FR2887938A1 - Ligne de vide et procede de surveillance d'une telle ligne - Google Patents

Ligne de vide et procede de surveillance d'une telle ligne Download PDF

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Publication number
FR2887938A1
FR2887938A1 FR0552027A FR0552027A FR2887938A1 FR 2887938 A1 FR2887938 A1 FR 2887938A1 FR 0552027 A FR0552027 A FR 0552027A FR 0552027 A FR0552027 A FR 0552027A FR 2887938 A1 FR2887938 A1 FR 2887938A1
Authority
FR
France
Prior art keywords
measuring
vacuum line
functional parameter
pump body
engine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR0552027A
Other languages
English (en)
French (fr)
Inventor
Nicolas Becourt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36046932&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2887938(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to FR0552027A priority Critical patent/FR2887938A1/fr
Application filed by Alcatel SA filed Critical Alcatel SA
Priority to DE602006006122T priority patent/DE602006006122D1/de
Priority to EP06116150A priority patent/EP1754888B1/fr
Priority to AT06116150T priority patent/ATE428051T1/de
Priority to US11/477,361 priority patent/US7543492B2/en
Priority to CN2006800241425A priority patent/CN101213371B/zh
Priority to JP2008518942A priority patent/JP5053269B2/ja
Priority to PCT/FR2006/050673 priority patent/WO2007003862A2/fr
Priority to KR1020087002832A priority patent/KR101319250B1/ko
Publication of FR2887938A1 publication Critical patent/FR2887938A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/03—Torque
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
FR0552027A 2005-07-04 2005-07-04 Ligne de vide et procede de surveillance d'une telle ligne Withdrawn FR2887938A1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0552027A FR2887938A1 (fr) 2005-07-04 2005-07-04 Ligne de vide et procede de surveillance d'une telle ligne
DE602006006122T DE602006006122D1 (de) 2005-07-04 2006-06-27 Vakuum-Pumpeinrichtung und Verfahren zur Lebensdauerüberwachung der Einrichtung
EP06116150A EP1754888B1 (fr) 2005-07-04 2006-06-27 Ligne de vide et procédé de surveillance d'une telle ligne
AT06116150T ATE428051T1 (de) 2005-07-04 2006-06-27 Vakuum-pumpeinrichtung und verfahren zur lebensdaueruberwachung der einrichtung
US11/477,361 US7543492B2 (en) 2005-07-04 2006-06-30 Vacuum line and a method of monitoring such a line
CN2006800241425A CN101213371B (zh) 2005-07-04 2006-07-04 真空管道及其监测方法
KR1020087002832A KR101319250B1 (ko) 2005-07-04 2006-07-04 진공 라인 및 이를 모니터링 하기 위한 방법
JP2008518942A JP5053269B2 (ja) 2005-07-04 2006-07-04 真空ラインおよびそれをモニタリングする方法
PCT/FR2006/050673 WO2007003862A2 (fr) 2005-07-04 2006-07-04 Ligne de vide et procédé de surveillance d'une telle ligne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0552027A FR2887938A1 (fr) 2005-07-04 2005-07-04 Ligne de vide et procede de surveillance d'une telle ligne

Publications (1)

Publication Number Publication Date
FR2887938A1 true FR2887938A1 (fr) 2007-01-05

Family

ID=36046932

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0552027A Withdrawn FR2887938A1 (fr) 2005-07-04 2005-07-04 Ligne de vide et procede de surveillance d'une telle ligne

Country Status (9)

Country Link
US (1) US7543492B2 (https=)
EP (1) EP1754888B1 (https=)
JP (1) JP5053269B2 (https=)
KR (1) KR101319250B1 (https=)
CN (1) CN101213371B (https=)
AT (1) ATE428051T1 (https=)
DE (1) DE602006006122D1 (https=)
FR (1) FR2887938A1 (https=)
WO (1) WO2007003862A2 (https=)

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KR100885919B1 (ko) * 2007-05-21 2009-02-26 삼성전자주식회사 펌프 폴트 예측 장치 및 펌프 폴트 예측 방법
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
FR2947309A1 (fr) 2009-06-26 2010-12-31 Alcatel Lucent Procede de prediction d'une defaillance de la rotation du rotor d'une pompe a vide et dispositif de pompage associe
CN102121470B (zh) * 2010-01-08 2013-06-19 中芯国际集成电路制造(上海)有限公司 监测真空泵失效的装置和方法、真空度感测器
JP5767632B2 (ja) * 2010-05-21 2015-08-19 エドワーズ株式会社 排気ポンプの堆積物検知装置と、該装置を備えた排気ポンプ
US9782852B2 (en) 2010-07-16 2017-10-10 Hypertherm, Inc. Plasma torch with LCD display with settings adjustment and fault diagnosis
US10455682B2 (en) 2012-04-04 2019-10-22 Hypertherm, Inc. Optimization and control of material processing using a thermal processing torch
US9481050B2 (en) 2013-07-24 2016-11-01 Hypertherm, Inc. Plasma arc cutting system and persona selection process
US10486260B2 (en) 2012-04-04 2019-11-26 Hypertherm, Inc. Systems, methods, and devices for transmitting information to thermal processing systems
KR101597008B1 (ko) * 2010-08-05 2016-02-23 가부시키가이샤 에바라 세이사꾸쇼 배기 시스템
JP5504107B2 (ja) * 2010-09-06 2014-05-28 エドワーズ株式会社 逆流防止システム及び該逆流防止システムを備えた真空ポンプ
JP5848044B2 (ja) * 2011-06-30 2016-01-27 株式会社ユーシン精機 成形品取出機
KR101319657B1 (ko) * 2011-09-30 2013-10-17 삼성전기주식회사 부품 계수 장치
US20150332071A1 (en) 2012-04-04 2015-11-19 Hypertherm, Inc. Configuring Signal Devices in Thermal Processing Systems
US9672460B2 (en) 2012-04-04 2017-06-06 Hypertherm, Inc. Configuring signal devices in thermal processing systems
US9737954B2 (en) 2012-04-04 2017-08-22 Hypertherm, Inc. Automatically sensing consumable components in thermal processing systems
US11783138B2 (en) 2012-04-04 2023-10-10 Hypertherm, Inc. Configuring signal devices in thermal processing systems
US9395715B2 (en) 2012-04-04 2016-07-19 Hypertherm, Inc. Identifying components in a material processing system
US9144882B2 (en) * 2012-04-04 2015-09-29 Hypertherm, Inc. Identifying liquid jet cutting system components
WO2015134966A1 (en) 2014-03-07 2015-09-11 Hypertherm, Inc. Liquid pressurization pump and systems with data storage
US12521905B2 (en) 2014-03-07 2026-01-13 Hypertherm, Inc. Liquid pressurization pump and systems with data storage
US10786924B2 (en) 2014-03-07 2020-09-29 Hypertherm, Inc. Waterjet cutting head temperature sensor
US20150269603A1 (en) 2014-03-19 2015-09-24 Hypertherm, Inc. Methods for Developing Customer Loyalty Programs and Related Systems and Devices
CN104676177A (zh) * 2015-01-29 2015-06-03 江苏广通管业制造有限公司 一种新型航空真空弯头
FR3067069B1 (fr) 2017-06-06 2019-08-02 Pfeiffer Vacuum Procede de surveillance d'un etat de fonctionnement d'un dispositif de pompage
JP6804029B2 (ja) 2017-12-21 2020-12-23 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法及びプログラム
CN112955840B (zh) * 2018-09-12 2025-04-25 Abb瑞士股份有限公司 用于监测气体分析仪的样品处置系统的状况的方法和系统
CN111043007B (zh) * 2019-12-30 2024-06-21 东莞市天美新自动化设备有限公司 跟踪步进式多级抽真空系统
JP7374015B2 (ja) * 2020-02-21 2023-11-06 エドワーズ株式会社 真空ポンプ、除害装置、および排気ガス処理システム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0918159A2 (en) * 1994-04-28 1999-05-26 Ebara Corporation Cryopump
US20030154052A1 (en) * 2001-08-31 2003-08-14 Shuichi Samata Method for diagnosing life of manufacturing equipment using rotary machine
US20030158705A1 (en) * 2001-08-31 2003-08-21 Ken Ishii Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
US20040143418A1 (en) * 2001-03-23 2004-07-22 Kabushiki Kaisha Toshiba Apparatus for predicting life of rotary machine and equipment using the same

Family Cites Families (11)

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US6178393B1 (en) * 1995-08-23 2001-01-23 William A. Irvin Pump station control system and method
US6260004B1 (en) * 1997-12-31 2001-07-10 Innovation Management Group, Inc. Method and apparatus for diagnosing a pump system
US20050091004A1 (en) * 1998-04-15 2005-04-28 Alexander G. Parlos System and method for condition assessment and end-of-life prediction
JP2000283056A (ja) * 1999-03-26 2000-10-10 Hitachi Ltd 真空ポンプ異常監視システム
JP3723866B2 (ja) * 2001-02-07 2005-12-07 株式会社日立製作所 インターナルポンプの性能監視方法及び装置
JP4149691B2 (ja) * 2001-08-31 2008-09-10 株式会社東芝 半導体製造装置用回転機の寿命予測方法及び半導体製造装置
GB0217494D0 (en) * 2002-07-29 2002-09-04 Boc Group Plc Conditioning monitoring of pumps and pump systems
JP3967245B2 (ja) * 2002-09-30 2007-08-29 株式会社東芝 回転機の寿命予測方法及び回転機を有する製造装置
US6868760B1 (en) * 2003-02-12 2005-03-22 Pratt-Read Corporation Tool locking mechanism
JP3923880B2 (ja) * 2002-09-30 2007-06-06 株式会社東芝 回転機の寿命予測システム、回転機の寿命予測方法及び回転機を有する製造装置
JP2004150340A (ja) * 2002-10-30 2004-05-27 Mitsubishi Heavy Ind Ltd ターボ分子ポンプおよびその故障予測方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0918159A2 (en) * 1994-04-28 1999-05-26 Ebara Corporation Cryopump
US20040143418A1 (en) * 2001-03-23 2004-07-22 Kabushiki Kaisha Toshiba Apparatus for predicting life of rotary machine and equipment using the same
US20030154052A1 (en) * 2001-08-31 2003-08-14 Shuichi Samata Method for diagnosing life of manufacturing equipment using rotary machine
US20030158705A1 (en) * 2001-08-31 2003-08-21 Ken Ishii Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff

Also Published As

Publication number Publication date
CN101213371B (zh) 2011-06-15
KR101319250B1 (ko) 2013-10-18
ATE428051T1 (de) 2009-04-15
JP2008545088A (ja) 2008-12-11
KR20080031048A (ko) 2008-04-07
US7543492B2 (en) 2009-06-09
WO2007003862A2 (fr) 2007-01-11
CN101213371A (zh) 2008-07-02
EP1754888B1 (fr) 2009-04-08
EP1754888A1 (fr) 2007-02-21
US20070012099A1 (en) 2007-01-18
WO2007003862A3 (fr) 2007-03-08
DE602006006122D1 (de) 2009-05-20
JP5053269B2 (ja) 2012-10-17

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Legal Events

Date Code Title Description
CD Change of name or company name
CA Change of address
TP Transmission of property

Owner name: ADIXEN VACUUM PRODUCTS, FR

Effective date: 20120709

ST Notification of lapse

Effective date: 20160331