ATE268867T1 - Pumpensteuergerät für hochpräzisionsdosierpumpe - Google Patents

Pumpensteuergerät für hochpräzisionsdosierpumpe

Info

Publication number
ATE268867T1
ATE268867T1 AT99965911T AT99965911T ATE268867T1 AT E268867 T1 ATE268867 T1 AT E268867T1 AT 99965911 T AT99965911 T AT 99965911T AT 99965911 T AT99965911 T AT 99965911T AT E268867 T1 ATE268867 T1 AT E268867T1
Authority
AT
Austria
Prior art keywords
pump
control device
precision dosing
pump control
dispenses
Prior art date
Application number
AT99965911T
Other languages
German (de)
English (en)
Inventor
Raymond A Zagar
Robert F Mcloughlin
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Application granted granted Critical
Publication of ATE268867T1 publication Critical patent/ATE268867T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/06—Valve parameters
    • F04B2201/0601—Opening times
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/03—Pressure in the compression chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Control Of Non-Positive-Displacement Pumps (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
AT99965911T 1998-11-23 1999-11-23 Pumpensteuergerät für hochpräzisionsdosierpumpe ATE268867T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10956898P 1998-11-23 1998-11-23
PCT/US1999/028002 WO2000031416A1 (en) 1998-11-23 1999-11-23 Pump controller for precision pumping apparatus

Publications (1)

Publication Number Publication Date
ATE268867T1 true ATE268867T1 (de) 2004-06-15

Family

ID=22328367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99965911T ATE268867T1 (de) 1998-11-23 1999-11-23 Pumpensteuergerät für hochpräzisionsdosierpumpe

Country Status (6)

Country Link
EP (1) EP1133639B1 (zh)
CN (2) CN1175182C (zh)
AT (1) ATE268867T1 (zh)
DE (1) DE69917927T2 (zh)
TW (1) TW593888B (zh)
WO (1) WO2000031416A1 (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US6325932B1 (en) 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
US7543596B2 (en) * 2002-07-19 2009-06-09 Entegris, Inc. Liquid flow controller and precision dispense apparatus and system
WO2007061957A2 (en) * 2005-11-21 2007-05-31 Entegris, Inc. System and method for position control of a mechanical piston in a pump
KR101231945B1 (ko) 2004-11-23 2013-02-08 엔테그리스, 아이엔씨. 가변 홈 위치 토출 장치용 시스템 및 방법
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
EP1952022B1 (en) 2005-11-21 2014-11-12 Entegris, Inc. System and method for a pump with reduced form factor
JP5355091B2 (ja) * 2005-12-02 2013-11-27 インテグリス・インコーポレーテッド モータを用いて圧力変動を補正するためのシステムおよび方法
JP4845969B2 (ja) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド ポンプ制御装置を結合する入出力システム、方法、および装置
CN101356715B (zh) * 2005-12-02 2012-07-18 恩特格里公司 用于泵中的阀的排序的系统和方法
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
CN101356372B (zh) 2005-12-02 2012-07-04 恩特格里公司 用于在泵中进行压力补偿的系统和方法
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (zh) * 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7684446B2 (en) 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
JP5224476B2 (ja) * 2006-06-02 2013-07-03 ノーメット マネージメント サービス ビイ．ヴイ． 駆動機構を具えた定量ポンプ
CN101936276B (zh) * 2008-11-20 2013-08-21 张家口百通环保科技有限公司 内燃机尾气净化的后处理系统过程中用于还原剂溶液抽取、计量并释放的计量泵
DE202010002145U1 (de) 2010-02-09 2011-09-07 Vacuubrand Gmbh + Co Kg Membranvakuumpumpe
US9421498B2 (en) * 2012-11-12 2016-08-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9656197B2 (en) * 2012-11-12 2017-05-23 Pall Corporation Systems and methods for conditioning a filter assembly
US10132309B2 (en) * 2013-03-15 2018-11-20 Integrated Designs, L.P. Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool
WO2015184057A1 (en) * 2014-05-28 2015-12-03 Entegris, Inc. System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177929A (ja) * 1983-03-28 1984-10-08 Canon Inc サツクバツクポンプ
JP2803859B2 (ja) * 1989-09-29 1998-09-24 株式会社日立製作所 流動体供給装置およびその制御方法
JPH0727150U (ja) * 1993-10-07 1995-05-19 大日本スクリーン製造株式会社 シリカ系被膜形成用塗布液吐出装置
EP0863538B1 (en) * 1997-03-03 2003-05-21 Tokyo Electron Limited Coating apparatus and coating method
JP3940854B2 (ja) * 1997-03-25 2007-07-04 Ｓｍｃ株式会社 サックバックバルブ

Also Published As

Publication number Publication date
CN1175182C (zh) 2004-11-10
WO2000031416A1 (en) 2000-06-02
EP1133639A1 (en) 2001-09-19
CN1331783A (zh) 2002-01-16
EP1133639B1 (en) 2004-06-09
DE69917927T2 (de) 2005-06-23
DE69917927D1 (de) 2004-07-15
TW593888B (en) 2004-06-21
CN1590761A (zh) 2005-03-09

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Legal Events

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