ATE268867T1 - PUMP CONTROL DEVICE FOR HIGH-PRECISION DOSING PUMP - Google Patents

PUMP CONTROL DEVICE FOR HIGH-PRECISION DOSING PUMP

Info

Publication number
ATE268867T1
ATE268867T1 AT99965911T AT99965911T ATE268867T1 AT E268867 T1 ATE268867 T1 AT E268867T1 AT 99965911 T AT99965911 T AT 99965911T AT 99965911 T AT99965911 T AT 99965911T AT E268867 T1 ATE268867 T1 AT E268867T1
Authority
AT
Austria
Prior art keywords
pump
control device
precision dosing
pump control
dispenses
Prior art date
Application number
AT99965911T
Other languages
German (de)
Inventor
Raymond A Zagar
Robert F Mcloughlin
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Application granted granted Critical
Publication of ATE268867T1 publication Critical patent/ATE268867T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/06—Valve parameters
    • F04B2201/0601—Opening times
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/03—Pressure in the compression chamber

Abstract

A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.
AT99965911T 1998-11-23 1999-11-23 PUMP CONTROL DEVICE FOR HIGH-PRECISION DOSING PUMP ATE268867T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10956898P 1998-11-23 1998-11-23
PCT/US1999/028002 WO2000031416A1 (en) 1998-11-23 1999-11-23 Pump controller for precision pumping apparatus

Publications (1)

Publication Number Publication Date
ATE268867T1 true ATE268867T1 (en) 2004-06-15

Family

ID=22328367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99965911T ATE268867T1 (en) 1998-11-23 1999-11-23 PUMP CONTROL DEVICE FOR HIGH-PRECISION DOSING PUMP

Country Status (6)

Country Link
EP (1) EP1133639B1 (en)
CN (2) CN1175182C (en)
AT (1) ATE268867T1 (en)
DE (1) DE69917927T2 (en)
TW (1) TW593888B (en)
WO (1) WO2000031416A1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US6325932B1 (en) 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
JP2005534111A (en) * 2002-07-19 2005-11-10 マイクロリス・コーポレーション Liquid flow controller and precision dispensing device and system
US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
KR101283259B1 (en) * 2005-11-21 2013-07-11 엔테그리스, 아이엔씨. System and method for position control of a mechanical piston in a pump
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
EP2894332B1 (en) 2005-11-21 2016-08-17 Entegris, Inc. System and method for a pump with reduced form factor
WO2007067354A2 (en) 2005-12-02 2007-06-14 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
JP5253178B2 (en) * 2005-12-02 2013-07-31 インテグリス・インコーポレーテッド System and method for valve sequence of pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
JP5366555B2 (en) 2005-12-02 2013-12-11 インテグリス・インコーポレーテッド System and method for pressure compensation in a pump
KR101243524B1 (en) * 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. System and method for correcting for pressure variations using a motor
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US7684446B2 (en) 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
CA2653981A1 (en) * 2006-06-02 2007-12-13 Nomet Management Services B.V. A volumetric pump comprising a driving mechanism
CN101936276B (en) * 2008-11-20 2013-08-21 张家口百通环保科技有限公司 Metering pump for extracting, metering and releasing reducing agent solution in process of tail gas purification aftertreatment of combustion engine
DE202010002145U1 (en) 2010-02-09 2011-09-07 Vacuubrand Gmbh + Co Kg Diaphragm vacuum pump
US9656197B2 (en) * 2012-11-12 2017-05-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9421498B2 (en) * 2012-11-12 2016-08-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9719504B2 (en) * 2013-03-15 2017-08-01 Integrated Designs, L.P. Pump having an automated gas removal and fluid recovery system and method
CN106460811A (en) * 2014-05-28 2017-02-22 恩特格里斯公司 Anti-backlash mechanism for motor-driven components in precision systems and applications

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177929A (en) * 1983-03-28 1984-10-08 Canon Inc Suck back pump
JP2803859B2 (en) * 1989-09-29 1998-09-24 株式会社日立製作所 Fluid supply device and control method thereof
JPH0727150U (en) * 1993-10-07 1995-05-19 大日本スクリーン製造株式会社 Silica-based coating liquid ejector
DE69814710T2 (en) * 1997-03-03 2004-03-18 Tokyo Electron Ltd. Coating device and method
JP3940854B2 (en) * 1997-03-25 2007-07-04 Ｓｍｃ株式会社 Suck back valve

Also Published As

Publication number Publication date
CN1331783A (en) 2002-01-16
EP1133639B1 (en) 2004-06-09
EP1133639A1 (en) 2001-09-19
WO2000031416A1 (en) 2000-06-02
TW593888B (en) 2004-06-21
DE69917927T2 (en) 2005-06-23
CN1590761A (en) 2005-03-09
DE69917927D1 (en) 2004-07-15
CN1175182C (en) 2004-11-10

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Legal Events

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