及其制作方法
CN109579928A (zh) * 2018-11-23 2019-04-05 北京控制工程研究所 一种热式微流量测量传感器流道及密封结构
CN114945806A (zh) * 2019-10-21 2022-08-26 弗卢斯索有限公司 传感器组件
CN114729829A (zh) * 2019-11-14 2022-07-08 日立安斯泰莫株式会社 物理量检测装置
CN111551759A (zh) * 2020-04-13 2020-08-18 中国电子科技集团公司第四十九研究所 一种用于热膜式风速传感器单元的测试夹具
CN111927751A (zh) * 2020-07-14 2020-11-13 西安交通大学 一种隔膜压缩机膜片位移无损监测系统及方法
CN111927751B (zh) * 2020-07-14 2021-07-02 西安交通大学 一种隔膜压缩机膜片位移无损监测系统及方法

Also Published As

Publication number Publication date
WO2011121680A1 (ja) 2011-10-06
CA2794467A1 (en) 2011-10-06
JP2011209130A (ja) 2011-10-20
US20130008263A1 (en) 2013-01-10
EP2554952A1 (en) 2013-02-06
EP2554952A4 (en) 2014-06-18
JP4979788B2 (ja) 2012-07-18
KR20130038805A (ko) 2013-04-18
KR101358698B1 (ko) 2014-02-07

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Application publication date: 20121121