KR101193096B1 - 광학 필터 및 광학 필터의 제조 방법 - Google Patents

광학 필터 및 광학 필터의 제조 방법 Download PDF

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Publication number
KR101193096B1
KR101193096B1 KR1020067016033A KR20067016033A KR101193096B1 KR 101193096 B1 KR101193096 B1 KR 101193096B1 KR 1020067016033 A KR1020067016033 A KR 1020067016033A KR 20067016033 A KR20067016033 A KR 20067016033A KR 101193096 B1 KR101193096 B1 KR 101193096B1
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KR
South Korea
Prior art keywords
film
stress
main surface
optical filter
stress correction
Prior art date
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KR1020067016033A
Other languages
English (en)
Korean (ko)
Other versions
KR20070041666A (ko
Inventor
에이이치 카메다
Original Assignee
가부시키가이샤 다이신쿠
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Application filed by 가부시키가이샤 다이신쿠 filed Critical 가부시키가이샤 다이신쿠
Publication of KR20070041666A publication Critical patent/KR20070041666A/ko
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Publication of KR101193096B1 publication Critical patent/KR101193096B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
KR1020067016033A 2004-07-09 2005-06-23 광학 필터 및 광학 필터의 제조 방법 KR101193096B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004203440 2004-07-09
JPJP-P-2004-00203440 2004-07-09
PCT/JP2005/011521 WO2006006363A1 (ja) 2004-07-09 2005-06-23 光学フィルタおよび光学フィルタの製造方法

Publications (2)

Publication Number Publication Date
KR20070041666A KR20070041666A (ko) 2007-04-19
KR101193096B1 true KR101193096B1 (ko) 2012-10-19

Family

ID=35783711

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067016033A KR101193096B1 (ko) 2004-07-09 2005-06-23 광학 필터 및 광학 필터의 제조 방법

Country Status (5)

Country Link
JP (1) JP4692486B2 (ja)
KR (1) KR101193096B1 (ja)
CN (1) CN100580485C (ja)
TW (1) TW200606465A (ja)
WO (1) WO2006006363A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2694627A1 (en) * 2007-07-27 2009-02-05 Selex Galileo S.P.A. Preliminary controlled pre-deformation treatment for the production of mirrors
WO2012165579A1 (ja) * 2011-06-03 2012-12-06 Hoya株式会社 プラスチックレンズ
US9651723B2 (en) 2012-10-26 2017-05-16 Kyocera Corporation Optical filter member and imaging device provided with the same
KR101844372B1 (ko) 2014-12-03 2018-04-02 주식회사 엘엠에스 고체 촬상 소자용 광학필터 및 이를 포함하는 고체 촬상 소자
WO2017213047A1 (ja) * 2016-06-08 2017-12-14 Jsr株式会社 光学フィルターおよび光学センサー装置
US20180024276A1 (en) * 2016-07-21 2018-01-25 Corning Incorporated Optical elements with stress-balancing coatings
CN108121023A (zh) * 2017-12-28 2018-06-05 中国科学院长春光学精密机械与物理研究所 一种光学薄膜滤光片的制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58113901A (ja) * 1981-12-26 1983-07-07 Nippon Kogaku Kk <Nikon> 積層型光学構体
JPS58217901A (ja) * 1982-06-14 1983-12-19 Nippon Kogaku Kk <Nikon> 透過型光学部材
JPH02307100A (ja) * 1989-05-23 1990-12-20 Nikon Corp 軟ｘ線用フレネルゾーンプレートの製造方法
JP3034668B2 (ja) * 1991-11-02 2000-04-17 有限会社光伸光学 干渉フィルター
JPH06186418A (ja) * 1992-06-30 1994-07-08 Victor Co Of Japan Ltd ダイクロイックミラーの製造方法
JPH06186403A (ja) * 1992-12-18 1994-07-08 Olympus Optical Co Ltd 多層膜光学部材
JPH0933719A (ja) * 1995-07-21 1997-02-07 Koshin Kogaku:Kk 誘電体多層膜フィルタの製造方法とその製造装置
US6842282B2 (en) * 2001-02-14 2005-01-11 Arisawa Mfg. Co., Ltd. Reflection projection screen
JP3937823B2 (ja) * 2001-11-29 2007-06-27 株式会社大真空 光線カットフィルタ
JP2004117747A (ja) * 2002-09-25 2004-04-15 Fujitsu Ltd 光装置
CN100394214C (zh) * 2002-11-21 2008-06-11 台达电子工业股份有限公司 膜应力平衡镀膜方法以及应用该方法制造的光学组件
JP4513258B2 (ja) * 2002-12-12 2010-07-28 旭硝子株式会社 波長可変フィルタ
JP2005010338A (ja) * 2003-06-18 2005-01-13 Canon Inc 光学素子
JP2005043755A (ja) * 2003-07-24 2005-02-17 Seiko Epson Corp 光学多層膜フィルタ、光学多層膜フィルタの製造方法、光学ローパスフィルタ、及び電子機器装置

Also Published As

Publication number Publication date
KR20070041666A (ko) 2007-04-19
JPWO2006006363A1 (ja) 2008-04-24
WO2006006363A1 (ja) 2006-01-19
CN100580485C (zh) 2010-01-13
CN1918489A (zh) 2007-02-21
TW200606465A (en) 2006-02-16
TWI367350B (ja) 2012-07-01
JP4692486B2 (ja) 2011-06-01

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