JP2012514544A5 - - Google Patents
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- Publication number
- JP2012514544A5 JP2012514544A5 JP2011545461A JP2011545461A JP2012514544A5 JP 2012514544 A5 JP2012514544 A5 JP 2012514544A5 JP 2011545461 A JP2011545461 A JP 2011545461A JP 2011545461 A JP2011545461 A JP 2011545461A JP 2012514544 A5 JP2012514544 A5 JP 2012514544A5
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- electrical
- support
- end effector
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012636 effector Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims 6
- 238000010168 coupling process Methods 0.000 claims 6
- 238000005859 coupling reaction Methods 0.000 claims 6
- 230000001939 inductive effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14380909P | 2009-01-11 | 2009-01-11 | |
| US61/143,809 | 2009-01-11 | ||
| PCT/US2010/020510 WO2010081009A2 (en) | 2009-01-11 | 2010-01-08 | Systems, apparatus and methods for making an electrical connection to a robot and electrical end effector thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012514544A JP2012514544A (ja) | 2012-06-28 |
| JP2012514544A5 true JP2012514544A5 (https=) | 2013-09-12 |
| JP5501375B2 JP5501375B2 (ja) | 2014-05-21 |
Family
ID=42317166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011545461A Active JP5501375B2 (ja) | 2009-01-11 | 2010-01-08 | ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8264187B2 (https=) |
| JP (1) | JP5501375B2 (https=) |
| KR (1) | KR101287000B1 (https=) |
| CN (1) | CN102349146B (https=) |
| TW (1) | TWI405649B (https=) |
| WO (1) | WO2010081009A2 (https=) |
Families Citing this family (66)
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| KR101659931B1 (ko) | 2007-06-27 | 2016-09-26 | 브룩스 오토메이션 인코퍼레이티드 | 다차원 위치 센서 |
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| CN106463438B (zh) | 2014-01-28 | 2019-09-10 | 布鲁克斯自动化公司 | 基板运输设备 |
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| US9799544B2 (en) | 2015-10-23 | 2017-10-24 | Applied Materials, Inc. | Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing |
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| TWI707754B (zh) | 2016-06-28 | 2020-10-21 | 美商應用材料股份有限公司 | 包括間隔上臂與交錯腕部的雙機器人以及包括該者之方法 |
| US10453725B2 (en) | 2017-09-19 | 2019-10-22 | Applied Materials, Inc. | Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same |
| SG11202004931PA (en) * | 2017-11-27 | 2020-06-29 | Murata Machinery Ltd | Storage device |
| US11574830B2 (en) | 2018-03-16 | 2023-02-07 | Brooks Automation Us, Llc | Substrate transport apparatus |
| US10943805B2 (en) | 2018-05-18 | 2021-03-09 | Applied Materials, Inc. | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
| CN108598750A (zh) * | 2018-06-07 | 2018-09-28 | 浙江琦星电子有限公司 | 机械臂关节间的电源和信号传输方式 |
| US10669768B2 (en) * | 2018-09-28 | 2020-06-02 | Toyota Research Institute, Inc. | Robotic power delivery |
| US11583756B2 (en) | 2019-03-08 | 2023-02-21 | Infivention Technologies Pvt. Ltd. | Electronic game board |
| TWI704744B (zh) * | 2019-03-29 | 2020-09-11 | 威達高科股份有限公司 | 使用移動機器人電池的電源橋接裝置 |
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| JP2021095609A (ja) * | 2019-12-18 | 2021-06-24 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び電子デバイスの製造方法 |
| CN111105977B (zh) * | 2020-01-09 | 2022-11-25 | 北京北方华创微电子装备有限公司 | 电气小车系统 |
| JP6872050B1 (ja) * | 2020-02-03 | 2021-05-19 | 日本航空電子工業株式会社 | ロボット装置及び無線コネクタ |
| JP7412248B2 (ja) * | 2020-03-30 | 2024-01-12 | 東京エレクトロン株式会社 | 搬送装置 |
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| US11770049B2 (en) | 2020-09-23 | 2023-09-26 | Applied Materials, Inc. | Generating electric power for a robotic end effector |
| TWI750835B (zh) * | 2020-10-06 | 2021-12-21 | 香港商女媧創造股份有限公司 | 馬達驅動結構 |
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| KR102307687B1 (ko) * | 2021-06-25 | 2021-10-05 | (주) 티로보틱스 | 기판 이송 로봇을 진공 챔버 내에서 주행하기 위한 주행 로봇 |
| CN113478521B (zh) * | 2021-07-14 | 2022-12-30 | 东莞科卓机器人有限公司 | 一种气路电路共用的水平关节机器人 |
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| KR101689550B1 (ko) | 2009-01-11 | 2016-12-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판들을 운반하기 위한 정전기 엔드 이펙터 장치, 시스템들 및 방법들 |
| US8777547B2 (en) | 2009-01-11 | 2014-07-15 | Applied Materials, Inc. | Systems, apparatus and methods for transporting substrates |
| US8264187B2 (en) | 2009-01-11 | 2012-09-11 | Applied Materials, Inc. | Systems, apparatus and methods for making an electrical connection |
-
2010
- 2010-01-08 US US12/684,772 patent/US8264187B2/en active Active
- 2010-01-08 WO PCT/US2010/020510 patent/WO2010081009A2/en not_active Ceased
- 2010-01-08 KR KR1020117018651A patent/KR101287000B1/ko active Active
- 2010-01-08 JP JP2011545461A patent/JP5501375B2/ja active Active
- 2010-01-08 CN CN2010800126847A patent/CN102349146B/zh active Active
- 2010-01-11 TW TW099100593A patent/TWI405649B/zh active
-
2012
- 2012-08-22 US US13/592,005 patent/US8692500B2/en active Active
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