KR101300962B1 - 회로 패턴 검사 장치 - Google Patents

회로 패턴 검사 장치 Download PDF

Info

Publication number
KR101300962B1
KR101300962B1 KR1020120006372A KR20120006372A KR101300962B1 KR 101300962 B1 KR101300962 B1 KR 101300962B1 KR 1020120006372 A KR1020120006372 A KR 1020120006372A KR 20120006372 A KR20120006372 A KR 20120006372A KR 101300962 B1 KR101300962 B1 KR 101300962B1
Authority
KR
South Korea
Prior art keywords
electrode
conductive pattern
feed
pattern
test
Prior art date
Application number
KR1020120006372A
Other languages
English (en)
Korean (ko)
Other versions
KR20120085207A (ko
Inventor
히로시 하모리
Original Assignee
오에이치티 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오에이치티 가부시끼가이샤 filed Critical 오에이치티 가부시끼가이샤
Publication of KR20120085207A publication Critical patent/KR20120085207A/ko
Application granted granted Critical
Publication of KR101300962B1 publication Critical patent/KR101300962B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/303—Contactless testing of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Multimedia (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
KR1020120006372A 2011-01-21 2012-01-19 회로 패턴 검사 장치 KR101300962B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-010707 2011-01-21
JP2011010707A JP5305111B2 (ja) 2011-01-21 2011-01-21 回路パターン検査装置

Publications (2)

Publication Number Publication Date
KR20120085207A KR20120085207A (ko) 2012-07-31
KR101300962B1 true KR101300962B1 (ko) 2013-08-27

Family

ID=46526033

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120006372A KR101300962B1 (ko) 2011-01-21 2012-01-19 회로 패턴 검사 장치

Country Status (4)

Country Link
JP (1) JP5305111B2 (zh)
KR (1) KR101300962B1 (zh)
CN (1) CN102608516B (zh)
TW (1) TWI427302B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5417651B1 (ja) * 2013-01-08 2014-02-19 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5433876B1 (ja) * 2013-03-26 2014-03-05 オー・エイチ・ティー株式会社 回路パターン検査装置
WO2014208129A1 (ja) * 2013-06-28 2014-12-31 シャープ株式会社 タッチパネル用電極基板の検査方法
JP6368927B2 (ja) * 2014-02-18 2018-08-08 日本電産リード株式会社 シングルレイヤー型検査対象物の検査装置及び検査方法
JP6421463B2 (ja) * 2014-06-02 2018-11-14 日本電産リード株式会社 基板検査装置、及び基板検査方法
JP6014950B1 (ja) * 2015-12-22 2016-10-26 オー・エイチ・ティー株式会社 導電体パターン検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010139377A (ja) 2008-12-11 2010-06-24 Oht Inc 回路パターン検査装置及びその回路パターン検査方法
JP4644745B2 (ja) 2009-08-04 2011-03-02 オー・エイチ・ティー株式会社 回路パターン検査装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11133090A (ja) * 1997-10-30 1999-05-21 Nihon Densan Riido Kk 基板検査装置および基板検査方法
JP4246987B2 (ja) * 2002-11-27 2009-04-02 日本電産リード株式会社 基板検査装置および基板検査方法
TWI247904B (en) * 2002-11-30 2006-01-21 Oht Inc Circuit pattern inspection device and circuit pattern inspection method
JP4008949B2 (ja) * 2002-11-30 2007-11-14 オー・エイチ・ティー株式会社 回路パターン検査装置及び回路パターン検査方法
JP4562358B2 (ja) * 2003-07-04 2010-10-13 株式会社ユニオンアロー・テクノロジー 導電パターン検査装置
JP2005208058A (ja) * 2003-12-26 2005-08-04 Oht Inc 回路パターン検査装置及び回路パターン検査方法
JP4394980B2 (ja) * 2004-01-30 2010-01-06 日本電産リード株式会社 基板検査装置及び基板検査方法
JP4291843B2 (ja) * 2006-10-19 2009-07-08 株式会社東京カソード研究所 パターン検査装置
JP2009080042A (ja) * 2007-09-26 2009-04-16 Oht Inc 回路パターン検査装置
JP4856120B2 (ja) * 2008-06-06 2012-01-18 株式会社ユニオンアロー・テクノロジー 導電パターン検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010139377A (ja) 2008-12-11 2010-06-24 Oht Inc 回路パターン検査装置及びその回路パターン検査方法
JP4644745B2 (ja) 2009-08-04 2011-03-02 オー・エイチ・ティー株式会社 回路パターン検査装置

Also Published As

Publication number Publication date
TWI427302B (zh) 2014-02-21
KR20120085207A (ko) 2012-07-31
TW201239375A (en) 2012-10-01
CN102608516B (zh) 2015-04-29
CN102608516A (zh) 2012-07-25
JP5305111B2 (ja) 2013-10-02
JP2012150078A (ja) 2012-08-09

Similar Documents

Publication Publication Date Title
KR101300962B1 (ko) 회로 패턴 검사 장치
KR101276970B1 (ko) 회로 패턴 검사 장치 및 검사 방법
KR101101848B1 (ko) 터치패널 검사장치
JP2005331516A (ja) 配線の破壊検査装置及び破壊検査方法
JP2006300665A (ja) 検査装置および導電パターン検査方法
JP2006200993A (ja) 回路パターン検査装置およびその方法
KR101451549B1 (ko) 회로 패턴 검사 장치
KR101633514B1 (ko) 회로 패턴 검사 장치 및 그 회로 패턴 검사 방법
KR101175384B1 (ko) 회로 패턴 검사 장치, 그 방법 및 컴퓨터 프로그램을 기억하는 컴퓨터 판독 가능 기록 매체
WO2002101398A1 (fr) Appareil d'inspection de schema de circuit, procede d'inspection de schema de circuit et support d'enregistrement
WO2004057350A1 (ja) 回路パターン検査装置及びパターン検査方法
KR20070111330A (ko) 기판 검사 장치 및 기판 검사 방법
KR101296460B1 (ko) 기판 검사 장치 및 기판 검사 방법
US6952104B2 (en) Inspection method and apparatus for testing fine pitch traces
CN106154095A (zh) 接触式ltps的检测方法以及用于该方法的焊盘结构
JP2005208058A (ja) 回路パターン検査装置及び回路パターン検査方法
JP5122512B2 (ja) 回路パターン検査装置
JP5899961B2 (ja) 絶縁検査装置及び絶縁検査方法
KR101763535B1 (ko) 도전체 패턴 검사 장치
KR101533187B1 (ko) 회로 패턴 검사 장치
KR101823317B1 (ko) 패널의 배선패턴 검사장치 및 배선패턴 검사방법
CN116859220A (zh) 非接触式的短路检测方法
JP2010038742A (ja) 回路断線検査装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160516

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20170517

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20180807

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20190529

Year of fee payment: 7