CN1590761A - Pump controller for precision pumping apparatus - Google Patents
Pump controller for precision pumping apparatus Download PDFInfo
- Publication number
- CN1590761A CN1590761A CNA2004100791930A CN200410079193A CN1590761A CN 1590761 A CN1590761 A CN 1590761A CN A2004100791930 A CNA2004100791930 A CN A2004100791930A CN 200410079193 A CN200410079193 A CN 200410079193A CN 1590761 A CN1590761 A CN 1590761A
- Authority
- CN
- China
- Prior art keywords
- fluid
- distributor chamber
- feeder house
- petcock
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
- F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/06—Valve parameters
- F04B2201/0601—Opening times
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Control Of Non-Positive-Displacement Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10956898P | 1998-11-23 | 1998-11-23 | |
US60/109,568 | 1998-11-23 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998150533A Division CN1175182C (en) | 1998-11-23 | 1999-11-23 | Pump controller for precision pumping appts. |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1590761A true CN1590761A (en) | 2005-03-09 |
Family
ID=22328367
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998150533A Expired - Fee Related CN1175182C (en) | 1998-11-23 | 1999-11-23 | Pump controller for precision pumping appts. |
CNA2004100791930A Pending CN1590761A (en) | 1998-11-23 | 1999-11-23 | Pump controller for precision pumping apparatus |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998150533A Expired - Fee Related CN1175182C (en) | 1998-11-23 | 1999-11-23 | Pump controller for precision pumping appts. |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1133639B1 (en) |
CN (2) | CN1175182C (en) |
AT (1) | ATE268867T1 (en) |
DE (1) | DE69917927T2 (en) |
TW (1) | TW593888B (en) |
WO (1) | WO2000031416A1 (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7850431B2 (en) | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
US7878765B2 (en) | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
US7897196B2 (en) | 2005-12-05 | 2011-03-01 | Entegris, Inc. | Error volume system and method for a pump |
CN101460742B (en) * | 2006-06-02 | 2011-06-08 | 诺迈特管理服务有限公司 | A volumetric pump comprising a driving mechanism |
US8025486B2 (en) | 2005-12-02 | 2011-09-27 | Entegris, Inc. | System and method for valve sequencing in a pump |
US8029247B2 (en) | 2005-12-02 | 2011-10-04 | Entegris, Inc. | System and method for pressure compensation in a pump |
US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US8087429B2 (en) | 2005-11-21 | 2012-01-03 | Entegris, Inc. | System and method for a pump with reduced form factor |
US8172546B2 (en) | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
CN101495756B (en) * | 2005-12-02 | 2012-07-04 | 恩特格里公司 | System and method for correcting for pressure variations using a motor |
US8292598B2 (en) | 2004-11-23 | 2012-10-23 | Entegris, Inc. | System and method for a variable home position dispense system |
CN103133331A (en) * | 2006-11-30 | 2013-06-05 | 恩特格里公司 | Computer system for monitoring operation of pump in manufacturing process of semiconductor |
CN103801146A (en) * | 2012-11-12 | 2014-05-21 | 帕尔公司 | System and method for conditioning filter assembly |
US8753097B2 (en) | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
CN106662083A (en) * | 2014-05-28 | 2017-05-10 | 恩特格里斯公司 | System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6325932B1 (en) | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
JP2005534111A (en) * | 2002-07-19 | 2005-11-10 | マイクロリス・コーポレーション | Liquid flow controller and precision dispensing device and system |
CN103016324B (en) * | 2005-11-21 | 2016-08-10 | 恩特格里公司 | The system and method for the position control of the mechanical piston in pump |
US7940664B2 (en) | 2005-12-02 | 2011-05-10 | Entegris, Inc. | I/O systems, methods and devices for interfacing a pump controller |
US7684446B2 (en) | 2006-03-01 | 2010-03-23 | Entegris, Inc. | System and method for multiplexing setpoints |
US7494265B2 (en) | 2006-03-01 | 2009-02-24 | Entegris, Inc. | System and method for controlled mixing of fluids via temperature |
CN101936276B (en) * | 2008-11-20 | 2013-08-21 | 张家口百通环保科技有限公司 | Metering pump for extracting, metering and releasing reducing agent solution in process of tail gas purification aftertreatment of combustion engine |
DE202010002145U1 (en) | 2010-02-09 | 2011-09-07 | Vacuubrand Gmbh + Co Kg | Diaphragm vacuum pump |
US9421498B2 (en) * | 2012-11-12 | 2016-08-23 | Pall Corporation | Systems and methods for conditioning a filter assembly |
US10132309B2 (en) * | 2013-03-15 | 2018-11-20 | Integrated Designs, L.P. | Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59177929A (en) * | 1983-03-28 | 1984-10-08 | Canon Inc | Suck back pump |
JP2803859B2 (en) * | 1989-09-29 | 1998-09-24 | 株式会社日立製作所 | Fluid supply device and control method thereof |
JPH0727150U (en) * | 1993-10-07 | 1995-05-19 | 大日本スクリーン製造株式会社 | Silica-based coating liquid ejector |
DE69814710T2 (en) * | 1997-03-03 | 2004-03-18 | Tokyo Electron Ltd. | Coating device and method |
JP3940854B2 (en) * | 1997-03-25 | 2007-07-04 | Smc株式会社 | Suck back valve |
-
1999
- 1999-11-23 CN CNB998150533A patent/CN1175182C/en not_active Expired - Fee Related
- 1999-11-23 TW TW088120448A patent/TW593888B/en not_active IP Right Cessation
- 1999-11-23 CN CNA2004100791930A patent/CN1590761A/en active Pending
- 1999-11-23 AT AT99965911T patent/ATE268867T1/en not_active IP Right Cessation
- 1999-11-23 EP EP99965911A patent/EP1133639B1/en not_active Expired - Lifetime
- 1999-11-23 DE DE69917927T patent/DE69917927T2/en not_active Expired - Fee Related
- 1999-11-23 WO PCT/US1999/028002 patent/WO2000031416A1/en active IP Right Grant
Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8172546B2 (en) | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
US9617988B2 (en) | 2004-11-23 | 2017-04-11 | Entegris, Inc. | System and method for variable dispense position |
US8814536B2 (en) | 2004-11-23 | 2014-08-26 | Entegris, Inc. | System and method for a variable home position dispense system |
US8292598B2 (en) | 2004-11-23 | 2012-10-23 | Entegris, Inc. | System and method for a variable home position dispense system |
US8651823B2 (en) | 2005-11-21 | 2014-02-18 | Entegris, Inc. | System and method for a pump with reduced form factor |
US9399989B2 (en) | 2005-11-21 | 2016-07-26 | Entegris, Inc. | System and method for a pump with onboard electronics |
US8753097B2 (en) | 2005-11-21 | 2014-06-17 | Entegris, Inc. | Method and system for high viscosity pump |
US8087429B2 (en) | 2005-11-21 | 2012-01-03 | Entegris, Inc. | System and method for a pump with reduced form factor |
US8382444B2 (en) | 2005-12-02 | 2013-02-26 | Entegris, Inc. | System and method for monitoring operation of a pump |
US7878765B2 (en) | 2005-12-02 | 2011-02-01 | Entegris, Inc. | System and method for monitoring operation of a pump |
CN101356715B (en) * | 2005-12-02 | 2012-07-18 | 恩特格里公司 | System and method for valve sequencing in a pump |
US9816502B2 (en) | 2005-12-02 | 2017-11-14 | Entegris, Inc. | System and method for pressure compensation in a pump |
US8029247B2 (en) | 2005-12-02 | 2011-10-04 | Entegris, Inc. | System and method for pressure compensation in a pump |
CN102705209B (en) * | 2005-12-02 | 2015-09-30 | 恩特格里公司 | For system and method pressure compensated in pump |
CN101495754B (en) * | 2005-12-02 | 2013-05-29 | 恩特格里公司 | System and method for operation of a pump |
CN101495756B (en) * | 2005-12-02 | 2012-07-04 | 恩特格里公司 | System and method for correcting for pressure variations using a motor |
US7850431B2 (en) | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
US8662859B2 (en) | 2005-12-02 | 2014-03-04 | Entegris, Inc. | System and method for monitoring operation of a pump |
US8678775B2 (en) | 2005-12-02 | 2014-03-25 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US8025486B2 (en) | 2005-12-02 | 2011-09-27 | Entegris, Inc. | System and method for valve sequencing in a pump |
US8083498B2 (en) | 2005-12-02 | 2011-12-27 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US9309872B2 (en) | 2005-12-02 | 2016-04-12 | Entegris, Inc. | System and method for position control of a mechanical piston in a pump |
US8870548B2 (en) | 2005-12-02 | 2014-10-28 | Entegris, Inc. | System and method for pressure compensation in a pump |
CN101360678B (en) * | 2005-12-05 | 2013-01-02 | 恩特格里公司 | Error volume system and method for a pump |
US7897196B2 (en) | 2005-12-05 | 2011-03-01 | Entegris, Inc. | Error volume system and method for a pump |
CN101460742B (en) * | 2006-06-02 | 2011-06-08 | 诺迈特管理服务有限公司 | A volumetric pump comprising a driving mechanism |
CN103133331B (en) * | 2006-11-30 | 2015-11-18 | 恩特格里公司 | For monitoring the computer system of the operation of pump in semiconductor fabrication |
CN103133331A (en) * | 2006-11-30 | 2013-06-05 | 恩特格里公司 | Computer system for monitoring operation of pump in manufacturing process of semiconductor |
US9631611B2 (en) | 2006-11-30 | 2017-04-25 | Entegris, Inc. | System and method for operation of a pump |
CN103801146B (en) * | 2012-11-12 | 2016-01-20 | 帕尔公司 | For regulating the system and method for filter assemblies |
CN103801146A (en) * | 2012-11-12 | 2014-05-21 | 帕尔公司 | System and method for conditioning filter assembly |
CN106662083A (en) * | 2014-05-28 | 2017-05-10 | 恩特格里斯公司 | System and method for operation of a pump with feed and dispense sensors, filtration and dispense confirmation, and reduced pressure priming of filter |
CN106662083B (en) * | 2014-05-28 | 2018-11-27 | 恩特格里斯公司 | For operate there is feeding and apply with sensor, filter and apply the decompression note with confirmation and filter to pump system and method |
Also Published As
Publication number | Publication date |
---|---|
WO2000031416A1 (en) | 2000-06-02 |
EP1133639A1 (en) | 2001-09-19 |
EP1133639B1 (en) | 2004-06-09 |
DE69917927T2 (en) | 2005-06-23 |
CN1175182C (en) | 2004-11-10 |
ATE268867T1 (en) | 2004-06-15 |
TW593888B (en) | 2004-06-21 |
DE69917927D1 (en) | 2004-07-15 |
CN1331783A (en) | 2002-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MYKROLIS CORP. Free format text: FORMER OWNER: MILLIPORE CORP. Effective date: 20050722 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20050722 Address after: Massachusetts USA Applicant after: Mykrolis Corp. Address before: Massachusetts USA Applicant before: Millipore Corp. |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20060519 Address after: Minnesota, USA Applicant after: MYKROLIS Corp. Address before: Massachusetts USA Applicant before: Mykrolis Corp. |
|
C12 | Rejection of a patent application after its publication | ||
RJ01 | Rejection of invention patent application after publication |