CN101495756B - System and method for correcting for pressure variations using a motor - Google Patents

System and method for correcting for pressure variations using a motor Download PDF

Info

Publication number
CN101495756B
CN101495756B CN 200680045074 CN200680045074A CN101495756B CN 101495756 B CN101495756 B CN 101495756B CN 200680045074 CN200680045074 CN 200680045074 CN 200680045074 A CN200680045074 A CN 200680045074A CN 101495756 B CN101495756 B CN 101495756B
Authority
CN
China
Prior art keywords
pressure
valve
dispensing
volume
pump
Prior art date
Application number
CN 200680045074
Other languages
Chinese (zh)
Other versions
CN101495756A (en
Inventor
G·贡内拉
J·切德罗内
R·A·扎格尔斯
R·F·麦克洛克林
Original Assignee
恩特格里公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US74168105P priority Critical
Priority to US60/741,681 priority
Application filed by 恩特格里公司 filed Critical 恩特格里公司
Priority to PCT/US2006/045176 priority patent/WO2007067359A2/en
Publication of CN101495756A publication Critical patent/CN101495756A/en
Application granted granted Critical
Publication of CN101495756B publication Critical patent/CN101495756B/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00Pumps specially modified to deliver fixed or variable measured quantities

Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.

Description

使用电机校正压力变化的系统和方法 Motor systems and methods of correcting pressure variation

[0001] 相关申请 [0001] RELATED APPLICATIONS

[0002] 本申请要求申请日为2005年12月2日,发明名称为“使用电机校正压力变化的系统禾口方法”,发明人为George Gonnella, James Cedrone, Raymond Zagars 禾口Robert McLoughlin,序列号为60/741,681的美国临时专利申请的优先权,上述专利的全部内容全面被清楚地引用于此作为参考。 [0002] This application claims filed on December 2, 2005 May, entitled "System Hekou method Motor corrected pressure change", inventor George Gonnella, James Cedrone, Raymond Zagars Hekou Robert McLoughlin, Serial No. priority to U.S. provisional Patent application No. 60 / 741,681, the entire contents of which patents are expressly incorporated herein fully by reference. 本申请是申请日为2005年2月4日,发明名称为“精确泵送装置的泵控制器”,发明人为Raymond A. Zagars等人,序列号为11/051,576的美国专利申请的部分继续申请,上述申请是申请日为1999年11月23日,发明人为Zagars等人,发明名称为“精确泵送装置的泵控制器”的美国专利申请No. 09/447,604的分案申请,上述申请又根据35U. SC § 119要求申请日为1998年11月23日的临时专利申请No. 60/109,568 的优先权,上述申请全面被清楚地引用于此作为参考。 This application is filed on February 4, 2005, entitled "Pump controller precision pumping device", inventor Raymond A. Zagars et al., U.S. Serial No. partial Patent Application 11 / 051,576 of continue to apply for the application is filed November 23, 1999, inventors Zagars et al., entitled "pump controller exact pumping device," US Patent application No. divisional application 09 / 447,604 of the application and is fully incorporated herein by reference clearly according 35U. SC § 119 Patent claims priority to provisional November 23, 1998 application No. 60 / 109,568, the above application.

技术领域 FIELD

[0003] 本发明通常涉及流体泵。 [0003] The present invention generally relates to fluid pumps. 尤其是,本发明的实施例涉及多级泵。 In particular, embodiments of the present invention relates to a multi-stage pump. 更特别地,本发明的实施例涉及用在半导体制造中的泵中的部件致动所导致的压力变化的校正。 More particularly, embodiments of the present invention relates to use in semiconductor manufacturing in the pump actuation member results in pressure changes of the correction. 背景技术 Background technique

[0004] 对于许多应用来说对泵送装置分配流体的量和/或速度的精确控制是必需的。 [0004] For many applications, precise control of the amount of dispensing a fluid pumping device and / or speed is required. 例如在半导体加工中,重要的是控制将光化学制品例如光致抗蚀化学制品施加到半导体晶片的量和速度。 For example, in semiconductor processing, it is important to control the photochemicals e.g. photo resist is applied to the chemical amount and rate of the semiconductor wafer. 在加工期间施加到半导体晶片的涂层典型地需要横过晶片的表面以埃度量的平整度。 During processing is applied to the wafer flatness required across the surface of the semiconductor wafer coating typically measure Angstroms. 必须控制将加工化学制品施加到晶片的速度以便保证均勻地施加加工液体。 Control must be applied to chemical processing speed of the wafer in order to ensure uniform application of processing liquid.

[0005] 如今半导体工业中使用的许多光化学制品非常昂贵,经常成本高达$1000每公升。 [0005] Today, many photochemical products in the semiconductor industry are very expensive and often cost as much as $ 1000 per liter. 所以,优选的是保证使用最少但是足够量的化学制品并且化学制品不被泵送装置破坏。 Therefore, it is preferable to use the least, but is to ensure a sufficient amount of chemicals and chemical pumping device is not damaged. 目前的多级泵可以导致液体中的陡压力尖峰。 The current multi-stage pump can result in steep pressure spikes liquid. 例如,负压尖峰可以导致化学制品中产生气体和气泡形成,这可以导致晶片涂层的缺陷。 For example, the negative pressure spikes can cause chemical gas generation and bubble formation, which can result in wafer defects in the coating. 类似地,正压尖峰可以导致过早聚合物交联, 这也可以导致涂层缺陷。 Similarly, positive pressure spikes can cause premature crosslinking of the polymer, which may also lead to coating defects.

[0006] 可以看出,这样的压力尖峰和随后的压力下降可以破坏流体(即,可以不利地改变流体的物理特性)。 [0006] As can be seen, such a pressure spike and the subsequent pressure drop can damage the fluid (i.e., can adversely alter physical properties of the fluid). 另外,压力尖峰可以导致累积流体压力,这可以导致分配泵多于预期的流体或以具有不良动力学的方式分配流体。 Further, the pressure spikes can lead to accumulation of fluid pressure, which may result in a fluid dispensing pump or more than expected so as to have poor dispensing fluid dynamics.

[0007] 更具体而言,当阀关闭以在泵送装置内产生圈闭空间时,该阀的关闭可以导致该封闭空间内的压力增加。 [0007] More specifically, when the valve is closed to generate traps space within the pumping device, closing the valve may cause the pressure to increase within the enclosed space. 当发生在包含等待分配的流体的分配室中时该压力增加是特别有害的。 When dispensing occurs at the fluid chamber comprises waiting for assignment of the pressure increase is particularly harmful. 因此,希望有一种方式补偿由于阀在泵送装置内的移动导致的压力增加。 Accordingly, it is desirable to have a way to cause movement of the pressure compensating valves in the pumping device is increased. 发明内容 SUMMARY

[0008] 补偿可以发生在泵送装置的各种封闭空间中的压力增加(或减小)的系统和方法。 [0008] Compensation may occur in a variety of pumping apparatus in the closed space a pressure increase (or decrease) systems and methods. 本发明的实施例可以通过移动泵送装置的泵送机构以调节腔室的体积来补偿泵送装置的腔室中的压力增加(或减小),从而补偿腔室中的压力增加(或减小)。 Embodiments of the invention may be to adjust the volume of the chamber to compensate for the pressure chamber by a pumping device in a mobile pumping device pumping mechanism is increased (or decreased), so that the pressure compensating chamber increases (or decrease small). 更具体而言,在一个实施例中,为了解决分配室中流体的不希望的压力增加,分配电机可以被反转以收回活塞以补偿分配室中的任何压力增加。 More specifically, in one embodiment, in order to solve the undesirable pressure increase in the fluid distribution chamber, dispense motor may be reversed to retract piston is increased to compensate for any pressure distribution chamber.

[0009] 本发明的实施例提供了校正压力波动的系统和方法,其基本消除或减小了先前开发的泵送系统和方法的缺陷。 Example [0009] The present invention provides a system and method of correcting pressure fluctuations, which substantially eliminates or reduces the drawbacks of previously developed pumping systems and methods. 尤其是,本发明的实施例提供了校正在多级泵或与多级泵结合使用的设备内部的各种机构或部件的致动所导致的分配室中的压力波动的系统和方法。 In particular, embodiments of the present invention provides a mechanism or correct various components within the device, or multistage pump used in conjunction with multi-stage pump system and method for dispensing actuating pressure chamber resulting in fluctuation.

[0010] 本发明的一个实施例可以在分配阶段的开始之前校正通过关闭净化阀所导致的分配室中的压力变化。 [0010] An embodiment of the present invention may be corrected before the start of dispensing phase change dispensing chamber is closed by the pressure caused by the purge valve of. 该校正通过反转分配电机使得分配室的体积增加大体净化阀的滞留体积来实现。 Correction by inverting the dispensing machine such that the volume of the dispensing chamber of the purge valve increases hold-up volume substantially achieved.

[0011] 本发明的另一实施例通过在分配阶段之前反转分配电机附加距离并且向前移动分配电机等于该附加距离的量来保证分配电机的最后运动沿向前方向。 Another [0011] embodiment of the present invention by reversing the additional distance dispense motor stage prior to dispensing and dispensing machine moves forward a distance equal to the additional amount to ensure that the final allocation of the motion of the motor in the forward direction.

[0012] 本发明的实施例可以提供在分配阶段之前允许在分配室中获得用于分配的理想基线压力的技术优点。 Example [0012] The present invention can be obtained provided that allows for distribution over the baseline pressure in the dispensing chamber prior to dispensing stage technical advantages.

[0013] 本发明的其他实施例可以提供补偿与多级泵结合使用的设备中的差异例如系统之间的压头差的能力。 [0013] Other embodiments of the present invention may provide the ability of the head difference between the compensation system used in conjunction with, for example, differences in multi-stage pump apparatus.

[0014] 本发明的某些实施例通过解决可以在分配电机的驱动组件中发生的任何齿隙游移(backlash)使得齿隙游移对分配的影响可忽略提供了优点。 [0014] Any backlash (Backlash) Certain embodiments of the present invention may occur in the motor drive assembly through the solution dispensing such that dispensing of the backlash influence is negligible provides advantages.

[0015] 当结合以下描述和附图考虑时将会更好地领会和理解本发明的这些和其他方面。 [0015] will be better appreciated and understood that these and other aspects of the present invention when considered in conjunction with the following description and accompanying drawings. 尽管指出了本发明的各种实施例及其许多特定细节,以下描述作为举例说明而不是限制被给出。 While indicating various embodiments of the present invention and numerous specific details are described below by way of illustration and not limitation are given. 可以在本发明的范围内进行许多替换、修改、增加或重布置,并且本发明包括所有这样的替换、修改、增加或重布置。 It may be made within the scope of the invention that many alternatives, modifications, additions, or rearranged, and the invention includes all such substitutions, modifications, additions, or rearranged. 附图说明 BRIEF DESCRIPTION

[0016] 结合附图可以通过参考以下描述获得对本发明及其优点的更全面理解,其中相似的参考数字指示相似的特征,并且其中: [0016] DRAWINGS A more complete understanding can be obtained of the present invention and its advantages by reference to the following description, wherein like reference numerals indicate similar thereto, and wherein:

[0017] 图1是泵送系统的一个实施例的示意图; [0017] FIG. 1 is a schematic diagram of one embodiment of the pumping system;

[0018] 图2是根据本发明的一个实施例的多级泵(“多级泵”)的示意图; [0018] FIG. 2 is a schematic diagram of a multi-stage pump ( "multi-stage pump") of a embodiment of the present invention;

[0019] 图3A,3B,4A,4C和4D是多级泵的各种实施例的示意图; [0019] FIGS. 3A, 3B, 4A, 4C, and 4D are schematic drawings of various embodiments of the multi-stage pump;

[0020] 图4B是分配块体的一个实施例的示意图; [0020] FIG. 4B is a schematic of one embodiment of the allocation of the block;

[0021] 图5是本发明的一个实施例的阀和电机定时(timing)的示意图; [0021] FIG. 5 is a schematic view of a motor and a timing valve (Timing) according to an embodiment of the present invention;

[0022] 图6是与泵一起使用的致动序列的一个实施例的示例压力分布图; [0022] FIG. 6 is an exemplary embodiment of a pressure profile of the actuation sequence for use with the pump;

[0023] 图7是与泵一起使用的致动序列的一个实施例的一部分的示例压力分布图; [0023] FIG. 7 is an exemplary embodiment of a portion of the pressure profile for use with the embodiment of FIG pump actuation sequence;

[0024] 图8A和8B是泵的操作的各个阶段的阀和电机定时的一个实施例的示意图; [0024] Figures 8A and 8B are a timing diagram of an embodiment of the valve and the motor pump the various stages of operation;

[0025] 图9A和9B是泵的操作的各个阶段的阀和电机定时的一个实施例的示意图; [0025] FIGS. 9A and 9B are a timing diagram of an embodiment of the valve and the motor pump the various stages of operation;

[0026] 图IOA和IOB是与泵一起使用的致动序列的一个实施例的一部分的示例压力分布图;和 [0026] An actuation sequence of FIGS. IOA and IOB are used with the pump pressure profile of a portion of an example of embodiment; and

[0027] 图11是泵送系统的一个实施例的示意图。 [0027] FIG. 11 is a diagram of an embodiment of the pumping system. 具体实施方式 Detailed ways

[0028] 在图中示出了本发明的优选实施例,相似的数字用于指示各个图的相似和相应的部分。 [0028] In the drawing shows a preferred embodiment of the present invention, like numerals are used for like and corresponding parts of the various figures indicate.

[0029] 本发明的实施例涉及使用泵精确地分配流体的泵送系统,所述泵可以是单级泵或多级(“多级”)泵。 [0029] Embodiments of the invention relate to the use of a pump to precisely dispense fluid pumping system, the pump may be a single-stage or multi-stage pump ( "multi-stage") pump. 尤其是,本发明的实施例可以补偿可以在泵送装置的各种封闭空间中发生的压力增加(或减小)。 In particular, the pressure of the embodiments of the invention may occur can be compensated in a wide variety of pumping apparatus closed space increases (or decreases). 本发明的实施例可以通过移动泵送装置的泵送机构以调节腔室的体积而补偿泵送装置的腔室中的压力变化,从而补偿压力变化。 Embodiments of the invention may change the pressure in the chamber means to adjust the volume of the pumping chamber is compensated by moving the pumping means pumping mechanism to compensate for pressure changes. 更具体而言,在一个实施例中,为了解决分配室中流体的不希望压力增加,分配电机可以被反转以退回活塞以补偿分配室中的任何压力增加。 More specifically, in one embodiment, the fluid distribution chamber in order to solve the undesirable pressure increase, dispense motor may be reversed to return the piston to compensate for any pressure increase in the dispensing chamber. 这样的泵送系统的实施例在申请日为2005年12月5日,发明人为JamesCedrone,George Gonnella和Iraj Gashgaee,发明名称为“具有减小的形状因数的多级泵的系统和方法”,序列号为60/742,435的美国临时专利申请中被公开,上述申请全文被引用于此作为参考。 Examples of such a pumping system in a filed December 5, 2005, by inventors JamesCedrone, George Gonnella and Iraj Gashgaee, entitled "System and method having a multi-stage pump to reduce the form factor" sequence U.S. provisional Patent application No. 60 / 742,435 is disclosed in the above applications are incorporated herein by reference in entirety.

[0030] 图1是泵送系统10的这样一个实施例的示意图。 [0030] FIG. 1 is a schematic of an embodiment 10 of the pumping system. 泵送系统10可以包括流体源15,泵控制器20和多级泵100,它们一起工作以将流体分配到晶片25上。 The pumping system 10 may include a fluid source 15, a pump controller 20 and multi-stage pump 100, which work together to dispense fluid onto the wafer 25. 多级泵100的操作可以由泵控制器20控制,其可以是机载多级泵100,或通过用于传递控制信号,数据或其他信息的一个或多个通信链路连接到多级泵100。 Operation multistage pump 100 may be controlled by pump controller 20, which may be an onboard multi-stage pump 100 or by transmitting a control signal, data or other information to one or more communication links connected to a multi-stage pump 100 . 另外,泵控制器20的功能可以在机载控制器和另一控制器之间被分配。 Further, the pump controller 20 functions may be distributed between the onboard controller and another controller. 泵控制器20可以包括包含用于控制多级泵100的操作的一组控制指令30的计算机可读介质27 (例如RAM,ROM,闪存,光盘,磁驱动或其他计算机可读介质)。 Pump controller 20 may include the operation for controlling comprise multistage pump 100 is a set of control instructions 30 the computer readable medium 27 (e.g. RAM, ROM, flash memory, optical disk, magnetic drive or other computer readable medium). 处理器35(例如CPU,ASIC,RISC,DSP或其他处理器)可以执行指令。 The processor 35 (e.g., CPU, ASIC, RISC, DSP or other processor) can execute instructions. 处理器的一个例子是Texas InstrumentsTMS320F2812PGFA 16 ^DSP (Texas Instruments 是位于德克萨斯放,达拉斯市的公司)。 An example of a processor is Texas InstrumentsTMS320F2812PGFA 16 ^ DSP (Texas Instruments is a place located in Texas, Dallas company). 在图1的实施例中,控制器20通过通信链路40和45与多级泵100通信。 In the embodiment of FIG. 1, the controller 20 and communications link 40 with the multi-stage pump 100 45 through a communication. 通信链路40和45可以是网络(例如以太网,无线网络,全局网,DeviceNet 网络或本领域中已知或开发的其他网络),总线(例如SCSI总线)或其他通信链路。 45 and communications link 40 may be a network (e.g., other network Ethernet, wireless network, global network, DeviceNet network or known in the art or developed), a bus (e.g., SCSI bus) or other communications link. 控制器20可以作为机载PCB板,远程控制器或以其他合适的方式实现。 The controller 20 can be used as an onboard PCB board, remote controller or implemented in other suitable manner. 泵控制器20可以包括连接到控制器的合适接口(例如网络接口,I/O接口,模拟数字转换器和其他部件)以与多级泵100通信。 Pump controller 20 may comprise a controller connected to a suitable interface (e.g. a network interface, I / O interfaces, analog to digital converters and other components) to communicate with the multi-stage pump 100. 另外,泵控制器20可以包括本领域中已知的各种计算机部件,包括处理器, 存储器,接口,显示设备,外围设备或为了简化起见未显示的其他计算机部件。 Further, the controller 20 may include a pump known in the art various computer components, including a processor, memory, interfaces, display devices, peripherals or other computer components for simplicity sake not shown. 泵控制器20 可以控制多级泵中的各种阀和电机以导致多级泵精确地分配流体,包括低粘度流体(即小于100厘泊)或其他流体。 Pump controller 20 may control the multi-stage pump to cause various valves and motors multistage pump to precisely dispense fluid, comprising a low viscosity fluids (i.e., less than 100 centipoise) or other fluids. 如申请日为2005年12月2日,发明人为Cedrone等人,发明名称为“用于泵的I/O接口系统和方法”,序列号为60/741,657的美国专利申请,和申请日为—,[ENTG1810-1],发明名称为“用于连接泵控制器的I/O系统,方法和设备”,序列号为—的美国专利申请中所述的I/O接口连接器可以用于将泵控制器20连接到各种接口和制造工具,上述两个申请被完全引用于此作为参考。 As filed on December 2, 2005, by inventors Cedrone et al, entitled "I / O interface system and method for pumps", U.S. Patent Application Serial No. 60 / 741,657, and filed and is -, [ENTG1810-1], entitled "for connecting the pump controller I / O systems, methods and devices", serial No. - U.S. Patent application of the I / O interface connector can be used interfaces for connecting to a variety of manufacturing tools and pump controller 20, the above-mentioned two applications are fully incorporated herein by reference.

[0031] 图2是多级泵100的示意图。 [0031] FIG. 2 is a schematic diagram of a multi-stage pump 100. 多级泵100包括进给级部分105和独立分配级部分110。 Multi-stage pump 100 includes a feed stage portion 105 and dispense stage portion 110 independently. 从流体流动观点来看,过滤器120位于进给级部分105和分配级部分110之间以从过程流体过滤杂质。 From a fluid flow point of view, the filter 120 is located in a feed stage filter impurities from the process fluid between the portion 105 and dispense stage portion 110. 许多阀可以控制通过多级泵100的流体流动,例如包括入口阀125, 隔离阀130,阻挡阀135,净化阀140,排放阀145和出口阀147。 Many valve may control fluid flow through the multi-stage pump 100 including, for example the inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140, vent valve 145 and outlet valve 147. 分配级部分110可以进一步包括确定在分配级110中的流体的压力的压力传感器112。 Dispense stage portion 110 can further include determining a pressure of the fluid in the dispensing stage 110 in a pressure sensor 112. 压力传感器112确定的压力可以用于控制如下所述的各种泵的速度。 A pressure sensor 112 for controlling pressure may be determined as follows according to the speed of the various pumps. 示例性压力传感器包括陶瓷和聚合物压阻(pesioresistive)和电容压力传感器,包括由德国Korb的Metallux AG制造的那些传感器。 Exemplary pressure sensors include ceramic and polymer piezoresistive (pesioresistive) and capacitive pressure sensors, including those manufactured by the sensor Metallux AG in Korb, Germany. 根据一个实施例,接触过程流体的压力传感器112的面是全氟聚合物。 The surface of the pressure sensor to an embodiment, the contact 112 of the process fluid is a perfluoropolymer. 泵100可以包括附加压力传感器,例如读取进给室155中的压力的压力传感器。 A pressure pump 100 may include additional sensors, such as reading the pressure sensor 155 in the feed pressure chamber of.

[0032] 进给级105和分配级110可以包括泵送多级泵100中的流体的滚动隔膜泵。 [0032] Feed stage 105 and dispense stage 110 can include rolling diaphragm pumps to pump fluid in the multistage pump 100. 进给级泵150( “进给泵150”)例如包括收集流体的进给室155,在进给室155内移动并且移动流体的进给级隔膜160,移动进给级隔膜160的活塞165,导螺杆170和步进电机175。 Feed stage pump 150 ( "feed pump 150") includes, for example collect fluid feed chamber 155, to move within feed chamber 155 and the movement of the fluid feed stage diaphragm 160 to move feed stage diaphragm 160, a piston 165, stepper motor 170 and lead screw 175. 导螺杆170通过螺母,齿轮或用于将能量从电机施加到导螺杆170的其他机构联接到步进电机175。 The lead screw 170 to the other lead screw mechanism 170 is coupled to the stepping motor 175 through a nut, gear, or for applying energy from the motor. 根据一个实施例,进给电机170旋转螺母,所述螺母又旋转导螺杆170,导致活塞165致动。 According to one embodiment, feed motor 170 rotates a nut in turn rotates the lead screw 170, causing piston 165 to the actuator. 分配级泵180( “分配泵180”)可以类似地包括分配室185,分配级隔膜190,活塞192,导螺杆195,和分配电机200。 Dispense stage pump 180 ( "dispense pump 180") may similarly include a dispense chamber 185, a dispense stage diaphragm 190, a piston 192, lead screw 195, and a dispense motor 200. 分配电机200可以通过螺纹螺母(例如Torlon或其他材料螺母)驱动导螺杆195。 Dispense motor 200 can be a threaded nut (e.g., nut Torlon or other material) driving the lead screw 195.

[0033] 根据其他实施例,进给级105和分配级110可以是各种其他泵,包括气压或液压致动泵,液压泵或其他泵。 [0033] According to other embodiments, feed stage 105 and dispense stage 110 can be a variety of other pumps including pneumatically or hydraulically actuated pumps, hydraulic pumps or other pumps. 使用进给级的气压致动泵和步进电机驱动液压泵的多级泵的一个例子在美国专利申请No. 11/051,576中被描述。 An example of the use of the feed stage of a multi-stage pneumatic actuator and a stepper motor driven pump in the hydraulic pump is described in U.S. Patent Application No. 11 / 051,576. 然而,在两级使用电机提供了消除液压管道系统,控制系统和流体的优点,由此减小了空间和潜在泄漏。 However, the use of the two hydraulic motors provides the advantage of eliminating piping system, and a fluid control system, thereby reducing space and potential leaks.

[0034] 进给电机175和分配电机200可以是任何合适的电机。 [0034] The feed motor 175 and dispense motor 200 can be any suitable motor. 根据一个实施例,分配电机200是永磁体同步电机(“PMSM”)。 According to one embodiment, dispense motor 200 is a permanent magnet synchronous motor ( "PMSM"). PMSM可以由在电机200,控制器机载多级泵100或独立泵控制器(例如如图1中所示)的利用磁场定向控制(“F0C”)或本领域中已知的其他类型的位置/速度控制的数字信号处理器(“DSP”)控制。 200 may be formed in a PMSM, the motor controller unit 100 contained in multi-stage pump or a separate pump controller (e.g. as shown in FIG. 1) by using field oriented control ( "F0C") or other type of location is known in the art a digital signal processor ( "DSP") / speed control controls. PMSM 200可以进一步包括用于实时反馈分配电机200的位置的编码器(例如细线旋转位置编码器)。 The PMSM 200 may further include a real-time encoder position feedback dispense motor 200 (e.g., a fine line rotary position encoder). 位置传感器的使用提供了活塞192的位置的精确和可重复控制,这导致对分配室185中的流体运动的精确和可重复控制。 Using a position sensor provides an accurate and repeatable control of the position of the piston 192, which leads to the dispensing chamber 185 of fluid movement precise and repeatable control. 例如,使用根据一个实施例将8000个脉冲提供给DSP的2000线编码器,有可能精确地测量和控制0. 045的旋转度。 For example, according to one embodiment using the pulse supplied to the DSP 8000 to 2000 line encoder, it is possible to accurately measure and control the degree of rotation of 0.045. 另外,PMSM可以在低速度下振动很小或没有振动地运转。 Further, PMSM little or no vibration can be operated at low speed vibration. 进给电机175也可以是PMSM或步进电机。 Feed motor 175 may be a stepping motor or PMSM. 也应当注意进给泵可以包括内部传感器(homesensor)以指示进给泵何时处于其原始位置(home position)。 It should also be noted that the feed pump may include an internal sensor (homesensor) to indicate when the feed pump is in its original position (home position).

[0035] 图3A是多级泵100的泵组件的一个实施例的示意图。 [0035] FIG 3A is a schematic diagram of one embodiment of a pump assembly of the multi-stage pump 100. 多级泵100可以包括分配块体205,所述分配块体限定通过多级泵100的各种流体流动路径并且至少部分限定进给室155和分配室185。 Multi-stage pump 100 can include a dispense block 205, the distribution block defining a fluid flow path through various multi-stage pump 100 and at least partially defines a feed chamber 155 and dispense chamber 185. 根据一个实施例,分配泵块体205可以是PTFE,改性PTFE或其他材料的单块体。 According to one embodiment, the dispensing pump block 205 may be PTFE, modified PTFE or other materials monolithic body. 由于这些材料不与或很少与许多过程流体相互作用,因此这些材料的使用允许流动通道和泵室直接加工到分配块体205中,使附加的硬件最少化。 Since these materials with little or no interaction with many process fluids, use of these materials allows the processing flow channels and the pump chamber directly into the dispense block 205, so that additional hardware is minimized. 因此通过提供集成流体歧管,分配块体205减小了对管道系统的需要。 Therefore, by providing an integrated fluid manifold, dispense block 205 reduces the need for piping system.

[0036] 分配块体205可以包括各种外部入口和出口,例如包括通过其接收流体的入口210,用于在排放阶段排放流体的排放出口215,和在分配阶段通过其分配流体的分配出口220。 [0036] The distribution block 205 may include various external inlets and outlets, for example, includes an inlet 210 through which fluid is received, the discharge outlet for discharging the fluid discharge phase 215, and dispensing a fluid dispensing outlet 220 through which the dispensing stage . 在图3A的例子中,当净化流体返回到进给室时(如图4A和图4B中所示)分配块体205并不包括外部净化出口。 In the example of FIG 3A, when the purge fluid dispensing return to the feed chamber (shown in FIG. 4A and 4B) blocks 205 does not include an external purge outlet. 然而在本发明的其他实施例中,流体可以在外部被净化。 However, in other embodiments of the present invention, the external fluid may be purified. 申请日为2005年12月2日,发明人为Iraj Gashgaee,发明名称为“0形圈低型面配件及其组件”的美国临时专利申请No. 60/741,667描述了配件的一个实施例,其可以用于将分配块体205的外部入口和出口连接到流体管线,上述申请被完全引用于此作为参考。 Filed December 2, 2005, by inventors Iraj Gashgaee, entitled application is a "low profile 0-ring fitting its components" U.S. Provisional Patent No. 60 / 741,667 describes an embodiment of an accessory, which may be used to assign the block outside the inlet and outlet fluid line 205 is connected to the application is fully incorporated herein by reference.

[0037] 分配块体205将流体传送到进给泵,分配泵和过滤器120。 [0037] The distribution block 205 is transferred to a fluid feed pump, a dispensing pump and a filter 120. 泵盖225可以保护进给电机175和分配电机200免于受损,而活塞罩227可以为活塞165和活塞192提供保护,并且根据本发明的一个实施例,可以由聚乙烯或其他聚合物形成。 Pump cover 225 may be protected from damage feed motor 200 and dispense motor 175, the piston 227 can provide protection for the cover of the piston 165 and the piston 192, and in accordance with one embodiment of the present invention, may be formed of polyethylene or other polymer . 阀板230提供可以被配置成将流体流引导到多级泵100的各种部件的阀系统(例如图2的入口阀125,隔离阀130, 阻挡阀135,净化阀140和排放阀145)的阀罩。 The valve plate 230 may be configured to provide fluid flow to the various components of the multi-stage pump valve system 100 (FIG. 2, for example, inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140 and exhaust valve 145) valve housing. 根据一个实施例,入口阀125,隔离阀130, 阻挡阀135,净化阀140和排放阀145均至少部分集成到阀板230中并且是取决于是否有压力或真空施加到相应隔膜而打开或关闭的隔膜阀。 According to one embodiment, the inlet valve 125, isolation valve 130 one embodiment, barrier valve 135, purge valve 140 and exhaust valve 145 are at least partially integrated into the valve plate 230 and is depending on whether pressure or a vacuum is applied to the diaphragm to open or close the respective the diaphragm valve. 在其他实施例中,一些阀可以在分配块体205的外部或者布置在附加阀板中。 In other embodiments, some of the valves 205 can be external or additional valve disposed on the plate member allocation block. 根据一个实施例,PTFE的片层夹在阀板230和分配块体205之间以形成各种阀的隔膜。 According to one embodiment, PTFE sheet layer 205 sandwiched between a separator to form a variety of valve plate 230 and the dispensing valve block. 阀板230包括用于每个阀的阀控制入口以将压力或真空施加到相应隔膜。 The valve plate 230 includes a control valve for each valve to the inlet pressure or vacuum is applied to the respective diaphragm. 例如,入口235对应于阻挡阀135,入口240对应于净化阀140,入口245对应于隔离阀130,入口250对应于排放阀145,并且入口255对应于入口阀125(在该情况下出口阀147在外部)。 For example, entry 235 corresponds to a barrier valve 135, inlet 240 corresponds to a purge valve 140, inlet 245 to isolation valve 130, inlet 250 corresponding to the discharge valve 145 and the inlet 255 to the inlet valve 125 (the outlet in this case valve 147 on the outside). 通过将压力或真空选择性地施加到入口,相应的阀被打开和关闭。 The pressure applied to the inlet by a vacuum or alternatively, the respective valves are opened and closed.

[0038] 阀控制气体和真空通过阀控制供给管线260被提供给阀板230,所述供给管线从阀控制歧管(在顶盖263或罩盖225之下的区域中)穿过分配块体205到达阀板230。 [0038] gases and vacuum control valve 260 is supplied to the valve plate 230 via valve control supply line, the supply line through a dispensing control valve from the manifold block (or area under the cover 263 of the cover 225) body 205 reaches the valve plate 230. 阀控制气体供给入口265将加压气体提供给阀控制歧管并且真空入口270将真空(或低压) 提供给阀控制歧管。 Inlet valve 265 controls the gas supply pressurized gas is supplied to the control valve inlet 270 and the vacuum manifold vacuum (or low pressure) is supplied to the control valve manifold. 阀控制歧管充当三通阀以通过供给管线260将加压气体或真空传送到阀板230的合适入口以致动一个或多个相应的阀。 Valve control manifold acts as a three-way valve 260 through a pressurized gas supply line or the inlet valve to a suitable vacuum transfer plate 230 to actuate one or more corresponding valve. 在一个实施例中,诸如全文被引用于此作为参考的申请日为—,[ENTG1770-1],发明人为(iashgaee等人,发明名称为“固定体积阀系统”的美国专利申请No.—中所述的阀板可以被使用,其减小了阀的滞留体积,消除了由于真空波动产生的体积变化,减小了真空要求并且减小了阀隔膜上的应力。 In one embodiment, such as an entirety is incorporated herein by reference, filed -, [ENTG1770-1], inventor (iashgaee et al, entitled "fixed volume valve system" of U.S. Patent No.- the valve plate may be used, which reduces the hold-up volume of the valve, it eliminates the change in the volume of the vacuum fluctuations, reducing the vacuum requirements and reduces stress on the valve diaphragm.

[0039] 图;3B是多级泵100的另一实施例的示意图。 [0039] FIG.; 3B is a schematic diagram of another embodiment of a multi-stage pump 100 of the embodiment. 图:3B中所示的许多特征类似于上面结合图3A中所述的那些特征。 FIG: Many of the features illustrated above in connection with FIG. 3B is similar to those features described in 3A. 然而,图:3B的实施例包括防止流体液滴进入多级泵100容纳电子设备的区域的几个特征。 However, FIG: Example 3B includes preventing fluid droplets into the multistage pump 100 receiving the electronic device several feature region. 例如当操作者从入口210,出口215或排放口220连接或断开管子时流体液滴可以出现。 For example, a fluidic droplet may occur when the operator from the inlet 210, outlet 215, or vent pipe 220 is connected or disconnected. “防液滴”特征被设计成防止潜在有害的化学制品的液滴进入泵,特别是电子设备室并且不一定需要泵是“防水的”(例如可潜入流体中而不会泄漏)。 "Anti-droplets" feature is designed to prevent drops of potentially harmful chemicals into the pump chamber and particularly the electronic device is not necessarily required to pump "waterproof" (for example, the fluid without leaking sneak). 根据其他实施例,泵可以完全被密封。 According to other embodiments, the pump can be completely sealed.

[0040] 根据一个实施例,分配块体205可以包括从接触顶盖沈3的分配块体205的边缘向外突出的垂直突出法兰或唇边272。 [0040] According to one embodiment, dispense block member 205 may include a flange portion 205 projecting perpendicularly outwardly projecting flange or lip 272 from contacting the cap 3 of the allocation block sink. 根据一个实施例,在顶部边缘上,顶盖沈3的顶部与唇边272的顶部表面齐平。 According to one embodiment, on the top edge, the top cover 3 and the top surface of the lip sink 272 flush. 这导致靠近分配块体205和顶盖沈3的顶部接口的液滴倾向于到达分配块体205上,而不是通过所述接口。 This leads to the top of the block 205 and close to the dispensing cap 3 droplets sink to the dispensing interface tends to block 205, rather than through the interface. 然而,在侧面上,顶盖沈3与唇边272的基部齐平或以另外方式从唇边272的外表面向内偏移。 However, on the side, the cap 3 and the base lip sink 272 is flush or otherwise offset from the inner face of the outer lip 272. 这导致液滴倾向于流下由顶盖沈3和唇边272产生的拐角,而不是在顶盖263和分配块体205之间流动。 This tends to cause a stream of droplets from the corners of the top cover 3 and the sink lip 272, and not flow between the cap 263 and 205 in the block allocation. 另外,橡胶密封件放置在顶盖沈3的顶部边缘和后板271之间以防止液滴在顶盖263和后板271之间泄漏。 Further, a rubber seal is placed between the top cover and the rear edge of the sink top plate 3 to prevent the droplet 271 from leaking between the cap 263 and the rear plate 271.

[0041 ] 分配块体205也可以包括倾斜部件273,所述倾斜部件包括在分配块体205中限定的倾斜表面,所述倾斜表面向下和远离泵100容纳电子设备的区域倾斜。 [0041] The distribution block 205 may also comprise an inclined member 273, the inclined member comprises an inclined surface defined in dispense block 205, and the inclined surface 100 downwardly away from the pump and the electronic device receiving the inclined region. 因此,靠近分配块体205的顶部的液滴被引导远离电子设备。 Thus, close to the dispensing of droplets at the top of the block 205 is directed away from the electronic device. 另外,泵盖225也可以稍稍向内偏离分配块体205的外侧边缘在泵100的侧面下方的液滴将倾向于流经泵盖225的接口和泵100的其他部分。 Further, the pump cover 225 may be slightly inwardly offset from the outer edge of the distribution block 205 drops below the side of the pump 100 through the pump will tend to cover other parts of the interface 100 and the pump 225.

[0042] 根据本发明的一个实施例,在金属盖与分配块体205相接的任何地方,金属盖的垂直表面可以从分配块体205的相应垂直表面稍稍向内偏移(例如1/64英寸或0. 396875 毫米)。 [0042] According to one embodiment of the present invention, the metal lid with anywhere in dispense block 205 contact the vertical surface of the metal cover member may be the respective vertical surfaces 205 is slightly offset inwardly from the distribution block (e.g. 1/64 inch or 0.396875 millimeters). 另外,多级泵100可以包括密封件,倾斜部件和其他特征以防止液滴进入多级泵100 容纳电子设备的部分。 Further, multistage pump 100 may include a sealing member, wherein the inclined member and the other portion to prevent liquid droplets entering the multistage pump 100 receiving the electronic device. 此外,如下面所述的图4A中所示,后板271可以包括进一步“防液滴”多级泵100的特征。 Further, as described below shown in FIG, 4A 271 may include a back plate wherein the multistage pump further 100 "anti droplets."

[0043] 图4A是多级泵100的一个实施例的示意图,其中分配块体205被制造成透明以显示在其中限定的流体流动通道。 [0043] FIG. 4A is a schematic of an embodiment 100 of a multistage pump, wherein the allocation block 205 is manufactured to be transparent to show the fluid flow passages defined therein. 分配块体205限定用于多级泵100的各种室和流体流动通道。 Allocation block 205 and defining a chamber for a variety of fluid flow channels 100 of the multistage pump. 根据一个实施例,进给室巧5和分配室185可以被直接加工到分配块体205中。 According to one embodiment, the feeding chamber and the distribution chamber 5 clever 185 may be machined directly into dispense block 205. 另外, 各种流动通道可以被加工到分配块体205中。 Further, the various flow channels may be allocated to processing block 205. 流体流动通道275(图5C中所示)从入口210通向入口阀。 Fluid flow channel 275 (shown in FIG. 5C) from the inlet 210 leads to inlet valve. 流体流动通道280从入口阀通向进给室155以完成从入口210到进给泵150的路径。 Fluid flow path from the inlet 280 to the chamber opening into the valve 155 to complete the path from the inlet 210 to the feed pump 150. 阀罩230中的入口阀125调节入口210和进给泵150之间的流动。 Valve cover 230 inlet valve 125 in the flow 150 between the inlet 210 and the feed pump regulator. 流动通道285将流体从进给泵150传送到阀板230中的隔离阀130。 The fluid transfer flow passage 285 from the feed pump 150 to valve plate 230 in the isolation valve 130. 隔离阀130的输出由另一流动通道(未显示)传送到过滤器120。 Output isolation valve 130 is transmitted from the other flow passage (not shown) to filter 120. 流体从过滤器120流动通过将过滤器120连接到排放阀145和阻挡阀135的流动通道。 The fluid valve 120 is connected to the discharge flow channel 145 and barrier valve 135 from the filter 120 flows through the filter. 排放阀145的输出被传送到排放出口215,而阻挡阀135 的输出通过流动通道290被传送到分配泵180。 Output 145 is transmitted to the exhaust valve discharge outlet 215, while the output of the blocking valve 135 through the flow passage 290 is transmitted to the dispense pump 180. 分配泵可以在分配阶段期间通过流动通道295将流体输出到出口220,或者在净化阶段中通过流动通道300将流体输出到净化阀。 Dispense pump 295 can be output during dispensing the fluid phase through the flow channels to the outlet 220, or output to purge valve in the purge stage of the fluid through the flow channel 300. 在净化阶段期间,流体可以通过流动通道305返回到进给泵150。 During the decontamination phase, the fluid 305 can be returned to the feed pump 150 through the flow channel. 由于流体流动通道可以直接在PTFE(或其他材料)块体中形成,因此分配块体205可以充当多级泵100的各种部件之间的过程流体的管道系统,从而消除或减小了对附加管道系统的需要。 Since the fluid flow path may be formed directly in the PTFE (or other material) block, the allocation block 205 thus may act as a process fluid conduit system between the various components of the multi-stage pump 100, thereby eliminating or reducing the additional need piping system. 在其他情况下,管道系统可以被插入分配块体205中以限定流体流动通道。 In other cases, the system may be inserted into the conduit 205 to define a fluid flow channel allocation block. 图4B根据一个实施例提供了被制造成透明以显示其中的几个流动通道的分配块体205的示意图。 Figure 4B provides a schematic block allocation in which several flow channel 205 is manufactured to be transparent to display, according to one embodiment.

[0044] 返回图4A,图4A也显示了包括进给级电机190,包括分配电机200的分配泵180, 和阀控制歧管302的多级泵100,其中泵盖225和顶盖263被去除以显示进给泵150。 [0044] Returning to FIG. 4A, which also shows the feed stage comprises a motor 190, the motor 200 includes a dispensing pump to dispense 180, and a valve control manifold 302 of multistage pump 100, 225 wherein the pump cover and the top cover 263 is removed to display the feed pump 150. 根据本发明的一个实施例,进给泵150,分配泵180和阀板230的部分可以使用插入分配块体205中的相应腔中的棒(例如金属棒)联接到分配块体205。 According to an embodiment of the present invention, a feed pump 150, dispense pump 180 and the valve plate portion 230 bar may be used in the respective cavities (e.g., metal rod) is inserted into the allocation block 205 is coupled to the dispense block 205. 每个棒可以包括接收螺杆的一个或多个螺纹孔。 Each rod may comprise one or more threaded hole for receiving the screw. 作为例子,分配电机200和活塞罩227可以通过一个或多个螺杆(例如螺杆275和螺杆观0)安装到分配块体205,所述螺杆穿过分配块体205中的螺纹孔以拧入棒观5的相应孔中。 By way of example, dispense motor 200 and piston 227 may cover 205 via one or more mounting screws (e.g., screws 275 and a screw concept 0) to the allocation block, the allocation of a screw through a threaded hole in the block 205 screwed to the rod 5 View of corresponding holes. 应当理解用于将部件联接到分配块体205的该机构仅仅作为例子被提供并且任何合适的附连机构可以被使用。 It should be appreciated that the means for coupling to the dispensing mechanism 205 of the block are provided merely examples and any suitable attachment mechanism may be used as.

[0045] 根据本发明的一个实施例,后板271可以包括向内延伸凸耳(例如托架274),顶盖263和泵盖225安装到所述凸耳。 [0045] Example, the rear plate 271 in accordance with one embodiment of the present invention may include inwardly extending lugs (e.g. carrier 274), the top cover 263 and pump cover 225 is mounted to the lug. 由于顶盖263和泵盖225重叠托架274(例如在顶盖263的底部和后缘和泵盖225的顶部和后缘),因此防止液滴流入顶盖263的底部边缘和泵盖225的顶部边缘之间或在顶盖263和泵盖225的后部边缘的任何空间之间的电子设备区域中。 Since the top cover 263 and pump cover 225 overlap bracket 274 (e.g., the top cover 225 and a trailing edge and a trailing edge at the bottom of the cap and the pump 263), and thus prevent the bottom edge of the droplet flows into the pump cover 263 of the cover 225 the electronic device of any space between the region between the top edge 225 or rear edge of the lid in the top cover 263 and the pump.

[0046] 根据本发明的一个实施例,歧管302可以包括一组电磁阀以选择性地将压力/真空引导到阀板230。 [0046] According to one embodiment of the present invention, the manifold 302 may include a set of solenoid valves to selectively direct pressure / vacuum valve to the guide plate 230. 当取决于实现方式特定螺线管打开,由此将真空或压力引导到阀时,螺线管将产生热量。 When the solenoid is opened depending on the particular implementation, whereby vacuum or pressure directed to the valve, the solenoid will generate heat. 根据一个实施例,歧管302安装在PCB板(其安装到后板271并且在图4C中更好地被显示)之下远离分配块体205特别是分配室185。 According to one embodiment, the manifold 302 is mounted on the PCB (which is mounted to the rear plate 271 and is better shown in FIG. 4C) away from dispense block 205 under the particular dispensing chamber 185. 歧管302可以安装到托架,所述托架又安装到后板271或者可以以另外方式联接到后板271。 The manifold 302 may be mounted to a carriage in turn is mounted to the rear plate 271 or may be coupled to the rear plate 271 otherwise. 这帮助防止来自歧管302中的螺线管的热量影响分配块体205中的流体。 This helps prevent the heat from the manifold solenoid 302 effects fluid distribution block 205. 后板271可以由不锈钢,加工铝或可以消散来自歧管302和PCB的热量的其他材料制造。 After the plate 271 may be made of stainless steel, machined aluminum or other material can dissipate heat from the manifold 302 and the PCB. 换句话说,后板271可以充当用于歧管302和PCB的散热托架。 In other words, the back plate 271 may serve as heat carrier manifold 302 and the PCB. 泵100可以进一步安装到后板271可以将热量传导到的表面或其他结构。 Pump 100 may be further mounted to the rear plate 271 conducts heat to the surface or other structure. 因此,后板271和它所附连的结构充当用于歧管302和泵100的电子设备的散热器。 Thus, back plate 271 and the structure it is attached to act as a heat sink for the electronic device manifold 302 and the pump 100.

[0047] 图4C是多级泵100的示意图,其显示了用于将压力或真空提供给阀板230的供给管线沈0。 [0047] FIG 4C is a schematic view of a multi-stage pump 100, which shows the supply line for the pressure or vacuum supplied to the sink valve plate 230 0. 如结合图3所述,阀板230中的阀可以被配置成允许流体流到多级泵100的各种部件。 As in connection with Figure 3, the valve plate valve 230 may be configured to allow fluid flow to the various components of the multi-stage pump 100. 阀的致动由将压力或真空引导到每个供给管线沈0的阀控制歧管302控制。 Guided by actuation of the valve or pressure control of each vacuum supply line 302 to the valve control manifold 0 sink tube. 每个供给管线260可以包括带有小孔口的配件(典型配件在318被指示)。 Each supply line 260 may include accessory has a small orifice (typically fitting is indicated at 318). 所述孔口可以具有比配件318所附连的相应供给管线沈0的直径更小的直径。 The aperture may have a diameter ratio of the appended fitting 318 connected to a respective supply line 0 Shen smaller diameter. 在一个实施例中,所述孔口直径可以为大约0.010英寸。 In one embodiment, the orifice diameter may be about 0.010 inches. 因此,配件318的孔口可以用于在供给管线沈0中设置限制。 Thus, the orifice fitting 318 may be used to limit supply line disposed in Shen 0. 每个供给管线260中的孔口帮助减轻将压力和真空施加到供给管线之间的陡压力差的影响, 并且因此使压力和真空施加到阀之间的过渡平滑。 Each aperture in the supply line 260 is applied to help reduce the impact of the steep pressure and vacuum pressure differential between the supply line, and thus the pressure and vacuum is applied to smooth the transition between the valve. 换句话说,所述孔口帮助减小压力变化对下游阀的隔膜的影响。 In other words, the orifice helps to reduce the influence of the pressure variations downstream of the diaphragm valve. 这允许阀更平滑和更缓慢地打开和关闭,这可以导致由阀的打开和关闭引起的系统内更平滑的压力过渡增加并且实际上可以增加阀自身的寿命。 This allows for smoother and valves open and close more slowly, which may be caused by the valve opening and closing in the system caused by a smoother transition pressure increase and may actually increase the life of the valve itself.

[0048] 图4C也示出了歧管302可以联接到其上的PCB 397。 [0048] Figure 4C also shows the manifold 302 may be coupled to PCB 397 thereto. 根据本发明的一个实施例, 歧管302可以接收来自PCB板397的信号以导致螺线管打开/关闭以将真空/压力引导到各种供给管线260以控制多级泵100的阀。 According to one embodiment of the present invention, the manifold 302 may receive signals from the PCB 397 to cause the solenoid open / closed to the vacuum / pressure supply line guide to the various control valves 260 to 100 of the multistage pump. 再次地,如图4C中所示,歧管302可以位于PCB397离分配块体205的远端以减小热量对分配块体205中的流体的影响。 Again, as shown in FIG. 4C, the manifold 302 may be located in the influence of the fluid 205 from the distal end of PCB397 dispense block 205 to reduce the heat of the allocation block. 另外,在基于PCB设计和空间限制的可行范围内,产生热量的部件可以放置在PCB远离分配块体205的侧面上,从而再次减小了热量的影响。 Further, to the extent feasible based on PCB design and space limitations, the heat generating member may be placed on the side of the PCB away from dispense block 205, thereby reducing the influence of heat again. 来自歧管302和PCB 397的热量可以由后板271消散。 Heat from the manifold 302 and the PCB 397 may be dissipated by the rear plate 271. 在另一方面,图4D是泵100的一个实施例的示意图,其中歧管302直接安装到分配块体205。 On the other hand, FIG. 4D is a diagram of an embodiment of the pump 100, in which the manifold 302 is mounted directly to dispense block 205.

[0049] 现在有用的是描述多级泵100的操作。 [0049] Now it is useful to describe the operation of the multi-stage pump 100. 在多级泵100的操作期间,多级泵100的阀被打开或关闭以允许或限制流体流动到多级泵100的各个部分。 During operation of the multi-stage pump 100, a valve multistage pump 100 is opened or closed to allow or restrict fluid flow to various portions of the multi-stage pump 100. 根据一个实施例,这些阀可以是气压致动(即气体驱动)隔膜泵,其取决于是否施加压力或真空而打开或关闭。 According to one embodiment, these valves can be pneumatically actuated (i.e., gas driven) diaphragm pump, depending on whether the application of pressure or vacuum to open or close. 然而,在本发明的其他实施例中,可以使用任何合适的阀。 However, in other embodiments of the present invention, any suitable valve may be used.

[0050] 以下提供了多级泵100的操作的各个阶段的概述。 [0050] The following provides an overview of the operation of the various stages of the multi-stage pump 100. 然而,可以根据各种控制方案控制多级泵100以排序阀和控制压力,所述控制方案包括但不限于申请日为2006年8 月11 日,发明人为MichaelClarke,Robert F. McLoughlin 和Marc Laverdiere,发明名称为“用于浸入式平版印刷术系统中的流体流动控制的系统和方法”的美国专利申请No. 11/502, 729中所述的那些控制方案。 However, pump 100 may be controlled to sort multistage valve and the control pressure, the control scheme in accordance with various control programs including but not limited to the filing date of August 11, 2006, inventors MichaelClarke, Robert F. McLoughlin and Marc Laverdiere, U.S. Patent entitled "method and system for immersion lithography fluid flow control system," application No. those control schemes according to 11/502, 729. 根据一个实施例,多级泵100可以包括准备阶段, 分配阶段,填充阶段,过滤前阶段,过滤阶段,排放阶段,净化阶段和静态净化阶段。 According to one embodiment, the multi-stage pump 100 can include a preparation stage, distribution stage, filling stage, pre-filtering stage, filtration stage, the discharge stage, purification stage and static purge stage. 在进给阶段期间,入口阀125被打开并且进给级泵150移动(例如牵拉)进给级隔膜160以将流体抽吸到进给室155中。 During the feeding phase, the inlet valve 125 is opened and feed stage pump 150 moves (e.g., pulls) feed stage diaphragm 160 to draw fluid into feed chamber 155. 一旦足够量的流体填充进给室155,入口阀125被关闭。 Once a sufficient amount of fluid filled into the chamber 155 to the inlet valve 125 is closed. 在过滤阶段期间,进给级泵150移动进给级隔膜160以从进给室155排出流体。 During the filtration segment, feed-stage pump 150 moves feed stage diaphragm 160 to discharge fluid from the feed chamber 155. 隔离阀130和阻挡阀135被打开以允许流体通过过滤器120流到分配室185。 Isolation valve 130 and barrier valve 135 is opened to allow fluid flow into dispense chamber 185 through the filter 120. 根据一个实施例,隔离阀130 可以首先被打开(例如在“过滤前阶段”)以允许压力在过滤器120中形成并且然后打开阻挡阀135以允许流体流入分配室185。 According to one embodiment, the isolation valve 130 can be opened first (e.g. the "front stage filter") is formed to allow the pressure in the filter 120 and then barrier valve 135 opened to allow fluid flow into dispense chamber 185. 根据一个实施例,隔离阀130和阻挡阀135都可以被打开并且移动进给泵以在过滤器的分配侧形成压力。 According to one embodiment, the isolation valve 130 and barrier valve 135 can be opened and moved to form a feed pump pressure in the distribution side of the filter. 在过滤阶段期间,可以将分配泵180置于其原始位置。 During the filtration segment, dispense pump 180 can be placed in its original position. 如两者都被引用于此作为参考的申请日为2004年11月23日,发明人为Laverdiere等人,发明名称为“用于可变原始位置分配系统的系统和方法”的美国临时专利申请No. 60/630,384和申请日为2005年11月21日,发明人为Laverdiere等人,发明名称为“用于可变原始位置分配系统的系统和方法”的PCT申请No. PCT/US2005/042127 中所述,分配泵的原始位置可以是这样一个位置,该位置为分配周期提供在分配泵的最大可用体积,但是小于分配泵可以提供的最大可用体积。 As both of which are incorporated herein by reference, filed November 23, 2004, inventors Laverdiere et al., Entitled No to apply for "System and Method original location distribution system for a variable" US Provisional Patent . 60 / 630,384 and filed November 21, 2005, inventors et Laverdiere human, the PCT entitled "system and method for dispensing a variable position of the original system" application No. PCT / US2005 / 042127 in the home position of the dispense pump can be such a position that for the allocation period to provide the maximum available volume in the dispensing pump, but less than the maximum available volume of the dispense pump can be provided. 基于分配周期的各种参数选择原始位置以减小多级泵100的未使用滞留体积。 Based on the various dispensing cycle parameters selected original position multistage pump to reduce unused hold-up volume of 100. 进给泵150可以类似地被置于原始位置,该原始位置提供的体积小于其最大可用体积。 Feed pump 150 may be similarly placed in the original position, the volume of which is less than its original position to provide the maximum available volume.

[0051] 在排放阶段的开始,隔离阀130被打开,阻挡阀135被关闭并且排放阀145被打开。 [0051] At the beginning of the discharge phase, the isolation valve 130 is opened, barrier valve 135 is closed and the exhaust valve 145 is opened. 在另一实施例中,阻挡阀135可以在排放阶段期间保持打开并且在排放阶段结束时关闭。 In another embodiment, barrier valve 135 can remain open and close at the end of the discharge phase during the discharge phase. 在这时,如果阻挡阀135打开,控制器可以感觉到压力,原因是可以由压力传感器112 测量的分配室中的压力将受过滤器120中的压力影响。 At this time, if the blocking valve 135 is opened, the controller may feel the pressure, because the pressure affects may be received in the filter 120 by the pressure sensor measuring the dispensing chamber 112 in. 进给级泵150将压力施加到流体以通过打开的排放阀145从过滤器120去除气泡。 Feed stage pump 150 applies pressure to the fluid to remove air bubbles from filter 120 through open vent valve 145. 进给级泵150可以被控制以导致以预定速度发生排放,允许更长的排放时间和更低的排放速度,由此允许排放废物量的精确控制。 Feed stage pump 150 may be controlled to cause the occurrence of discharge at a predetermined rate, allowing for longer discharge time and the discharge speed lower, thereby allowing precise control of the discharge amount of waste. 如果进给泵是气动型泵,流体流动限制可以放置在排放流体路径中,并且施加到进给泵的气压可以增加或减小以便保持“排放”设置点压力,提供其他未受控方法的一些控制。 If the feed pump is a pneumatic pump, a fluid flow restriction may be placed in the discharge fluid path, and applying pressure to the feed pump may increase or decrease in order to maintain "emission" set point pressure, to provide some other uncontrolled methods control.

[0052] 在净化阶段开始时,隔离阀130被关闭,如果在排放阶段是打开的,阻挡阀135被关闭,排放阀145被关闭,净化阀140被打开并且入口阀125被打开。 [0052] at the beginning of the purge stage, the isolation valve 130 is closed, if the discharge stage is opened, barrier valve 135 is closed, discharge valve 145 is closed, purge valve 140 is opened and the inlet valve 125 is opened. 分配泵180将压力施加到分配室185中的流体以通过净化阀140排放气泡。 Dispense pump 180 applies pressure to the fluid in dispense chamber 185 through purge valve 140 to discharge air bubbles. 在静态净化阶段期间,分配泵180被停止,但是净化阀140保持打开以继续排放空气。 During the static purge segment, dispense pump 180 is stopped, but purge valve 140 remains open to continue the discharge air. 在净化或静态净化阶段期间去除的任何过多流体可以被传送到多级泵100之外(例如返回到流体源或被丢弃)或者再循环到进给级泵150。 Any excess fluid during the purge or static purge stage removal may be transferred to outside multistage pump 100 (e.g., returned to the fluid source or discarded) or recycled to feed-stage pump 150. 在准备阶段期间,入口阀125,隔离阀130和阻挡阀135可以被打开并且净化阀140被关闭使得进给级泵150可以达到该源(例如源瓶)的环境压力。 During the preparation phase, the inlet valve 125, isolation valve 130 and barrier valve 135 can be opened and the purge valve 140 is closed so that the feed stage pump 150 can reach the source (e.g., source bottle) ambient pressure. 根据其他实施例,在准备阶段所有阀可以被关闭。 According to other embodiments, the preparation phase of all valves can be closed.

[0053] 在分配阶段期间,出口阀147打开并且分配泵180将压力施加到分配室185中的流体。 [0053] During the dispense segment, outlet valve 147 opens and dispense pump 180 applies pressure to the fluid in dispense chamber 185. 由于出口阀147可以比分配泵180更慢地对控制起反应,出口阀147可以首先被打开并且在预定的一段时间以后分配电机200被启动。 Because outlet valve 147 may control 180 more slowly than the reaction starting dispensing pump outlet valve 147 can be opened first and dispense motor 200 is activated after a predetermined period of time. 这防止分配泵180推动流体通过部分打开的出口阀147。 This prevents dispense pump 180 from pushing fluid outlet valve 147 is opened by the portion. 而且,这防止阀打开所导致的流体沿分配喷嘴向上移动,继之以电机动作所导致的流体向前运动。 Moreover, this prevents the fluid valve is opened resulting in the dispensing nozzle is moved upward, followed by operation of the motor caused by the fluid forward motion. 在其他实施例中,出口阀147可以被打开并且同时由分配泵180 开始分配。 In other embodiments, the outlet valve 147 may be opened simultaneously and begin dispensing by the dispensing pump 180.

[0054] 可以执行分配喷嘴中的过多流体被去除的附加倒吸阶段。 [0054] The stage may perform additional suck excess fluid dispensing nozzle is removed. 在倒吸阶段期间,出口阀147可以关闭并且副电机或真空可以用于将过多流体吸到出口喷嘴之外。 During the suckback stage, the outlet valve 147 may be closed and the secondary motor or vacuum can be used to excess fluid sucked outside the outlet nozzle. 备选地,出口阀147可以保持打开并且分配电机200可以被反转以将流体吸回到分配室中。 Alternatively, the outlet valve 147 can remain open and dispense motor 200 can be reversed to draw fluid back to the distribution chamber. 倒吸阶段帮助防止过多流体滴到晶片上。 Suckback stage helps prevent dripping excess fluid on the wafer.

[0055] 主要参考图5,该图提供了用于图2的多级泵100的各个操作阶段的阀和分配电机定时的示意图。 [0055] Referring primarily to Figure 5, this figure provides a schematic of a multistage pump of FIG. 2 for various phases of operation of the motor 100 and dispensing valve timing. 尽管在阶段变化期间几个阀被显示成同时关闭,但是阀的关闭可以被定时成稍稍分隔(例如100毫秒)以减小压力尖峰。 Although the phase variation during several valves are shown as closed simultaneously, but the shut-off valve can be timed to be slightly separated (e.g., 100 msec) to reduce the pressure spikes. 例如,在排放和净化阶段之间,隔离阀130 可以在排放阀145之前不久被关闭。 For example, between the discharge and cleaning stage, the isolation valve 130 may be closed shortly before the discharge valve 145. 然而应当注意,其他阀定时可以在本发明的各种实施例中被利用。 It should however be noted that other embodiments may be utilized valve timing of the various embodiments of the present invention. 另外,几个阶段可以一起被执行(例如填充/分配阶段可以同时被执行,在该情况下入口和出口阀可以在分配/填充阶段中都是打开的)。 Furthermore, several stages may be performed together (e.g. filling / dispensing phase may be performed simultaneously, the inlet and outlet valves are open may be allocated / filling phase in this case). 进一步应当注意特定阶段并不一定在每个周期重复。 It should further be noted that a particular stage is not necessarily repeated in each cycle. 例如,净化和静态净化阶段可以不在每个周期被执行。 For example, purification and static purification stage may not be performed every cycle. 类似地,排放阶段可以不在每个周期被执行。 Similarly, the discharge phase may not be performed every cycle.

[0056] 各种阀的打开和关闭可以导致多级泵100内的流体的压力尖峰。 [0056] The opening and closing of the various valves can cause pressure spikes fluid within the multistage pump 100. 由于出口阀147 在静态净化阶段期间被关闭,例如在静态净化阶段结束时关闭净化阀140可以导致分配室185中的压力增加。 Because outlet valve 147 is closed during the static purge stage, the purge valve closed for example at the end of the static purge stage 140 can cause the pressure distribution chamber 185 is increased. 发生该情况的原因是每个阀当其关闭时可以移走少量体积的流体。 This is the case because the occurrence of each valve can be closed when it is removed in a small volume of fluid. 尤其是,在许多情况下在从室185分配流体之前净化周期和/或静态净化周期用于净化来自分配室185的空气以便在从多级泵100分配流体中防止溅射或其他扰动。 In particular, in many cases the purge cycle and / or static purge cycle prior to dispensing the fluid from the chamber 185 to purge air from the distribution chamber 185 so as to prevent sputtering or other disturbances in the dispensing fluid 100 in a multi-stage pump. 然而在静态净化周期结束时,净化阀140关闭以便密封分配室185以准备开始分配。 However, at the end of the static purge cycle, the purge valve 140 closed to seal the dispensing chamber 185 in preparation for the start allocation. 当净化阀140关闭时它将额外流体体积(大约等于净化阀140的滞留体积)推入分配室185中,这又导致分配室185中流体的压力增加到用于分配流体的基线压力以上。 When the additional volume of the fluid will close the purge valve 140 (approximately equal to the retention volume of purge valve 140) into dispense chamber 185, which in turn causes the fluid pressure in the dispensing chamber 185 is increased above the baseline pressure for dispensing fluid. 该过大压力(高于基线)可以导致随后流体分配的问题。 The excess pressure (above the baseline) may cause problems in subsequent fluid dispensing. 这些问题在低压应用中被加剧,原因是净化阀140的关闭所导致的压力增加可以占期望用于分配的基线压力的更大百分比。 These problems are exacerbated in low pressure applications, because the purge valve 140 closed the pressure increase due to a greater percentage of the baseline may represent a desired pressure for dispensing of the.

[0057] 更具体而言,由于关闭净化阀140产生的压力增加,在随后的分配阶段期间如果压力不减小则会发生流体“喷射”到晶片上,双倍分配或其他不想要的流体动力学。 [0057] More specifically, since the pressure generated by closing the purge valve 140 is increased, during a subsequent dispensing fluid phase hydrodynamic "injected" into the wafer, or other unwanted double assignment if the pressure does not decrease occurs learn. 另外, 当在多级泵100的操作期间该压力增加不恒定时,这些压力增加可以在连续分配阶段期间导致分配流体量或者其他分配特性的变化。 Further, when during the operation of the multi-stage pump 100 increases the pressure is not constant, the pressure increase may cause a change in the amount of fluid dispensing or other dispensing characteristics of dispensing during the successive stages. 这些分配上的变化又可以导致晶片废品的增加和晶片的返工。 These changes in distribution and in turn can lead to increased wafer rework of wafer scrap. 本发明的实施例解决了由于系统内的各种阀关闭产生的压力增加以实现用于开始分配阶段的想要的开始压力,通过在分配之前允许在分配室185中实现几乎任何基线压力解决了系统之间的不同压头和其他设备差异。 Embodiments of the invention address the various valves in the system is increased closing pressure generating pressure started to implement a desired phase distribution is started, to achieve virtually any solves the baseline pressure distribution chamber 185 prior to dispensing by allowing different pressure head differences between the devices and other systems.

[0058] 在一个实施例中,为了解决分配室185中流体不希望的压力增加,在静态净化阶段期间分配电机200可以被反转以退回活塞192预定距离以补偿阻挡阀135,净化阀140和/或可以导致分配室185中的压力增加的任何其他来源的关闭所导致的任何压力增加。 [0058] In one embodiment, in order to solve the fluid distribution chamber 185 undesired pressure increase, during the static purge stage dispensing motor 200 may be reversed to return the piston 192 a predetermined distance to compensate for the barrier valve 135, purge valve 140 and / or may cause any pressure increase in dispense chamber 185 to close any other source that result in increased. 可以如引用于此的申请日为2005年12月2日,发明人为George Gonnel Ia和James Cedrone, 发明名称为“用于控制流体压力的系统和方法”的美国专利申请No. 11/292, 559和申请日为2006年2月沘日,发明人为George Gonnella和James Cedrone,发明名称为“用于监视泵的操作的系统和方法”的美国专利申请No. 11/364,286中所述通过调节进给泵150的速度控制分配室185中的压力。 As can be cited as herein filed December 2, 2005, inventor George Gonnel Ia and James Cedrone, entitled Application No. 11/292, 559 U.S. Patent, "systems and methods for controlling fluid pressure" in and filed May Bi February 2006, by inventors George Gonnella and James Cedrone, entitled "system and method for monitoring the operation of the pump," U.S. Patent application No. 11 / 364,286 by adjusting the speed control feed pump 150 in the dispensing chamber 185 pressure.

[0059] 因此,本发明的实施例提供了带有温和流体操作特性的多级泵。 [0059] Thus, embodiments of the present invention provides a multi-stage pump with gentle fluid handling characteristics. 通过在分配阶段之前补偿分配室中的压力波动,可以避免或减轻潜在的破坏性压力尖峰。 By compensating the pressure distribution chamber prior to dispensing phase fluctuations, avoided or mitigated potentially destructive pressure spikes. 本发明的实施例也可以利用其他泵控制机构和阀定时以帮助减小压力和压力变化对过程流体的有害影响。 Embodiments of the invention may also be utilized other pump control mechanism and the valve timing to help reduce the harmful effects of stress and pressure change of the process fluid.

[0060] 为此,注意用于补偿可能在泵送装置的各种封闭空间中出现的压力增加或减小的系统和方法。 [0060] To this end, note that the system and method of pressure compensation that may occur in a variety of enclosed spaces a pumping device for increasing or decreasing. 本发明的实施例可以通过移动泵送装置的泵送机构调节室的体积以补偿泵送装置的室中的压力增加或减小,从而补偿室中的压力增加或减小。 Embodiments of the invention can be produced by adjusting the volume of the pumping chamber of the moving mechanism of the pumping means to increase or decrease the pressure compensating chamber in a pumping apparatus so that the pressure compensating chamber increases or decreases. 更具体而言,在一个实施例中,为了解决分配室中流体不希望的压力增加,分配电机可以被反转以退回活塞,从而补偿分配室中的任何压力增加。 More specifically, in one embodiment, the fluid distribution chamber in order to solve the undesirable pressure increase, dispense motor may be reversed to return the piston to compensate for any pressure increase in the dispensing chamber.

[0061] 可以参考图6更好地理解这些压力变化的减小,图6示出了用于操作根据本发明的一个实施例的多级泵在分配室185的示例性压力分布图。 We understood that [0061] Referring to FIG 6 may be better to reduce these pressure variations, FIG. 6 shows the operation of a multistage pump according to one embodiment of the present invention in an exemplary distribution of the pressure distribution chamber 185 of FIG. 在点440,分配开始并且分配泵180将流体推出出口。 At point 440, allocation start the pump and dispense the fluid out the outlet 180. 分配在点445结束。 Distribution end point 445. 在填充阶段期间在分配室185的压力保持相当恒定,原因是在该阶段中典型地不涉及分配泵180。 During the filling phase the pressure in the dispensing chamber 185 is kept fairly constant, because at this stage typically does not involve the dispense pump 180. 在点450,过滤阶段开始并且进给级电机175以预定速度前进以推动来自进给室155的流体。 It begins at point 450 and the intake, the filtration stage to stage motor 175 at a predetermined forward speed to push fluid from feed chamber 155. 在图6中可以看到,分配室185中的压力开始升高以在点455到达预定设定点。 It can be seen in FIG. 6, the pressure in the dispensing chamber 185 begins to rise to reach a predetermined set point at point 455. 当分配室185中的压力到达设定点时,分配电机200以恒定速度反转以增加分配室185中的可用体积。 When the pressure in the dispensing chamber 185 reaches the set point, at a constant speed distribution is reversed to increase the dispensing chamber 185 in motor 200 available volume. 在点455和点460之间的压力分布图的相对平直部分中,当压力下降到设定点之下时进给电机175的速度增加并且当到达设定点时减小。 In a relatively flat portion of the pressure profile between the point 455 and the point 460, when the pressure drops below the setpoint speed of the motor 175 of the feed increases and decreases when the setpoint is reached. 这将分配室185中的压力保持在大致恒定的压力。 This dispensing chamber 185 is maintained at a pressure substantially constant pressure. 在点460,分配电机200到达其原始位置并且过滤阶段结束。 At point 460, dispense motor 200 reaches the end of its original position and the filtration stage. 在过滤结束时阻挡阀135的关闭导致在点460的陡压力尖峰。 At the end of the filter 135 causes the barrier valve is closed at the point of steep pressure spike 460.

[0062] 在排放和净化阶段之后并且在静态净化阶段结束之前,净化阀140被关闭,导致在压力分布图中的点1500开始的压力尖峰。 [0062] After discharge and cleaning stage and before the end of the static purge stage, purge valve 140 is closed, causing the pressure peak at the start of the pressure profile 1500. 可以看出在压力分布图中的点1500和1502之间分配室185中的压力可以由于该关闭经历显著增加。 In the pressure profile it can be seen that the pressure distribution chamber 185 may significantly increase due to the closing elapsed between points 1500 and 1502. 由于净化阀140的关闭产生的压力增加通常不是一致的,并且取决于系统的温度和用于多级泵100的流体的粘度。 Since the purge pressure shut-off valve 140 is increased generated is usually not uniform, depending on the viscosity of the fluid and the temperature of the system and a multi-stage pump 100.

[0063] 为了解决发生在点1500和1502之间的压力增力卩,分配电机200可以被反转以退回活塞192预定距离以补偿由阻挡阀135,净化阀140和/或任何其他来源导致的任何压力增加。 [0063] In order to solve the pressure point occurs between 1500 and 1502 booster Jie, dispense motor 200 can be reversed to return the piston 192 a predetermined distance to compensate for the barrier valve 135, purge valve 140 and / or due to any other source any increase in pressure. 在一些情况下,由于净化阀140需要一定的时间来关闭,因此理想的是在反转分配电机200之前延迟一定的时间。 In some cases, since the purge valve 140 closed to take some time, it is desirable that the reversing motor 200 prior to dispensing a certain time delay. 因此,压力分布图上的点1500和1504之间的时间反映了关闭净化阀140的信号和分配电机200的反转之间的延迟。 Thus, a point on the pressure profile between 1500 and 1504 reflect the time delay between the signal reversal close the purge valve and dispense motor 140 to 200. 该时间延迟足以允许净化阀140 完全关闭,并且分配室185内的压力基本确定,其可以为大约50毫秒。 This time delay sufficient to allow the purge valve 140 is fully closed, and the pressure in the dispensing chamber 185 is determined substantially, it may be about 50 milliseconds.

[0064] 当净化阀140的滞留体积是已知量(例如在制造公差内)时,分配电机200可以被反转以退回活塞19¾补偿距离以使分配室185的体积增加大约等于净化阀140的滞留体积。 [0064] When the purge valve 140 is a retention volume of a known quantity (e.g., within manufacturing tolerances), dispense motor 200 can be reversed to return the piston to bring the volume compensation distance 19¾ dispensing chamber 185 is approximately equal to the increase of the purge valve 140 hold-up volume. 当分配室185和活塞192的尺寸是已知量时,分配电机200可以被反转特定数量的电机增量,其中通过反转分配电机200该数量的电机增量,分配室185的体积增加大约净化阀140的滞留体积。 When the size of the dispensing chamber 185 and the piston 192 is a known quantity, the motor 200 may be allocated a certain number of motor increments inverted, an increase of about 200 wherein the number of increments the motor by reversing the motor distribution, volume of distribution chamber 185 hold-up volume of purge valve 140.

[0065] 通过分配电机200的反转退回活塞192的影响导致分配室185中的压力从点1504 减小到大约在点1506的期望用于分配的基线压力。 [0065] The dispensing chamber 185 causes a pressure distribution by reversing motor 200 to return the piston 192 from the impact point of the baseline pressure is reduced to about 1504 at a point 1506 for dispensing desired. 在许多情况下,该压力校正可以足以在随后的分配阶段中获得满意的分配。 In many cases, the pressure correction may be sufficient to obtain a satisfactory allocation in the subsequent distribution stages. 然而,取决于用于分配电机200的电机的类型或用于净化阀140的阀的类型,反转分配电机200以增加分配室185的体积可以在分配电机200 的驱动机构中产生空隙或“齿隙游移”。 However, depending on the type of motor or the motor 200 for dispensing the type of purge valve 140 of the valve, reversing dispense motor 200 to increase the volume dispensing chamber 185 may be voids or "tooth driving motor 200 in the dispensing mechanism gap wavering. " 该“齿隙游移”意味着在分配阶段期间当分配电机200沿正向方向被启动以将流体推出分配泵180时在分配电机200的部件例如电机螺母组件之间可能有一定量的松弛或空隙,其必须在分配电机200的驱动组件物理地启用使得活塞192移动之前被占据。 The "backlash" when the dispensing means 200 in a forward direction during the dispensing phase of the motor is activated to launch a fluid dispensing pump 180 may be, for example, when a certain amount of slack or voids between the motor assembly nut member dispense motor 200, which must be enabled dispensing drive assembly such that motor 200 physically occupied before the piston 192 moves. 由于该齿隙游移量可变,当确定向前移动活塞192多远以获得预期分配压力时可能难以解决该齿隙游移。 Since the variable amount of the backlash, when it is determined how far the piston 192 moves forward to achieve a desired dispensing pressure may be difficult to solve the backlash. 因此,分配电机200的驱动组件中的该齿隙游移可以导致每个分配阶段期间分配的流体量的可变性。 Thus, the backlash distribution drive assembly motor 200 can cause the fluid in the meandering amount dispensed during each dispensing phase variability.

[0066] 因此,理想的是保证分配电机200的最后运动在分配阶段之前沿正向方向以将分配电机200的驱动组件中的齿隙游移量减小到大体可忽略或不存在的水平。 [0066] Thus, it is desirable to ensure that the last allocated moving motor 200 in the forward direction of the dispensing phase of the leading edge to dispense the amount of backlash in the drive assembly motor 200 is reduced to a substantially negligible or non-existent level. 所以,在一些实施例中,为了解决分配泵200的驱动电机组件中的不希望的齿隙游移,分配电机200可以被反转以退回活塞192预定距离以补偿由阻挡阀135,净化阀140和/或可以导致分配室185中的压力增加的任何其他来源的关闭导致的任何压力增加,并且另外分配电机可以被反转以退回活塞192额外超调距离以使分配室185增加超调体积。 Therefore, in some embodiments, in order to solve the driving motor 200 in the dispensing pump assembly undesired backlash, dispense motor 200 can be reversed to return the piston 192 a predetermined distance to compensate for the barrier valve 135, purge valve 140 and / or may cause any pressure increase in dispense chamber 185 to close any increase due to other sources, and in addition dispense motor may be reversed to return the piston 192 to cause an additional overshoot from the dispense chamber 185 to increase the volume of the overshoot. 然后可以沿正向方向启用分配电机200以沿正向方向移动活塞192基本等于超调距离。 Enable dispense motor 200 to move the piston 192 in the forward direction is substantially equal to the overshoot distance may then be in the forward direction. 这导致分配室185中近似的预期基线压力,同时也保证了分配之前分配电机200的最后运动沿正向方向,从而从分配电机200的驱动组件基本去除了任何齿隙游移。 This results in dispensing chamber 185 is approximately the expected baseline pressure, but also to ensure the final movement of forward direction motor 200 prior to dispensing assigned to the drive assembly from the dispensing motor 200 substantially removes any backlash.

[0067] 仍参考图6,如上所述在压力分布图中的点1500开始的压力尖峰可以由净化阀140的关闭导致。 [0067] Still referring to FIG. 6, as described above in the pressure profile in the starting point 1500 by a pressure spike may cause the purge valve 140 closed. 为了解决在点1500和1502之间出现的压力增加,在延迟之后分配电机200可以被反转以退回活塞192用以补偿净化阀140 (和/或任何其他来源)的关闭所导致的任何压力增加的预定距离加上额外超调距离。 To address any pressure in the pressure occurring between points 1500 and 1502 increases, dispense motor 200 can be reversed to return the piston 192 after a delay to compensate for the purge valve 140 (and / or any other source) results in an increase in the closing the predetermined distance plus an additional overshoot distance. 如上所述补偿距离可以使分配室185增加大约等于净化阀140的滞留体积的体积。 As described above compensation from the dispensing chamber 185 can increase the volume of the retentate is about equal to the volume of purge valve 140. 超调距离也可以使分配室185的体积增加大约等于净化阀140的滞留体积,或更小或更大体积的体积,这取决于特定执行方式。 Overshoot distance may also increase the volume of the dispensing chamber 185 is approximately equal to the retention volume of the purge valve 140, or larger or smaller volume of volume, depending on the particular implementation.

[0068] 通过分配电机200的反转退回活塞192补偿距离加上超调距离的影响导致分配室185中的压力从点1504减小到1508。 [0068] Effect of adding overshoot distance distribution by reversing motor 200 to return the piston 192 from the compensation chamber 185 resulting in a pressure distribution point from 1504 to 1508 reduced. 然后可以沿正向启用分配电机200以沿正向方向移动活塞192基本等于超调距离。 It may then be assigned the forward direction to enable the motor 200 to move the piston 192 in the forward direction substantially equal to the overshoot distance. 在一些情况下,理想的是在沿正向方向启用分配电机200 之前允许分配电机200基本完全停止;该延迟可以为大约50毫秒。 In some cases, it is desirable to allow dispense motor 200 to enable substantially complete dispense motor 200 before stopping in a forward direction; the delay may be about 50 milliseconds. 通过分配电机200的正向启用产生的活塞192的正向运动的影响导致分配室185中的压力从点1510大致增加到在点1512的用于分配所需的基线压力,同时保证了在分配阶段之前分配电机200的最后运动沿正向方向,从而从分配电机200的驱动组件去除基本所有齿隙游移。 By affecting the forward motion of the piston 192 generated by the dispense motor 200 to enable the forward causes the pressure in the dispensing chamber 185 increases substantially from a point 1510 in the baseline pressure required for dispensing the point 1512, while ensuring the dispensing stage assigned before the last movement of the motor 200 in the forward direction, so as to remove the drive assembly from the dispensing motor 200 substantially all of the backlash. 在静态净化阶段结束时分配电机200的反向和正向运动在图3的时序图中被描绘。 Allocating reverse and forward movement of the motor 200 are depicted in FIG. 3 is a timing chart at the end of the static purge stage.

[0069] 关于图7可以更清楚地描述本发明的实施例,图7示出了在操作根据本发明的一个实施例的多级泵的某些阶段期间在分配室185的示例性压力分布图。 [0069] On FIG. 7 may be more clearly describe the embodiments of the present invention, FIG 7 illustrates an exemplary pressure profile in the dispensing chamber 185 during certain stages of operation of multi-stage pump according to one embodiment of the present invention. . 线1520代表用于分配流体所需的基线压力,尽管它可以是任何所需压力,典型地为大约Op. si(例如标准度量),或大气压。 Line 1520 represents a baseline pressure required for dispensing the fluid, although it can be any desired pressure, typically about Op. Si (e.g. gauge), or atmospheric pressure. 在点1522,在净化阶段期间分配室185中的压力可以刚好在基线压力1520 以上。 At point 1522, the pressure during the purge phase distribution chamber 185 may just above the baseline pressure 1520. 在净化阶段结束时分配电机200可以停止,导致分配室185中的压力在点15M开始下降到大约在点15¾的基线压力1520。 Dispense motor at the end of the purification stage 200 can be stopped, leading to pressure distribution chamber 185 at point 15M starts to drop to approximately baseline pressure points 15¾ 1520. 然而在静态净化阶段结束之前,泵100中的阀例如净化阀140可以被关闭,导致压力分布图的点15¾和1530之间的压力尖峰。 However, before the end of the static purge stage, the pump 100, for example, a valve purge valve 140 may be closed, resulting in the pressure profile and the pressure spike point between 15¾ 1530.

[0070] 分配电机200然后可以被反转以移动活塞192补偿距离和超调距离(如上所述), 导致分配室185中的压力在压力分布图中的点1532和1534之间下降到基线压力1520以下。 [0070] dispense motor 200 may then be reversed to move the piston 192 and the compensation distance overshoot distance (as described above), resulting in a pressure chamber 185 in the dispensing point pressure profile drops to between 1532 and 1534 the baseline pressure 1520 or less. 为了使分配室185中的压力返回到大约基线压力1520和从分配电机200的驱动组件去除齿隙游移,可以沿正向方向启用分配电机200基本等于超调距离。 In order to make the pressure distribution chamber 185 is returned to the baseline pressure of about 1520 to enable dispensing from the dispensing motor and a motor drive assembly for removing backlash 200, 200 may be substantially equal to the forward direction from the overshoot. 该运动导致分配室185中的压力返回压力分布图的点1536和1538之间的基线压力1520。 This movement causes the pressure distribution chamber 185 to return the pressure distribution between the baseline pressure points 1536 and 1538 of the 1520 of FIG. 因此,分配室185 中的压力基本返回到用于分配所需的基线压力,齿隙游移从分配电机200的驱动组件被去除,并且在随后分配阶段期间可以实现所需分配。 Thus, the pressure in the dispensing chamber 185 is substantially returned to baseline pressure required for dispensing, backlash is removed from the dispensing assembly drive motor 200, and during a subsequent dispensing stage may achieve the desired dispensing.

[0071] 尽管主要结合校正静态净化阶段期间由净化阀的关闭导致的压力增加描述了本发明的以上实施例,然而将显而易见这些相同技术可以适用于校正在多级泵100的任何操作阶段期间由在多级泵100的内部或外部的几乎任何来源导致的压力增加或减小,并且可以对校正由进出分配室185的流动路径中的阀的打开或关闭导致的分配室185中的压力变化特别有用。 [0071] The pressure during Although primarily the combined correction of static purge stage by the purge valve is closed due to an increase described above according to the present embodiment of the invention, however it will be apparent that these same techniques may be applied to correction during the operation stage of any multi-stage pump 100 by in almost any source of pressure caused by increases or decreases, and the correction can be opened and closed by the flow path and out of the dispensing chamber 185 in the valve chamber 185 leading to pressure changes in the distribution of the particular internal or external to multi-stage pump 100 it works.

[0072] 另外,这些相同技术可以用于通过补偿与多级泵100结合使用的其他设备中的变化实现分配室185中所需的基线压力是显而易见的。 [0072] Further, these same techniques can be used to change other devices by compensating for the multi-stage pump 100 to achieve the desired binding in the dispensing chamber 185 in the baseline pressure was apparent. 为了更好地补偿设备中的这些差异或工艺、环境或在多级泵100的外部或内部使用的设备中的其他变化,本发明的某些方面或变量,例如分配室185中所需的基线压力,补偿距离,超调距离,延迟时间等,可以由泵100 的用户配置。 In order to compensate for these differences or process equipment, environmental or other changes in external or internal devices 100 used in a multi-stage pump, certain aspects of the present invention or variables, for example the desired distribution chamber 185 baseline a pressure compensation from the overshoot distance, delay time, etc., may be configured by the user of the pump 100.

[0073] 此外,本发明的实施例可以利用压力换能器112类似地获得分配室185中所需的基线压力。 [0073] Further, embodiments of the present invention may utilize a pressure transducer 112 similarly to obtain a desired distribution chamber 185 in the baseline pressure. 例如,为了补偿净化阀140(和/或任何其他来源)的关闭所导致的任何压力增力口,活塞192可以被退回(或向前移动)直到获得分配室185中所需的基线压力(由压力换能器112测量)。 For example, to compensate for any pressure booster purge port-closing valve 140 (and / or any other source) results in the piston 192 may be retracted (or moved forward) baseline pressure required until a distribution chamber 185 (by the pressure transducer 112 measures). 类似地,为了在分配之前将分配电机200的驱动组件中的齿隙游移量减小到基本可忽略或不存在的水平,活塞193可以被退回直到分配室185中的压力低于基线压力,并且然后沿正向方向被启用直到分配室185中的压力达到分配所需的基线压力。 Similarly, in order to allocate an amount of backlash in the drive assembly motor 200 prior to dispensing or reduced to a substantially negligible level that does not exist, the piston 193 may be retracted until the pressure in the dispensing chamber 185 is below the baseline pressure, and the forward direction is then enabled until the pressure distribution chamber 185 reaches a desired baseline pressure distribution.

[0074] 不仅可以如上所述解决流体中的压力变化,而且另外,过程流体中的压力尖峰,或其他压力波动也可以通过避免关闭阀以产生圈闭空间和打开圈闭空间之间的阀而被减小。 [0074] can not only solve the pressure change in the fluid as described above, but in addition, pressure spikes in the process fluid, or other pressure fluctuation can be avoided by closing the valve to generate a trap between the valve and an open space trap space It is reduced. 在多级泵100的完整分配周期期间(例如从分配阶段到分配阶段),多级泵100内的阀可以多次改变状态。 During the allocation cycle complete multistage pump 100 (e.g., allocated to the stage from the dispensing stage), within the multi-stage pump valve 100 may change states many times. 在这些无数变化期间不希望压力尖峰和下降会出现。 During these numerous variations you do not want to pressure spikes and drops occur. 不仅这些压力波动可以导致敏感过程化学制品的破坏,而且另外,这些阀的打开和关闭可以导致流体分配的中断或变动。 These pressure fluctuations can only result in the destruction of sensitive chemical processes, but in addition, the opening and closing of these valves can lead to fluid dispensing interruptions or changes. 例如,由联接到分配室185的一个或多个内部阀的打开导致的滞留体积的突然压力增加可以导致分配室185内的流体压力的相应下降并且可以导致在流体中形成气泡, 这又会影响随后的分配。 For example, coupled to the dispensing chamber is opened by a plurality of inner valve 185 or the abrupt pressure increase due to hold up volume can result in a corresponding decrease in fluid pressure within the dispensing chamber 185 and may result in the formation of bubbles in the fluid, which would affect subsequent allocation.

[0075] 为了改善由多级泵100内的各种阀的打开和关闭导致的压力变化,各种阀的打开和关闭和/或电机的启用和切断可以被定时以减小这些压力尖峰。 [0075] In order to improve the multi-stage pump 100 and opening the various valves closed due to pressure changes, the opening and closing of the various valves and / or the motor on and off may be enabled to reduce the timing of these pressure spikes. 一般而言,根据本发明的实施例为了减小压力变化,如果可以被避免的话,阀将从不关闭以在流体路径中产生封闭或圈闭空间,并且作为这不可缺少的一部分,如果可以被避免的话,两个圈闭空间之间的阀将不被打开。 Generally, according to embodiments of the present invention in order to reduce pressure changes, if it can be avoided, the valve will not be closed to create a closed space or trap in the fluid path, and as a integral part of this, if may be avoid it, the valve space between the two traps will not be opened. 相反地,打开任何阀应当被避免,除非有通向多级泵100的外部区域的开放的流体路径或通向大气或多级泵100的外部环境的开放的流体路径(例如出口阀147,排放阀145或入口阀125是打开的)。 Rather, any valve opening should be avoided, unless there is an open outside environment leading to an open area outside the multi-stage pump 100 or the fluid path open to the atmosphere or multi-stage pump 100 fluid path (e.g., the outlet valve 147, the discharge the inlet valve 145 or valve 125 is open).

[0076] 表达用于打开和关闭根据本发明的实施例的多级泵100内的阀的一般准则的另一方式是在多级泵100的操作期间,只有当外部阀,例如入口阀125,排放阀145或出口阀147打开时,多级泵100中的内部阀,例如阻挡阀135或净化阀140将被打开或关闭以便消除可以由阀的打开产生的体积变化(大约等于被打开的内部阀的滞留体积)所导致的任何压力变化。 [0076] The expression for opening and closing a valve to another embodiment of the general guidelines in the multistage pump 100 of the embodiment of the present invention is that during operation of the multi-stage pump 100, the outer valve only when, for example, inlet valve 125, when the discharge valve 145 or outlet valve 147 is opened, multistage pump internal valve 100, for example, barrier valve 135 or purge valve 140 to be opened or closed to eliminate can be equal to the volume change of opening produced valve (approximately internal opened retention volume of the valve) any pressure variations caused. 这些准则可以以又一方式被认为是当打开多级泵100内的阀时,阀应当从外到内被打开(即外部阀应当在内部阀之前被打开),而当关闭多级泵100内的阀时,阀应当从内到外被关闭(即内部阀应当在外部阀之前被关闭)。 These criteria may be considered in another way valve is opened when the multistage pump 100, the valve should be opened (i.e., the outer valve shall be opened before the inner valve) from outside to inside, and closed when the multi-stage pump 100 when the valve, the valve should be closed from the inside to the outside (i.e., inside of the valve should be closed before the outer valve).

[0077] 另外,在一些实施例中,在某些变化之间将利用足够的时间以保证在另一变化(例如阀打开或关闭,电机启动或停止)发生(例如被启动)之前特定阀被完全打开或关闭,电机完全启动或停止,或者系统或系统的一部分内的压力基本在Op. si(例如标准度量)或其他非零水平。 [0077] Further, in some embodiments, some variations between the use of sufficient time to ensure a further variation (e.g. opening or closing the valve, the motor start or stop) occurs prior to (e.g., is activated) is a particular valve fully opened or closed, the motor starts or stops completely, the pressure in the or part of the system or substantially Op. si (e.g. gauge) or other non-zero levels. 在许多情况下在100和300毫秒之间的延迟应当足以允许多级泵100 内的阀基本完全打开或关闭,然而将在这些技术的特定应用或实现方式中使用的实际延迟可以至少部分取决于用于多级泵100的流体的粘度以及各种各样的其他因素。 In many cases, the delay between 100 msec and 300 should be sufficient to allow the multi-stage pump valve 100 closed or substantially fully open, but will be used in certain applications or implementations of these techniques the actual delay may depend at least in part for the viscosity of the fluid multistage pump 100 and a variety of other factors.

[0078] 参考图8A和8B可以更好地理解上述准则,所述图提供了用于多级泵100的各种操作阶段的阀和电机定时的一个实施例的示意图,其用于改善多级泵100的操作期间的压力变化。 [0078] 8A and 8B may be better understood the above criteria, the figure provides a schematic for the operation of valves and motors of various stages of a multistage pump 100 of the embodiment of the timing of, for improving a multi-stage pressure pump 100 during the change operation. 应当注意图8A和8B未按比例绘制并且每个编号阶段均可以具有不同或唯一的时间长度(包括零时间),而不管这些图中它们的描绘如何,并且每个这些编号阶段的长度可以基于各种各样的因素,例如被执行的用户制法(recipe),在多级泵100中使用的阀的类型(例如打开或关闭这些阀耗费多少时间)等。 It should be noted that FIGS. 8A and 8B are not to scale and each stage may have a different number or a unique time length (including zero time), regardless of how these drawings depict thereof, and the length of each stage can be based on these numbers variety of factors, such as user method (Recipe) is performed, the valve 100 using multistage pump type (e.g. opening or closing the valves takes much time) and the like.

[0079] 参考图8A,在时刻2010准备阶段信号可以指示多级泵100准备执行分配,在这之后的某时,在时刻2010,一个或多个信号可以在时刻2020被发送以打开入口阀125,沿正向方向操作分配电机200以分配流体,和反转填充电机175以将流体抽取到填充室155中。 [0079] Referring to Figure 8A, at time 2010 may indicate a preparation phase signal multistage pump 100 is ready to perform allocation, at some time after that, at time 2010, the one or more signals may be transmitted 2020 to open the inlet valve 125 at time operation dispense motor 200 in the forward direction to dispense fluid, and reverse the motor 175 to fill to draw fluid-filled chamber 155. 在时刻2020之后但是在时刻2022之前(例如在阶段2期间)信号可以被发送以打开出口阀147,使得流体可以从出口阀147被分配。 However, before time 2022 (e.g., during the phase 2) signal may be sent after time 2020 to open the outlet valve 147, such that fluid may be dispensed from the outlet valve 147.

[0080] 在阅读该公开内容之后将显而易见阀信号和电机信号的定时可以基于启动泵的各种阀或电机所需的时间,与多级泵100结合执行的制法或其他因素而变化。 [0080] After reading this disclosure will be apparent from the timing signals and the motor valve may be based on the time required for a signal to start the motor or pump various valves, production method, or in combination with other factors, perform multistage pump 100 varies. 例如,在图8A中,在信号被发送以沿正向方向操作分配电机200之后信号可以被发送以打开出口阀147, 原因是在该例子中,出口阀147可以比分配电机200更快地操作,并且因此理想的是定时出口阀147的打开和分配电机200的启动使得它们基本同时获得更好的分配。 For example, in Figure 8A, the signal is transmitted after the transmission signal can be assigned to the motor 200 in the forward direction of the operating to open the outlet valve 147, because in this example, the outlet valve 147 can operate faster than the dispense motor 200 , and is therefore desirable to start timing of the outlet valve is opened and the dispense motor 200 such that they are substantially at the same time to obtain a better distribution of 147. 然而其他阀和电机可以具有不同的启动速度,等等,并且因此不同的定时可以用于这些不同的阀和电机。 However, other valves and starting the motor may have different speeds, and the like, and thus can be used for the different timing of these various valves and motors. 例如,打开出口阀147的信号可以早于或与启动分配电机200的信号基本同时被发送,并且类似地,关闭出口阀200的信号可以早于、晚于或与停止分配电机200的信号同时被发送,寸寸。 For example, opening the outlet valve signal may be earlier than the 147 or substantially simultaneously transmits the signal to start dispensing motor 200, and similarly, closing the outlet valve signal can be earlier than 200, than or the signal to stop dispense motor 200 while being send, begins.

[0081] 因此,在时期2020和2030之间流体可以从多级泵200被分配。 [0081] Accordingly, fluid may be dispensed from a multi-stage pump 200 in the period between 2020 and 2030. 取决于由多级泵200执行的制法,分配电机200的操作速度可以在时期2020和2030之间(例如在阶段2_6 的每一个中)变化使得不同流体量可以在时期2020-2030之间的不同点被分配。 Depending on the production method of the multi-stage pump 200 performs dispensing operation speed of the motor 200 may be in the period between 2020 and 2030 (e.g., in each stage of 2_6) 2020-2030 vary between different fluids such amount may Period different points are assigned. 例如,分配电机可以根据多项式函数操作使得分配电机200在阶段2期间比在阶段6期间更快地操作并且相应地在阶段2中与在阶段6中相比更多流体从多级泵200被分配。 For example, the dispensing machine can dispense motor in accordance with operation of the operation polynomial function 200 during phase 2 than in phase during 6 and correspondingly faster compared in stage 6 and more fluid is dispensed from the multi-stage pump 200 in stage 2 . 在分配阶段发生之后,在时刻2030之前信号被发送以关闭出口阀147,此后在时刻2030信号被发送以停止分配电机200。 After the distribution phase occurs before time 2030 signal is sent to close the outlet valve 147, and thereafter at time 2030 a signal is sent to stop the motor 200 assigned.

[0082] 类似地,在时刻2020和2050之间(例如阶段2_7)进给室155可以通过填充电机175的反转用流体填充。 [0082] Similarly, the time between 2020 and 2050 (e.g., Stage 2_7) feed chamber 155 may be filled with a fluid 175 is reversed by the motor filling. 然后在时刻2050,信号被发送以停止填充电机175,此后结束填充阶段。 Then at time 2050, a signal is sent to stop the motor 175 is filled, after the end of the filling phase. 为了允许填充室155内的压力基本返回到Op. si(例如标准度量),可以在采取任何其他行动之前在时刻2050和时刻2060之间(例如阶段9,延迟0)将入口阀打开。 Prior to allow the pressure in the filling chamber 155 substantially returns to Op. Si (e.g. gauge), may take any other action between 2060 (e.g., 9 stages, delay 0) opens the inlet valve at time 2050 and time. 在一个实施例中,该延迟可以为大约10毫秒。 In one embodiment, the delay may be about 10 milliseconds. 在另一实施例中,时刻2050和时刻2060之间的时期可以是可变的,并且可以取决于在填充室155中读出的压力。 In another embodiment, the period between time 2050 and time 2060 may be variable, and may depend on the pressure read in the filling chamber 155. 例如,压力换能器可以用于测量填充室155中的压力。 For example, a pressure transducer may be used to measure the pressure chamber 155 is filled. 当压力换能器指示填充室155中的压力到达Op. si时阶段10可以在时刻2060开始。 When the pressure transducer 155 indicates the pressure in the chamber is filled reaches Op. Si stage 10 may start at time 2060.

[0083] 然后在时刻2060,信号被发送以打开隔离阀130,并且在允许隔离阀130完全打开的足够长的合适延迟(例如大约250毫秒)之后信号在时刻2070被发送以打开阻挡阀135。 [0083] Then at time 2060, a signal is sent to open isolation valve 130, and allowing the isolation valve 130 is fully opened sufficiently long Suitable delayed signal 2070 is transmitted at time (e.g. approximately 250 milliseconds) then to open the blocking valve 135. 再次地在允许阻挡阀135完全打开的足够长的合适延迟(例如大约250毫秒)之后,信号在时刻2080被发送以关闭入口阀125。 Again, after allowing the blocking valve 135 is fully opened suitably long enough delay (e.g., approximately 250 milliseconds), the signal is sent at time 2080 to close the inlet valve 125. 在允许入口阀125完全关闭的合适延迟(例如大约350毫秒)之后,信号可以在时刻2090被发送以启动填充电机175,并且在时刻2100信号可以被发送以启动分配电机200使得填充电机175在过滤前和过滤阶段(例如阶段13和14) 期间是运行的并且分配电机200在过滤阶段(例如阶段14)期间是运行的。 After allowing the inlet valve 125 is fully closed a suitable delay (e.g., approximately 350 milliseconds), the signal may at time 2090 is transmitted to start the filling machine 175, and at time 2100 a signal may be transmitted to activate the dispense motor 200 so as to fill the motor 175 in the filter before and during filtration stage (e.g. stage 13 and 14) are running and the motor 200 in dispensing filtration stage (e.g. stage 14) during running. 时刻2090和2100之间的时期可以是过滤前阶段,可以是运动或电机的设定时期或设定距离以允许正被过滤的流体的压力达到预定设定点,或者可以使用如上所述的压力换能器被确定。 The time period between 21,002,090 and may be a pre-filtering stage, or may be set during the movement of the motor or the set distance being filtered to allow the pressure of the fluid reaches a predetermined set point, or the pressure may be used as described above transducer is determined.

[0084] 备选地压力换能器可以用以测量流体的压力并且当压力换能器指示流体的压力到达设定点时过滤阶段14可以在时刻2100开始。 When the filter [0084] Alternatively, the pressure transducer may be used to measure the pressure of the fluid and the pressure transducer when the pressure reaches a set point indicator fluid phase 14 can start at time 2100. 在被引用于此作为参考的申请日为2005 年12月2日,发明人为George GormelIa和James Cedrone,发明名称为“用于控制流体压力的系统和方法”的美国专利申请No. 11/292, 559和发明人为GeorgeGonnella和James Cedrone,发明名称为“用于监视泵的操作的系统和方法”的美国专利申请No. 11/364,286 中更详尽地描述了这些过程的实施例。 Being incorporated herein by reference, filed December 2, 2005, inventors George GormelIa and James Cedrone, entitled U.S. Patent Application No. 11/292, "systems and methods for controlling fluid pressure", and and 559 and GeorgeGonnella inventor James Cedrone, entitled application No. 11 / 364,286 describes in more detail the embodiments of these processes is "a system and method for monitoring the operation of the pump," U.S. Pat.

[0085] 在过滤阶段之后,一个或多个信号在时刻2110被发送以停止填充电机175和分配电机200。 [0085] After the filter stage, one or more signals are transmitted at time 2110 to stop the filling machine 175 and dispense motor 200. 时刻2100和时刻2110之间的长度(例如过滤阶段14)可以取决于所需过滤速度,填充电机175和分配电机200的速度,流体的粘度等而变化。 Length (e.g. filtration phase 14) the time between 2110 and 2100 may depend on the time required for the filtration rate, the speed of the motor 175 and dispensing filled motor 200, the fluid viscosity and the like. 在一个实施例中,当分配电机200到达原始位置时过滤阶段可以在时刻2110结束。 In one embodiment, the filter stage 200 when the dispensing machine reaches the home position may end at time 2110.

[0086] 在允许填充电机175和分配电机200完全停止的合适延迟之后,所述延迟可能根本不需要时间(例如无延迟),在时刻2120信号被发送以打开排放阀145。 [0086] After allowing to fill motor 175 and dispense motor 200 is completely stopped suitable delay, the delay time may not be needed (e.g., no delay), the timing signal 2120 is transmitted to open the discharge valve 145. 移到图8B,在允许排放阀145完全打开的合适延迟(例如大约225毫秒)之后,信号可以在时刻2130被发送到填充电机175以启动步进电机175进行排放阶段(例如阶段17)。 Move 8B, a suitable delay to allow the exhaust valve 145 is fully opened (e.g. about 225 ms), the signal 2130 may be transmitted to the motor 175 at the time of filling the stepping motor 175 to start the discharging stage (e.g., stage 17). 尽管在排放阶段期间可以让阻挡阀135打开以在排放阶段期间允许通过压力换能器112监视多级泵100内的流体的压力,阻挡阀135也可以在排放阶段开始之前在时刻2130被关闭。 While allowing the blocking valve 135 is opened to allow the transducer by the pressure 112 monitors the pressure of the fluid within the multistage pump 100 during the discharge phase, the blocking valve 135 may be at the time 2130 is turned off before the start of the discharge phase during the discharge phase.

[0087] 为了结束排放阶段,信号在时刻2140被发送以停用填充电机175。 [0087] To the end of the discharge phase, signal 2140 is transmitted to deactivate the motor 175 is filled at the time. 如果需要的话, 可以在时刻2140和2142之间进行延迟(例如大约100毫秒)以允许合适地消散流体的压力,例如如果在排放阶段期间流体的压力高的话。 If desired, it can be carried out between 2140 and 2142 the time delay (e.g. about 100 ms) to allow the pressure of the fluid is suitably dissipated, for example, if the fluid pressure is high during the discharge phase words. 在一个实施例中,时刻2142和2150之间的时期可以用于使压力换能器112归零并且可以大约为10毫秒。 In one embodiment, the time period between 21,502,142 and may be used to zero the pressure transducer 112 and may be approximately 10 milliseconds.

[0088] 然后在时刻2150,信号被发送以关闭阻挡阀125。 [0088] Then at time 2150, the blocking signal is sent to close valve 125. 在时刻2150之后,允许合适的延迟使得阻挡阀125可以完全关闭(例如大约250毫秒)。 After time 2150, such that the appropriate delay to allow the blocking valve 125 may be completely closed (e.g. approximately 250 milliseconds). 然后信号在时刻2160被发送以关闭隔离阀130,并且在允许隔离阀130完全关闭的合适延迟之后(例如大约250毫秒), 信号在时刻2170被发送以关闭排放阀145。 Then, after the signal is sent 2160 to close isolation valve 130 at the time, and allows the isolation valve 130 is fully closed a suitable delay (e.g., approximately 250 milliseconds), the signal is sent at time 2170 to close the discharge valve 145. 允许合适的延迟使得排放阀140可以完全关闭(例如大约250毫秒),此后在时刻2180信号被发送以打开入口阀125,并且在允许入口阀125完全打开的合适延迟之后(例如大约250毫秒),信号在时刻2190被发送以打开净化阀140。 Allow appropriate delay so that the discharge valve 140 may be completely closed (e.g., about 250 ms), after which at time 2180 a signal is sent to open the inlet valve 125, and allows, after the inlet valve 125 suitable delay fully opened (e.g. about 250 ms), signal 2190 is transmitted at the time the purge valve 140 to open.

[0089] 在允许排放阀145完全打开的合适延迟之后(例如大约250毫秒),信号可以在时刻2200被发送到分配电机200以启动分配电机200进行净化阶段(例如阶段2¾,并且在可以依赖制法的净化阶段的时期之后,信号可以在时刻2210被发送以停止分配电机200 并且结束净化阶段。在时刻2210和2212之间允许足够的时期(例如预定的或使用压力换能器112确定的)使得分配室185中的压力可以基本设置为Op. si(例如大约10毫秒)。 随后,在时刻2220信号可以被发送以关闭净化阀140,并且在允许净化阀140完全关闭的足够延迟之后(例如大约250毫秒),信号可以在时刻2230被发送以关闭入口阀125。在启动分配电机200以校正由多级泵100内的阀的关闭导致的任何压力变化之后(如上所述), 多级泵100可以在时刻2010再次准备执行分配。 [0089] After allowing a suitable delay the discharge valve 145 is fully opened (e.g. about 250 ms), the signal may 2200 is transmitted to the dispense motor 200 to start the dispense motor 200 purification stage (e.g., stage 2¾ at time, and may depend on system after the cleaning stage during the method, the signal 2210 may be transmitted at a time to stop the motor 200 and dispensing end cleaning stage. at time allowing sufficient time between 2210 and 2212 (e.g., predetermined or use of a pressure transducer 112 is determined) after the pressure distribution chamber 185 may be substantially set Op. si (e.g. approximately 10 milliseconds). subsequently, may be sent to close the purge valve 140 at the 2220 signal timing, and allow the purge valve 140 is fully closed a sufficient delay (e.g. approximately 250 milliseconds), the signal may be transmitted 2230 to close the inlet valve 125. any pressure changes after starting the dispense motor 200 to correct the closing of the valve 100 is caused by multistage pump, multistage pump (as described above) at time 100 may be ready to perform again in the 2010 time allocation.

[0090] 应当注意在准备阶段和分配阶段之间可以有一些延迟。 [0090] It should be noted that between the preparation stage and the distribution stage there may be some delay. 由于当多级泵100进入准备阶段时阻挡阀135和隔离阀130可以关闭,因此有可能将流体引入填充室155中而不影响多级泵的随后分配,而不管该填充期间或该填充之后分配是否被启动。 Since the multi-stage pump when the blocking valve 135 and isolation valve 130 may be closed into the preparation stage 100, it is possible to introduce fluid into the fill chamber 155 then partitioned without affecting the multi-stage pump, regardless of whether the allocated during filling or after the filling whether the start.

[0091] 在多级泵100处于准备状态时填充填充室155可以关于图9A和9B更清楚地被描绘,所述图提供了用于多级泵100的各种操作阶段的阀和电机定时的另一实施例的示意图,其用于改善多级泵100的操作期间的压力变化。 [0091] When filling the filling chamber multistage pump 100 is in the ready state 155 can pertain to FIGS. 9A and 9B is depicted more clearly, the drawings provides various operating stages of the valve and the motor for multistage pump 100 timing a schematic view of another embodiment, for improving pressure variations during operation of the multistage pump 100.

[0092] 参考图9A,在时刻3010准备阶段信号可以指示多级泵100准备执行分配,在这之后的某时,在时刻3012,信号可以被发送以打开出口阀147。 [0092] Referring to Figure 9A, at time 3010 may indicate a preparation phase signal multistage pump 100 is ready to perform allocation, at some time after that, at time 3012, the signal may be transmitted 147 to open the outlet valve. 在允许出口阀147打开的合适延迟之后,一个或多个信号可以在时刻3020被发送以沿正向方向操作分配电机200以从出口阀147分配流体,和反转填充电机175以将流体抽取到填充室155中(如下面更全面地所述,入口阀125可以仍然从先前的填充阶段打开)。 After a suitable delay to allow the outlet valve 147 is opened, the one or more signals may be transmitted at time 3020 in the forward direction to operate the dispense motor 200 to dispense fluid from the outlet valve 147, and the motor 175 to reverse the filling fluid drawn into filling chamber 155 (as more fully described below, the inlet valve 125 may still open from the previous filling phase). 在时刻3030信号可以被发送以停止分配电机200并且在时刻3040信号被发送以关闭出口阀147。 Signal 3030 may be transmitted at a time to stop dispense motor 200 is transmitted to close and the outlet valve 147 in the timing signal 3040.

[0093] 在阅读该公开内容之后将显而易见阀信号和电机信号的定时可以基于启动泵的各种阀或电机所需的时间,与多级泵100结合执行的制法或其他因素而变化。 [0093] After reading this disclosure will be apparent from the timing signals and the motor valve may be based on the time required for a signal to start the motor or pump various valves, production method, or in combination with other factors, perform multistage pump 100 varies. 例如(如图8A中所示),在信号被发送以沿正向方向操作分配电机200之前信号可以被发送以打开出口阀147,原因是在该例子中,出口阀147可以比分配电机200更快地操作,并且因此理想的是定时出口阀147的打开和分配电机200的启动使得它们基本同时获得更好的分配。 For example (shown in FIG. 8A), the signal is transmitted in a signal may be sent before the dispense motor 200 to operate in the forward direction to open the outlet valve 147, because in this example, the outlet valve 147 can be more than dispense motor 200 fast operation, and therefore it is desirable to start timing of the outlet valve 147 opens and dispense motor 200 such that they are substantially at the same time a better distribution. 然而其他阀和电机可以具有不同的启动速度,等等,并且因此不同的定时可以用于这些不同的阀和电机。 However, other valves and starting the motor may have different speeds, and the like, and thus can be used for the different timing of these various valves and motors. 例如,打开出口阀147的信号可以早于或与启动分配电机200的信号基本同时被发送,并且类似地,关闭出口阀200的信号可以早于,晚于或与停用分配电机200的信号同时被发送,等等。 For example, the outlet valve 147 is opened earlier than the signals may be transmitted or substantially simultaneously with the signal to start dispensing of the motor 200, and similarly, the outlet valve is closed earlier than the signal 200 may be, or later in the signal at the same time deactivate dispense motor 200 It is sent, and so on.

[0094] 因此,在时期3020和3030之间流体可以从多级泵200被分配。 [0094] Accordingly, fluid may be dispensed from a multi-stage pump 200 in the period between 3020 and 3030. 取决于由多级泵200执行的制法,分配电机200的操作速度可以在时期3020和3030之间(例如在阶段2_6 的每一个中)变化使得不同流体量可以在时期3020-3030之间的不同点被分配。 Depending on the production method of the multi-stage pump 200 performs dispensing operation speed of the motor 200 may be in the period between 3020 and 3030 (e.g., in each stage of 2_6) between 3020-3030 vary such that different amounts of fluid may Period different points are assigned. 例如,分配电机可以根据多项式函数操作使得分配电机200在阶段2期间比在阶段6期间更快地操作并且相应地在阶段2中与在阶段6中相比更多流体从多级泵200被分配。 For example, the dispensing machine can dispense motor in accordance with operation of the operation polynomial function 200 during phase 2 than in phase during 6 and correspondingly faster compared in stage 6 and more fluid is dispensed from the multi-stage pump 200 in stage 2 . 在分配阶段发生之后,在时刻3030之前信号被发送以关闭出口阀147,此后在时刻2030信号被发送以停止分配电机200。 After the distribution phase occurs before time 3030 signal is sent to close the outlet valve 147, and thereafter at time 2030 a signal is sent to stop the motor 200 assigned.

[0095] 类似地,在时刻3020和3050之间(例如阶段2_7)进给室155可以通过填充电机175的反转用流体填充。 [0095] Similarly, the time between 3020 and 3050 (e.g., Stage 2_7) feed chamber 155 may be filled with a fluid 175 is reversed by the motor filling. 然后在时刻3050,信号被发送以停止填充电机175,此后结束填充阶段。 Then at time 3050, a signal is sent to stop the motor 175 is filled, after the end of the filling phase. 为了允许填充室155内的压力基本返回到Op. si(例如标准度量),可以在采取任何其他行动之前在时刻3050和时刻3060之间(例如阶段9,延迟0)让入口阀打开。 In order to allow the pressure in the filling chamber 155 substantially returns to Op. Si (e.g. gauge), may take time between time 3050 and 3060 (e.g., 9 stages, retardation 0) so that the inlet valve is opened before any other action. 在一个实施例中,该延迟可以为大约10毫秒。 In one embodiment, the delay may be about 10 milliseconds. 在另一实施例中,时刻3050和时刻3060之间的时期是可变的,并且可以取决于在填充室155中读出的压力。 Embodiment, the period between time 3050 and time 3060] In another embodiment is variable, and may depend on the pressure read in the filling chamber 155. 例如,压力换能器可以用于测量填充室155中的压力。 For example, a pressure transducer may be used to measure the pressure chamber 155 is filled. 当压力换能器指示填充室155中的压力到达Op. si时阶段10 可以在时刻3060开始。 When the pressure transducer 155 indicates the pressure in the chamber is filled reaches Op. Si stage 10 may start at time 3060.

[0096] 然后在时刻3060,信号被发送以打开隔离阀130,并且信号在时刻3070被发送以打开阻挡阀135。 [0096] Then at time 3060, a signal is sent to open isolation valve 130, and the signal 3070 is transmitted at time to open the blocking valve 135. 然后信号在时刻3080被发送以关闭入口阀125,此后信号可以在时刻3090 被发送以启动填充电机175,并且在时刻3100信号可以被发送以启动分配电机200使得填充电机175在过滤前和过滤阶段期间是活动的并且分配电机200在过滤阶段期间是活动的。 Then the signal at time 3080 is sent to close the inlet valve 125, after which signal may 3090 be sent to activate fill motor 175 at the time, and at time 3100 a signal may be transmitted to activate the dispense motor 200 so as to fill the motor 175 before filtration and the filtration stage during the dispense motor is active and during the filtration stage 200 is active.

[0097] 在过滤阶段之后,一个或多个信号在时刻3110被发送以停用填充电机175和分配电机200。 [0097] After the filter stage, one or more signals are transmitted at time 3110 to deactivate fill motor 175 and dispense motor 200. 在时刻3120信号被发送以打开排放阀145。 It is sent to open the discharge valve 145 at timing signal 3120. 移到图9B,信号可以在时刻3130被发送到填充电机175以启动步进电机175进行排放阶段。 Move 9B, the signal 3130 may be transmitted to the motor 175 at the time of filling the stepping motor 175 to start the draining stage. 为了结束排放阶段,信号在时刻3140被发送以停用填充电机175。 To the end of the discharge phase, at time 3140 a signal is sent to disable the motor 175 is filled. 然后在时刻3150,信号被发送以关闭阻挡阀125,而在时刻3160信号被发送以关闭隔离阀130并且在时刻3170关闭排放阀145。 Then at time 3150, the blocking signal is sent to close the valve 125, and the signal is transmitted at time 3160 to close isolation valve 130 closed and vent valve 3170 at time 145.

[0098] 在时刻3180信号被发送以打开入口阀125,并且之后信号在时刻3190被发送以打开净化阀140。 [0098] timing signal 3180 is transmitted to the inlet valve 125 is opened, and after the signal 3190 is transmitted at time 140 to open the purge valve. 然后信号可以在时刻3200被发送到分配电机200以启动分配电机200进行净化阶段,并且在净化阶段之后,信号可以在时刻3210被发送以停止分配电机200。 The signals can then be transmitted at time 3200 allocated to the motor 200 to activate the motor 200 for dispensing purification stage, and after the purification stage, the signal may be transmitted 3210 to stop dispense motor 200 at the time.

[0099] 随后,在时刻3220信号可以被发送以关闭净化阀140,之后信号在时刻3230被发送以关闭入口阀125。 [0099] Subsequently, in the timing signal may be sent 3220 to close the purge valve 140, after the signal is sent 3230 to close the inlet valve 125 at the time. 在启动分配电机200以校正由多级泵100内的阀的关闭导致的任何压力变化之后(如上所述),多级泵100可以在时刻3010再次准备执行分配。 After the start dispense motor 200 to correct for any changes in pressure within a shut-off valve 100 caused multistage pump (as described above), to prepare a multi-stage pump 100 may be performed again at time 3010 allocated.

[0100] 一旦多级泵100在时刻3010进入准备阶段,信号可以被发送以打开入口阀125并且另一信号被发送以反转填充电机175使得当多级泵100处于准备状态时液体被抽取到填充室175中。 [0100] Once the multi-stage pump 100 at time 3010 into the preparation stage, a signal may be sent to open inlet valve 125 and the other signal is transmitted to the motor 175 such that fill the inverted when multistage pump 100 is in the ready state is drawn into the liquid filling the chamber 175. 尽管在准备阶段期间填充室155用液体填充,然而该填充决不会影响多级泵100在进入准备阶段之后的任何点分配流体的能力,原因是阻挡阀135和隔离阀130被关闭,基本上使填充室巧5从分配室185分离。 While filled with the liquid chamber 155 during the filling phase of the preparation, however, in no way affects the filling multistage pump capacity 100 at any point after the dispensing of the fluid entering the preparation phase, because the isolation valve 135 and barrier valve 130 is closed, substantially Coincidentally the filling chamber is separated from the dispensing chamber 5185. 此外,如果在填充完成之前开始分配,填充可以基本与流体从多级泵100的分配同时继续进行。 Further, if the filling is completed before the start distribution, may be substantially filled with fluid while continuing the dispensing of multi-stage pump 100.

[0101] 当多级泵100初始进入准备阶段时分配室185中的压力可以大约为用于分配阶段的所需压力。 [0101] When the initial multistage pump 100 into the preparation stage the pressure distribution chamber 185 may be approximately the pressure required for the dispensing stage. 然而,由于在进入准备阶段和开始分配阶段之间可以有一定的延迟,分配室185内的压力可以在准备阶段期间基于各种因素例如分配室185中的分配级隔膜190的性质,温度变化或各种其他因素而变化。 However, since between the entry and start the preparation stage may be assigned a certain phase delay, the pressure in the dispensing chamber 185 may dispense stage diaphragm 190 properties dispensing chamber 185, a temperature change based on various factors, for example, or during the preparation phase a variety of other factors. 因此,当分配阶段开始时分配室185中的压力可以从分配所需的基线压力漂移相对显著的程度。 Thus, when the dispensing pressure phase begins dispensing chamber 185 may be relatively significant degree of drift from the baseline pressure required for dispensing.

[0102] 参考图IOA和IOB可以更清楚地证明该漂移。 [0102] Referring to FIG. IOA and IOB will be more clearly demonstrate the drift. 图IOA描绘了在分配室185的示例性压力分布图,其示出了准备阶段期间分配室中的压力漂移。 FIG IOA illustrates an exemplary pressure profile in the distribution chamber 185, which shows a pressure distribution chamber during the preparation phase drift. 大致在点4010可以校正由阀移动或其他原因导致的任何压力变化,如上面参考图22和23所述。 Approximately point 4010 may correct any pressure changes caused by movement of a valve or other reasons, as described above with reference to FIGS. 22 and 23. 该压力校正可以大致在点4020将分配室185中的压力校正到大约分配所需的基线压力(由线4030表示),在所述点多级泵100可以进入准备阶段。 The pressure may be substantially corrected in the 4020 point pressure distribution chamber 185 is corrected to a desired distribution about the baseline pressure (represented by line 4030), the multistage pump 100 may point into the preparation stage. 可以看出,大致在点4020进入准备阶段之后分配室185中的压力可以由于例如上述的各种因素而稳定上升。 As can be seen, the pressure distribution chamber substantially at the point after 4020 into the preparation stage 185 may, for example, due to various factors described above and a steady increase. 当随后的分配阶段发生时,然后, 从基线压力4030的该压力漂移可能导致不能令人满意的分配。 When the subsequent distribution phase occurs, and then, from 4030 baseline pressure of the pressure drift may result in unsatisfactory distribution.

[0103] 另外,由于进入准备阶段和随后的分配阶段之间的时间延迟是可变的,并且分配室185中的压力漂移可以与延迟时间关联,因此在每个连续分配阶段中发生的分配可以由于在不同延迟期间发生的不同漂移量而不同。 [0103] Further, since the time between entering the preparation phase and a subsequent allocation phase delay is variable, and the pressure in the dispensing chamber 185 may be associated with drift in the delay time, thus dispensing occurs at each successive stage may be assigned due to the different amount of drift that occurs during different delays and different. 因此,该压力漂移也可以影响多级泵100精确地重复分配的能力,这又可以在加工制法重复中阻碍多级泵100的使用。 Thus, the pressure drift may affect the ability to precisely multistage pump 100 repeats distribution, which in turn may preclude the use of multi-stage pump 100 repeats the processing system in the process. 所以,理想的是在多级泵100的准备阶段期间基本保持基线压力以改善随后分配阶段期间的分配和分配阶段之间的分配可重复性,同时获得可接受的流体动力学。 Therefore, it is desirable to maintain the baseline pressure substantially during the preparation phase of the multi-stage pump 100 can be allocated to improve the repeatability of the distribution and allocation phase during subsequent dispensing phase, while obtaining an acceptable fluid dynamics.

[0104] 在一个实施例中,为了在准备阶段期间基本保持基线压力,分配电机200可以被控制以补偿或解决可以在分配室185中发生的向上(或向下)压力漂移。 [0104] In one embodiment, in order during the preparation phase remains substantially the baseline pressure, dispense motor 200 can be controlled to compensate for the upward or solution that may occur in the dispensing chamber 185 (or down) a pressure drift. 尤其是,可以使用“死区”闭环压力控制来控制分配电机200以基本保持分配室185中的基线压力。 In particular, can use the "dead zone" closed loop pressure control to control the dispense motor 200 to substantially maintain the baseline pressure distribution chamber 185. 暂时返回图2,压力传感器112可以规则间隔将压力读数报告给泵控制器20。 Returning briefly to FIG 2, a pressure sensor 112 may be reported at regular intervals to the controller 20 to the pump pressure reading. 如果报告的压力从所需基线压力偏离一定的量或公差,泵控制器20可以将信号发送到分配电机200以反转(或向前移动)最小距离,该最小距离为分配电机200有可能移动的可在泵控制器20检测的最小距离(电机增量),因此退回(或向前移动)活塞192和分配级隔膜190,产生分配室185内压力的相应减小(或增加)。 If the report from the desired pressure of pressure deviates from the baseline of a certain amount or tolerances, pump controller 20 may send a signal 200 to the reverse (or forward) the minimum distance dispense motor, this minimum distance is possible to dispense motor 200 moves the minimum distance 20 can be detected pump controller (motor increments), thus returning (or forward movement) of the piston 192 and dispense stage diaphragm 190, to produce a corresponding decrease in pressure within the dispensing chamber 185 (or increased).

[0105] 由于压力传感器112采样和报告分配室185中的压力的频率与分配电机200的操作速度相比稍快,因此在围绕将信号发送到分配电机200的某个时间窗口期间,泵控制器20可以不处理压力传感器112所报告的压力测量,或者可以禁用压力传感器112,使得分配电机200可以在另一压力测量由泵控制器20接收或处理之前完成其移动。 [0105] Since the operation speed of the pressure sensor 112 samples a pressure distribution chamber 185 and reports the frequency and distribution of the motor 200 slightly faster compared, so around the time window during transmission to a signal dispense motor 200, the pump controller 20 pressure sensor 112 may not process pressure measurements reported, or may disable the pressure sensor 112, the motor 200 may be assigned such that further pressure to complete its movement before measuring received or processed by the pump controller 20. 备选地,在处理由压力传感器112报告的压力测量之前泵控制器20可以等待直到它检测到分配电机200完成其移动。 Alternatively, Report 112 before processing by the pressure sensor measuring the pressure pump controller 20 may wait until it detects the completion of the dispense motor 200 to move. 在许多实施例中,压力传感器112采样分配室185中的压力并且报告该压力测量的采样间隔可以为大约301ΛΖ,大约IOWiz或另一间隔。 In many embodiments, sample pressure sensor 112 and dispensing chamber 185 in the sampling interval of the pressure measurement report may be about 301ΛΖ, or at another interval about IOWiz.

[0106] 然而,上述实施例并非没有自身的问题。 [0106] However, the above-described embodiments are not without their problems. 在一些情况下,当如上所述进入准备阶段和随后的分配阶段之间的时间延迟可变时,一个或多个这些实施例可以表现出明显的分配变化。 In some cases, when the time between the preparation as described above into the dispensing stage and a subsequent stage of the variable delay, one or more of these embodiments may exhibit significant changes in allocations. 然而,在一定程度上,在通过利用进入准备阶段和随后的分配之间的固定时间间隔减少这些问题和增强可重复性,当执行特定过程时这并不总是可行的。 However, to some extent, by using a fixed time between entering the preparation phase and a subsequent assignment interval to reduce these problems and enhance the reproducibility, when executing a specific process that is not always possible.

[0107] 为了在多级泵100的准备阶段期间基本保持基线压力同时增强分配的可重复性, 在一些实施例中可以使用闭环压力控制来控制分配电机200以补偿或解决可能在分配室185中出现的压力漂移。 [0107] In order to maintain the baseline pressure substantially during the preparation phase multistage pump 100 while enhancing the repeatability of dispensing, in some embodiments, closed loop pressure control may be used to control the dispense motor 200 to compensate for or solve the dispensing chamber 185 may be pressure appears to drift. 压力传感器112可以规则间隔将压力读数报告给泵控制器20(如上所述,在一些实施例中该间隔可以为大约301ΛΖ,大约IOWiz或另一间隔)。 The pressure sensor 112 at regular intervals may be reported to the pump pressure reading controller 20 (described above, in some embodiments the spacing may be about 301ΛΖ, or at another interval about IOWiz). 如果报告的压力高于(或低于)所需基线压力,泵控制器20可以将信号发送到分配电机200以反转(或向前移动)分配电机200电机增量,因此退回(或向前移动)活塞192和分配级隔膜190 并且减小(或增加)分配室185内的压力。 If the pressure reported above (or below) baseline pressure required to pump controller 20 may transmit a signal to dispense motor 200 to reverse (or forward) assigned motor increments the motor 200, thus returning (or forward movement) of the piston 192 and dispense stage diaphragm 190 and reduce (or increase the pressure in the) distribution chamber 185. 该压力监视和校正可以基本连续地发生直到分配阶段开始。 The pressure can be monitored and corrected until the start allocation phase occurs substantially continuously. 这样可以保持分配室185中的大致所需的基线压力。 This will maintain substantially the desired baseline pressure distribution chamber 185.

[0108] 如上所述,压力传感器112采样和报告分配室185中的压力的频率与分配电机200 的操作速度相比稍快。 [0108] As described above, the operating speed of the sample and the pressure sensor 112 reports the pressure distribution chamber 185 and a frequency distribution 200 slightly faster as compared to the motor. 为了解决该差异,在围绕将信号发送到分配电机200的某个时间窗口期间,泵控制器20可以不处理压力传感器112所报告的压力测量,或者可以禁用压力传感器112,使得分配电机200可以在另一压力测量由泵控制器20接收或处理之前完成其移动。 To address this difference, the surrounding pressure during the transmission time window allocated to a motor 200 signal, the controller 20 may not process the pump pressure sensor 112 reports the measured, or may disable the pressure sensor 112, the motor 200 may be assigned such that another prior pressure measurement received or processed by the pump controller 20 completes its movement. 备选地,在处理由压力传感器112报告的压力测量之前泵控制器20可以等待直到它检测到或接收到分配电机200完成其移动的通知。 Alternatively, Report 112 before processing by the pressure sensor measuring the pressure pump controller 20 may wait until it detects or receives the dispense motor 200 to move the completion notification.

[0109] 可以参考图IOB容易地看出如上所述利用闭环控制系统的实施例基本保持基线压力的有益效果,所述图描绘了在准备阶段期间在分配室185的示例性压力分布图,其中正好利用闭环控制系统的这一实施例。 [0109] Referring to FIG IOB can be easily seen using a closed loop control system described above, embodiments of the baseline pressure remains substantially advantageous effect, the figure depicts an exemplary pressure profile in the dispensing chamber 185 during the preparation phase, wherein just use closed loop control system of this embodiment. 大致在点4050校正由阀移动或其他原因导致的任何压力变化,如上面参考图6和7所述。 Approximately 4050 points to correct any change in pressure by the valve movement or other causes, as described above with reference to FIGS. 6 and 7. 该压力校正可以大致在点4060将分配室185中的压力校正到大约分配所需的基线压力(由线4040表示),在所述点多级泵100可以进入准备阶段。 The pressure may be substantially corrected in the 4060 point pressure distribution chamber 185 is corrected to a desired distribution about the baseline pressure (represented by line 4040), the multistage pump 100 may point into the preparation stage. 大致在点4060进入准备阶段之后闭环控制系统的实施例可以解决准备阶段期间的任何压力漂移以基本保持所需基线压力。 After approximately point 4060 into the preparation stage closed loop control system of the embodiment can solve any pressure during the preparation phase shift to substantially maintain a desired baseline pressure. 例如,在点4070闭环控制系统可以检测压力上升和解决该压力上升以基本保持基线压力4040。 For example, at point 4070 a closed loop control system can detect the pressure rise and pressure rise in the solution remains substantially the baseline pressure 4040. 类似地,在点4080,4090,4100,4110闭环控制系统可以解决或校正分配室185中的压力漂移以基本保持所需基线压力4040,无论准备阶段的长度如何(注意点4080,4090,4100和4110仅仅是代表性的并且闭环控制系统的其他压力校正在图IOB中被描绘,其未标有参考数字,因此未照这样被论述)。 Similarly, at the point 4080,4090,4100,4110 closed loop control system can be solved in a pressure or correcting the distribution chamber 185 to substantially maintain the desired drift baseline pressure 4040, regardless of the length of the preparatory phase (note point 4080,4090,4100 and 4110 is merely representative and other closed loop pressure control system is depicted in FIG correction IOB, which is not marked with a reference numeral, and therefore is not discussed as such). 因此,由于在准备阶段期间闭环控制系统基本保持分配室185中的所需基线压力4040,在随后的分配阶段中可以获得更满意的分配。 Therefore, due to the closed-loop control system during a preparation phase remained a desired baseline pressure distribution chamber 185 in 4040, can obtain a more satisfactory distribution in the subsequent distribution stages.

[0110] 然而在随后的分配阶段期间,为了获得该更满意的分配,理想的是当促动分配电机200以从分配室185分配流体时解决基本保持基线压力的任何校正。 [0110] However, during a subsequent dispensing phase, in order to obtain the more satisfactory distribution, it is desirable that when the motor 200 remains substantially correct any baseline pressure to resolve when dispensing fluid from the dispensing chamber 185 actuated dispensing. 更具体而言,恰好在压力校正发生并且多级泵100初始进入准备阶段之后的时刻4060,分配级隔膜190可以处于初始位置。 More specifically, just the pressure correction occurs after the initial time 100 and into the preparation stage multistage pump 4060 can dispense stage diaphragm 190 in the initial position. 为了从该初始位置获得所需分配,分配级隔膜190应当移动到分配位置。 In order to obtain the desired dispensed from the initial position, dispense stage diaphragm 190 should be moved to the dispensing position. 然而,在如上所述校正压力漂移之后,分配级隔膜190可以处于不同于初始位置的第二位置。 However, as described above, after a drift corrected pressure, dispense stage diaphragm 190 may be in a second position different from the initial position. 在一些实施例中,在分配阶段应当通过将分配级隔膜190移动到分配位置以实现所需分配而解决该差异。 In some embodiments, the dispensing stage by should dispense stage diaphragm 190 to move to the dispensing position to achieve the desired distribution and resolve the differences. 换句话说,为了实现所需分配,分配级隔膜190可以从准备阶段期间的压力漂移的任何校正发生之后的它的第二位置移动到当多级泵100初始进入准备阶段时的分配级隔膜190的初始位置,之后分配级隔膜190可以移动从初始位置到分配位置的距离。 Any its second position after the correction occurs in other words, to achieve the desired distribution, dispense stage diaphragm 190 may drift from the pressure during the preparation phase of the movement of multistage pump 100 when the initial dispense stage diaphragm 190 into the preparation stage when initial position after dispense stage diaphragm 190 may be moved away from the initial position to a dispensing position.

[0111] 在一个实施例中,当多级泵100初始进入准备阶段时泵控制器20可以计算初始距离(分配距离)以移动分配电机200从而实现所需分配。 [0111] In one embodiment, when the multi-stage pump 100 enters the initial preparation stage pump controller 20 can calculate the initial distance (distance distribution) to move the dispense motor 200 to achieve the desired distribution. 当多级泵100处于准备阶段时泵控制器20可以记住分配电机200移动以校正准备阶段期间发生的任何压力漂移的距离(校正距离)。 When multistage pump 100 is in the preparation stage pump controller 20 may assign remember any pressure drift distance (corrected distance) to the motor 200 moves during the preparation phase correction occurs. 在分配阶段期间,为了实现所需分配,泵控制器20可以向分配电机200发信号以移动校正距离加上(或减去)分配距离。 During the dispensing stage, in order to achieve the desired dispensing, the pump controller 20 may dispense motor 200 to move the correction signal from the plus (or minus) from the allocation.

[0112] 然而在其他情况下,不希望的是在致动分配电机200时解决这些压力校正以从分配室185分配流体。 [0112] In other cases, however, do not want to solve these pressure upon actuation to dispense motor correction 200 from the dispensing chamber 185 the fluid dispensing. 更具体而言,刚好在压力校正发生并且多级泵100初始进入准备阶段之后的点4060,分配级隔膜190可以处于初始位置。 More specifically, the correction occurs just pressure multistage pump 100 and the initial point of entry 4060 after the preparation stage, can dispense stage diaphragm 190 in the initial position. 为了从该初始位置获得所需分配,分配级隔膜190应当移动分配距离。 In order to obtain the desired dispensed from the initial position, dispense stage diaphragm 190 should be moved from the distribution. 在如上所述校正压力漂移之后,分配级隔膜190可以处于不同于初始位置的第二位置。 After the correction pressure drift as described above, dispense stage diaphragm 190 may be in a second position different from the initial position. 在一些实施例中,仅仅通过移动分配级隔膜190分配距离(从第二位置开始)就可以实现所需分配。 In some embodiments, the distance distribution only by moving the dispense stage diaphragm 190 (from the second starting position) can achieve the desired distribution.

[0113] 在一个实施例中,当多级泵100初始进入准备阶段时泵控制器20可以计算移动分配电机200以实现所需分配的初始距离。 [0113] In one embodiment, when the multi-stage pump 100 enters the initial preparation stage pump controller 20 may calculate an initial distance to achieve a desired dispense motor 200 assigned mobile. 然后在分配阶段期间,为了实现所需分配,泵控制器20可以向分配电机200发信号以移动该初始距离,而不管分配电机200移动以校正准备阶段期间的压力漂移的距离。 Then during the dispensing phase, to achieve the desired dispensing, pump controller 20 may signal to dispense motor 200 to move the initial distance, regardless of the distribution to the motor 200 moves from the pressure during the preparation phase drift correction.

[0114] 很明显在任何指定环境中使用或应用的上述实施例之一的选择将取决于许多因素,例如将与其中的选定实施例结合使用的系统,设备或经验条件。 [0114] Select one of the above embodiments are obvious use or application in any given environment will depend on many factors, for example, system, apparatus, or experience conditions employed in conjunction with the embodiment wherein a selected embodiment. 还很明显的是尽管用于基本保持基线压力的控制系统的以上实施例关于解决准备阶段期间的向上压力漂移进行了描述,这些相同系统和方法的实施例可以同样应用于解决多级泵100的准备阶段,或任何其他阶段中的向上或向下压力漂移。 It is also clear that although a basic control system for maintaining a baseline pressure on the settlement of the above embodiments of the upward pressure during the preparation phase shift has been described, these embodiments of the same system and method can also be applied to solve the multi-stage pump 100 preparation stage or any other stage in the upward or downward pressure drift. 此外,尽管本发明的实施例关于多级泵100进行了描述,将会理解这些发明的实施例(例如控制方法学等)可以同样好地应用于,和有效地用于单级或实质上任何其他类型的泵送装置。 Further, although the embodiments of the present invention on multi-stage pump 100 has been described, it will be understood that the embodiment (e.g. a control methodology, etc.) can be applied equally well to the invention, and effectively used in any single stage or substantially other types of pumping means.

[0115] 在这里有用的是描述这样一种单级泵送装置的例子,其可以与本发明的各种实施例结合使用。 [0115] Here it is useful to describe a single-stage pumping device in the example, which may be used in conjunction with various embodiments of the present invention. 图11是泵4000的泵组件的一个实施例的示意图。 FIG 11 is a schematic view of one embodiment of a pump assembly 4000. 泵4000可以类似于上述多级泵100的一级,比如分配级,并且可以包括由步进、无刷DC或其他电机驱动的滚动隔膜泵。 The pump 4000 may be similar to the one-stage multi-stage pump 100, such as assigning level, and may comprise a rolling diaphragm pump driven by a stepper, a brushless DC motor or other. 泵4000可以包括分配块体4005,所述分配块体限定通过泵4000的各种流体流动路径并且至少部分限定泵室。 Pump 4000 may include assignment block 4005, the distribution block defining a fluid flow path through various pump 4000 and at least partially defines the pump chamber. 根据一个实施例,分配泵体4005可以是PTFE,改性PTFE或其他材料的单块体。 According to one embodiment, the pump 4005 may be assigned PTFE, modified PTFE or other materials monolithic body. 由于这些材料不与或很少与许多过程流体相互作用,因此这些材料的使用允许流动通道和泵室直接加工到分配块体4005中,使附加的硬件最少化。 Since these materials with little or no interaction with many process fluids, use of these materials allows flow channels and the pump chamber directly into the dispensing processing block 4005, the additional hardware is minimized. 因此通过提供集成流体歧管,分配块体4005减小了对管道系统的需要。 Therefore, by providing an integrated fluid manifold, allocation block 4005 reduces the need for piping system.

[0116] 分配块体4005可以包括各种外部入口和出口,例如包括通过其接收流体的入口4010,用以净化/排放流体的净化/排放出口4015,和在分配阶段期间通过其分配流体的分配出口4020。 [0116] allocation block 4005 may include various external inlets and outlets, for example, includes an inlet through which fluid is received 4010, for purification / discharge fluid purification / discharge outlet 4015, through which the dispensing and dispensing a fluid during the dispensing phase 4020 exports. 在图11的例子中,由于泵仅仅具有一个室,分配块体4005包括外部净化出口4010。 In the example of FIG. 11, the pump has only one chamber, block 4005 includes an outer dispensing purge outlet 4010. 完全被引用于此作为参考的申请日为2005年12月2日,发明人为Iraj Gashgaee, 发明名称为“0形圈低型面配件及其组件”的美国临时专利申请No. 60/741,667和申请日为—[ENTG1760-1],发明人为Iraj Gashgaee,发明名称为“0形圈低型面配件及安装组件”的美国专利申请描述了配件的一个实施例,其可以用于将分配块体4005的外部入口和出口连接到流体管线。 Entirety herein by reference as filed on December 2, 2005, by inventors Iraj Gashgaee, entitled to apply for the "0-ring parts and low-profile component," U.S. Provisional Patent No. 60 / 741,667 and filed - [ENTG1760-1], inventor Iraj Gashgaee, entitled "O-ring parts and low-profile mounting assembly" in U.S. patent application describes a fitting embodiment, which may be used to assign block inlet and outlet external body 4005 is connected to the fluid line.

[0117] 分配块体4005将流体从入口传送到入口阀(例如至少部分由阀板4030限定),从入口阀传送到泵室,从泵室传送到排放/净化阀和从泵室传送到出口4020。 [0117] allocation block 4005 the fluid from the inlet to the inlet valve (e.g., at least partially by a valve plate 4030 is defined), from the inlet valve to the pump chamber, the transfer from the pump chamber to the discharge / purge valve and the transfer from the pump chamber to the outlet 4020. 泵盖4225可以保护泵电机免于受损,而活塞罩4027可以为活塞提供保护,并且根据本发明的一个实施例,其可以由聚乙烯或另一聚合物形成。 Pump cover 4225 pump motor can be protected from damage, and the piston cover 4027 can provide protection for the piston, and in accordance with one embodiment of the present invention, which may be formed of polyethylene or another polymer. 阀板4030提供用于阀系统(例如入口阀,和净化/ 排放阀)的阀罩,其被配置成将流体流引导到泵4000的各种部件。 Valve plate 4030 provides a valve bonnet system (e.g. an inlet valve and purge / vent valve), which is configured to direct the flow of fluid to the various components of the pump 4000. 阀板4030和相应的阀可以类似于结合上述阀板230所述的方式形成。 The valve plate and the respective valve 4030 may be formed similar manner as described in conjunction with the valve plate 230. 根据一个实施例,入口阀和净化/排放阀的每一个均至少部分集成到阀板4030中并且是取决于是否有压力或真空施加到相应隔膜而打开或关闭的隔膜阀。 According to each of the at least part of one embodiment, the inlet valve and the purge / vent valve embodiment is integrated into the valve plate 4030 and is depending on whether pressure or a vacuum is applied to the respective diaphragm to open or close the diaphragm valve. 在其他实施例中,一些阀可以在分配块体4005的外部或布置在附加阀板中。 In other embodiments, some of the valves may dispense block body 4005 are arranged on the external or additional valve plate. 根据一个实施例,PTFE的片层夹在阀板4030和分配块体4005之间以形成各种阀的隔膜。 According to one embodiment, PTFE is a separator sheet interposed between the valve 4005 to form various valve plate 4030 and the allocation block. 阀板4030包括用于每个阀的阀控制入口(未显示)以将压力或真空施加到相应隔膜。 The valve plate includes a valve 4030 to control each valve inlet (not shown) to the pressure or vacuum is applied to the respective diaphragm.

[0118] 与多级泵100相同,泵4000可以包括防止流体液滴进入多级泵100容纳电子设备的区域的几个特征。 [0118] the same multistage pump 100, the pump 4000 may include several features to prevent fluid droplets into the region multistage pump 100 receiving the electronic device. “防液滴”特征可以包括突出唇边,倾斜特征,部件之间的密封,在金属/聚合物分界面的偏移和使电子设备隔绝液滴的上述其他特征。 "Anti-droplets" feature may include a projecting lip, wherein the inclined sealing member between the offset at the metal / polymer interface of the electronic apparatus and the other features of isolated droplets. 电子设备和歧管可以类似于上述方式被配置以减小热量对泵室中流体的影响。 The electronic device and the manifold may be similar to the above-described embodiment is configured to reduce the effect of heat on the fluid in the pump chamber. 因此,多级泵中用于减小形状因数和热影响和防止流体进入电子设备壳体的类似特征可以用在单级泵中。 Thus, multistage pump for reducing the form factor and the thermal effect and prevent fluid from entering the electronic device housing similar features may be used in a single stage pump.

[0119] 另外,上述许多控制方法学也可以与泵4000结合使用以实现基本满意的分配。 [0119] Further, many of the above control methodology may also be used in conjunction with the pump 4000 to achieve a satisfactory distribution substantially. 例如,本发明的实施例可以用于控制泵4000的阀以保证根据阀序列操作泵送装置的阀系统, 所述阀序列被配置成基本最小化通过泵送装置的流体流动路径被关闭的时间(例如到泵送装置的外部区域)。 For example, embodiments of the present invention may be used to control the valves of the pump 4000 according to ensure operation of the valve system the valve sequence pumping device, the sequence valve being configured to substantially minimize the pumping device through the fluid flow path is closed time (e.g., outer area to the pumping apparatus). 而且,在某些实施例中,当泵4000在操作中时在阀状态变化之间将使用足够的时间以保证在另一变化开始之前特定的阀被完全打开或关闭。 Further, in some embodiments, when the pump 4000 when the state changes between the valve to be used in sufficient time to ensure that a particular operation the valve is fully opened or closed before another change. 例如,泵4000的电机的移动可以被延迟足够的时间以保证在填充阶段之前泵4000的入口阀完全打开。 For example, moving the motor pump 4000 may be delayed a sufficient time to ensure that the pump inlet valve 4000 is fully opened before the filling stage.

[0120] 类似地,用于补偿或解决可以在泵送装置的室中发生的压力漂移的系统和方法的实施例可以基本同样有效地应用于泵4000。 Example [0120] Similarly, for compensating or solving a system and method that may occur in the pressure chamber of the pumping device may be substantially drift equally effectively applied to the pump 4000. 在分配之前分配电机可以被控制以基于在分配室中感测的压力基本保持分配室中的基线压力,如果分配室中的压力不同于所需压力(例如高于或低于),可以使用控制回路使得它被重复确定,并且如果这样的话,泵送机构的移动被调节以基本保持分配室中的所需压力。 Dispense motor may be controlled based on the pressure in the distribution chamber remains substantially sensed baseline pressure distribution chamber, if the pressure is different from the distribution chamber a desired pressure (e.g., higher or lower) may be used prior to dispensing controlled it was determined that the loop is repeated, and if so, moving the pumping mechanism is adjusted to substantially maintain a desired pressure in the distribution chamber.

[0121] 尽管泵4000的室中的压力调节实质上可以在任何时刻发生,在分配阶段开始之前它尤其有用。 [0121] Although the pressure of the pump chamber is adjusted substantially in 4000 can occur at any time, which is especially useful prior to the dispensing phase begins. 尤其是,当泵4000初始进入准备阶段时分配室185中的压力可以处于基线压力,该基线压力大约为用于随后分配阶段的所需压力(例如从校准或先前的分配确定的分配压力)或其某个分数。 In particular, when the pump 4000 into the initial stage of preparation in the pressure distribution chamber 185 may be in baseline pressure, the desired pressure is about the baseline pressure (e.g., pressure distribution is determined from the calibration or the previous allocation) for subsequent dispensing phase or one of its scores. 该所需分配压力可以用于实现具有所需一组特性,例如所需流速,量等。 The desired pressure distribution can be used to realize a desired set of characteristics, such as desired flow rate, amount and the like. 通过在出口阀打开之前的任何时刻使分配室185中的流体达到该所需基线压力, 可以在分配阶段之前解决顺应性和泵4000的部件的变化并且实现满意的分配。 By any time prior to the dispensing outlet valve opens the fluid chamber 185 reaches the desired baseline pressure, compliance can be resolved and the change of the pump member 4000 and the stage prior to dispensing to achieve a satisfactory distribution.

[0122] 然而由于在进入准备阶段和开始分配阶段之间有一定的延迟,泵4000的室内的压力可以在准备阶段期间基于各种因素变化。 [0122] However, due to enter the preparatory stage between the stage and began to assign a certain delay, the pump chamber pressure of 4000 may change based on various factors during the preparation phase. 为了防止该压力漂移,可以使用本发明的实施例使得在泵4000的室中基本保持所需基线压力并且在随后的分配阶段中实现满意的分配。 In order to prevent drift of the pressure, the embodiment may be used in the present invention is such that the pump chamber 4000 remains substantially the baseline pressure required to achieve a satisfactory distribution and in the subsequent distribution stages. [0123] 除了控制单级泵中的压力漂移之外,本发明的实施例也可以用于补偿在泵4000 或与泵4000结合使用的设备内部的各种机构或部件的促动所导致的分配室中的压力变动。 The actuator [0123] In addition to the single-stage pump pressure control drift, embodiments of the present invention may also be used to compensate for the pump and the pump 4000 or 4000 used in conjunction with various mechanisms or components within the device resulting distribution pressure chamber changes.

[0124] 本发明的一个实施例可以在分配阶段(或任何其他阶段)开始之前校正由净化或排出阀的关闭导致的泵室中的压力变化。 An embodiment [0124] of the present invention may correct variation of the pump pressure chamber in the closing of the valve caused by the purification or before the beginning of the discharge phase distribution (or any other stage). 该补偿可以类似于上面关于多级泵100所述通过反转泵4000的电机使得当净化或入口阀关闭时泵4000的室的体积基本增加这样的阀的滞留体积而实现。 The compensation may be similar to the above with respect to the pump motor 100 by reversing the multistage pump 4000 such that when the purge valve is closed, or the volume of the inlet chamber of the pump 4000 increases hold-up volume substantially such a valve is achieved.

[0125] 因此,本发明的实施例提供了一种具有温和流体操作特性的泵送装置。 [0125] Thus, embodiments of the present invention provide a fluid pumping apparatus having a mild operating characteristics. 通过排列泵送装置内的阀的打开和关闭和/或电机的启动的顺序,可以避免或减轻潜在的破坏性压力尖峰。 Opened by the valve arrangement and in the pumping device and / or the closing motor starting sequence, avoided or mitigated potentially destructive pressure spikes. 本发明的实施例也可以利用其他泵控制机构和阀衬(valve lining)以帮助减小压力对过程流体的有害影响。 Embodiments of the invention may also use other means and pump control valve liner (valve lining) to help reduce the harmful effects of pressure on the process fluid.

[0126] 在前面的说明书中,参考特定实施例描述了本发明。 [0126] In the foregoing specification, embodiments described with reference to particular embodiments of the present invention. 然而,本领域的普通技术人员应当理解可以进行各种修改和变化而不脱离如下面的权利要求中所述的本发明的范围。 However, those of ordinary skill in the art should be understood that various modifications and variations are possible without departing from the scope of the invention as claimed in claims following claim. 因此,说明书和附图应当被视为是示例意义而不是限制意义,并且所有这样的修改应当包括在本发明的范围内。 Accordingly, the specification and figures are to be regarded in an illustrative sense rather than a restrictive sense, and all such modifications should be included within the scope of the invention.

[0127] 在上面关于特定实施例描述了益处,其他优点,和问题的解决方案。 [0127] In the embodiments described above with respect to specific embodiments Benefits, other advantages, and solutions to problems. 然而,益处,优点,问题的解决方案,和可以导致任何益处,优点,或问题的解决方案发生或变得更显著的任何部件(一个或多个)应当被理解为任何或所有权利要求的主要、必需或基本的特征或部件。 However, solutions to the benefits, advantages, problems, and may cause any benefit, advantage, or solution to occur or become any component (s) should be more pronounced understood as any or all the claims of the main , required, or essential features or components.

Claims (20)

1. 一种用于补偿泵送装置中的压力的方法,所述泵送装置具有腔室,该方法包括: 将流体引入泵送装置的分配室中;打开或关闭所述泵送装置的阀;和移动所述泵送装置的泵送机构的隔膜,以调节所述分配室的体积,从而补偿所述分配室中由于所述阀的打开或关闭所产生的压力减小或压力增加,其中,利用电机直接移动所述隔膜。 Valve opening or closing the pumping means; introducing a fluid dispensing device pumping chamber: 1. A pressure compensating device for pumping, the pumping means having a chamber, the method comprising ; diaphragm pumping mechanism and the movement of the pumping means, to regulate the volume of the dispensing chamber, said dispensing chamber so as to compensate opened or closed due to the pressure generated by the pressure reducing valve or increased, wherein , the direct movement of the diaphragm by the motor.
2.根据权利要求1所述的方法,其中,所述压力增加大致与所述阀的缩进体积成比例。 The method according to claim 1, wherein said pressure increase substantially proportional to the volume of the valve is retracted.
3.根据权利要求2所述的方法,其中,所述隔膜被移动以使所述分配室的体积增加基本等于所述阀的缩进体积的量。 3. The method according to claim 2, wherein the diaphragm is moved to bring the volume of the dispensing chamber substantially equal to the amount of increase in volume of the valve is retracted.
4.根据权利要求3所述的方法,其进一步包括移动所述隔膜以从所述泵送装置的所述分配室分配流体。 4. The method according to claim 3, further comprising a movement of the diaphragm to dispense from said dispensing chamber of the fluid pumping device.
5.根据权利要求3所述的方法,其中所述隔膜被移动以使所述分配室的体积增加大约超调体积,然后所述隔膜被移动以使所述分配室的体积减小大约超调体积。 5. The method according to claim 3, wherein the diaphragm is moved to bring the volume of the dispensing chamber volume is increased by about overshoot, then the diaphragm is moved to reduce the volume of the dispensing chamber about overshoot volume.
6.根据权利要求5所述的方法,其进一步包括移动所述隔膜以从所述泵送装置分配流体。 6. The method according to claim 5, further comprising a movement of the diaphragm to dispense fluid from the pumping apparatus.
7.根据权利要求2所述的方法,其中所述隔膜被移动以增加所述分配室的体积直到在所述分配室中获得所需压力。 7. The method according to claim 2, wherein the diaphragm is moved to increase until the pressure in the dispensing chamber of the dispensing chamber volume is required.
8.根据权利要求7所述的方法,其进一步包括移动所述隔膜以从所述泵送装置分配流体。 8. The method according to claim 7, further comprising a movement of the diaphragm to dispense fluid from the pumping apparatus.
9.根据权利要求7所述的方法,其中所述隔膜被移动以增加所述分配室的体积直到在所述分配室中获得低于所需压力的压力,然后所述隔膜被移动以减小所述分配室的体积直到获得大约所需压力。 9. The method according to claim 7, wherein the diaphragm is moved to increase the pressure of the volume of the dispensing chamber until the dispensing chamber lower than the desired pressure, then the diaphragm is moved to reduce the the volume of the dispensing chamber until the desired pressure is obtained around.
10.根据权利要求9所述的方法,其进一步包括移动所述隔膜以从所述泵送装置分配流体。 10. The method of claim 9, further comprising a movement of the diaphragm to dispense fluid from the pumping apparatus.
11. 一种系统,其包括:泵送装置,其包括进给室、能够操作以接收用于分配的流体的分配室和位于所述分配室内的泵送机构;和控制器,其被配置成调节所述泵送装置的泵送机构的移动,使得当流体被引入泵送装置的分配室中并且所述泵送装置的阀被打开或关闭时,电机被操作以便移动所述泵送装置的隔膜,从而调节所述分配室的体积,以补偿所述分配室中由于所述阀的打开或关闭所产生的压力减小或压力增加。 11. A system, comprising: a pumping means which includes a feed chamber, operable to receive a dispensing chamber for dispensing the fluid and pumping means located in said dispensing chamber; and a controller configured to adjusting the pumping mechanism moving the pumping means, such that when fluid is introduced into the dispensing chamber of the pumping means and the pumping means when the valve is opened or closed, the motor is operated to move the pumping means diaphragm, thereby adjusting the volume of the distribution chamber, to compensate for the dispensing chamber is opened or closed due to the pressure generated pressure increase or decrease the valve.
12.根据权利要求11所述的系统,其中,所述压力增加大致与所述阀的缩进体积成比例。 12. The system of claim 11, wherein said pressure increase substantially proportional to the volume of the valve is retracted.
13.根据权利要求12所述的系统,其中,调节所述分配室的体积包括移动所述隔膜以使所述分配室的体积增加基本等于所述阀的缩进体积的量。 13. The system of claim 12, wherein adjusting the volume of the dispensing chamber comprises movement of the diaphragm to increase the volume of the dispensing chamber so that a substantially equal amount of indentation volume of the valve.
14.根据权利要求13所述的系统,其中,所述控制系统能够进一步操作以调节所述隔膜的移动从而从所述泵送装置分配流体。 14. The system according to claim 13, wherein the control system is further operable to adjust the movement of the diaphragm and thus dispensing fluid from the pumping apparatus.
15.根据权利要求13所述的系统,其中,调节所述分配室的体积包括移动所述隔膜以使所述分配室的体积增加大约超调体积,然后所述隔膜被移动以使所述分配室的体积减小大约超调体积。 15. The system according to claim 13, wherein adjusting the volume of the dispensing chamber comprises movement of the diaphragm to cause the volume of the dispensing chamber volume is increased by about overshoot, then the diaphragm is moved to the dispensing volume of the chamber volume is reduced by about overshoot.
16.根据权利要求15所述的系统,其中,所述控制系统能够进一步操作以调节所述隔膜的移动从而从所述泵送装置分配流体。 16. The system according to claim 15, wherein the control system is further operable to adjust the movement of the diaphragm and thus dispensing fluid from the pumping apparatus.
17.根据权利要求13所述的系统,其中调节分配室的体积包括移动所述隔膜以增加所述分配室的体积,直到在所述分配室中获得所需压力。 17. The system according to claim 13, wherein the volume of the dispensing chamber comprises adjusting movement of the diaphragm to increase the volume of the dispensing chamber, the dispensing chamber until the desired pressure.
18.根据权利要求17所述的系统,其中,所述控制系统能够进一步操作以调节所述隔膜的移动从而从所述泵送装置分配流体。 18. The system according to claim 17, wherein the control system is further operable to adjust the movement of the diaphragm and thus dispensing fluid from the pumping apparatus.
19.根据权利要求17所述的系统,其中调节所述分配室的体积包括移动所述隔膜以增加所述分配室的体积,直到在所述分配室中获得低于所需压力的压力,然后所述隔膜被移动以减小所述分配室的体积直到获得大约所需压力。 19. The system according to claim 17, wherein the volume of the dispensing chamber comprises adjusting movement of the diaphragm to increase the volume of the dispensing chamber until the pressure in said dispensing chamber is lower than the desired pressure, and then the diaphragm is moved to the desired reduced pressure until approximately the volume of the dispensing chamber.
20.根据权利要求19所述的系统,其中,所述控制系统能够进一步操作以调节所述隔膜的移动从而从所述泵送装置分配流体。 20. The system according to claim 19, wherein the control system is further operable to adjust the movement of the diaphragm to dispense fluid from the pumping apparatus.
CN 200680045074 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor CN101495756B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US74168105P true 2005-12-02 2005-12-02
US60/741,681 2005-12-02
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Publications (2)

Publication Number Publication Date
CN101495756A CN101495756A (en) 2009-07-29
CN101495756B true CN101495756B (en) 2012-07-04

Family

ID=38123375

Family Applications (2)

Application Number Title Priority Date Filing Date
CN 200680045074 CN101495756B (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor
CN2012101516051A CN102705213A (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2012101516051A CN102705213A (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Country Status (5)

Country Link
JP (2) JP5355091B2 (en)
KR (1) KR101243524B1 (en)
CN (2) CN101495756B (en)
TW (1) TWI443482B (en)
WO (1) WO2007067359A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9297374B2 (en) 2010-10-20 2016-03-29 Entegris, Inc. Method and system for pump priming
US9354637B2 (en) 2010-02-26 2016-05-31 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
US7940664B2 (en) 2005-12-02 2011-05-10 Entegris, Inc. I/O systems, methods and devices for interfacing a pump controller
US8029247B2 (en) 2005-12-02 2011-10-04 Entegris, Inc. System and method for pressure compensation in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN101356715B (en) 2005-12-02 2012-07-18 恩特格里公司 System and method for valve sequencing in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
JP5345853B2 (en) 2005-12-05 2013-11-20 インテグリス・インコーポレーテッド Error volume systems and methods for pumping
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US8641691B2 (en) 2006-09-28 2014-02-04 Smith & Nephew, Inc. Portable wound therapy system
CN102959683B (en) * 2010-06-28 2016-04-06 恩特格里公司 An intelligent controller can be customized distribution system
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
KR20170012423A (en) * 2014-05-28 2017-02-02 엔테그리스, 아이엔씨. Anti-backlash mechanism for the driven part-precision systems and motors in applications

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001020417A1 (en) 1999-09-17 2001-03-22 Rosemount Inc. Improved interface for managing process calibrators
TW466301B (en) 1999-10-18 2001-12-01 Integrated Designs L P Method and apparatus for dispensing fluids
CN1590761A (en) 1998-11-23 2005-03-09 米利波尔公司 Pump controller for precision pumping apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS6243074B2 (en) * 1978-11-29 1987-09-11 Ricoh Kk
JPS63255575A (en) * 1987-04-10 1988-10-21 Onizuka Glass Seisakusho:Kk Pump device
JPH04167916A (en) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd Device for controlling pressure of feeding water for spraying
JP3822362B2 (en) * 1998-07-10 2006-09-20 株式会社スギノマシン Liquid pressure device
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
JP4531328B2 (en) * 2002-05-31 2010-08-25 株式会社タクミナ Quantitative transfer device
JP3792624B2 (en) * 2002-08-08 2006-07-05 株式会社コベルコ科研 The method of producing oxide dispersion strengthened ferritic steel excellent in high temperature creep strength with coarse grain structure
JP3861060B2 (en) * 2003-01-31 2006-12-20 日機装株式会社 Non-pulsatile pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (en) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 Optical disk device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590761A (en) 1998-11-23 2005-03-09 米利波尔公司 Pump controller for precision pumping apparatus
WO2001020417A1 (en) 1999-09-17 2001-03-22 Rosemount Inc. Improved interface for managing process calibrators
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
TW466301B (en) 1999-10-18 2001-12-01 Integrated Designs L P Method and apparatus for dispensing fluids
US6478547B1 (en) 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9354637B2 (en) 2010-02-26 2016-05-31 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
US9297374B2 (en) 2010-10-20 2016-03-29 Entegris, Inc. Method and system for pump priming

Also Published As

Publication number Publication date
TW200732872A (en) 2007-09-01
JP2009527674A (en) 2009-07-30
WO2007067359A3 (en) 2009-04-23
JP2012154337A (en) 2012-08-16
JP5524269B2 (en) 2014-06-18
JP5355091B2 (en) 2013-11-27
WO2007067359A2 (en) 2007-06-14
KR101243524B1 (en) 2013-03-20
CN101495756A (en) 2009-07-29
TWI443482B (en) 2014-07-01
KR20080071582A (en) 2008-08-04
CN102705213A (en) 2012-10-03

Similar Documents

Publication Publication Date Title
US6419841B1 (en) Fluid dispensing system
JP2803859B2 (en) The fluid supply apparatus and control method thereof
JP4294485B2 (en) High purity fluid delivery systems
KR100758187B1 (en) Apparatus and methods for pumping high viscosity fluids
JP3057570B2 (en) Precision liquid dispenser
CN100374768C (en) Liquid flow controller and precision dispense apparatus and system
US6419462B1 (en) Positive displacement type liquid-delivery apparatus
CN100381213C (en) Method and device for injecting fixed quantity of liquid
EP0513843B1 (en) Integrated system for filtering and dispensing fluid
TW382615B (en) Dispensing system for accurately dispensing liquids and solids, pump and dispense head thereof, and method of calibrating the dispensing system
US6742993B2 (en) Method and apparatus for dispensing fluids
US6554579B2 (en) Liquid dispensing system with enhanced filter
JP3653688B2 (en) Slit coating coater and slit coating type coating method
US6752599B2 (en) Apparatus for photoresist delivery
JP3619032B2 (en) Vacuum pressure control valve
US5490765A (en) Dual stage pump system with pre-stressed diaphragms and reservoir
JP2003307178A (en) Diaphragm pump
US6190565B1 (en) Dual stage pump system with pre-stressed diaphragms and reservoir
US9617988B2 (en) System and method for variable dispense position
US5950923A (en) Suck back valve
KR101290958B1 (en) System and method for operation of a pump
JPH0673651B2 (en) The coating agent supply device
US6109881A (en) Gas driven pump for the dispensing and filtering of process fluid
JPH10281334A (en) Suck back valve
WO2001021525A1 (en) Precision dispensing pump and method of dispensing

Legal Events

Date Code Title Description
C06 Publication
C10 Entry into substantive examination
C14 Grant of patent or utility model
CF01