DE69531313D1 - Regeneration einer Kryopumpe - Google Patents

Regeneration einer Kryopumpe

Info

Publication number
DE69531313D1
DE69531313D1 DE69531313T DE69531313T DE69531313D1 DE 69531313 D1 DE69531313 D1 DE 69531313D1 DE 69531313 T DE69531313 T DE 69531313T DE 69531313 T DE69531313 T DE 69531313T DE 69531313 D1 DE69531313 D1 DE 69531313D1
Authority
DE
Germany
Prior art keywords
cryopump
regeneration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69531313T
Other languages
English (en)
Other versions
DE69531313T2 (de
Inventor
Nobuharu Noji
Junichi Hayakawa
Motoyasu Satoh
Hiroshi Aono
Tetsuo Komai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11463694A external-priority patent/JPH07293438A/ja
Priority claimed from JP22415394A external-priority patent/JPH0861232A/ja
Priority claimed from JP30298494A external-priority patent/JPH08135570A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69531313D1 publication Critical patent/DE69531313D1/de
Application granted granted Critical
Publication of DE69531313T2 publication Critical patent/DE69531313T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/10—Inlet temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE69531313T 1994-04-28 1995-04-26 Regeneration einer Kryopumpe Expired - Fee Related DE69531313T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP11463694 1994-04-28
JP11463694A JPH07293438A (ja) 1994-04-28 1994-04-28 クライオポンプ
JP22415394 1994-08-24
JP22415394A JPH0861232A (ja) 1994-08-24 1994-08-24 クライオポンプの再生方法及び再生装置
JP30298494A JPH08135570A (ja) 1994-11-11 1994-11-11 クライオポンプ及びコールドトラップ
JP30298494 1994-11-11

Publications (2)

Publication Number Publication Date
DE69531313D1 true DE69531313D1 (de) 2003-08-21
DE69531313T2 DE69531313T2 (de) 2004-05-13

Family

ID=27312783

Family Applications (4)

Application Number Title Priority Date Filing Date
DE69515720T Expired - Fee Related DE69515720T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69528607T Expired - Fee Related DE69528607T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69531313T Expired - Fee Related DE69531313T2 (de) 1994-04-28 1995-04-26 Regeneration einer Kryopumpe
DE69528913T Expired - Fee Related DE69528913T2 (de) 1994-04-28 1995-04-26 Kryopumpe

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69515720T Expired - Fee Related DE69515720T2 (de) 1994-04-28 1995-04-26 Kryopumpe
DE69528607T Expired - Fee Related DE69528607T2 (de) 1994-04-28 1995-04-26 Kryopumpe

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69528913T Expired - Fee Related DE69528913T2 (de) 1994-04-28 1995-04-26 Kryopumpe

Country Status (4)

Country Link
US (1) US5582017A (de)
EP (4) EP0919722B1 (de)
KR (1) KR100360357B1 (de)
DE (4) DE69515720T2 (de)

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US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US6902378B2 (en) 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
JPH10184541A (ja) * 1996-12-27 1998-07-14 Anelva Corp 真空排気装置
US5775109A (en) * 1997-01-02 1998-07-07 Helix Technology Corporation Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
US6272400B1 (en) 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
JP2000110735A (ja) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> ポンプ保護装置、ポンプ保護方法及びポンプ装置
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
US6327863B1 (en) 2000-05-05 2001-12-11 Helix Technology Corporation Cryopump with gate valve control
US7127901B2 (en) 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US6630411B1 (en) * 2002-05-07 2003-10-07 Lsi Logic Corporation Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber
US20030218400A1 (en) * 2002-05-24 2003-11-27 Rimmel Dennis L. Induction motor and method of providing axial flow in a submerged induction motor
AU2003253222A1 (en) * 2002-07-26 2004-02-23 Nikkiso Cryo, Inc. Process and apparatus for assembling and disassembling a cryogenic pump
US6895766B2 (en) 2003-06-27 2005-05-24 Helix Technology Corporation Fail-safe cryopump safety purge delay
JP4691026B2 (ja) 2003-06-27 2011-06-01 ブルックス オートメーション インコーポレイテッド クライオポンプ自動安全パージの一体化
US6920763B2 (en) 2003-06-27 2005-07-26 Helix Technology Corporation Integration of automated cryopump safety purge
US8540493B2 (en) 2003-12-08 2013-09-24 Sta-Rite Industries, Llc Pump control system and method
US8469675B2 (en) 2004-08-26 2013-06-25 Pentair Water Pool And Spa, Inc. Priming protection
US7854597B2 (en) 2004-08-26 2010-12-21 Pentair Water Pool And Spa, Inc. Pumping system with two way communication
US8019479B2 (en) 2004-08-26 2011-09-13 Pentair Water Pool And Spa, Inc. Control algorithm of variable speed pumping system
US7845913B2 (en) 2004-08-26 2010-12-07 Pentair Water Pool And Spa, Inc. Flow control
US7874808B2 (en) 2004-08-26 2011-01-25 Pentair Water Pool And Spa, Inc. Variable speed pumping system and method
US8480373B2 (en) 2004-08-26 2013-07-09 Pentair Water Pool And Spa, Inc. Filter loading
US7686589B2 (en) 2004-08-26 2010-03-30 Pentair Water Pool And Spa, Inc. Pumping system with power optimization
US8602745B2 (en) 2004-08-26 2013-12-10 Pentair Water Pool And Spa, Inc. Anti-entrapment and anti-dead head function
US7412835B2 (en) 2005-06-27 2008-08-19 Legall Edwin L Apparatus and method for controlling a cryocooler by adjusting cooler gas flow oscillating frequency
FR2887938A1 (fr) * 2005-07-04 2007-01-05 Alcatel Sa Ligne de vide et procede de surveillance d'une telle ligne
JP4150745B2 (ja) * 2006-05-02 2008-09-17 住友重機械工業株式会社 クライオポンプ及びその再生方法
WO2008094357A2 (en) * 2007-01-29 2008-08-07 Sumitomo Heavy Industries, Ltd. Expander speed control
US20100115971A1 (en) * 2007-07-23 2010-05-13 Sumitomo Heavy Industries, Ltd. Cryopump
JP4673904B2 (ja) 2008-04-25 2011-04-20 住友重機械工業株式会社 コールドトラップ、及びコールドトラップの再生方法
JP4686572B2 (ja) * 2008-05-14 2011-05-25 住友重機械工業株式会社 クライオポンプ、真空排気システム、及びその診断方法
CN102099640B (zh) * 2008-05-21 2013-03-27 布鲁克机械公司 线性驱动低温冷冻机
KR101143800B1 (ko) * 2008-09-30 2012-05-11 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 기판 처리 장치, 전자 디바이스의 제조 방법, 진공 배기 시스템의 운전 방법
CN102165192B (zh) * 2008-09-30 2014-03-12 佳能安内华股份有限公司 真空排气系统、冷冻机、低温泵及其运转方法、以及基板处理装置
EP2342402B1 (de) 2008-10-06 2018-06-06 Pentair Water Pool and Spa, Inc. Verfahren für den betrieb eines sicherheitsvakuumablasssystems
US9556874B2 (en) 2009-06-09 2017-01-31 Pentair Flow Technologies, Llc Method of controlling a pump and motor
US8564233B2 (en) 2009-06-09 2013-10-22 Sta-Rite Industries, Llc Safety system and method for pump and motor
US8436559B2 (en) * 2009-06-09 2013-05-07 Sta-Rite Industries, Llc System and method for motor drive control pad and drive terminals
JP5466235B2 (ja) * 2009-07-15 2014-04-09 株式会社アルバック 減圧システム及び真空処理装置
JP4912438B2 (ja) * 2009-07-16 2012-04-11 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
US8657584B2 (en) * 2010-02-16 2014-02-25 Edwards Limited Apparatus and method for tuning pump speed
CN103261816B (zh) 2010-10-08 2015-11-25 住友美国低温学公司 快速降温的低温制冷机
BR112013014476A2 (pt) 2010-12-08 2016-09-20 Pentair Water Pool & Spa Inc válvula de descarga de alívio de vácuo para um sistema de segurança de liberação de vácuo
DE102010055058A1 (de) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh Verfahren zum Belüften einer Vakuumpumpe und Anordnung mit einer Vakuumpumpe
JP5679910B2 (ja) 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5679913B2 (ja) * 2011-06-14 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプ監視方法
US9546647B2 (en) * 2011-07-06 2017-01-17 Sumitomo (Shi) Cryogenics Of America Inc. Gas balanced brayton cycle cold water vapor cryopump
JP5748682B2 (ja) * 2012-01-31 2015-07-15 住友重機械工業株式会社 コールドトラップおよびコールドトラップの制御方法
JP5808691B2 (ja) * 2012-02-23 2015-11-10 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
US10677498B2 (en) 2012-07-26 2020-06-09 Sumitomo (Shi) Cryogenics Of America, Inc. Brayton cycle engine with high displacement rate and low vibration
US9885360B2 (en) 2012-10-25 2018-02-06 Pentair Flow Technologies, Llc Battery backup sump pump systems and methods
JP6013886B2 (ja) * 2012-11-13 2016-10-25 住友重機械工業株式会社 クライオポンプ
JP6053551B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの運転方法
EP2972656A4 (de) * 2013-03-15 2017-01-18 Pentair Flow Technologies, LLC Verfahren zum steuern einer pumpe und eines motors
JP6053588B2 (ja) 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
TWI580865B (zh) * 2013-03-25 2017-05-01 Sumitomo Heavy Industries Low temperature pump
JP6253464B2 (ja) * 2014-03-18 2017-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
JP6351525B2 (ja) * 2015-03-04 2018-07-04 住友重機械工業株式会社 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
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JP6615663B2 (ja) 2016-03-22 2019-12-04 住友重機械工業株式会社 クライオポンプ、クライオポンプ吸蔵ガス量推測装置及びクライオポンプ吸蔵ガス量推測方法
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Also Published As

Publication number Publication date
DE69528913T2 (de) 2003-09-04
EP0921311A2 (de) 1999-06-09
DE69528607T2 (de) 2003-07-10
KR950033087A (ko) 1995-12-22
DE69531313T2 (de) 2004-05-13
EP0918159B1 (de) 2002-11-20
EP0918159A2 (de) 1999-05-26
EP0921311A3 (de) 1999-06-30
EP0684382B1 (de) 2000-03-22
EP0921311B1 (de) 2002-10-16
DE69515720T2 (de) 2000-11-16
EP0919722A2 (de) 1999-06-02
EP0684382A1 (de) 1995-11-29
EP0919722B1 (de) 2003-07-16
EP0918159A3 (de) 1999-06-30
EP0919722A3 (de) 1999-06-30
DE69528607D1 (de) 2002-11-21
KR100360357B1 (ko) 2003-02-05
US5582017A (en) 1996-12-10
DE69515720D1 (de) 2000-04-27
DE69528913D1 (de) 2003-01-02

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee