KR101246965B1 - 반도체 집적 회로 장치의 검사 장치 및 검사 방법 - Google Patents

반도체 집적 회로 장치의 검사 장치 및 검사 방법 Download PDF

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Publication number
KR101246965B1
KR101246965B1 KR1020100036884A KR20100036884A KR101246965B1 KR 101246965 B1 KR101246965 B1 KR 101246965B1 KR 1020100036884 A KR1020100036884 A KR 1020100036884A KR 20100036884 A KR20100036884 A KR 20100036884A KR 101246965 B1 KR101246965 B1 KR 101246965B1
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KR
South Korea
Prior art keywords
analog
analog voltage
voltage
semiconductor integrated
integrated circuit
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KR1020100036884A
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English (en)
Korean (ko)
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KR20100117519A (ko
Inventor
히데아키 사카구치
Original Assignee
샤프 가부시키가이샤
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Application filed by 샤프 가부시키가이샤 filed Critical 샤프 가부시키가이샤
Publication of KR20100117519A publication Critical patent/KR20100117519A/ko
Application granted granted Critical
Publication of KR101246965B1 publication Critical patent/KR101246965B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316—Testing of analog circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Analogue/Digital Conversion (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020100036884A 2009-04-24 2010-04-21 반도체 집적 회로 장치의 검사 장치 및 검사 방법 KR101246965B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2009-106787 2009-04-24
JP2009106787A JP2010256175A (ja) 2009-04-24 2009-04-24 半導体集積回路装置の、検査装置および検査方法

Publications (2)

Publication Number Publication Date
KR20100117519A KR20100117519A (ko) 2010-11-03
KR101246965B1 true KR101246965B1 (ko) 2013-03-25

Family

ID=42996977

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100036884A KR101246965B1 (ko) 2009-04-24 2010-04-21 반도체 집적 회로 장치의 검사 장치 및 검사 방법

Country Status (4)

Country Link
JP (1) JP2010256175A (ja)
KR (1) KR101246965B1 (ja)
CN (1) CN101871991A (ja)
TW (1) TW201100827A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5502938B2 (ja) * 2012-06-19 2014-05-28 株式会社アドバンテスト 試験装置
CN107340466B (zh) * 2016-04-28 2019-11-01 中芯国际集成电路制造(上海)有限公司 模拟信号检测系统和模拟信号检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001013218A (ja) 1999-07-02 2001-01-19 Yokogawa Electric Corp 半導体テスト装置
KR20010015401A (ko) * 1999-07-23 2001-02-26 마찌다 가쯔히꼬 반도체 집적회로의 검사장치 및 검사방법
KR20020025841A (ko) * 2000-09-29 2002-04-04 마찌다 가쯔히꼬 반도체 집적회로의 검사방법 및 그 검사장치
KR20030085509A (ko) * 2002-04-30 2003-11-05 샤프 가부시키가이샤 기준 전압 발생 장치 및 그것을 구비한 반도체 집적회로와 반도체 집적 회로의 검사 장치 및 그 검사 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116624A (ja) * 1984-06-06 1986-01-24 Fuji Facom Corp アナログ出力装置の試験方式
JPH0863337A (ja) * 1994-08-24 1996-03-08 Fujitsu Ltd 数値比較選択回路
JPH1032529A (ja) * 1996-07-16 1998-02-03 Saitama Nippon Denki Kk ダイバシティ受信装置
US6532561B1 (en) * 1999-09-25 2003-03-11 Advantest Corp. Event based semiconductor test system
JP2002231888A (ja) * 2001-01-30 2002-08-16 Matsushita Electric Ind Co Ltd 半導体集積回路装置およびその検査方法
JP3983123B2 (ja) * 2002-07-11 2007-09-26 シャープ株式会社 半導体検査装置及び半導体検査方法
EP1583221A1 (en) * 2004-03-31 2005-10-05 NEC Compound Semiconductor Devices, Ltd. PLL frequency synthesizer circuit and frequency tuning method thereof
TWI285358B (en) * 2004-07-30 2007-08-11 Sunplus Technology Co Ltd TFT LCD source driver with built in test circuit and method for testing the same
WO2007122950A1 (ja) * 2006-03-23 2007-11-01 Matsushita Electric Industrial Co., Ltd. 半導体装置、半導体試験装置、及び半導体装置の試験方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001013218A (ja) 1999-07-02 2001-01-19 Yokogawa Electric Corp 半導体テスト装置
KR20010015401A (ko) * 1999-07-23 2001-02-26 마찌다 가쯔히꼬 반도체 집적회로의 검사장치 및 검사방법
KR20020025841A (ko) * 2000-09-29 2002-04-04 마찌다 가쯔히꼬 반도체 집적회로의 검사방법 및 그 검사장치
KR20030085509A (ko) * 2002-04-30 2003-11-05 샤프 가부시키가이샤 기준 전압 발생 장치 및 그것을 구비한 반도체 집적회로와 반도체 집적 회로의 검사 장치 및 그 검사 방법

Also Published As

Publication number Publication date
CN101871991A (zh) 2010-10-27
TW201100827A (en) 2011-01-01
KR20100117519A (ko) 2010-11-03
JP2010256175A (ja) 2010-11-11

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