KR101287000B1 - 로봇 및 로봇의 전기 엔드 이펙터로 전기 연결을 하기 위한 시스템, 장치 및 방법 - Google Patents

로봇 및 로봇의 전기 엔드 이펙터로 전기 연결을 하기 위한 시스템, 장치 및 방법 Download PDF

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KR101287000B1
KR101287000B1 KR1020117018651A KR20117018651A KR101287000B1 KR 101287000 B1 KR101287000 B1 KR 101287000B1 KR 1020117018651 A KR1020117018651 A KR 1020117018651A KR 20117018651 A KR20117018651 A KR 20117018651A KR 101287000 B1 KR101287000 B1 KR 101287000B1
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South Korea
Prior art keywords
electrical
end effector
contacts
substrate
coupling
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Korean (ko)
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KR20110104991A (ko
Inventor
윌리엄 피. 라세키
이즈야 크레머맨
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어플라이드 머티어리얼스, 인코포레이티드
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R35/00—Flexible or turnable line connectors, i.e. the rotation angle being limited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20311—Robotic arm including power cable or connector

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020117018651A 2009-01-11 2010-01-08 로봇 및 로봇의 전기 엔드 이펙터로 전기 연결을 하기 위한 시스템, 장치 및 방법 Active KR101287000B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14380909P 2009-01-11 2009-01-11
US61/143,809 2009-01-11
PCT/US2010/020510 WO2010081009A2 (en) 2009-01-11 2010-01-08 Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof

Publications (2)

Publication Number Publication Date
KR20110104991A KR20110104991A (ko) 2011-09-23
KR101287000B1 true KR101287000B1 (ko) 2013-07-23

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Application Number Title Priority Date Filing Date
KR1020117018651A Active KR101287000B1 (ko) 2009-01-11 2010-01-08 로봇 및 로봇의 전기 엔드 이펙터로 전기 연결을 하기 위한 시스템, 장치 및 방법

Country Status (6)

Country Link
US (2) US8264187B2 (https=)
JP (1) JP5501375B2 (https=)
KR (1) KR101287000B1 (https=)
CN (1) CN102349146B (https=)
TW (1) TWI405649B (https=)
WO (1) WO2010081009A2 (https=)

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US20100178135A1 (en) 2010-07-15
WO2010081009A3 (en) 2010-10-14
JP2012514544A (ja) 2012-06-28
CN102349146B (zh) 2013-09-18
US20120321434A1 (en) 2012-12-20
TWI405649B (zh) 2013-08-21
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US8264187B2 (en) 2012-09-11
CN102349146A (zh) 2012-02-08
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