DE69528913T2 - Kryopumpe - Google Patents

Kryopumpe

Info

Publication number
DE69528913T2
DE69528913T2 DE69528913T DE69528913T DE69528913T2 DE 69528913 T2 DE69528913 T2 DE 69528913T2 DE 69528913 T DE69528913 T DE 69528913T DE 69528913 T DE69528913 T DE 69528913T DE 69528913 T2 DE69528913 T2 DE 69528913T2
Authority
DE
Germany
Prior art keywords
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69528913T
Other languages
English (en)
Other versions
DE69528913D1 (de
Inventor
Nobuharu Noji
Junichi Hayakawa
Motoyasu Satoh
Hiroshi Aono
Tetsuo Komai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11463694A external-priority patent/JPH07293438A/ja
Priority claimed from JP22415394A external-priority patent/JPH0861232A/ja
Priority claimed from JP30298494A external-priority patent/JPH08135570A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69528913D1 publication Critical patent/DE69528913D1/de
Publication of DE69528913T2 publication Critical patent/DE69528913T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/10—Inlet temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps
DE69528913T 1994-04-28 1995-04-26 Kryopumpe Expired - Fee Related DE69528913T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11463694A JPH07293438A (ja) 1994-04-28 1994-04-28 クライオポンプ
JP22415394A JPH0861232A (ja) 1994-08-24 1994-08-24 クライオポンプの再生方法及び再生装置
JP30298494A JPH08135570A (ja) 1994-11-11 1994-11-11 クライオポンプ及びコールドトラップ

Publications (2)

Publication Number Publication Date
DE69528913D1 DE69528913D1 (de) 2003-01-02
DE69528913T2 true DE69528913T2 (de) 2003-09-04

Family

ID=27312783

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69515720T Expired - Fee Related DE69515720T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69531313T Expired - Fee Related DE69531313T2 (de) 1994-04-28 1995-04-26 Regeneration einer Kryopumpe
DE69528607T Expired - Fee Related DE69528607T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69528913T Expired - Fee Related DE69528913T2 (de) 1994-04-28 1995-04-26 Kryopumpe

Family Applications Before (3)

Application Number Title Priority Date Filing Date
DE69515720T Expired - Fee Related DE69515720T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69531313T Expired - Fee Related DE69531313T2 (de) 1994-04-28 1995-04-26 Regeneration einer Kryopumpe
DE69528607T Expired - Fee Related DE69528607T2 (de) 1994-04-28 1995-04-26 Kryopumpe

Country Status (4)

Country Link
US (1) US5582017A (de)
EP (4) EP0921311B1 (de)
KR (1) KR100360357B1 (de)
DE (4) DE69515720T2 (de)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
JPH10184541A (ja) * 1996-12-27 1998-07-14 Anelva Corp 真空排気装置
US5775109A (en) * 1997-01-02 1998-07-07 Helix Technology Corporation Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
US6272400B1 (en) 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
JP2000110735A (ja) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> ポンプ保護装置、ポンプ保護方法及びポンプ装置
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
US6327863B1 (en) 2000-05-05 2001-12-11 Helix Technology Corporation Cryopump with gate valve control
US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US6630411B1 (en) * 2002-05-07 2003-10-07 Lsi Logic Corporation Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber
US20030218400A1 (en) * 2002-05-24 2003-11-27 Rimmel Dennis L. Induction motor and method of providing axial flow in a submerged induction motor
US7107677B2 (en) * 2002-07-26 2006-09-19 Nikkiso Cyro, Incorporated Process, apparatus, and kit for assembling and disassembling a cryogenic pump
US6920763B2 (en) 2003-06-27 2005-07-26 Helix Technology Corporation Integration of automated cryopump safety purge
US6895766B2 (en) 2003-06-27 2005-05-24 Helix Technology Corporation Fail-safe cryopump safety purge delay
ATE404792T1 (de) 2003-06-27 2008-08-15 Helix Tech Corp Automatisierung der sicherheits-regenerierung bei einer kryopumpe
US8540493B2 (en) 2003-12-08 2013-09-24 Sta-Rite Industries, Llc Pump control system and method
US8602745B2 (en) 2004-08-26 2013-12-10 Pentair Water Pool And Spa, Inc. Anti-entrapment and anti-dead head function
US7845913B2 (en) 2004-08-26 2010-12-07 Pentair Water Pool And Spa, Inc. Flow control
US8019479B2 (en) 2004-08-26 2011-09-13 Pentair Water Pool And Spa, Inc. Control algorithm of variable speed pumping system
US8480373B2 (en) 2004-08-26 2013-07-09 Pentair Water Pool And Spa, Inc. Filter loading
US7874808B2 (en) 2004-08-26 2011-01-25 Pentair Water Pool And Spa, Inc. Variable speed pumping system and method
US8469675B2 (en) 2004-08-26 2013-06-25 Pentair Water Pool And Spa, Inc. Priming protection
US8043070B2 (en) 2004-08-26 2011-10-25 Pentair Water Pool And Spa, Inc. Speed control
US7686589B2 (en) 2004-08-26 2010-03-30 Pentair Water Pool And Spa, Inc. Pumping system with power optimization
US7412835B2 (en) * 2005-06-27 2008-08-19 Legall Edwin L Apparatus and method for controlling a cryocooler by adjusting cooler gas flow oscillating frequency
FR2887938A1 (fr) * 2005-07-04 2007-01-05 Alcatel Sa Ligne de vide et procede de surveillance d'une telle ligne
JP4150745B2 (ja) * 2006-05-02 2008-09-17 住友重機械工業株式会社 クライオポンプ及びその再生方法
WO2008094357A2 (en) * 2007-01-29 2008-08-07 Sumitomo Heavy Industries, Ltd. Expander speed control
US20100115971A1 (en) * 2007-07-23 2010-05-13 Sumitomo Heavy Industries, Ltd. Cryopump
JP4673904B2 (ja) * 2008-04-25 2011-04-20 住友重機械工業株式会社 コールドトラップ、及びコールドトラップの再生方法
JP4686572B2 (ja) * 2008-05-14 2011-05-25 住友重機械工業株式会社 クライオポンプ、真空排気システム、及びその診断方法
WO2010011403A2 (en) * 2008-05-21 2010-01-28 Brooks Automation, Inc. Linear drive cryogenic refrigerator
CN102171454B (zh) * 2008-09-30 2014-03-12 佳能安内华股份有限公司 真空抽吸系统、衬底处理设备、电子装置的制造方法和真空抽吸系统的操作方法
KR101279184B1 (ko) * 2008-09-30 2013-06-26 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
MX2011003708A (es) 2008-10-06 2011-06-16 Pentair Water Pool & Spa Inc Metodo para operar un sistema de seguridad para alivio de vacio.
US9556874B2 (en) 2009-06-09 2017-01-31 Pentair Flow Technologies, Llc Method of controlling a pump and motor
US8436559B2 (en) * 2009-06-09 2013-05-07 Sta-Rite Industries, Llc System and method for motor drive control pad and drive terminals
US8564233B2 (en) 2009-06-09 2013-10-22 Sta-Rite Industries, Llc Safety system and method for pump and motor
US20120060533A1 (en) * 2009-07-15 2012-03-15 Ulvac, Inc. Pressure reduction system and vacuum treatment device
JP4912438B2 (ja) * 2009-07-16 2012-04-11 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
US8657584B2 (en) * 2010-02-16 2014-02-25 Edwards Limited Apparatus and method for tuning pump speed
KR101342455B1 (ko) 2010-10-08 2013-12-17 스미토모 크라이어제닉스 오브 아메리카 인코포레이티드 고속 냉각 극저온 냉동기
CA2820887C (en) 2010-12-08 2019-10-22 Pentair Water Pool And Spa, Inc. Discharge vacuum relief valve for safety vacuum release system
DE102010055058A1 (de) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh Verfahren zum Belüften einer Vakuumpumpe und Anordnung mit einer Vakuumpumpe
JP5679910B2 (ja) 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5679913B2 (ja) * 2011-06-14 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプ監視方法
US9546647B2 (en) * 2011-07-06 2017-01-17 Sumitomo (Shi) Cryogenics Of America Inc. Gas balanced brayton cycle cold water vapor cryopump
JP5748682B2 (ja) * 2012-01-31 2015-07-15 住友重機械工業株式会社 コールドトラップおよびコールドトラップの制御方法
JP5808691B2 (ja) * 2012-02-23 2015-11-10 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
CN104662378B (zh) 2012-07-26 2016-11-23 住友(Shi)美国低温研究有限公司 布雷顿循环发动机
US9885360B2 (en) 2012-10-25 2018-02-06 Pentair Flow Technologies, Llc Battery backup sump pump systems and methods
JP6013886B2 (ja) * 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP6053551B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの運転方法
EP2972656A4 (de) * 2013-03-15 2017-01-18 Pentair Flow Technologies, LLC Verfahren zum steuern einer pumpe und eines motors
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
TWI580865B (zh) * 2013-03-25 2017-05-01 Sumitomo Heavy Industries Low temperature pump
JP6253464B2 (ja) 2014-03-18 2017-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
JP6351525B2 (ja) * 2015-03-04 2018-07-04 住友重機械工業株式会社 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
CN107850351B (zh) 2015-06-03 2020-08-07 住友(Shi)美国低温研究有限公司 具有缓冲器的气体平衡发动机
JP6615663B2 (ja) 2016-03-22 2019-12-04 住友重機械工業株式会社 クライオポンプ、クライオポンプ吸蔵ガス量推測装置及びクライオポンプ吸蔵ガス量推測方法
CN107524579A (zh) * 2017-09-26 2017-12-29 安徽万瑞冷电科技有限公司 一种低温泵
US11867163B2 (en) 2018-07-30 2024-01-09 Unicla International Limited Electric drive compressor system
KR102597865B1 (ko) 2018-09-03 2023-11-02 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프 및 크라이오펌프의 감시방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171359A (ja) * 1984-02-16 1985-09-04 ダイキン工業株式会社 極低温冷凍機
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3680335D1 (de) * 1986-06-23 1991-08-22 Leybold Ag Kryopumpe und verfahren zum betrieb dieser kryopumpe.
JPS6425976A (en) * 1987-07-20 1989-01-27 Tokuda Seisakusho Sputtering device
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
EP0336992A1 (de) * 1988-04-13 1989-10-18 Leybold Aktiengesellschaft Verfahren und Vorrichtung zur Überprüfung der Funktion einer refrigeratorbetriebenen Kryopumpe
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
KR930702618A (ko) * 1990-11-19 1993-09-09 하랄트 고트하르트 . 페터 좀머캄프 저온펌프를 재생시키는 방법 및 이 방법을 수행하기 위한 저온펌프
US5176004A (en) * 1991-06-18 1993-01-05 Helix Technology Corporation Electronically controlled cryopump and network interface
WO1993005859A1 (en) * 1991-09-19 1993-04-01 The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services Miniature cryosorption vacuum pump
US5231839A (en) * 1991-11-27 1993-08-03 Ebara Technologies Incorporated Methods and apparatus for cryogenic vacuum pumping with reduced contamination
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe

Also Published As

Publication number Publication date
KR100360357B1 (ko) 2003-02-05
US5582017A (en) 1996-12-10
DE69515720D1 (de) 2000-04-27
EP0921311A3 (de) 1999-06-30
KR950033087A (ko) 1995-12-22
EP0921311A2 (de) 1999-06-09
EP0919722A2 (de) 1999-06-02
EP0918159A3 (de) 1999-06-30
EP0684382B1 (de) 2000-03-22
DE69531313D1 (de) 2003-08-21
DE69531313T2 (de) 2004-05-13
DE69528607T2 (de) 2003-07-10
DE69515720T2 (de) 2000-11-16
DE69528913D1 (de) 2003-01-02
EP0921311B1 (de) 2002-10-16
EP0918159B1 (de) 2002-11-20
EP0919722B1 (de) 2003-07-16
DE69528607D1 (de) 2002-11-21
EP0919722A3 (de) 1999-06-30
EP0918159A2 (de) 1999-05-26
EP0684382A1 (de) 1995-11-29

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