KR101308784B1 - 소형 폼 팩터를 갖는 펌프용 시스템 및 방법 - Google Patents
소형 폼 팩터를 갖는 펌프용 시스템 및 방법 Download PDFInfo
- Publication number
- KR101308784B1 KR101308784B1 KR1020087013326A KR20087013326A KR101308784B1 KR 101308784 B1 KR101308784 B1 KR 101308784B1 KR 1020087013326 A KR1020087013326 A KR 1020087013326A KR 20087013326 A KR20087013326 A KR 20087013326A KR 101308784 B1 KR101308784 B1 KR 101308784B1
- Authority
- KR
- South Korea
- Prior art keywords
- discharge
- pump
- valve
- chamber
- delete delete
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 53
- 230000002829 reductive effect Effects 0.000 title description 11
- 208000028659 discharge Diseases 0.000 claims abstract description 405
- 239000012530 fluid Substances 0.000 claims abstract description 158
- 238000005096 rolling process Methods 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000010926 purge Methods 0.000 claims description 104
- 238000002955 isolation Methods 0.000 claims description 33
- 238000004891 communication Methods 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000013536 elastomeric material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 44
- 230000008569 process Effects 0.000 description 23
- 238000006073 displacement reaction Methods 0.000 description 21
- 239000004810 polytetrafluoroethylene Substances 0.000 description 17
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 17
- 239000003795 chemical substances by application Substances 0.000 description 14
- 230000008859 change Effects 0.000 description 12
- 238000007599 discharging Methods 0.000 description 12
- 230000008901 benefit Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 230000003068 static effect Effects 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 9
- 238000001914 filtration Methods 0.000 description 8
- 230000020169 heat generation Effects 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005086 pumping Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 230000004907 flux Effects 0.000 description 5
- 230000000670 limiting effect Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000007792 addition Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 230000008707 rearrangement Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004963 Torlon Substances 0.000 description 1
- 229920003997 Torlon® Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000004836 empirical method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229920005548 perfluoropolymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B23/00—Pumping installations or systems
- F04B23/04—Combinations of two or more pumps
- F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/06—Venting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
- F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
- F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0601—Opening times
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49229—Prime mover or fluid pump making
- Y10T29/49236—Fluid pump or compressor making
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2005/042127 WO2006057957A2 (en) | 2004-11-23 | 2005-11-21 | System and method for a variable home position dispense system |
| USPCT/US2005/042127 | 2005-11-21 | ||
| US74243505P | 2005-12-05 | 2005-12-05 | |
| US60/742,435 | 2005-12-05 | ||
| PCT/US2006/044906 WO2007061956A2 (en) | 2005-11-21 | 2006-11-20 | System and method for a pump with reduced form factor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20080072033A KR20080072033A (ko) | 2008-08-05 |
| KR101308784B1 true KR101308784B1 (ko) | 2013-09-17 |
Family
ID=39580461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020087013326A Active KR101308784B1 (ko) | 2005-11-21 | 2006-11-20 | 소형 폼 팩터를 갖는 펌프용 시스템 및 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US8087429B2 (enExample) |
| EP (2) | EP1952022B1 (enExample) |
| JP (2) | JP5339914B2 (enExample) |
| KR (1) | KR101308784B1 (enExample) |
| CN (1) | CN101583796B (enExample) |
| TW (1) | TWI413732B (enExample) |
| WO (1) | WO2007061956A2 (enExample) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8172546B2 (en) * | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
| EP1859169A2 (en) | 2004-11-23 | 2007-11-28 | Entegris, Inc. | System and method for a variable home position dispense system |
| EP1952022B1 (en) | 2005-11-21 | 2014-11-12 | Entegris, Inc. | System and method for a pump with reduced form factor |
| US8753097B2 (en) | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
| JP4845969B2 (ja) | 2005-12-02 | 2011-12-28 | エンテグリース,インコーポレイテッド | ポンプ制御装置を結合する入出力システム、方法、および装置 |
| US7878765B2 (en) * | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
| KR101243509B1 (ko) | 2005-12-02 | 2013-03-20 | 엔테그리스, 아이엔씨. | 펌프에서의 압력 보상을 위한 시스템 및 방법 |
| US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
| US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
| CN101356715B (zh) * | 2005-12-02 | 2012-07-18 | 恩特格里公司 | 用于泵中的阀的排序的系统和方法 |
| CN101360678B (zh) * | 2005-12-05 | 2013-01-02 | 恩特格里公司 | 用于泵的误差容积系统和方法 |
| TWI402423B (zh) | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
| US7684446B2 (en) * | 2006-03-01 | 2010-03-23 | Entegris, Inc. | System and method for multiplexing setpoints |
| US7494265B2 (en) * | 2006-03-01 | 2009-02-24 | Entegris, Inc. | System and method for controlled mixing of fluids via temperature |
| US7681460B2 (en) * | 2007-04-20 | 2010-03-23 | Gilbarco Inc. | System and method for detecting pressure variations in fuel dispensers to more accurately measure fuel delivered |
| US7725271B2 (en) * | 2007-11-13 | 2010-05-25 | Gilbarco Inc. | Nozzle snap flow compensation |
| DE202007018538U1 (de) * | 2007-12-01 | 2008-10-23 | Knf Neuberger Gmbh | Mehrstufige Membran-Saugpumpe |
| US8042376B2 (en) * | 2008-06-02 | 2011-10-25 | Gilbarco Inc. | Fuel dispenser utilizing pressure sensor for theft detection |
| ES2478629T3 (es) * | 2008-06-13 | 2014-07-22 | J.P. Sauer & Sohn Maschinenbau Gmbh | Compresor de pistón de fases múltiples |
| US8353684B2 (en) * | 2009-02-05 | 2013-01-15 | Grant Peacock | Phase change compressor |
| US8727744B2 (en) * | 2010-02-26 | 2014-05-20 | Entegris, Inc. | Method and system for optimizing operation of a pump |
| US8684705B2 (en) | 2010-02-26 | 2014-04-01 | Entegris, Inc. | Method and system for controlling operation of a pump based on filter information in a filter information tag |
| TWI563351B (en) | 2010-10-20 | 2016-12-21 | Entegris Inc | Method and system for pump priming |
| US10422614B2 (en) * | 2012-09-14 | 2019-09-24 | Henkel IP & Holding GmbH | Dispenser for applying an adhesive to a remote surface |
| US9719504B2 (en) | 2013-03-15 | 2017-08-01 | Integrated Designs, L.P. | Pump having an automated gas removal and fluid recovery system and method |
| CN104454497B (zh) * | 2013-09-16 | 2017-01-04 | 富鼎电子科技(嘉善)有限公司 | 排液装置 |
| PT3137768T (pt) * | 2014-04-30 | 2021-01-19 | Anthony George Hurter | Aparelho e processo de purificação com água supercrítica de óleo combustível usado |
| US10155208B2 (en) * | 2014-09-30 | 2018-12-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Liquid mixing system for semiconductor fabrication |
| CN110624717A (zh) | 2015-06-01 | 2019-12-31 | 深圳市大疆创新科技有限公司 | 具有液体流量和转速的反馈的喷洒系统 |
| CN107635872B (zh) | 2015-06-01 | 2020-12-04 | 深圳市大疆创新科技有限公司 | 无刷泵电机系统 |
| KR20220120724A (ko) * | 2015-06-23 | 2022-08-30 | 엔테그리스, 아이엔씨. | 장방형 다이어프램 밸브 |
| US10508648B2 (en) * | 2015-07-09 | 2019-12-17 | Trebor International | Automated cross-phase pump and controller |
| DE102016113214A1 (de) * | 2016-07-18 | 2018-01-18 | Prominent Gmbh | Dosiereinrichtung mit Kommunikationsschnittstelle |
| US11098702B2 (en) * | 2017-04-26 | 2021-08-24 | Shimadzu Corporation | Liquid delivery device and fluid chromatograph |
| CN108252901B (zh) * | 2017-12-08 | 2024-04-19 | 北京大学 | 可调式流量泵 |
| US11772234B2 (en) | 2019-10-25 | 2023-10-03 | Applied Materials, Inc. | Small batch polishing fluid delivery for CMP |
| CN117295891A (zh) * | 2021-04-08 | 2023-12-26 | 流体计量有限公司 | 流体分配系统 |
| CN221003073U (zh) * | 2022-09-19 | 2024-05-24 | 贝克顿·迪金森公司 | 泵组件 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05184827A (ja) * | 1991-05-17 | 1993-07-27 | Millipore Corp | 流体をろ過及び分与するための一体化システム及び方法 |
| US5772899A (en) * | 1989-03-28 | 1998-06-30 | Millipore Investment Holdings Limited | Fluid dispensing system having independently operated pumps |
Family Cites Families (244)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US269626A (en) | 1882-12-26 | brauee | ||
| US826018A (en) * | 1904-11-21 | 1906-07-17 | Isaac Robert Concoff | Hose-coupling. |
| US1664125A (en) * | 1926-11-10 | 1928-03-27 | John R Lowrey | Hose coupling |
| US2153664A (en) * | 1937-03-08 | 1939-04-11 | Dayton Rubber Mfg Co | Strainer |
| US2215505A (en) | 1938-06-13 | 1940-09-24 | Byron Jackson Co | Variable capacity pumping apparatus |
| US2328468A (en) | 1940-12-07 | 1943-08-31 | Laffly Edmond Gabriel | Coupling device for the assembly of tubular elements |
| US2456765A (en) * | 1945-04-18 | 1948-12-21 | Honeywell Regulator Co | Hot-wire bridge overspeed controller |
| US2457384A (en) | 1947-02-17 | 1948-12-28 | Ace Glass Inc | Clamp for spherical joints |
| GB661522A (en) | 1949-03-31 | 1951-11-21 | Eureka Williams Corp | Improvements in or relating to oil burners |
| US2631538A (en) * | 1949-11-17 | 1953-03-17 | Wilford C Thompson | Diaphragm pump |
| US2673522A (en) * | 1951-04-10 | 1954-03-30 | Bendix Aviat Corp | Diaphragm pump |
| US2757966A (en) | 1952-11-06 | 1956-08-07 | Samiran David | Pipe coupling |
| US3078058A (en) * | 1959-06-15 | 1963-02-19 | Justus Roe And Sons Inc | Tape measure |
| US3072058A (en) | 1961-08-18 | 1963-01-08 | Socony Mobil Oil Co Inc | Pipe line control system |
| US3227279A (en) * | 1963-05-06 | 1966-01-04 | Conair | Hydraulic power unit |
| US3250225A (en) * | 1964-07-13 | 1966-05-10 | John F Taplin | Mechanical system comprising feed pump having a rolling diaphragm |
| US3327635A (en) * | 1965-12-01 | 1967-06-27 | Texsteam Corp | Pumps |
| DE1910093A1 (de) | 1969-02-28 | 1970-09-10 | Wagner Josef Fa | Farbspritzanlage |
| US3741298A (en) * | 1971-05-17 | 1973-06-26 | L Canton | Multiple well pump assembly |
| JPS4971508A (enExample) * | 1972-11-13 | 1974-07-10 | ||
| US3895748A (en) * | 1974-04-03 | 1975-07-22 | George R Klingenberg | No drip suck back units for glue or other liquids either separately installed with or incorporated into no drip suck back liquid applying and control apparatus |
| JPS5181413U (enExample) | 1974-12-23 | 1976-06-29 | ||
| US3977255A (en) | 1975-08-18 | 1976-08-31 | Control Process, Incorporated | Evaluating pressure profile of material flowing to mold cavity |
| US4023592A (en) * | 1976-03-17 | 1977-05-17 | Addressograph Multigraph Corporation | Pump and metering device |
| US4093403A (en) * | 1976-09-15 | 1978-06-06 | Outboard Marine Corporation | Multistage fluid-actuated diaphragm pump with amplified suction capability |
| JPS5481119U (enExample) | 1977-11-19 | 1979-06-08 | ||
| JPS5573563U (enExample) | 1978-11-17 | 1980-05-21 | ||
| US4705461A (en) | 1979-09-19 | 1987-11-10 | Seeger Corporation | Two-component metering pump |
| SE416889B (sv) * | 1979-12-27 | 1981-02-16 | Imo Industri Ab | Forfarande for blandning av tva vetskor med olika viskositet samt anordning for genomforande av forfarandet |
| DE3010509A1 (de) * | 1980-03-19 | 1981-09-24 | Volkswagenwerk Ag, 3180 Wolfsburg | Hydraulische steuereinrichtung fuer ein hydrodynamisch-mechanisches getriebe fuer kraftfahrzeuge |
| US4483665A (en) | 1982-01-19 | 1984-11-20 | Tritec Industries, Inc. | Bellows-type pump and metering system |
| JPS58119983U (ja) | 1982-02-04 | 1983-08-16 | 臼井国際産業株式会社 | 細径金属鋼管端部と接続用端金具との「鎔」着固定構造 |
| JPS58203340A (ja) | 1982-05-20 | 1983-11-26 | Matsushita Electric Ind Co Ltd | 給湯装置 |
| JPS59177929A (ja) * | 1983-03-28 | 1984-10-08 | Canon Inc | サツクバツクポンプ |
| JPS6067790U (ja) | 1983-10-18 | 1985-05-14 | 三洋電機株式会社 | 自動洗濯機 |
| US4541455A (en) | 1983-12-12 | 1985-09-17 | Tritec Industries, Inc. | Automatic vent valve |
| US4614438A (en) | 1984-04-24 | 1986-09-30 | Kabushiki Kaisha Kokusai Technicals | Method of mixing fuel oils |
| JPH0437274Y2 (enExample) | 1984-10-19 | 1992-09-02 | ||
| JPH0213184Y2 (enExample) | 1984-11-06 | 1990-04-12 | ||
| US4601409A (en) * | 1984-11-19 | 1986-07-22 | Tritec Industries, Inc. | Liquid chemical dispensing system |
| JPH0135027Y2 (enExample) * | 1985-01-29 | 1989-10-25 | ||
| US4681513A (en) | 1985-02-01 | 1987-07-21 | Jeol Ltd. | Two-stage pump assembly |
| JPS61178582U (enExample) | 1985-04-26 | 1986-11-07 | ||
| US4597721A (en) * | 1985-10-04 | 1986-07-01 | Valco Cincinnati, Inc. | Double acting diaphragm pump with improved disassembly means |
| JPS62131987A (ja) | 1985-12-05 | 1987-06-15 | Takeshi Hoya | 複式連結圧送装置 |
| SE451153B (sv) * | 1986-01-20 | 1987-09-07 | Dominator Ab | Sett att endra trycket i pneumatiska eller hydrauliska system och anordning for att genomfora settet |
| EP0232843B1 (en) | 1986-02-06 | 1993-08-11 | GTE Products Corporation | Motor vehicle headlight |
| US4690621A (en) | 1986-04-15 | 1987-09-01 | Advanced Control Engineering | Filter pump head assembly |
| JPH0658246B2 (ja) | 1986-04-30 | 1994-08-03 | アンリツ株式会社 | 組合せ計量装置 |
| DE3631984C1 (de) | 1986-09-19 | 1987-12-17 | Hans Ing Kern | Dosierpumpe |
| US4943032A (en) * | 1986-09-24 | 1990-07-24 | Stanford University | Integrated, microminiature electric to fluidic valve and pressure/flow regulator |
| US4824073A (en) | 1986-09-24 | 1989-04-25 | Stanford University | Integrated, microminiature electric to fluidic valve |
| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| US4966646A (en) | 1986-09-24 | 1990-10-30 | Board Of Trustees Of Leland Stanford University | Method of making an integrated, microminiature electric-to-fluidic valve |
| US4797834A (en) * | 1986-09-30 | 1989-01-10 | Honganen Ronald E | Process for controlling a pump to account for compressibility of liquids in obtaining steady flow |
| JP2604362B2 (ja) * | 1986-10-22 | 1997-04-30 | 株式会社日立製作所 | 低脈流ポンプ |
| JPS63173866A (ja) * | 1987-01-09 | 1988-07-18 | Hitachi Ltd | 無脈動ポンプの制御方式 |
| JPS63255575A (ja) * | 1987-04-10 | 1988-10-21 | Yoshimoto Seisakusho:Kk | ポンプ装置 |
| US5157605A (en) | 1987-04-27 | 1992-10-20 | Schlumberger Technology Corporation | Induction logging method and apparatus including means for combining on-phase and quadrature components of signals received at varying frequencies and including use of multiple receiver means associated with a single transmitter |
| JPS63176681U (enExample) | 1987-05-03 | 1988-11-16 | ||
| JP2824575B2 (ja) * | 1987-08-11 | 1998-11-11 | 株式会社日立製作所 | 低脈流送液ポンプ |
| US5246347A (en) * | 1988-05-17 | 1993-09-21 | Patients Solutions, Inc. | Infusion device with disposable elements |
| US4952386A (en) | 1988-05-20 | 1990-08-28 | Athens Corporation | Method and apparatus for purifying hydrogen fluoride |
| JPH0213184U (enExample) * | 1988-06-30 | 1990-01-26 | ||
| JPH0291485A (ja) | 1988-09-27 | 1990-03-30 | Teijin Ltd | 液体定量供給装置 |
| US4950134A (en) | 1988-12-27 | 1990-08-21 | Cybor Corporation | Precision liquid dispenser |
| JPH02206469A (ja) | 1989-02-03 | 1990-08-16 | Aisin Seiki Co Ltd | ポンピング装置 |
| JP2633005B2 (ja) | 1989-02-15 | 1997-07-23 | 日本電子株式会社 | 定流量ポンプ用流量計 |
| JPH02227794A (ja) | 1989-02-28 | 1990-09-10 | Kubota Ltd | 自動販売機のシロップポンプ |
| US4981418A (en) | 1989-07-25 | 1991-01-01 | Osmonics, Inc. | Internally pressurized bellows pump |
| US5062770A (en) | 1989-08-11 | 1991-11-05 | Systems Chemistry, Inc. | Fluid pumping apparatus and system with leak detection and containment |
| DE3928949A1 (de) * | 1989-08-31 | 1991-03-14 | Wagner Gmbh J | Membranpumpe |
| US5135031A (en) * | 1989-09-25 | 1992-08-04 | Vickers, Incorporated | Power transmission |
| JP2803859B2 (ja) | 1989-09-29 | 1998-09-24 | 株式会社日立製作所 | 流動体供給装置およびその制御方法 |
| US5061574A (en) | 1989-11-28 | 1991-10-29 | Battelle Memorial Institute | Thick, low-stress films, and coated substrates formed therefrom |
| US5316181A (en) * | 1990-01-29 | 1994-05-31 | Integrated Designs, Inc. | Liquid dispensing system |
| US5098261A (en) * | 1990-05-04 | 1992-03-24 | Brandel Corporation | Peristaltic pump and method for adjustable flow regulation |
| US5061156A (en) | 1990-05-18 | 1991-10-29 | Tritec Industries, Inc. | Bellows-type dispensing pump |
| JPH0816563B2 (ja) | 1990-07-06 | 1996-02-21 | 株式会社荏原製作所 | ターボ冷凍機のサージ検出装置 |
| DE4021541C1 (enExample) | 1990-07-06 | 1991-12-19 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| JP2963514B2 (ja) | 1990-09-20 | 1999-10-18 | 克郎 神谷 | 輸液制御装置 |
| JPH04167916A (ja) | 1990-10-30 | 1992-06-16 | Sumitomo Metal Ind Ltd | スプレー用給水圧力制御装置 |
| US5230445A (en) * | 1991-09-30 | 1993-07-27 | City Of Hope | Micro delivery valve |
| US5527161A (en) * | 1992-02-13 | 1996-06-18 | Cybor Corporation | Filtering and dispensing system |
| US5312233A (en) * | 1992-02-25 | 1994-05-17 | Ivek Corporation | Linear liquid dispensing pump for dispensing liquid in nanoliter volumes |
| US5336884A (en) | 1992-07-01 | 1994-08-09 | Rockwell International Corporation | High resolution optical hybrid absolute incremental position encoder |
| US5380019A (en) * | 1992-07-01 | 1995-01-10 | Furon Company | Spring seal |
| US5344195A (en) | 1992-07-29 | 1994-09-06 | General Electric Company | Biased fluid coupling |
| US5261442A (en) | 1992-11-04 | 1993-11-16 | Bunnell Plastics, Inc. | Diaphragm valve with leak detection |
| US5490765A (en) * | 1993-05-17 | 1996-02-13 | Cybor Corporation | Dual stage pump system with pre-stressed diaphragms and reservoir |
| US6190565B1 (en) * | 1993-05-17 | 2001-02-20 | David C. Bailey | Dual stage pump system with pre-stressed diaphragms and reservoir |
| US6203759B1 (en) | 1996-05-31 | 2001-03-20 | Packard Instrument Company | Microvolume liquid handling system |
| US5511797A (en) * | 1993-07-28 | 1996-04-30 | Furon Company | Tandem seal gasket assembly |
| JPH0727150U (ja) * | 1993-10-07 | 1995-05-19 | 大日本スクリーン製造株式会社 | シリカ系被膜形成用塗布液吐出装置 |
| US5350200A (en) | 1994-01-10 | 1994-09-27 | General Electric Company | Tube coupling assembly |
| US5407102A (en) | 1994-02-15 | 1995-04-18 | Freudinger; Mark J. | Apparatus for dispensing a quantity of flowable material |
| US5434774A (en) * | 1994-03-02 | 1995-07-18 | Fisher Controls International, Inc. | Interface apparatus for two-wire communication in process control loops |
| JPH07253081A (ja) | 1994-03-15 | 1995-10-03 | Kobe Steel Ltd | 往復動圧縮機 |
| DE4412668C2 (de) * | 1994-04-13 | 1998-12-03 | Knf Flodos Ag | Pumpe |
| US5476004A (en) | 1994-05-27 | 1995-12-19 | Furon Company | Leak-sensing apparatus |
| US5447287A (en) * | 1994-06-24 | 1995-09-05 | Robertshaw Controls Company | Fuel control device and methods of making the same |
| US5580103A (en) | 1994-07-19 | 1996-12-03 | Furon Company | Coupling device |
| JPH0861246A (ja) | 1994-08-23 | 1996-03-08 | Kawamoto Seisakusho:Kk | 可変速ポンプ装置 |
| US5599100A (en) * | 1994-10-07 | 1997-02-04 | Mobil Oil Corporation | Multi-phase fluids for a hydraulic system |
| US5546009A (en) | 1994-10-12 | 1996-08-13 | Raphael; Ian P. | Detector system using extremely low power to sense the presence or absence of an inert or hazardous fuild |
| US5784573A (en) * | 1994-11-04 | 1998-07-21 | Texas Instruments Incorporated | Multi-protocol local area network controller |
| US5575311A (en) | 1995-01-13 | 1996-11-19 | Furon Company | Three-way poppet valve apparatus |
| US5653251A (en) | 1995-03-06 | 1997-08-05 | Reseal International Limited Partnership | Vacuum actuated sheath valve |
| US5846056A (en) | 1995-04-07 | 1998-12-08 | Dhindsa; Jasbir S. | Reciprocating pump system and method for operating same |
| JPH08300020A (ja) | 1995-04-28 | 1996-11-19 | Nisshin Steel Co Ltd | ステンレス鋼熱間圧延用の潤滑剤分散粘性液の流量制御方法 |
| US5652391A (en) * | 1995-05-12 | 1997-07-29 | Furon Company | Double-diaphragm gauge protector |
| DE19525557A1 (de) | 1995-07-13 | 1997-01-16 | Knf Flodos Ag | Dosierpumpe |
| US5645301A (en) * | 1995-11-13 | 1997-07-08 | Furon Company | Fluid transport coupling |
| US5991279A (en) | 1995-12-07 | 1999-11-23 | Vistar Telecommunications Inc. | Wireless packet data distributed communications system |
| US5895570A (en) | 1996-02-09 | 1999-04-20 | United States Filter Corporation | Modular filtering system |
| US5793754A (en) | 1996-03-29 | 1998-08-11 | Eurotherm Controls, Inc. | Two-way, two-wire analog/digital communication system |
| US5839828A (en) | 1996-05-20 | 1998-11-24 | Glanville; Robert W. | Static mixer |
| US6378907B1 (en) * | 1996-07-12 | 2002-04-30 | Mykrolis Corporation | Connector apparatus and system including connector apparatus |
| US6131766A (en) * | 1996-08-12 | 2000-10-17 | Restaurant Automation Development Inc. | System for dispensing controlled amounts of flowable material from a flexible container |
| JPH10169566A (ja) | 1996-12-05 | 1998-06-23 | Toyo Koatsu:Kk | 広い吐出速度範囲を有し一定圧力にても吐出可能なポンプ |
| US5947702A (en) | 1996-12-20 | 1999-09-07 | Beco Manufacturing | High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm |
| JP3854691B2 (ja) * | 1997-01-14 | 2006-12-06 | キヤノン株式会社 | 無線通信システムおよび無線通信装置 |
| EP0863538B1 (en) | 1997-03-03 | 2003-05-21 | Tokyo Electron Limited | Coating apparatus and coating method |
| JP3940854B2 (ja) | 1997-03-25 | 2007-07-04 | Smc株式会社 | サックバックバルブ |
| KR100252221B1 (ko) | 1997-06-25 | 2000-04-15 | 윤종용 | 반도체장치 제조용 습식 식각장치 및 습식 식각장치내의 식각액 순환방법 |
| US5967173A (en) | 1997-07-14 | 1999-10-19 | Furon Corporation | Diaphragm valve with leak detection |
| JP3919896B2 (ja) | 1997-09-05 | 2007-05-30 | テルモ株式会社 | 遠心式液体ポンプ装置 |
| US6033302A (en) | 1997-11-07 | 2000-03-07 | Siemens Building Technologies, Inc. | Room pressure control apparatus having feedforward and feedback control and method |
| US5848605A (en) | 1997-11-12 | 1998-12-15 | Cybor Corporation | Check valve |
| US6151640A (en) | 1998-01-23 | 2000-11-21 | Schneider Automation Inc. | Control I/O module having the ability to interchange bus protocols for bus networks independent of the control I/O module |
| CA2330693C (en) * | 1998-04-27 | 2005-06-28 | Digital Electronics Corporation | Control system, display, host computer for control, and data transmitting method |
| JP3929185B2 (ja) | 1998-05-20 | 2007-06-13 | 株式会社荏原製作所 | 真空排気装置及び方法 |
| JPH11356081A (ja) | 1998-06-09 | 1999-12-24 | Matsushita Electric Ind Co Ltd | インバータ装置 |
| AU4428399A (en) | 1998-06-19 | 2000-01-05 | Gateway, Inc. | Communication system and method for interfacing differing communication standards |
| US6045331A (en) | 1998-08-10 | 2000-04-04 | Gehm; William | Fluid pump speed controller |
| US6390780B1 (en) | 1998-09-24 | 2002-05-21 | Rule Industries, Inc. | Pump and controller system and method |
| JP4011210B2 (ja) * | 1998-10-13 | 2007-11-21 | 株式会社コガネイ | 薬液供給方法および薬液供給装置 |
| US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
| WO2000031416A1 (en) | 1998-11-23 | 2000-06-02 | Millipore Corporation | Pump controller for precision pumping apparatus |
| US8172546B2 (en) * | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
| US6203288B1 (en) * | 1999-01-05 | 2001-03-20 | Air Products And Chemicals, Inc. | Reciprocating pumps with linear motor driver |
| WO2000043130A1 (en) | 1999-01-20 | 2000-07-27 | Mykrolis Corporation | Flow controller |
| US6575264B2 (en) * | 1999-01-29 | 2003-06-10 | Dana Corporation | Precision electro-hydraulic actuator positioning system |
| US6298941B1 (en) | 1999-01-29 | 2001-10-09 | Dana Corp | Electro-hydraulic power steering system |
| JP2000265949A (ja) | 1999-03-18 | 2000-09-26 | Toyota Autom Loom Works Ltd | 可変容量型圧縮機 |
| US6464464B2 (en) | 1999-03-24 | 2002-10-15 | Itt Manufacturing Enterprises, Inc. | Apparatus and method for controlling a pump system |
| US6319317B1 (en) | 1999-04-19 | 2001-11-20 | Tokyo Electron Limited | Coating film forming method and coating apparatus |
| DE29909100U1 (de) | 1999-05-25 | 1999-08-12 | ARGE Meibes/Pleuger, 30916 Isernhagen | Rohrleitungsanordnung mit Filter |
| US6210745B1 (en) * | 1999-07-08 | 2001-04-03 | National Semiconductor Corporation | Method of quality control for chemical vapor deposition |
| DE19933202B4 (de) | 1999-07-15 | 2006-04-06 | Institut für Luft- und Kältetechnik gemeinnützige Gesellschaft mbH | Verfahren zum Betreiben mehrstufiger Verdichter |
| WO2001009513A1 (en) * | 1999-07-30 | 2001-02-08 | Crs Services, Inc. | Hydraulic pump manifold |
| AU776367B2 (en) | 1999-09-03 | 2004-09-09 | Fenwal, Inc. | Systems and methods for control of pumps |
| US6330517B1 (en) | 1999-09-17 | 2001-12-11 | Rosemount Inc. | Interface for managing process |
| US6250502B1 (en) * | 1999-09-20 | 2001-06-26 | Daniel A. Cote | Precision dispensing pump and method of dispensing |
| JP2001098908A (ja) | 1999-09-29 | 2001-04-10 | Mitsubishi Electric Corp | バルブタイミング調整装置 |
| KR100754342B1 (ko) * | 1999-10-18 | 2007-09-03 | 인터그레이티드 디자인즈 엘.피. | 유체 분배 방법 및 장치 |
| DE19950222A1 (de) * | 1999-10-19 | 2001-04-26 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur Diagnose eines Kraftstoffversorgungssystems |
| JP3361300B2 (ja) | 1999-10-28 | 2003-01-07 | 株式会社イワキ | チューブフラムポンプ |
| US6325932B1 (en) | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
| US7247245B1 (en) | 1999-12-02 | 2007-07-24 | Entegris, Inc. | Filtration cartridge and process for filtering a slurry |
| US6348124B1 (en) * | 1999-12-14 | 2002-02-19 | Applied Materials, Inc. | Delivery of polishing agents in a wafer processing system |
| US6497680B1 (en) | 1999-12-17 | 2002-12-24 | Abbott Laboratories | Method for compensating for pressure differences across valves in cassette type IV pump |
| US6332362B1 (en) | 2000-04-18 | 2001-12-25 | Lg Electronics Inc. | Device and method for detecting anomaly of air conditioner by using acoustic emission method |
| JP2001342989A (ja) | 2000-05-30 | 2001-12-14 | Matsushita Electric Ind Co Ltd | Dcポンプの駆動制御方法 |
| US6474950B1 (en) | 2000-07-13 | 2002-11-05 | Ingersoll-Rand Company | Oil free dry screw compressor including variable speed drive |
| US6925072B1 (en) | 2000-08-03 | 2005-08-02 | Ericsson Inc. | System and method for transmitting control information between a control unit and at least one sub-unit |
| US6749402B2 (en) | 2000-09-20 | 2004-06-15 | Fluid Management, Inc. | Nutating pump, control system and method of control thereof |
| JP2002106467A (ja) | 2000-09-28 | 2002-04-10 | Techno Excel Co Ltd | トラバース機構駆動式流体ポンプ |
| US6618628B1 (en) | 2000-10-05 | 2003-09-09 | Karl A. Davlin | Distributed input/output control systems and methods |
| US6520520B2 (en) * | 2000-10-31 | 2003-02-18 | Durrell U. Howard | Steering stabilizer with trimming accumulator |
| WO2002040160A1 (de) | 2000-11-17 | 2002-05-23 | Tecan Trading Ag | Vorrichtung und verfahren zum abtrennen von proben aus einer flüssigkeit |
| US6708239B1 (en) | 2000-12-08 | 2004-03-16 | The Boeing Company | Network device interface for digitally interfacing data channels to a controller via a network |
| US6540265B2 (en) * | 2000-12-28 | 2003-04-01 | R. W. Beckett Corporation | Fluid fitting |
| US7133807B2 (en) | 2001-01-22 | 2006-11-07 | Tokyo Electron Limited | Apparatus productivity improving system and its method |
| US6554579B2 (en) * | 2001-03-29 | 2003-04-29 | Integrated Designs, L.P. | Liquid dispensing system with enhanced filter |
| JP4576739B2 (ja) | 2001-04-02 | 2010-11-10 | パナソニック電工株式会社 | ポンプ用モータ駆動制御装置 |
| US6767877B2 (en) | 2001-04-06 | 2004-07-27 | Akrion, Llc | Method and system for chemical injection in silicon wafer processing |
| US6805841B2 (en) | 2001-05-09 | 2004-10-19 | The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin | Liquid pumping system |
| JP4684478B2 (ja) | 2001-07-04 | 2011-05-18 | 株式会社荏原製作所 | 給水装置の制御方法 |
| US6697701B2 (en) * | 2001-08-09 | 2004-02-24 | Lincoln Global, Inc. | Welding system and methodology providing multiplexed cell control interface |
| US6823283B2 (en) * | 2001-08-14 | 2004-11-23 | National Instruments Corporation | Measurement system including a programmable hardware element and measurement modules that convey interface information |
| US7457732B2 (en) | 2001-08-17 | 2008-11-25 | General Electric Company | System and method for measuring quality of baseline modeling techniques |
| EP1433036A4 (en) | 2001-10-01 | 2008-10-22 | Entegris Inc | DEVICE FOR CONDITIONING THE TEMPERATURE OF A FLUID |
| US6640999B2 (en) | 2001-11-13 | 2003-11-04 | Unilever Home & Personal Care Usa, Division Of Conopco, Inc. | Dose dispensing pump for dispensing two or more materials |
| US20030114942A1 (en) | 2001-12-17 | 2003-06-19 | Varone John J. | Remote display module |
| GB0130602D0 (en) | 2001-12-21 | 2002-02-06 | Johnson Electric Sa | Brushless D.C. motor |
| GB2384947B (en) | 2002-02-01 | 2006-01-18 | Sendo Int Ltd | Enabling and/or inhibiting an operation of a wireless communicatons unit |
| EP1480906A4 (en) | 2002-02-07 | 2009-09-23 | Pall Corp | LIQUID DISPENSING SYSTEMS AND METHODS |
| US6766810B1 (en) | 2002-02-15 | 2004-07-27 | Novellus Systems, Inc. | Methods and apparatus to control pressure in a supercritical fluid reactor |
| US7241115B2 (en) | 2002-03-01 | 2007-07-10 | Waters Investments Limited | Methods and apparatus for determining the presence or absence of a fluid leak |
| JP4131459B2 (ja) | 2002-04-02 | 2008-08-13 | 応研精工株式会社 | 液体用ダイヤフラムポンプ |
| JP4531328B2 (ja) | 2002-05-31 | 2010-08-25 | 株式会社タクミナ | 定量搬送装置 |
| US6914543B2 (en) | 2002-06-03 | 2005-07-05 | Visteon Global Technologies, Inc. | Method for initializing position with an encoder |
| JP4191437B2 (ja) | 2002-06-26 | 2008-12-03 | 並木精密宝石株式会社 | 基板一体型ブラシレスモータ |
| US6837484B2 (en) * | 2002-07-10 | 2005-01-04 | Saint-Gobain Performance Plastics, Inc. | Anti-pumping dispense valve |
| DE10233127C1 (de) | 2002-07-20 | 2003-12-11 | Porsche Ag | Vorrichtung zur Wanddurchführung von Rohrleitungen, Schläuchen oder elektrischen Kabeln für Kraftfahrzeuge |
| JP3792624B2 (ja) | 2002-08-08 | 2006-07-05 | 核燃料サイクル開発機構 | 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法 |
| JP3809406B2 (ja) * | 2002-08-29 | 2006-08-16 | キヤノン株式会社 | 記録装置及び記録装置の制御方法 |
| US7013223B1 (en) * | 2002-09-25 | 2006-03-14 | The Board Of Trustees Of The University Of Illinois | Method and apparatus for analyzing performance of a hydraulic pump |
| US7175397B2 (en) * | 2002-09-27 | 2007-02-13 | Pulsafeeder, Inc. | Effervescent gas bleeder apparatus |
| US20040072450A1 (en) * | 2002-10-15 | 2004-04-15 | Collins Jimmy D. | Spin-coating methods and apparatuses for spin-coating, including pressure sensor |
| JP2004143960A (ja) * | 2002-10-22 | 2004-05-20 | Smc Corp | ポンプ装置 |
| CA2502925C (en) | 2002-10-23 | 2009-10-20 | Carrier Commercial Refrigeration, Inc. | Fluid dispenser calibration system and method |
| US7008553B2 (en) | 2003-01-09 | 2006-03-07 | General Electric Company | Method for removing aluminide coating from metal substrate and turbine engine part so treated |
| JP2004225672A (ja) | 2003-01-27 | 2004-08-12 | Ebara Densan Ltd | 回転機械の運転制御装置 |
| US7156115B2 (en) * | 2003-01-28 | 2007-01-02 | Lancer Partnership, Ltd | Method and apparatus for flow control |
| JP3861060B2 (ja) | 2003-01-31 | 2006-12-20 | 日機装株式会社 | 無脈動ポンプ |
| JP4392474B2 (ja) | 2003-02-21 | 2010-01-06 | 兵神装備株式会社 | 材料供給システム |
| US20040193330A1 (en) | 2003-03-26 | 2004-09-30 | Ingersoll-Rand Company | Method and system for controlling compressors |
| JP2004293443A (ja) | 2003-03-27 | 2004-10-21 | Katsutoshi Masuda | 流動体吐出ポンプ装置 |
| US7735685B2 (en) | 2003-05-09 | 2010-06-15 | Intellipack | Dispensing system with in line chemical pump system |
| FR2854667B1 (fr) | 2003-05-09 | 2006-07-28 | Cit Alcatel | Controle de pression dans la chambre de procedes par variation de vitesse de pompes, vanne de regulation et injection de gaz neutre |
| JP4206308B2 (ja) * | 2003-08-01 | 2009-01-07 | 株式会社日立ハイテクノロジーズ | 液体クロマトグラフ用ポンプ |
| JP4377639B2 (ja) | 2003-09-18 | 2009-12-02 | 株式会社日立ハイテクノロジーズ | ポンプおよびクロマトグラフ用液体ポンプ |
| US7210771B2 (en) | 2004-01-08 | 2007-05-01 | Eastman Kodak Company | Ink delivery system with print cartridge, container and reservoir apparatus and method |
| US20050173463A1 (en) | 2004-02-09 | 2005-08-11 | Wesner John A. | Dispensing pump having linear and rotary actuators |
| JP4319105B2 (ja) | 2004-02-18 | 2009-08-26 | 三菱電機株式会社 | 製造システム、ゲートウェイ装置、ゲートウェイプログラムおよび被制御装置の制御方法 |
| DE102004014793A1 (de) | 2004-03-24 | 2005-10-20 | Bosch Rexroth Ag | Verfahren zur Datenübertragung |
| US7272452B2 (en) | 2004-03-31 | 2007-09-18 | Siemens Vdo Automotive Corporation | Controller with configurable connections between data processing components |
| DE602004007247T2 (de) | 2004-06-04 | 2008-02-28 | Société Industrielle de Sonceboz S.A., Sonceboz | Pumpenantrieb |
| US7648792B2 (en) | 2004-06-25 | 2010-01-19 | Ultracell Corporation | Disposable component on a fuel cartridge and for use with a portable fuel cell system |
| US7363195B2 (en) * | 2004-07-07 | 2008-04-22 | Sensarray Corporation | Methods of configuring a sensor network |
| US20060083259A1 (en) * | 2004-10-18 | 2006-04-20 | Metcalf Thomas D | Packet-based systems and methods for distributing data |
| EP1859169A2 (en) | 2004-11-23 | 2007-11-28 | Entegris, Inc. | System and method for a variable home position dispense system |
| JP4232162B2 (ja) | 2004-12-07 | 2009-03-04 | 三菱電機株式会社 | 圧縮機検査装置 |
| US7477960B2 (en) | 2005-02-16 | 2009-01-13 | Tokyo Electron Limited | Fault detection and classification (FDC) using a run-to-run controller |
| US20080089361A1 (en) * | 2005-10-06 | 2008-04-17 | Metcalf Thomas D | System and method for transferring data |
| US8753097B2 (en) * | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
| EP1952022B1 (en) | 2005-11-21 | 2014-11-12 | Entegris, Inc. | System and method for a pump with reduced form factor |
| KR20080073778A (ko) * | 2005-12-02 | 2008-08-11 | 엔테그리스, 아이엔씨. | O링 없는 로우 프로파일 피팅 및 피팅 조립체 |
| CN101356715B (zh) | 2005-12-02 | 2012-07-18 | 恩特格里公司 | 用于泵中的阀的排序的系统和方法 |
| US7878765B2 (en) | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
| US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
| KR101243509B1 (ko) | 2005-12-02 | 2013-03-20 | 엔테그리스, 아이엔씨. | 펌프에서의 압력 보상을 위한 시스템 및 방법 |
| US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
| JP4845969B2 (ja) * | 2005-12-02 | 2011-12-28 | エンテグリース,インコーポレイテッド | ポンプ制御装置を結合する入出力システム、方法、および装置 |
| CN101360678B (zh) * | 2005-12-05 | 2013-01-02 | 恩特格里公司 | 用于泵的误差容积系统和方法 |
| TWI402423B (zh) * | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
| US7494265B2 (en) * | 2006-03-01 | 2009-02-24 | Entegris, Inc. | System and method for controlled mixing of fluids via temperature |
| US7684446B2 (en) * | 2006-03-01 | 2010-03-23 | Entegris, Inc. | System and method for multiplexing setpoints |
| US20070254092A1 (en) | 2006-04-28 | 2007-11-01 | Applied Materials, Inc. | Systems and Methods for Detecting Abnormal Dispense of Semiconductor Process Fluids |
| US7443483B2 (en) | 2006-08-11 | 2008-10-28 | Entegris, Inc. | Systems and methods for fluid flow control in an immersion lithography system |
| EP2212606A2 (en) | 2007-11-02 | 2010-08-04 | Entegris, Inc. | O-ringless seal couplings |
| JP5059821B2 (ja) | 2009-08-28 | 2012-10-31 | ルネサスエレクトロニクス株式会社 | 光ディスク装置 |
-
2006
- 2006-11-20 EP EP06838070.8A patent/EP1952022B1/en active Active
- 2006-11-20 CN CN2006800432973A patent/CN101583796B/zh active Active
- 2006-11-20 US US11/602,464 patent/US8087429B2/en active Active
- 2006-11-20 EP EP14192045.4A patent/EP2894332B1/en active Active
- 2006-11-20 KR KR1020087013326A patent/KR101308784B1/ko active Active
- 2006-11-20 JP JP2008541406A patent/JP5339914B2/ja active Active
- 2006-11-20 WO PCT/US2006/044906 patent/WO2007061956A2/en not_active Ceased
- 2006-11-21 TW TW095142926A patent/TWI413732B/zh active
-
2011
- 2011-08-24 US US13/216,944 patent/US8651823B2/en not_active Expired - Lifetime
-
2012
- 2012-04-06 JP JP2012087168A patent/JP5684186B2/ja active Active
-
2013
- 2013-09-05 US US14/019,163 patent/US9399989B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5772899A (en) * | 1989-03-28 | 1998-06-30 | Millipore Investment Holdings Limited | Fluid dispensing system having independently operated pumps |
| JPH05184827A (ja) * | 1991-05-17 | 1993-07-27 | Millipore Corp | 流体をろ過及び分与するための一体化システム及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009527673A (ja) | 2009-07-30 |
| EP1952022A4 (en) | 2011-03-30 |
| US20070128050A1 (en) | 2007-06-07 |
| US9399989B2 (en) | 2016-07-26 |
| EP1952022A2 (en) | 2008-08-06 |
| US8087429B2 (en) | 2012-01-03 |
| JP5339914B2 (ja) | 2013-11-13 |
| WO2007061956B1 (en) | 2008-07-24 |
| TWI413732B (zh) | 2013-11-01 |
| WO2007061956A2 (en) | 2007-05-31 |
| CN101583796A (zh) | 2009-11-18 |
| US8651823B2 (en) | 2014-02-18 |
| EP2894332A1 (en) | 2015-07-15 |
| WO2007061956A3 (en) | 2007-11-01 |
| US20140044570A1 (en) | 2014-02-13 |
| US20120057990A1 (en) | 2012-03-08 |
| EP2894332B1 (en) | 2016-08-17 |
| JP5684186B2 (ja) | 2015-03-11 |
| JP2012132470A (ja) | 2012-07-12 |
| EP1952022B1 (en) | 2014-11-12 |
| KR20080072033A (ko) | 2008-08-05 |
| CN101583796B (zh) | 2012-07-04 |
| TW200726912A (en) | 2007-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101308784B1 (ko) | 소형 폼 팩터를 갖는 펌프용 시스템 및 방법 | |
| US8753097B2 (en) | Method and system for high viscosity pump | |
| US9309872B2 (en) | System and method for position control of a mechanical piston in a pump | |
| US8172546B2 (en) | System and method for correcting for pressure variations using a motor | |
| US8029247B2 (en) | System and method for pressure compensation in a pump | |
| CN101495756B (zh) | 使用电机校正压力变化的系统和方法 | |
| JP5674853B2 (ja) | ポンプの機械式ピストンのピストン制御システムおよび方法 | |
| CN101356373B (zh) | 用于泵中的机械活塞的位置控制的系统 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20080602 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20111115 Comment text: Request for Examination of Application |
|
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20130213 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20130808 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20130909 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20130909 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| FPAY | Annual fee payment |
Payment date: 20160825 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20160825 Start annual number: 4 End annual number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20170824 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20170824 Start annual number: 5 End annual number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20180903 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20180903 Start annual number: 6 End annual number: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20190902 Start annual number: 7 End annual number: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20200901 Start annual number: 8 End annual number: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20210820 Start annual number: 9 End annual number: 9 |
|
| PR1001 | Payment of annual fee |
Payment date: 20220822 Start annual number: 10 End annual number: 10 |
|
| PR1001 | Payment of annual fee |
Payment date: 20230828 Start annual number: 11 End annual number: 11 |
|
| PR1001 | Payment of annual fee |
Payment date: 20240826 Start annual number: 12 End annual number: 12 |