CN1175182C - 用于精密泵设备的泵调节器 - Google Patents
用于精密泵设备的泵调节器 Download PDFInfo
- Publication number
- CN1175182C CN1175182C CNB998150533A CN99815053A CN1175182C CN 1175182 C CN1175182 C CN 1175182C CN B998150533 A CNB998150533 A CN B998150533A CN 99815053 A CN99815053 A CN 99815053A CN 1175182 C CN1175182 C CN 1175182C
- Authority
- CN
- China
- Prior art keywords
- fluid
- pump
- distributor chamber
- motor
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
- F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0601—Opening times
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Control Of Non-Positive-Displacement Pumps (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10956898P | 1998-11-23 | 1998-11-23 | |
US60/109,568 | 1998-11-23 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100791930A Division CN1590761A (zh) | 1998-11-23 | 1999-11-23 | 用于精密泵设备的泵调节器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1331783A CN1331783A (zh) | 2002-01-16 |
CN1175182C true CN1175182C (zh) | 2004-11-10 |
Family
ID=22328367
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100791930A Pending CN1590761A (zh) | 1998-11-23 | 1999-11-23 | 用于精密泵设备的泵调节器 |
CNB998150533A Expired - Fee Related CN1175182C (zh) | 1998-11-23 | 1999-11-23 | 用于精密泵设备的泵调节器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100791930A Pending CN1590761A (zh) | 1998-11-23 | 1999-11-23 | 用于精密泵设备的泵调节器 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1133639B1 (zh) |
CN (2) | CN1590761A (zh) |
AT (1) | ATE268867T1 (zh) |
DE (1) | DE69917927T2 (zh) |
TW (1) | TW593888B (zh) |
WO (1) | WO2000031416A1 (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8172546B2 (en) | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
US6325932B1 (en) | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
JP2005534111A (ja) * | 2002-07-19 | 2005-11-10 | マイクロリス・コーポレーション | 液体流量制御器および精密分注装置およびシステム |
JP5079516B2 (ja) * | 2004-11-23 | 2012-11-21 | インテグリス・インコーポレーテッド | 可変定位置ディスペンスシステムのためのシステムおよび方法 |
WO2007061956A2 (en) | 2005-11-21 | 2007-05-31 | Entegris, Inc. | System and method for a pump with reduced form factor |
KR101279747B1 (ko) * | 2005-11-21 | 2013-06-27 | 엔테그리스, 아이엔씨. | 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법 |
US8753097B2 (en) | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
CN102705213A (zh) * | 2005-12-02 | 2012-10-03 | 恩特格里公司 | 使用电机校正压力变化的系统和方法 |
US7850431B2 (en) | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
US7878765B2 (en) * | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
KR101281210B1 (ko) | 2005-12-02 | 2013-07-02 | 엔테그리스, 아이엔씨. | 펌프에서의 밸브 시퀀싱 시스템 및 방법 |
CN102705209B (zh) * | 2005-12-02 | 2015-09-30 | 恩特格里公司 | 用于泵中压力补偿的系统和方法 |
JP4845969B2 (ja) | 2005-12-02 | 2011-12-28 | エンテグリース,インコーポレイテッド | ポンプ制御装置を結合する入出力システム、方法、および装置 |
WO2007067360A2 (en) * | 2005-12-05 | 2007-06-14 | Entegris, Inc. | Error volume system and method for a pump |
TWI402423B (zh) * | 2006-02-28 | 2013-07-21 | Entegris Inc | 用於一幫浦操作之系統及方法 |
US7684446B2 (en) | 2006-03-01 | 2010-03-23 | Entegris, Inc. | System and method for multiplexing setpoints |
US7494265B2 (en) | 2006-03-01 | 2009-02-24 | Entegris, Inc. | System and method for controlled mixing of fluids via temperature |
EP2024640A2 (en) * | 2006-06-02 | 2009-02-18 | Nomet Management Services B.V. | A volumetric pump comprising a driving mechanism |
CN101936276B (zh) * | 2008-11-20 | 2013-08-21 | 张家口百通环保科技有限公司 | 内燃机尾气净化的后处理系统过程中用于还原剂溶液抽取、计量并释放的计量泵 |
DE202010002145U1 (de) | 2010-02-09 | 2011-09-07 | Vacuubrand Gmbh + Co Kg | Membranvakuumpumpe |
US9656197B2 (en) * | 2012-11-12 | 2017-05-23 | Pall Corporation | Systems and methods for conditioning a filter assembly |
US9421498B2 (en) * | 2012-11-12 | 2016-08-23 | Pall Corporation | Systems and methods for conditioning a filter assembly |
US9739274B2 (en) * | 2013-03-15 | 2017-08-22 | Integrated Designs, L.P. | Pump system and method having a quick change motor drive |
JP6644712B2 (ja) * | 2014-05-28 | 2020-02-12 | インテグリス・インコーポレーテッド | 供給および分注センサー、濾過および分注確認、ならびに濾過器の減圧プライミングを有するポンプの動作のためのシステムおよび方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177929A (ja) * | 1983-03-28 | 1984-10-08 | Canon Inc | サツクバツクポンプ |
JP2803859B2 (ja) * | 1989-09-29 | 1998-09-24 | 株式会社日立製作所 | 流動体供給装置およびその制御方法 |
JPH0727150U (ja) * | 1993-10-07 | 1995-05-19 | 大日本スクリーン製造株式会社 | シリカ系被膜形成用塗布液吐出装置 |
EP0863538B1 (en) * | 1997-03-03 | 2003-05-21 | Tokyo Electron Limited | Coating apparatus and coating method |
JP3940854B2 (ja) * | 1997-03-25 | 2007-07-04 | Smc株式会社 | サックバックバルブ |
-
1999
- 1999-11-23 CN CNA2004100791930A patent/CN1590761A/zh active Pending
- 1999-11-23 DE DE69917927T patent/DE69917927T2/de not_active Expired - Fee Related
- 1999-11-23 CN CNB998150533A patent/CN1175182C/zh not_active Expired - Fee Related
- 1999-11-23 EP EP99965911A patent/EP1133639B1/en not_active Expired - Lifetime
- 1999-11-23 WO PCT/US1999/028002 patent/WO2000031416A1/en active IP Right Grant
- 1999-11-23 AT AT99965911T patent/ATE268867T1/de not_active IP Right Cessation
- 1999-11-23 TW TW088120448A patent/TW593888B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1331783A (zh) | 2002-01-16 |
EP1133639B1 (en) | 2004-06-09 |
ATE268867T1 (de) | 2004-06-15 |
DE69917927D1 (de) | 2004-07-15 |
DE69917927T2 (de) | 2005-06-23 |
EP1133639A1 (en) | 2001-09-19 |
TW593888B (en) | 2004-06-21 |
WO2000031416A1 (en) | 2000-06-02 |
CN1590761A (zh) | 2005-03-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1175182C (zh) | 用于精密泵设备的泵调节器 | |
US7029238B1 (en) | Pump controller for precision pumping apparatus | |
KR101212824B1 (ko) | 가변 홈 위치 토출 장치용 시스템 및 방법 | |
CN101356715B (zh) | 用于泵中的阀的排序的系统和方法 | |
US8172546B2 (en) | System and method for correcting for pressure variations using a motor | |
CN101356372B (zh) | 用于在泵中进行压力补偿的系统和方法 | |
TWI443482B (zh) | 用以改正使用一馬達之壓力變化之系統及方法,與電腦可讀媒體 | |
JPS59177929A (ja) | サツクバツクポンプ | |
JP3307980B2 (ja) | 半導体装置の製造方法 | |
JP2002543334A (ja) | 中間チャンバを備えるガス加圧式液体ポンプ | |
KR101283259B1 (ko) | 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법 | |
CN101356373B (zh) | 用于泵中的机械活塞的位置控制的系统 | |
CN1179737A (zh) | 真空涂料喷射器的出口止回阀 | |
JPH08100773A (ja) | 高粘度材料定量吐出装置 | |
JPS63319078A (ja) | 吐出装置 | |
JPH0719161A (ja) | 多連式プランジャーポンプによる液体圧送方法とそのポンプ | |
JP2011022312A (ja) | 塗布装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MYKROLIS CORP. Free format text: FORMER OWNER: MILLIPORE CORP. Effective date: 20050729 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20050729 Address after: Massachusetts, USA Patentee after: Mykrolis Corp. Address before: Massachusetts, USA Patentee before: Millipore Corp. |
|
C56 | Change in the name or address of the patentee | ||
CP03 | Change of name, title or address |
Address after: Minnesota, USA Patentee after: MYKROLIS Corp. Address before: Massachusetts, USA Patentee before: Mykrolis Corp. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20041110 Termination date: 20091223 |