KR101247900B1 - 액정 기판 접합 시스템 - Google Patents

액정 기판 접합 시스템 Download PDF

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Publication number
KR101247900B1
KR101247900B1 KR1020110012109A KR20110012109A KR101247900B1 KR 101247900 B1 KR101247900 B1 KR 101247900B1 KR 1020110012109 A KR1020110012109 A KR 1020110012109A KR 20110012109 A KR20110012109 A KR 20110012109A KR 101247900 B1 KR101247900 B1 KR 101247900B1
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KR
South Korea
Prior art keywords
substrate
chamber
board
liquid crystal
roller conveyor
Prior art date
Application number
KR1020110012109A
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English (en)
Korean (ko)
Other versions
KR20110097632A (ko
Inventor
히사시 이찌무라
다꾸야 가이즈
유끼노리 나까야마
다께시 이시다
히로아끼 다께다
Original Assignee
가부시키가이샤 히타치플랜트테크놀로지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2010037597A external-priority patent/JP5495845B2/ja
Priority claimed from JP2010078630A external-priority patent/JP5512349B2/ja
Application filed by 가부시키가이샤 히타치플랜트테크놀로지 filed Critical 가부시키가이샤 히타치플랜트테크놀로지
Publication of KR20110097632A publication Critical patent/KR20110097632A/ko
Application granted granted Critical
Publication of KR101247900B1 publication Critical patent/KR101247900B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202—LCD, i.e. liquid crystal displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
KR1020110012109A 2010-02-23 2011-02-11 액정 기판 접합 시스템 KR101247900B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2010-037597 2010-02-23
JP2010037597A JP5495845B2 (ja) 2010-02-23 2010-02-23 液晶基板貼合システム
JP2010078630A JP5512349B2 (ja) 2010-03-30 2010-03-30 基板反転装置及び基板反転方法
JPJP-P-2010-078630 2010-03-30

Publications (2)

Publication Number Publication Date
KR20110097632A KR20110097632A (ko) 2011-08-31
KR101247900B1 true KR101247900B1 (ko) 2013-03-26

Family

ID=44490467

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110012109A KR101247900B1 (ko) 2010-02-23 2011-02-11 액정 기판 접합 시스템

Country Status (3)

Country Link
KR (1) KR101247900B1 (zh)
CN (2) CN201984258U (zh)
TW (1) TWI444703B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101247900B1 (ko) * 2010-02-23 2013-03-26 가부시키가이샤 히타치플랜트테크놀로지 액정 기판 접합 시스템
US9132578B2 (en) * 2011-11-29 2015-09-15 Corning Incorporated Apparatus and method for skinning articles
CN103579056B (zh) * 2013-10-23 2016-12-07 苏州均华精密机械有限公司 粘着半导体芯片的装置
JP5837247B1 (ja) * 2015-03-31 2015-12-24 株式会社日立製作所 基板組立装置とそれを用いた基板組立方法
CN105460287B (zh) * 2015-12-18 2019-06-11 轻工业西安机械设计研究院有限公司 包装盒片输送装置和输送方法
KR102701612B1 (ko) * 2016-11-11 2024-09-03 주식회사 탑 엔지니어링 패널 합착 장치 및 방법
JP6619762B2 (ja) 2017-03-27 2019-12-11 平田機工株式会社 製造システムおよび製造方法
JP6733966B2 (ja) * 2018-07-09 2020-08-05 Ａｉメカテック株式会社 基板組立装置及び基板組立方法
CN109822583B (zh) * 2019-01-09 2021-01-05 温州大学瓯江学院 电子产品的uv胶自动涂覆设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040034447A (ko) * 2002-10-15 2004-04-28 시바우라 메카트로닉스 가부시키가이샤 기판의 조립 방법 및 기판의 조립 장치
KR100617034B1 (ko) 2003-12-23 2006-08-30 엘지.필립스 엘시디 주식회사 액정표시소자 제조용 합착 장치와 이를 이용한 로딩 방법
KR100831282B1 (ko) 2002-03-18 2008-05-22 엘지디스플레이 주식회사 액정표시장치의 제조 장치 및 제조 방법
KR20090057901A (ko) * 2007-12-03 2009-06-08 가부시키가이샤 히타치플랜트테크놀로지 기판 접합 시스템

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002107524A (ja) * 2000-09-27 2002-04-10 Matsushita Electric Ind Co Ltd カラーフィルタの製造方法とその製造装置、及びカラーフィルタ用基板
KR100490048B1 (ko) * 2001-06-19 2005-05-17 삼성전자주식회사 액정 표시 장치 제조용 인라인 시스템 및 이를 이용하는 액정 표시 장치의 제조 방법
KR100720419B1 (ko) * 2002-03-22 2007-05-22 엘지.필립스 엘시디 주식회사 합착 장치
JP2007047304A (ja) * 2005-08-08 2007-02-22 Sharp Corp 液晶表示装置の製造装置および製造方法ならびに液晶表示装置
JP4379435B2 (ja) * 2006-05-17 2009-12-09 株式会社日立プラントテクノロジー 基板組立装置とそれを用いた基板組立方法
KR101247900B1 (ko) * 2010-02-23 2013-03-26 가부시키가이샤 히타치플랜트테크놀로지 액정 기판 접합 시스템

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831282B1 (ko) 2002-03-18 2008-05-22 엘지디스플레이 주식회사 액정표시장치의 제조 장치 및 제조 방법
KR20040034447A (ko) * 2002-10-15 2004-04-28 시바우라 메카트로닉스 가부시키가이샤 기판의 조립 방법 및 기판의 조립 장치
KR100617034B1 (ko) 2003-12-23 2006-08-30 엘지.필립스 엘시디 주식회사 액정표시소자 제조용 합착 장치와 이를 이용한 로딩 방법
KR20090057901A (ko) * 2007-12-03 2009-06-08 가부시키가이샤 히타치플랜트테크놀로지 기판 접합 시스템

Also Published As

Publication number Publication date
CN102169253A (zh) 2011-08-31
KR20110097632A (ko) 2011-08-31
CN201984258U (zh) 2011-09-21
CN102169253B (zh) 2015-04-01
TW201142410A (en) 2011-12-01
TWI444703B (zh) 2014-07-11

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