JP4107316B2 - 基板貼合装置 - Google Patents
基板貼合装置 Download PDFInfo
- Publication number
- JP4107316B2 JP4107316B2 JP2005254302A JP2005254302A JP4107316B2 JP 4107316 B2 JP4107316 B2 JP 4107316B2 JP 2005254302 A JP2005254302 A JP 2005254302A JP 2005254302 A JP2005254302 A JP 2005254302A JP 4107316 B2 JP4107316 B2 JP 4107316B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/60—In a particular environment
- B32B2309/68—Vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
Description
貼り合わせ前の2枚の基板を搬入する第1チャンバ室と、基板の貼り合わせを行う第2チャンバ室と、貼り合わせ後の基板の搬出を行う第3チャンバ室とからなり、第1チャンバン室内と第3チャンバ室内とは大気圧から中真空状態にまで可変制御し、第2チャンバ室は中真空から高真空まで可変制御するように構成した。
第2チャンバ室への基板の搬入、貼り合せ基板の搬出は略同時に行うことで、基板貼り合わせ時間を大幅に短縮することが可能となる。そのとき第1〜第3チャンバ室の真空度は中真空状態となっており、基板を吸引吸着で保持できる状態となっている。すなわち、吸引吸着用の真空度は高真空状態の負圧を供給する構成としてある。
Claims (5)
- 上下2枚の基板をそれぞれ搬入するための搬入用ロボットアームと、大気状態と該搬入用ロボットアームが該上下2枚の基板を吸引吸着で保持可能な中真空状態とを設定する第1の真空ポンプが設けられ、大気圧状態にあるとき、該搬入用ロボットによって該搬入用ロボットアームが該上下2枚の基板を吸引吸着して搬入し、該上下2枚の基板の搬入後、該真空ポンプによって中真空状態が設定されて、該搬入用ロボットアームが搬入された該上下2枚の基板を吸引吸着して保持する状態を継続する第1チャンバ室と、
吸引吸着作用が可能な中真空状態と高真空状態とを設定する第2の真空ポンプと、上下2つのテーブルとが設けられ、該第2の真空ポンプによって設定される該中真空状態で該搬入用ロボットアームに吸引吸着保持されて中真空状態の該第1チャンバ室から搬送される該上下2枚の基板を受け取り、該第2の真空ポンプによって設定される該高真空状態で該上下2枚の基板をそれぞれ上テーブルと下テーブルとで保持し、上下いずれか一方の該テーブルを水平方向に移動して該上下2枚の基板の位置合わせをし、上下いずれか一方の該テーブルを上下に動作させて該上下2枚の基板の間隔を狭めて貼り合わせを行なった後、該第2の真空ポンプによって該中真空状態にする第2チャンバ室と、
該第2チャンバ室で貼り合わせた該上下2枚の基板を吸引吸着して保持搬送する搬送用ロボットアームと、大気状態と該搬送用ロボットアームで貼り合わせた該上下2枚の基板の吸引吸着が可能な中真空状態とを設定する第3の真空ポンプとが設けられ、該搬送用ロボットアームが貼り合わせた該上下2枚の基板を吸引吸着可能とする中真空状態を該第3の真空ポンプによって設定して、該搬送用ロボットアームにより、中真空状態にある該第2のチャンバ室から貼り合わせた該上下2枚の基板が吸引吸着保持されて搬入され、貼り合わせた該上下2枚の基板の搬入後、該第3の真空ポンプによって大気状態に設定されて、該搬送用ロボットアームにより貼り合わせた該上下2枚の基板を吸引吸着して室外に搬出する第3チャンバ室と
を備え、
該第1チャンバ室と該第2チャンバ室と該第3チャンバ室とにそれぞれの室内の圧力を計測する計測手段を備え、該第1〜第3チャンバ室それぞれの真空度を制御する制御手段を設けたことを特徴とする基板貼合装置。 - 請求項1に記載の基板貼合装置において、
前記第1〜第3チャンバ室各々に、前記真空ポンプからの吸引吸着系をチャンバ室内と接続し、該吸引吸着系の中間に設けたバルブの開閉により、吸引吸着力を制御することを特徴とする基板貼合装置。 - 請求項1に記載の基板貼合装置において、
前記第2チャンバ室内の前記上テーブルに前記高真空状態で前記基板を保持するのに粘着力を用いたチャックを用いることを特徴とする基板貼合装置。 - 請求項1に記載の基板貼合装置において、
前記第2チャンバ室内の前記上テーブルに前記高真空状態で前記基板を保持するのに静電吸着力を用いたチャックを用いることを特徴とする基板貼合装置。 - 請求項1に記載の基板貼合装置において、
前記第1,第2,第3チャンバ室は夫々、前記中真空状態にて基板保持に吸引吸着を用いるため、吸引吸着により排気される量と同じ量の気体が常時供給されるようにした機構を有することを特徴とする基板貼合装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005254302A JP4107316B2 (ja) | 2005-09-02 | 2005-09-02 | 基板貼合装置 |
TW095127813A TW200714951A (en) | 2005-09-02 | 2006-07-28 | Substrate assembly apparatus and method |
KR1020060078352A KR100795136B1 (ko) | 2005-09-02 | 2006-08-18 | 기판 조립장치와 기판 조립방법 |
CNB2006101110767A CN100451775C (zh) | 2005-09-02 | 2006-08-18 | 基板组装装置和基板组装方法 |
US11/513,071 US20070051462A1 (en) | 2005-09-02 | 2006-08-31 | Substrate assembly apparatus and method |
US11/877,224 US20080053619A1 (en) | 2005-09-02 | 2007-10-23 | Substrate assembly apparatus and method |
US13/306,060 US20120067525A1 (en) | 2005-09-02 | 2011-11-29 | Substrate assembly apparatus and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005254302A JP4107316B2 (ja) | 2005-09-02 | 2005-09-02 | 基板貼合装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007065521A JP2007065521A (ja) | 2007-03-15 |
JP4107316B2 true JP4107316B2 (ja) | 2008-06-25 |
Family
ID=37828974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005254302A Expired - Fee Related JP4107316B2 (ja) | 2005-09-02 | 2005-09-02 | 基板貼合装置 |
Country Status (5)
Country | Link |
---|---|
US (3) | US20070051462A1 (ja) |
JP (1) | JP4107316B2 (ja) |
KR (1) | KR100795136B1 (ja) |
CN (1) | CN100451775C (ja) |
TW (1) | TW200714951A (ja) |
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JP4107316B2 (ja) * | 2005-09-02 | 2008-06-25 | 株式会社日立プラントテクノロジー | 基板貼合装置 |
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TW200931101A (en) * | 2007-12-12 | 2009-07-16 | Chung Shan Inst Of Science | Method of assembling LCD panel, interface apparatus, and assembling apparatus |
JP4288297B1 (ja) | 2008-01-09 | 2009-07-01 | 三菱重工業株式会社 | 圧力制御装置および圧力制御方法 |
US7947570B2 (en) * | 2008-01-16 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method and manufacturing apparatus of semiconductor substrate |
FR2935536B1 (fr) * | 2008-09-02 | 2010-09-24 | Soitec Silicon On Insulator | Procede de detourage progressif |
CN101585668B (zh) * | 2008-10-23 | 2010-10-13 | 刘苏海 | 一种夹层玻璃成型机 |
JP4796120B2 (ja) * | 2008-12-11 | 2011-10-19 | 三菱重工業株式会社 | 常温接合装置 |
EP2200077B1 (en) * | 2008-12-22 | 2012-12-05 | Soitec | Method for bonding two substrates |
JP5326098B2 (ja) * | 2009-02-05 | 2013-10-30 | シャープ株式会社 | 基板表面の封止装置と有機elパネルの製造方法 |
TWI593048B (zh) * | 2009-07-21 | 2017-07-21 | 尼康股份有限公司 | Substrate processing system, substrate holder, substrate holder pair, substrate bonding apparatus, and device manufacturing method |
TW201131689A (en) | 2009-07-21 | 2011-09-16 | Nikon Corp | Substrate holder system, substrate joining apparatus and method for manufacturing a device |
KR101073558B1 (ko) * | 2009-10-08 | 2011-10-17 | 삼성모바일디스플레이주식회사 | 기판 합착 장치 및 기판 합착 방법 |
FR2961630B1 (fr) * | 2010-06-22 | 2013-03-29 | Soitec Silicon On Insulator Technologies | Appareil de fabrication de dispositifs semi-conducteurs |
US8338266B2 (en) | 2010-08-11 | 2012-12-25 | Soitec | Method for molecular adhesion bonding at low pressure |
JP5334135B2 (ja) * | 2010-08-20 | 2013-11-06 | ニチゴー・モートン株式会社 | 積層装置 |
FR2964193A1 (fr) | 2010-08-24 | 2012-03-02 | Soitec Silicon On Insulator | Procede de mesure d'une energie d'adhesion, et substrats associes |
CN102012581B (zh) | 2010-09-30 | 2012-08-22 | 深圳市华星光电技术有限公司 | 液晶盒成盒装置及其方法 |
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CN102514341B (zh) * | 2011-11-24 | 2014-09-17 | 深圳市宝德自动化精密设备有限公司 | 精密真空oca贴合机及贴合生产方法 |
PL2924536T3 (pl) * | 2014-03-28 | 2016-11-30 | Sposób i urządzenie do mocowania płyty ochronnej na wyświetlaczu | |
CN104730743B (zh) * | 2015-03-31 | 2018-07-27 | 合肥鑫晟光电科技有限公司 | 真空贴合设备 |
US20170207191A1 (en) * | 2016-01-15 | 2017-07-20 | Taiwan Semiconductor Manufacturing Company Ltd. | Bonding system and associated apparatus and method |
KR102041044B1 (ko) * | 2018-04-30 | 2019-11-05 | 피에스케이홀딩스 주식회사 | 기판 지지 유닛 |
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CN109581707B (zh) * | 2018-11-15 | 2021-02-26 | 惠科股份有限公司 | 贴合显示面板的方法、控制装置及真空贴合机 |
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-
2005
- 2005-09-02 JP JP2005254302A patent/JP4107316B2/ja not_active Expired - Fee Related
-
2006
- 2006-07-28 TW TW095127813A patent/TW200714951A/zh not_active IP Right Cessation
- 2006-08-18 CN CNB2006101110767A patent/CN100451775C/zh not_active Expired - Fee Related
- 2006-08-18 KR KR1020060078352A patent/KR100795136B1/ko not_active IP Right Cessation
- 2006-08-31 US US11/513,071 patent/US20070051462A1/en not_active Abandoned
-
2007
- 2007-10-23 US US11/877,224 patent/US20080053619A1/en not_active Abandoned
-
2011
- 2011-11-29 US US13/306,060 patent/US20120067525A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN100451775C (zh) | 2009-01-14 |
CN1936678A (zh) | 2007-03-28 |
US20080053619A1 (en) | 2008-03-06 |
US20120067525A1 (en) | 2012-03-22 |
US20070051462A1 (en) | 2007-03-08 |
KR20070026019A (ko) | 2007-03-08 |
TW200714951A (en) | 2007-04-16 |
JP2007065521A (ja) | 2007-03-15 |
TWI346225B (ja) | 2011-08-01 |
KR100795136B1 (ko) | 2008-01-17 |
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