SG11201609910XA - Anti-backlash mechanism for motor-driven components in precision systems and applications - Google Patents

Anti-backlash mechanism for motor-driven components in precision systems and applications

Info

Publication number
SG11201609910XA
SG11201609910XA SG11201609910XA SG11201609910XA SG11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA SG 11201609910X A SG11201609910X A SG 11201609910XA
Authority
SG
Singapore
Prior art keywords
applications
motor
driven components
backlash mechanism
precision systems
Prior art date
Application number
SG11201609910XA
Inventor
James Cedrone
Iraj Gashgaee
George L Gonnella
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG11201609910XA publication Critical patent/SG11201609910XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/2003—Screw mechanisms with arrangements for taking up backlash
    • F16H25/2006—Screw mechanisms with arrangements for taking up backlash with more than one nut or with nuts consisting of more than one bearing part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/005—Multi-stage pumps with two cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/02—Pressure in the inlet chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/50—Presence of foreign matter in the fluid
    • F04B2205/503—Presence of foreign matter in the fluid of gas in a liquid flow, e.g. gas bubbles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Transmission Devices (AREA)
  • Details Of Reciprocating Pumps (AREA)
SG11201609910XA 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications SG11201609910XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462004117P 2014-05-28 2014-05-28
PCT/US2015/032816 WO2015184056A1 (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Publications (1)

Publication Number Publication Date
SG11201609910XA true SG11201609910XA (en) 2016-12-29

Family

ID=53433273

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201609910XA SG11201609910XA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications
SG10201810172QA SG10201810172QA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201810172QA SG10201810172QA (en) 2014-05-28 2015-05-28 Anti-backlash mechanism for motor-driven components in precision systems and applications

Country Status (8)

Country Link
US (2) US20170114879A1 (en)
EP (2) EP3149329B1 (en)
JP (2) JP6644712B2 (en)
KR (2) KR102141271B1 (en)
CN (2) CN106460811A (en)
SG (2) SG11201609910XA (en)
TW (2) TWI664350B (en)
WO (2) WO2015184057A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10969805B2 (en) 2013-02-11 2021-04-06 Graco Minnesota Inc. Paint sprayer distributed control and output volume monitoring architectures
US11124406B1 (en) * 2014-07-13 2021-09-21 Sestra Systems, Inc. System and method for piston detection in a metering mechanism for use with beverage dispensing system
FR3049993B1 (en) * 2016-04-07 2018-04-20 Dosatron International MECHANISM FOR DOSING A PUMP, METHODS OF LOCKING AND UNLOCKING SUCH A MECHANISM
US10519942B2 (en) 2016-07-28 2019-12-31 Accriva Diagnostics, Inc. Methods of operating a pump to reduce or eliminate pump backlash errors
US10570896B1 (en) * 2017-04-28 2020-02-25 Vp Sales And Company Lp Packing nut lock
US10792697B2 (en) * 2017-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Drippage prevention system and method of operating same
JP6920133B2 (en) * 2017-08-23 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス Processing liquid supply device
JP6920923B2 (en) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス Pump equipment and substrate processing equipment
KR101933062B1 (en) * 2017-09-19 2019-03-15 서강대학교산학협력단 Pump with pressure measurement function, fluid transfortation system using the same, and operation method thereof
US10663865B2 (en) * 2018-06-29 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist recycling apparatus
EP4331731A3 (en) * 2018-09-24 2024-05-29 Graco Minnesota Inc. Paint sprayer distributed control and output volume monitoring architectures
BR102018072471B1 (en) * 2018-10-31 2023-01-03 Drausuisse Brasil Comércio E Locação De Unidades Hidráulicas Inteligentes S.A. HYDRAULIC UNIT WITH COMBINED DRIVE BY PNEUMATIC WAY AND SERVO MOTOR AND ITS USE
KR102115101B1 (en) * 2018-11-01 2020-05-26 강현석 Iot-based intelligent remote management service system
WO2020097700A1 (en) * 2018-11-14 2020-05-22 Drausuisse Brasil Comercio E Locacao De Unidades Hidraulicas Inteligentes S.A. Hydraulic unit with parallel pumps linked to a servomotor and use thereof
CN111219248B (en) * 2018-11-27 2024-10-11 罗伯特·博世有限公司 Method for detecting presence of filter in system
JP7193376B2 (en) * 2019-02-22 2022-12-20 Ｔｏｗａ株式会社 RESIN MOLDING APPARATUS AND RESIN MOLDED PRODUCT MANUFACTURING METHOD
IT201900007779A1 (en) * 2019-05-31 2020-12-01 Corob Spa METHOD OF CONTROL OF THE DISPENSATION OF FLUID PRODUCTS
US11260669B2 (en) 2019-10-01 2022-03-01 Hewlett-Packard Development Company, L.P. Gas purger anomaly condition indication
TWI768379B (en) * 2020-06-19 2022-06-21 緯創資通股份有限公司 Presure buffering system and biological culture device
JP2022161268A (en) * 2021-04-08 2022-10-21 株式会社Ｓｃｒｅｅｎホールディングス Processing liquid distribution method and processing liquid supply device
JP7530861B2 (en) 2021-04-27 2024-08-08 東京エレクトロン株式会社 Processing liquid supply device, liquid replacement method, and storage medium
JP2023127381A (en) * 2022-03-01 2023-09-13 株式会社島津製作所 Controller of vacuum pump and control method

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4896552A (en) * 1988-01-19 1990-01-30 Ballscrews & Actuators Co., Inc. Ballscrew follower and method of making and operating the same
US4954032A (en) * 1989-11-13 1990-09-04 Windfred M. Berg, Inc. Anti-backlash nut
US5839321A (en) * 1997-05-16 1998-11-24 Ball Screw & Actuators Co. Backlash compensating assembly
US6142032A (en) * 1998-01-30 2000-11-07 Creager; Wesley Carl Adjustable anti-backlash nut assembly
US6234771B1 (en) * 1998-06-02 2001-05-22 Bayer Corporation Precision pumping device
US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
CN1590761A (en) * 1998-11-23 2005-03-09 米利波尔公司 Pump controller for precision pumping apparatus
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6131478A (en) * 1999-01-07 2000-10-17 Kerk Motion Products, Inc. Anti-backlash nut assembly
JP2004143960A (en) * 2002-10-22 2004-05-20 Smc Corp Pump apparatus
JP4311620B2 (en) * 2003-05-26 2009-08-12 ケーエスエス株式会社 Backlash removal nut
JP4206308B2 (en) * 2003-08-01 2009-01-07 株式会社日立ハイテクノロジーズ Liquid chromatograph pump
US7328839B2 (en) * 2004-10-21 2008-02-12 International Business Machines Corporation User configurable alerts for ATM transactions
WO2006057957A2 (en) 2004-11-23 2006-06-01 Entegris, Inc. System and method for a variable home position dispense system
DE102005017240A1 (en) * 2005-04-14 2006-10-19 Alldos Eichler Gmbh Method and device for monitoring a pumped by a pump fluid flow
US8777189B2 (en) 2005-04-25 2014-07-15 Entegris, Inc. Method and apparatus for treating fluids to reduce microbubbles
CN101356488B (en) 2005-12-02 2012-05-16 恩特格里公司 I/O systems, methods and devices for interfacing a pump controller
US8025486B2 (en) 2005-12-02 2011-09-27 Entegris, Inc. System and method for valve sequencing in a pump
CN101495756B (en) * 2005-12-02 2012-07-04 恩特格里公司 System and method for correcting for pressure variations using a motor
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
CN102705209B (en) 2005-12-02 2015-09-30 恩特格里公司 For system and method pressure compensated in pump
JP2007158663A (en) * 2005-12-05 2007-06-21 Ricoh Co Ltd Method for adjusting offset of analog image signal
US7842010B2 (en) 2005-12-05 2010-11-30 Medrad, Inc. Pneumatically-operated thrombectomy catheter deployment system
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7443483B2 (en) 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
US7992456B2 (en) * 2007-12-10 2011-08-09 Pacific Bearing Company Anti-backlash nut, lead screw assembly and method
JP5419008B2 (en) 2009-04-28 2014-02-19 Ｓｍｃ株式会社 Pump device
TWI563351B (en) 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
CN103843109B (en) 2011-08-19 2016-09-14 恩特格里斯公司 In order to detect the system and method for air in a fluid
US9303742B2 (en) * 2011-11-28 2016-04-05 Pacific Bearing Company Inverted spline rail system
US20140271264A1 (en) * 2013-03-15 2014-09-18 Anthony Florindi Piston pump drive train anti-backlash
CN203488656U (en) * 2013-08-19 2014-03-19 高明铁企业股份有限公司 Back clearance reducing screw structure

Also Published As

Publication number Publication date
WO2015184057A9 (en) 2016-09-01
EP3149328B1 (en) 2019-03-20
JP2017517696A (en) 2017-06-29
KR102141270B1 (en) 2020-08-04
EP3149328A1 (en) 2017-04-05
WO2015184057A1 (en) 2015-12-03
TWI670417B (en) 2019-09-01
KR102141271B1 (en) 2020-08-04
TW201608131A (en) 2016-03-01
EP3149329A1 (en) 2017-04-05
JP6644712B2 (en) 2020-02-12
KR20170013322A (en) 2017-02-06
US20170114879A1 (en) 2017-04-27
KR20170012423A (en) 2017-02-02
EP3149329B1 (en) 2020-01-29
JP6543646B2 (en) 2019-07-10
US20170107982A1 (en) 2017-04-20
CN106662083B (en) 2018-11-27
TW201608133A (en) 2016-03-01
TWI664350B (en) 2019-07-01
CN106460811A (en) 2017-02-22
WO2015184056A1 (en) 2015-12-03
SG10201810172QA (en) 2018-12-28
JP2017516944A (en) 2017-06-22
CN106662083A (en) 2017-05-10

Similar Documents

Publication Publication Date Title
SG11201609910XA (en) Anti-backlash mechanism for motor-driven components in precision systems and applications
HK1252377A1 (en) Linear actuators for use in electronic devices
HK1247352A1 (en) Calibration techniques in haptic systems
IL275181B (en) Sterile chromatography resin and uses thereof in manufacturing processes
GB2524085B (en) Exception handling in microprocessor systems
EP3234805A4 (en) Graph processing in database
ZA201704227B (en) Drawers and components for drawers
HK1250178A1 (en) Machining device
GB2551858B (en) Enhancing touch-sensitive device precision
SG10201607756XA (en) Cartridge and member used for cartridge
PL3224500T3 (en) Ball screw and nut mechanism
HK1219811A1 (en) Components with multiple energization elements for biomedical devices
IL251659A0 (en) Hydroxyl purine compounds and applications thereof
ITUB20153713A1 (en) EPICYCLOID PRECISION REDUCER
PL2916007T3 (en) Screw spindle pump
TWM489931U (en) Linear slide and end cover module thereof
GB201409203D0 (en) Improvements in digitising slides
SG11201801982XA (en) Linear motor field unit and linear motor
EP3288712C0 (en) Device for machining surfaces
LT3249244T (en) Screw
LT3225858T (en) Screw
PL3191714T3 (en) Screw compressor element
SG10201501373WA (en) Contrast Agent And Applications Thereof
EP3402990C0 (en) Pump for nuclear applications
HK1209472A1 (en) Nut and screw combination