JP2012514544A5 - - Google Patents

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JP2012514544A5
JP2012514544A5 JP2011545461A JP2011545461A JP2012514544A5 JP 2012514544 A5 JP2012514544 A5 JP 2012514544A5 JP 2011545461 A JP2011545461 A JP 2011545461A JP 2011545461 A JP2011545461 A JP 2011545461A JP 2012514544 A5 JP2012514544 A5 JP 2012514544A5
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shaft
electrical
support
end effector
power source
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JP2011545461A
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JP5501375B2 (ja
JP2012514544A (ja
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Priority claimed from PCT/US2010/020510 external-priority patent/WO2010081009A2/en
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JP2011545461A 2009-01-11 2010-01-08 ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法 Active JP5501375B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14380909P 2009-01-11 2009-01-11
US61/143,809 2009-01-11
PCT/US2010/020510 WO2010081009A2 (en) 2009-01-11 2010-01-08 Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof

Publications (3)

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JP2012514544A JP2012514544A (ja) 2012-06-28
JP2012514544A5 true JP2012514544A5 (https=) 2013-09-12
JP5501375B2 JP5501375B2 (ja) 2014-05-21

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JP2011545461A Active JP5501375B2 (ja) 2009-01-11 2010-01-08 ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法

Country Status (6)

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US (2) US8264187B2 (https=)
JP (1) JP5501375B2 (https=)
KR (1) KR101287000B1 (https=)
CN (1) CN102349146B (https=)
TW (1) TWI405649B (https=)
WO (1) WO2010081009A2 (https=)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459140B2 (en) * 2007-04-18 2013-06-11 Fabworx Solutions, Inc. Adjustable wrist design for robotic arm
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
CN101790673B (zh) 2007-06-27 2013-08-28 布鲁克斯自动化公司 用于自轴承电机的位置反馈
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
KR101659931B1 (ko) 2007-06-27 2016-09-26 브룩스 오토메이션 인코퍼레이티드 다차원 위치 센서
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
KR20100056468A (ko) 2007-07-17 2010-05-27 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
US8264187B2 (en) 2009-01-11 2012-09-11 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
CN102326244B (zh) 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
DE102010052396A1 (de) * 2010-11-24 2012-05-24 Kuka Roboter Gmbh Verfahren und Vorrichtung zum Steuern einer Peripheriekomponente eines Robotersystems
WO2012125572A2 (en) 2011-03-11 2012-09-20 Brooks Automation, Inc. Substrate processing tool
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
CN104380452B (zh) 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
CN102699917A (zh) * 2012-06-08 2012-10-03 北京工业大学 一种基于智能手机的解魔方机器人
CN104428884B (zh) 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
CN103547089A (zh) * 2012-07-09 2014-01-29 鸿富锦精密工业(深圳)有限公司 机柜
US9558974B2 (en) * 2012-09-27 2017-01-31 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor processing station and method for processing semiconductor wafer
JP5663638B2 (ja) * 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
US9281221B2 (en) * 2012-11-16 2016-03-08 Taiwan Semiconductor Manufacturing Company Limited Ultra-high vacuum (UHV) wafer processing
WO2014085479A1 (en) 2012-11-30 2014-06-05 Applied Materials, Inc Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
US9515469B2 (en) 2012-12-14 2016-12-06 General Electric Company Vacuum feed-through assembly
US10427303B2 (en) 2013-03-15 2019-10-01 Applied Materials, Inc. Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
KR101491082B1 (ko) * 2013-09-11 2015-02-10 (주)얼라이드 테크 파인더즈 메니퓰레이터 장치
KR102323370B1 (ko) 2014-01-05 2021-11-05 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들
CN106463438B (zh) 2014-01-28 2019-09-10 布鲁克斯自动化公司 基板运输设备
TW201536496A (zh) * 2014-03-28 2015-10-01 Hon Hai Prec Ind Co Ltd 機械手臂
US10046421B2 (en) * 2014-06-11 2018-08-14 Andersen Industries, Inc. Welding apparatus
US9531118B2 (en) * 2014-07-10 2016-12-27 Norman R. Byrne Electrical power coupling with magnetic connections
KR102000690B1 (ko) 2014-12-26 2019-07-16 카와사키 주코교 카부시키 카이샤 다관절 로봇
US9358684B1 (en) * 2015-02-18 2016-06-07 Merry Electronics Co., Ltd. Wireless transmission device and robot arm using the same
US10799964B2 (en) * 2015-03-12 2020-10-13 Robert Bosch Tool Corporation Table saw with pulley alignment mechanism
US10786854B2 (en) * 2015-03-12 2020-09-29 Robert Bosch Tool Corporation Table saw with electrically isolated arbor shaft
JP6649689B2 (ja) * 2015-03-16 2020-02-19 株式会社ディスコ 減圧処理装置及びウエーハの保持方法
WO2016194336A1 (ja) * 2015-05-29 2016-12-08 株式会社アルバック 静電チャック付き搬送ロボットの制御システム
JP6513508B2 (ja) * 2015-07-01 2019-05-15 東京エレクトロン株式会社 搬送装置、その制御方法及び基板処理システム
CN105171749B (zh) * 2015-07-13 2018-08-03 上海交通大学 执行模块、魔方还原机器人及其使用方法
US9799544B2 (en) 2015-10-23 2017-10-24 Applied Materials, Inc. Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
JP6505027B2 (ja) * 2016-01-04 2019-04-24 株式会社日立ハイテクノロジーズ 試料の離脱方法およびプラズマ処理装置
TWI707754B (zh) 2016-06-28 2020-10-21 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
SG11202004931PA (en) * 2017-11-27 2020-06-29 Murata Machinery Ltd Storage device
US11574830B2 (en) 2018-03-16 2023-02-07 Brooks Automation Us, Llc Substrate transport apparatus
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
CN108598750A (zh) * 2018-06-07 2018-09-28 浙江琦星电子有限公司 机械臂关节间的电源和信号传输方式
US10669768B2 (en) * 2018-09-28 2020-06-02 Toyota Research Institute, Inc. Robotic power delivery
US11583756B2 (en) 2019-03-08 2023-02-21 Infivention Technologies Pvt. Ltd. Electronic game board
TWI704744B (zh) * 2019-03-29 2020-09-11 威達高科股份有限公司 使用移動機器人電池的電源橋接裝置
JP6667028B2 (ja) * 2019-04-10 2020-03-18 東京エレクトロン株式会社 搬送装置、その制御方法及び基板処理システム
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
JP2021095609A (ja) * 2019-12-18 2021-06-24 キヤノントッキ株式会社 成膜装置、成膜方法及び電子デバイスの製造方法
CN111105977B (zh) * 2020-01-09 2022-11-25 北京北方华创微电子装备有限公司 电气小车系统
JP6872050B1 (ja) * 2020-02-03 2021-05-19 日本航空電子工業株式会社 ロボット装置及び無線コネクタ
JP7412248B2 (ja) * 2020-03-30 2024-01-12 東京エレクトロン株式会社 搬送装置
DE102020115448A1 (de) 2020-06-10 2021-12-16 Beckhoff Automation Gmbh Armmodul für einen modularen Roboterarm eines Industrieroboters
JP6995941B1 (ja) * 2020-07-07 2022-01-17 日本航空電子工業株式会社 無線コネクタ着脱方法、ロボット装置、無線コネクタ及び無線コネクタユニット
US11770049B2 (en) 2020-09-23 2023-09-26 Applied Materials, Inc. Generating electric power for a robotic end effector
TWI750835B (zh) * 2020-10-06 2021-12-21 香港商女媧創造股份有限公司 馬達驅動結構
US12195314B2 (en) * 2021-02-02 2025-01-14 Applied Materials, Inc. Cathode exchange mechanism to improve preventative maintenance time for cluster system
KR20230148150A (ko) * 2021-02-24 2023-10-24 퍼시몬 테크놀로지스 코포레이션 통합된 페이로드 그리퍼를 가진 진공-환경 로봇
US11646217B2 (en) * 2021-04-14 2023-05-09 Applied Materials, Inc. Transfer apparatus and substrate-supporting member
DE102021109904A1 (de) * 2021-04-20 2022-10-20 J. Schmalz Gmbh Handhabungsvorrichtung mit definierter Ruhekonfiguration
KR102307687B1 (ko) * 2021-06-25 2021-10-05 (주) 티로보틱스 기판 이송 로봇을 진공 챔버 내에서 주행하기 위한 주행 로봇
CN113478521B (zh) * 2021-07-14 2022-12-30 东莞科卓机器人有限公司 一种气路电路共用的水平关节机器人
CN114122841B (zh) * 2021-10-27 2024-05-10 中航光电科技股份有限公司 一种无线数据传输旋转连接器
WO2026036301A1 (en) * 2024-08-14 2026-02-19 Abb Schweiz Ag Industrial robot

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2406503A1 (fr) 1977-10-19 1979-05-18 Renault Circuit de transfert d'energie et de signaux electriques sans contact au niveau des articulations d'un robot
JPH0625961Y2 (ja) * 1988-04-06 1994-07-06 日新電機株式会社 ウエハ搬送装置
JPH02159744A (ja) * 1988-12-14 1990-06-19 Fuji Electric Co Ltd 半導体ウエハチャック装置のウエハ離脱機構
JPH04291741A (ja) * 1991-03-20 1992-10-15 Hitachi Ltd 真空処理装置及びその異常検出方法
CH685165A5 (de) 1992-02-24 1995-04-13 Perfecta Schmid Ag Stickereibohrer.
US5637973A (en) * 1992-06-18 1997-06-10 Kabushiki Kaisha Yaskawa Denki Noncontacting electric power transfer apparatus, noncontacting signal transfer apparatus, split-type mechanical apparatus employing these transfer apparatus and a control method for controlling same
JP3293891B2 (ja) * 1992-08-14 2002-06-17 株式会社アルバック 搬送用ロボットの試料把持部の静電チャックへの供電手段、及びその供電手段を有する搬送用ロボット
JPH07100786A (ja) * 1993-10-01 1995-04-18 Yaskawa Electric Corp 無配線ロボット
JPH0883832A (ja) * 1994-07-13 1996-03-26 Shinko Electric Co Ltd 電力供給装置
JPH0851137A (ja) * 1994-08-08 1996-02-20 Shinko Electric Co Ltd 半導体製造装置における搬送装置
JPH08243968A (ja) * 1995-03-13 1996-09-24 Yaskawa Electric Corp エンドエフェクタ
JP3817815B2 (ja) * 1997-03-11 2006-09-06 住友電気工業株式会社 電磁着脱コネクタ
JP2000268912A (ja) * 1999-03-18 2000-09-29 Sumitomo Electric Ind Ltd 電磁着脱コネクタ
TW543079B (en) * 1999-06-03 2003-07-21 Applied Materials Inc Robot blade for semiconductor processing equipment
JP4730697B2 (ja) * 2001-03-29 2011-07-20 Toto株式会社 静電チャックユニット
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2004165198A (ja) * 2002-11-08 2004-06-10 Canon Inc 半導体製造装置
US20050066902A1 (en) * 2003-09-26 2005-03-31 Tokyo Electron Limited Method and apparatus for plasma processing
DE10349452A1 (de) 2003-10-23 2005-05-25 Bosch Rexroth Ag Roboter vom Scara-Typ
JP2005158827A (ja) * 2003-11-20 2005-06-16 Anelva Corp 基板搬送システム及び基板処理装置
DE10354880A1 (de) * 2003-11-21 2005-06-30 Sks Welding Systems Gmbh Schweißbrennervorrichtung zum Anschluß an einen Schweißroboter
JP2006005136A (ja) * 2004-06-17 2006-01-05 Canon Inc 搬送装置
CN100461363C (zh) * 2004-12-10 2009-02-11 株式会社爱发科 搬运机械手以及搬运装置
CN1942288B (zh) 2005-02-12 2010-12-22 应用材料公司 一种多轴真空电机组件
JP4508990B2 (ja) * 2005-09-07 2010-07-21 株式会社巴川製紙所 給電コネクタ、及び当該給電コネクタを有する静電チャック装置
JP2007073373A (ja) * 2005-09-07 2007-03-22 Seiko Epson Corp 電源コネクタ
TWI342597B (en) 2005-11-21 2011-05-21 Applied Materials Inc Methods and apparatus for transferring substrates during electronic device manufacturing
JP4802018B2 (ja) * 2006-03-09 2011-10-26 筑波精工株式会社 静電保持装置及びそれを用いた真空環境装置並びにアライメント装置又は貼り合わせ装置
CN101535010B (zh) 2006-08-11 2013-02-27 应用材料公司 用于机械手肘关节组件的方法和装置
WO2008150484A1 (en) 2007-05-31 2008-12-11 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
CN102326244B (zh) 2009-01-11 2014-12-17 应用材料公司 用于在电子器件制造中传输基板的机械手系统、装置及方法
KR101689550B1 (ko) 2009-01-11 2016-12-26 어플라이드 머티어리얼스, 인코포레이티드 기판들을 운반하기 위한 정전기 엔드 이펙터 장치, 시스템들 및 방법들
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
US8264187B2 (en) 2009-01-11 2012-09-11 Applied Materials, Inc. Systems, apparatus and methods for making an electrical connection

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