KR101263494B1 - 이산화탄소의 정화 방법 - Google Patents

이산화탄소의 정화 방법 Download PDF

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Publication number
KR101263494B1
KR101263494B1 KR1020057006556A KR20057006556A KR101263494B1 KR 101263494 B1 KR101263494 B1 KR 101263494B1 KR 1020057006556 A KR1020057006556 A KR 1020057006556A KR 20057006556 A KR20057006556 A KR 20057006556A KR 101263494 B1 KR101263494 B1 KR 101263494B1
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South Korea
Prior art keywords
oxide
contaminants
adsorbent
mixed metal
metal oxide
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Expired - Lifetime
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Korean (ko)
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KR20050055766A (ko
Inventor
다니엘 주니어. 알바레즈
제프리 제이. 스피에겔만
루쎌 제이. 홀메스
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엔테그리스, 아이엔씨.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/62—Carbon oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/3433—Regenerating or reactivating of sorbents or filter aids other than those covered by B01J20/3408 - B01J20/3425
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/345—Regenerating or reactivating using a particular desorbing compound or mixture
    • B01J20/3458—Regenerating or reactivating using a particular desorbing compound or mixture in the gas phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/30—Processes for preparing, regenerating, or reactivating
    • B01J20/34—Regenerating or reactivating
    • B01J20/3483—Regenerating or reactivating by thermal treatment not covered by groups B01J20/3441 - B01J20/3475, e.g. by heating or cooling
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/50—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/22—Carbon dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/30—Sulfur compounds
    • B01D2257/308—Carbonoxysulfide COS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/404—Nitrogen oxides other than dinitrogen oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/406—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/702—Hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2220/00—Aspects relating to sorbent materials
    • B01J2220/40—Aspects relating to the composition of sorbent or filter aid materials
    • B01J2220/42—Materials comprising a mixture of inorganic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Gas Separation By Absorption (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020057006556A 2002-10-17 2003-10-16 이산화탄소의 정화 방법 Expired - Lifetime KR101263494B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41939002P 2002-10-17 2002-10-17
US60/419,390 2002-10-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020127011411A Division KR20120065439A (ko) 2002-10-17 2003-10-16 이산화탄소의 정화 방법

Publications (2)

Publication Number Publication Date
KR20050055766A KR20050055766A (ko) 2005-06-13
KR101263494B1 true KR101263494B1 (ko) 2013-05-13

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020057006556A Expired - Lifetime KR101263494B1 (ko) 2002-10-17 2003-10-16 이산화탄소의 정화 방법
KR1020127011411A Ceased KR20120065439A (ko) 2002-10-17 2003-10-16 이산화탄소의 정화 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020127011411A Ceased KR20120065439A (ko) 2002-10-17 2003-10-16 이산화탄소의 정화 방법

Country Status (8)

Country Link
US (1) US7381243B2 (https=)
EP (1) EP1551531A1 (https=)
JP (2) JP5191626B2 (https=)
KR (2) KR101263494B1 (https=)
CN (1) CN1705504B (https=)
AU (1) AU2003286455A1 (https=)
TW (1) TWI347302B (https=)
WO (1) WO2004035178A1 (https=)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0427647D0 (en) * 2004-12-17 2005-01-19 Johnson Matthey Plc Hydrogen getter
US20060198774A1 (en) * 2005-03-03 2006-09-07 Cross Joseph B Mercury Removal sorbent
US20070031302A1 (en) * 2005-08-08 2007-02-08 Carsten Wittrup Method and apparatus for purifying a gas
US20070028766A1 (en) * 2005-08-08 2007-02-08 Ravi Jain Method for removing impurities from a gas
US7556671B2 (en) * 2005-08-08 2009-07-07 The Boc Group, Inc. System and method for purifying a gas
US20070028772A1 (en) * 2005-08-08 2007-02-08 Ravi Jain Method and system for purifying a gas
US8017405B2 (en) * 2005-08-08 2011-09-13 The Boc Group, Inc. Gas analysis method
US20070028764A1 (en) * 2005-08-08 2007-02-08 Carsten Wittrup Method for enabling the provision of purified carbon dioxide
US7481985B2 (en) * 2005-08-08 2009-01-27 The Boc Group, Inc. Method of removing impurities from a gas
JP4728837B2 (ja) * 2006-02-24 2011-07-20 日本電信電話株式会社 水素供給システム
JP2007224382A (ja) * 2006-02-24 2007-09-06 Nippon Telegr & Teleph Corp <Ntt> 水素供給システム
JP4728843B2 (ja) * 2006-03-09 2011-07-20 日本電信電話株式会社 水素供給方法
JP4728846B2 (ja) * 2006-03-14 2011-07-20 日本電信電話株式会社 電解セル及び水素供給システム
US20070256706A1 (en) * 2006-04-06 2007-11-08 Esko Ahlbom Multiple bath CO2 cleaning
BRPI0910625B1 (pt) * 2008-04-17 2018-02-06 Univation Technologies, Llc Métodos e sistemas para remoção de impurezas de um fluido de alimentação
US7875106B2 (en) * 2008-05-30 2011-01-25 Battelle Memorial Institute Adsorbent and adsorbent bed for materials capture and separation processes
TWI447329B (zh) 2008-09-26 2014-08-01 Univ Ohio State 將碳質燃料轉化成無碳能量載體
FR2945036B1 (fr) * 2009-04-29 2011-07-15 Inst Francais Du Petrole Oxydes mixtes fer-manganese pour la production d'oxygene a haute temperature
US20100290977A1 (en) * 2009-05-15 2010-11-18 Bowers Charles W Method of removing hydrocarbon impurities from a gas
CN105762386A (zh) 2009-09-08 2016-07-13 俄亥俄州国家创新基金会 具有集成的碳捕集的重整/水裂解和用于发电的电化学系统的集成
CN102597173A (zh) 2009-09-08 2012-07-18 俄亥俄州立大学研究基金会 具有原位co2捕集的合成燃料和化学品生产
US10010847B2 (en) 2010-11-08 2018-07-03 Ohio State Innovation Foundation Circulating fluidized bed with moving bed downcomers and gas sealing between reactors
JP5713694B2 (ja) * 2011-01-17 2015-05-07 住友精化株式会社 メタン回収方法およびメタン回収装置
AU2012253328B2 (en) 2011-05-11 2017-05-25 Ohio State Innovation Foundation Systems for converting fuel
WO2012155059A1 (en) 2011-05-11 2012-11-15 The Ohio State University Oxygen carrying materials
US20130145773A1 (en) * 2011-12-13 2013-06-13 General Electric Company Method and system for separating co2 from n2 and o2 in a turbine engine system
JP6067368B2 (ja) * 2012-12-21 2017-01-25 オルガノ株式会社 吸着材の再生装置、吸着材の再生方法、二酸化炭素精製装置、および二酸化炭素精製方法
CA3148322A1 (en) 2013-02-05 2014-08-14 Ohio State Innovation Foundation Methods for converting fuel into syngas
CN105792912A (zh) * 2013-03-13 2016-07-20 俄亥俄州国家创新基金会 携氧材料及其制备方法
WO2014152914A1 (en) 2013-03-14 2014-09-25 Ohio State Innovation Foundation Systems and methods for converting carbonaceous fuels
EP3057703A1 (en) 2013-10-16 2016-08-24 Saudi Basic Industries Corporation Purification of carbon dioxide streams
US9850136B2 (en) 2013-10-16 2017-12-26 Saudi Basic Industries Corporation Catalyst for purification of CO2 from chlorinated hydrocarbons
US20150238915A1 (en) 2014-02-27 2015-08-27 Ohio State Innovation Foundation Systems and methods for partial or complete oxidation of fuels
US9695049B2 (en) * 2014-03-14 2017-07-04 Saes Getters S.P.A. System and method for ultra high purity (UHP) carbon dioxide purification
FR3037505A1 (fr) * 2015-06-19 2016-12-23 Air Liquide Procede et installation de recuperation d'hydrocarbures utilisant des fumees industrielles riches en co2
CA3020406A1 (en) 2016-04-12 2017-10-19 Ohio State Innovation Foundation Chemical looping syngas production from carbonaceous fuels
US11090624B2 (en) 2017-07-31 2021-08-17 Ohio State Innovation Foundation Reactor system with unequal reactor assembly operating pressures
US10549236B2 (en) 2018-01-29 2020-02-04 Ohio State Innovation Foundation Systems, methods and materials for NOx decomposition with metal oxide materials
WO2020033500A1 (en) 2018-08-09 2020-02-13 Ohio State Innovation Foundation Systems, methods and materials for hydrogen sulfide conversion
WO2020150438A1 (en) 2019-01-17 2020-07-23 Ohio State Innovation Foundation Systems, methods and materials for stable phase syngas generation
JP7423320B2 (ja) * 2019-02-08 2024-01-29 大阪瓦斯株式会社 二酸化炭素を主成分とするガス中の硫黄酸化物の除去方法
US11453626B2 (en) 2019-04-09 2022-09-27 Ohio State Innovation Foundation Alkene generation using metal sulfide particles
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WO2021046156A1 (en) 2019-09-03 2021-03-11 Ohio State Innovation Foundation Redox reaction facilitated carbon dioxide capture from flue gas and conversion to carbon monoxide
JP7616840B2 (ja) * 2019-09-24 2025-01-17 積水化学工業株式会社 ガス製造装置、ガス製造システムおよびガス製造方法
WO2022006112A1 (en) 2020-06-29 2022-01-06 Ohio State Innovation Foundation Systems and methods for high reactant conversion through multiple reactant flow ratio staging
KR102444842B1 (ko) * 2020-07-29 2022-09-21 디아이지에어가스 주식회사 초고순도 전자급 이산화탄소 생산 장치
KR102318490B1 (ko) * 2021-04-13 2021-10-29 주식회사 하이퓨리티 이산화탄소 가스의 정제유닛 및 정제방법
CN116651402B (zh) * 2023-07-07 2024-04-05 中国矿业大学 一种整体式co2吸附剂及其制备方法与应用

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151013A (ja) * 1984-12-21 1986-07-09 Mitsui Toatsu Chem Inc 二酸化炭素の精製方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0182649B1 (en) * 1984-11-22 1990-02-07 MITSUI TOATSU CHEMICALS, Inc. Process for purifying carbon dioxide
GB8610196D0 (en) * 1986-04-25 1986-05-29 Ici Plc Sulphur compounds removal
GB8714232D0 (en) * 1987-06-17 1987-07-22 Ici Plc Sulphur compounds removal
JP2572616B2 (ja) * 1987-12-18 1997-01-16 日本パイオニクス株式会社 二酸化炭素の除去方法
US5186727A (en) * 1991-06-07 1993-02-16 Allied-Signal Inc. Mixed-metal oxide absorbent for carbon dioxide and water removal
US5244641A (en) * 1992-04-28 1993-09-14 Phillips Petroleum Company Absorption of hydrogen sulfide and absorbent composition therefor
US5470377A (en) * 1993-03-08 1995-11-28 Whitlock; David R. Separation of solutes in gaseous solvents
JP3522785B2 (ja) * 1993-03-15 2004-04-26 日本パイオニクス株式会社 二酸化炭素の精製方法
JP3277340B2 (ja) * 1993-04-22 2002-04-22 日本酸素株式会社 半導体製造工場向け各種ガスの製造方法及び装置
US5674463A (en) * 1994-08-25 1997-10-07 The Boc Group, Inc. Process for the purification of carbon dioxide
US5658541A (en) * 1995-03-16 1997-08-19 Monsato Company Process for removal of divalent sulfur compounds from waste gases
ID22518A (id) * 1998-04-24 1999-10-28 Praxair Technology Inc Sistem pemurnian co2
US6511528B1 (en) * 1999-03-26 2003-01-28 Uop Llc Purification of carbon dioxide
US6537514B1 (en) * 1999-10-26 2003-03-25 Praxair Technology, Inc. Method and apparatus for producing carbon dioxide
GB0020523D0 (en) * 2000-08-18 2000-10-11 Bp Chem Int Ltd Process
US6428761B1 (en) * 2000-09-29 2002-08-06 Engelhard Corporation Process for reduction of gaseous sulfur compounds
JP2003165707A (ja) * 2001-11-28 2003-06-10 Mitsubishi Chemicals Corp 水素製造方法及び水素製造装置
KR101284395B1 (ko) * 2002-02-19 2013-07-09 프랙스에어 테크놀로지, 인코포레이티드 기체로부터 오염물질을 제거하는 방법
KR20030072541A (ko) * 2002-03-04 2003-09-15 한국화학연구원 이산화탄소 산화제를 사용한 알킬방향족 탄화수소의탈수소화 방법
US20040076575A1 (en) * 2002-10-17 2004-04-22 Daniel Alvarez Method of restricted purification of carbon dioxide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151013A (ja) * 1984-12-21 1986-07-09 Mitsui Toatsu Chem Inc 二酸化炭素の精製方法

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JP2006502957A (ja) 2006-01-26
AU2003286455A1 (en) 2004-05-04
JP5191626B2 (ja) 2013-05-08
KR20120065439A (ko) 2012-06-20
WO2004035178A1 (en) 2004-04-29
JP5662295B2 (ja) 2015-01-28
CN1705504B (zh) 2013-10-16
US20050265912A1 (en) 2005-12-01
EP1551531A1 (en) 2005-07-13
CN1705504A (zh) 2005-12-07
US7381243B2 (en) 2008-06-03
JP2012102006A (ja) 2012-05-31
TW200417512A (en) 2004-09-16
TWI347302B (en) 2011-08-21
KR20050055766A (ko) 2005-06-13

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