KR101319250B1 - 진공 라인 및 이를 모니터링 하기 위한 방법 - Google Patents

진공 라인 및 이를 모니터링 하기 위한 방법 Download PDF

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Publication number
KR101319250B1
KR101319250B1 KR1020087002832A KR20087002832A KR101319250B1 KR 101319250 B1 KR101319250 B1 KR 101319250B1 KR 1020087002832 A KR1020087002832 A KR 1020087002832A KR 20087002832 A KR20087002832 A KR 20087002832A KR 101319250 B1 KR101319250 B1 KR 101319250B1
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South Korea
Prior art keywords
motor
measuring
vacuum line
exhaust system
parameters associated
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Expired - Fee Related
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KR1020087002832A
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English (en)
Korean (ko)
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KR20080031048A (ko
Inventor
니꼴라스 베꾸
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아딕슨 배큠 프로덕츠
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Application filed by 아딕슨 배큠 프로덕츠 filed Critical 아딕슨 배큠 프로덕츠
Publication of KR20080031048A publication Critical patent/KR20080031048A/ko
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Publication of KR101319250B1 publication Critical patent/KR101319250B1/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/03—Torque
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
KR1020087002832A 2005-07-04 2006-07-04 진공 라인 및 이를 모니터링 하기 위한 방법 Expired - Fee Related KR101319250B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0552027 2005-07-04
FR0552027A FR2887938A1 (fr) 2005-07-04 2005-07-04 Ligne de vide et procede de surveillance d'une telle ligne
PCT/FR2006/050673 WO2007003862A2 (fr) 2005-07-04 2006-07-04 Ligne de vide et procédé de surveillance d'une telle ligne

Publications (2)

Publication Number Publication Date
KR20080031048A KR20080031048A (ko) 2008-04-07
KR101319250B1 true KR101319250B1 (ko) 2013-10-18

Family

ID=36046932

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087002832A Expired - Fee Related KR101319250B1 (ko) 2005-07-04 2006-07-04 진공 라인 및 이를 모니터링 하기 위한 방법

Country Status (9)

Country Link
US (1) US7543492B2 (https=)
EP (1) EP1754888B1 (https=)
JP (1) JP5053269B2 (https=)
KR (1) KR101319250B1 (https=)
CN (1) CN101213371B (https=)
AT (1) ATE428051T1 (https=)
DE (1) DE602006006122D1 (https=)
FR (1) FR2887938A1 (https=)
WO (1) WO2007003862A2 (https=)

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KR100885919B1 (ko) * 2007-05-21 2009-02-26 삼성전자주식회사 펌프 폴트 예측 장치 및 펌프 폴트 예측 방법
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
FR2947309A1 (fr) 2009-06-26 2010-12-31 Alcatel Lucent Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe
CN102121470B (zh) * 2010-01-08 2013-06-19 中芯国际集成电路制造(上海)有限公司 监测真空泵失效的装置和方法、真空度感测器
JP5767632B2 (ja) * 2010-05-21 2015-08-19 エドワーズ株式会社 排気ポンプの堆積物検知装置と、該装置を備えた排気ポンプ
US9782852B2 (en) 2010-07-16 2017-10-10 Hypertherm, Inc. Plasma torch with LCD display with settings adjustment and fault diagnosis
US10455682B2 (en) 2012-04-04 2019-10-22 Hypertherm, Inc. Optimization and control of material processing using a thermal processing torch
US9481050B2 (en) 2013-07-24 2016-11-01 Hypertherm, Inc. Plasma arc cutting system and persona selection process
US10486260B2 (en) 2012-04-04 2019-11-26 Hypertherm, Inc. Systems, methods, and devices for transmitting information to thermal processing systems
KR101597008B1 (ko) * 2010-08-05 2016-02-23 가부시키가이샤 에바라 세이사꾸쇼 배기 시스템
JP5504107B2 (ja) * 2010-09-06 2014-05-28 エドワーズ株式会社 逆流防止システム及び該逆流防止システムを備えた真空ポンプ
JP5848044B2 (ja) * 2011-06-30 2016-01-27 株式会社ユーシン精機 成形品取出機
KR101319657B1 (ko) * 2011-09-30 2013-10-17 삼성전기주식회사 부품 계수 장치
US20150332071A1 (en) 2012-04-04 2015-11-19 Hypertherm, Inc. Configuring Signal Devices in Thermal Processing Systems
US9672460B2 (en) 2012-04-04 2017-06-06 Hypertherm, Inc. Configuring signal devices in thermal processing systems
US9737954B2 (en) 2012-04-04 2017-08-22 Hypertherm, Inc. Automatically sensing consumable components in thermal processing systems
US11783138B2 (en) 2012-04-04 2023-10-10 Hypertherm, Inc. Configuring signal devices in thermal processing systems
US9395715B2 (en) 2012-04-04 2016-07-19 Hypertherm, Inc. Identifying components in a material processing system
US9144882B2 (en) * 2012-04-04 2015-09-29 Hypertherm, Inc. Identifying liquid jet cutting system components
WO2015134966A1 (en) 2014-03-07 2015-09-11 Hypertherm, Inc. Liquid pressurization pump and systems with data storage
US12521905B2 (en) 2014-03-07 2026-01-13 Hypertherm, Inc. Liquid pressurization pump and systems with data storage
US10786924B2 (en) 2014-03-07 2020-09-29 Hypertherm, Inc. Waterjet cutting head temperature sensor
US20150269603A1 (en) 2014-03-19 2015-09-24 Hypertherm, Inc. Methods for Developing Customer Loyalty Programs and Related Systems and Devices
CN104676177A (zh) * 2015-01-29 2015-06-03 江苏广通管业制造有限公司 一种新型航空真空弯头
FR3067069B1 (fr) 2017-06-06 2019-08-02 Pfeiffer Vacuum Procede de surveillance d'un etat de fonctionnement d'un dispositif de pompage
JP6804029B2 (ja) 2017-12-21 2020-12-23 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法及びプログラム
CN112955840B (zh) * 2018-09-12 2025-04-25 Abb瑞士股份有限公司 用于监测气体分析仪的样品处置系统的状况的方法和系统
CN111043007B (zh) * 2019-12-30 2024-06-21 东莞市天美新自动化设备有限公司 跟踪步进式多级抽真空系统
JP7374015B2 (ja) * 2020-02-21 2023-11-06 エドワーズ株式会社 真空ポンプ、除害装置、および排気ガス処理システム

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US20030158705A1 (en) * 2001-08-31 2003-08-21 Ken Ishii Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
US20040143418A1 (en) * 2001-03-23 2004-07-22 Kabushiki Kaisha Toshiba Apparatus for predicting life of rotary machine and equipment using the same

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DE69528913T2 (de) * 1994-04-28 2003-09-04 Ebara Corp., Tokio/Tokyo Kryopumpe
US6178393B1 (en) * 1995-08-23 2001-01-23 William A. Irvin Pump station control system and method
US6260004B1 (en) * 1997-12-31 2001-07-10 Innovation Management Group, Inc. Method and apparatus for diagnosing a pump system
US20050091004A1 (en) * 1998-04-15 2005-04-28 Alexander G. Parlos System and method for condition assessment and end-of-life prediction
JP2000283056A (ja) * 1999-03-26 2000-10-10 Hitachi Ltd 真空ポンプ異常監視システム
JP3723866B2 (ja) * 2001-02-07 2005-12-07 株式会社日立製作所 インターナルポンプの性能監視方法及び装置
JP4149691B2 (ja) * 2001-08-31 2008-09-10 株式会社東芝 半導体製造装置用回転機の寿命予測方法及び半導体製造装置
JP4184638B2 (ja) * 2001-08-31 2008-11-19 株式会社東芝 半導体製造装置の寿命診断方法
GB0217494D0 (en) * 2002-07-29 2002-09-04 Boc Group Plc Conditioning monitoring of pumps and pump systems
JP3967245B2 (ja) * 2002-09-30 2007-08-29 株式会社東芝 回転機の寿命予測方法及び回転機を有する製造装置
US6868760B1 (en) * 2003-02-12 2005-03-22 Pratt-Read Corporation Tool locking mechanism
JP3923880B2 (ja) * 2002-09-30 2007-06-06 株式会社東芝 回転機の寿命予測システム、回転機の寿命予測方法及び回転機を有する製造装置
JP2004150340A (ja) * 2002-10-30 2004-05-27 Mitsubishi Heavy Ind Ltd ターボ分子ポンプおよびその故障予測方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040143418A1 (en) * 2001-03-23 2004-07-22 Kabushiki Kaisha Toshiba Apparatus for predicting life of rotary machine and equipment using the same
US20030158705A1 (en) * 2001-08-31 2003-08-21 Ken Ishii Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff

Also Published As

Publication number Publication date
CN101213371B (zh) 2011-06-15
ATE428051T1 (de) 2009-04-15
JP2008545088A (ja) 2008-12-11
KR20080031048A (ko) 2008-04-07
US7543492B2 (en) 2009-06-09
WO2007003862A2 (fr) 2007-01-11
CN101213371A (zh) 2008-07-02
EP1754888B1 (fr) 2009-04-08
FR2887938A1 (fr) 2007-01-05
EP1754888A1 (fr) 2007-02-21
US20070012099A1 (en) 2007-01-18
WO2007003862A3 (fr) 2007-03-08
DE602006006122D1 (de) 2009-05-20
JP5053269B2 (ja) 2012-10-17

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