JP4266802B2 - 真空ポンプの故障データ保存システム - Google Patents
真空ポンプの故障データ保存システム Download PDFInfo
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- JP4266802B2 JP4266802B2 JP2003418079A JP2003418079A JP4266802B2 JP 4266802 B2 JP4266802 B2 JP 4266802B2 JP 2003418079 A JP2003418079 A JP 2003418079A JP 2003418079 A JP2003418079 A JP 2003418079A JP 4266802 B2 JP4266802 B2 JP 4266802B2
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- vacuum pump
- failure
- storage system
- data
- data storage
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- 238000013500 data storage Methods 0.000 title claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 6
- 239000007795 chemical reaction product Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000012806 monitoring device Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
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- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
本発明の好ましい態様は、前記記録手段に保存された前記真空ポンプの故障発生直前の所定期間におけるデータを外部に送信する送信手段を備えたことを特徴とする。
2,20 制御部
3 真空ポンプ
4 CPU
5,30 記録装置
7 ワークエリア
8 セーブエリア
9 故障履歴エリア
10 通信ポート
Claims (5)
- 真空ポンプの運転状態を検知する少なくとも1つのセンサと、
前記真空ポンプの故障発生直前の所定期間における前記真空ポンプの運転状況をデータとして保存する記録手段と、
前記センサの出力から前記真空ポンプの故障を判断するCPUとを備え、
前記記録手段は、前記センサにより検知された前記真空ポンプの運転状況をデータとして一時的に保存するワークエリアと、前記真空ポンプの故障発生直前の所定期間における前記データを前記ワークエリアから取得して保存するセーブエリアとを備えることを特徴とする真空ポンプの故障データ保存システム。 - 前記CPUによって前記真空ポンプに故障が発生したと判断されたときに、前記ワークエリアに保存されている前記データを前記セーブエリアに自動的に送信することを特徴とする請求項1に記載の真空ポンプの故障データ保存システム。
- 前記ワークエリアに保存されるデータの保存履歴件数、保存期間、及び保存間隔は調整可能であることを特徴とする請求項1に記載の真空ポンプの故障データ保存システム。
- 前記記録手段に保存された前記真空ポンプの故障発生直前の所定期間におけるデータを外部に送信する送信手段を備えたことを特徴とする請求項1乃至3のいずれか1項に記載の真空ポンプの故障データ保存システム。
- 請求項1乃至4のいずれか1項に記載の故障データ保存システムを備えたことを特徴とする真空ポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003418079A JP4266802B2 (ja) | 2003-12-16 | 2003-12-16 | 真空ポンプの故障データ保存システム |
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JP2003418079A JP4266802B2 (ja) | 2003-12-16 | 2003-12-16 | 真空ポンプの故障データ保存システム |
Publications (2)
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JP2005180203A JP2005180203A (ja) | 2005-07-07 |
JP4266802B2 true JP4266802B2 (ja) | 2009-05-20 |
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JP2003418079A Expired - Lifetime JP4266802B2 (ja) | 2003-12-16 | 2003-12-16 | 真空ポンプの故障データ保存システム |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110173422A (zh) * | 2019-05-23 | 2019-08-27 | 国家电网有限公司 | 真空泵物联网在线监测系统、方法及终端设备 |
US20200109712A1 (en) * | 2017-03-17 | 2020-04-09 | Ebara Corporation | Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111706499B (zh) * | 2020-06-09 | 2022-03-01 | 成都数之联科技有限公司 | 一种真空泵的预测维护系统及方法及真空泵自动采购系统 |
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2003
- 2003-12-16 JP JP2003418079A patent/JP4266802B2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20200109712A1 (en) * | 2017-03-17 | 2020-04-09 | Ebara Corporation | Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method |
US11946470B2 (en) * | 2017-03-17 | 2024-04-02 | Ebara Corporation | Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method |
CN110173422A (zh) * | 2019-05-23 | 2019-08-27 | 国家电网有限公司 | 真空泵物联网在线监测系统、方法及终端设备 |
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JP2005180203A (ja) | 2005-07-07 |
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