KR101133002B1 - 흑색 산화이트륨 용사 피막의 형성 방법 및 흑색 산화이트륨 용사 피막 피복 부재 - Google Patents

흑색 산화이트륨 용사 피막의 형성 방법 및 흑색 산화이트륨 용사 피막 피복 부재 Download PDF

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KR101133002B1
KR101133002B1 KR1020087022813A KR20087022813A KR101133002B1 KR 101133002 B1 KR101133002 B1 KR 101133002B1 KR 1020087022813 A KR1020087022813 A KR 1020087022813A KR 20087022813 A KR20087022813 A KR 20087022813A KR 101133002 B1 KR101133002 B1 KR 101133002B1
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South Korea
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black
alloys
gas
thermal
yttrium
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KR1020087022813A
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English (en)
Korean (ko)
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KR20090101408A (ko
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요시오 하라다
준이치 다케우치
료 야마사키
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도카로 가부시키가이샤
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020087022813A 2007-12-06 2008-07-02 흑색 산화이트륨 용사 피막의 형성 방법 및 흑색 산화이트륨 용사 피막 피복 부재 KR101133002B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007315877A JP4740932B2 (ja) 2007-12-06 2007-12-06 黒色酸化イットリウム溶射皮膜の形成方法および黒色酸化イットリウム溶射皮膜被覆部材
JPJP-P-2007-00315877 2007-12-06
PCT/JP2008/062366 WO2009072318A1 (ja) 2007-12-06 2008-07-02 黒色酸化イットリウム溶射皮膜の形成方法および黒色酸化イットリウム溶射皮膜被覆部材

Publications (2)

Publication Number Publication Date
KR20090101408A KR20090101408A (ko) 2009-09-28
KR101133002B1 true KR101133002B1 (ko) 2012-04-10

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ID=40717500

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087022813A KR101133002B1 (ko) 2007-12-06 2008-07-02 흑색 산화이트륨 용사 피막의 형성 방법 및 흑색 산화이트륨 용사 피막 피복 부재

Country Status (4)

Country Link
JP (1) JP4740932B2 (ja)
KR (1) KR101133002B1 (ja)
TW (1) TWI385277B (ja)
WO (1) WO2009072318A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101236351B1 (ko) 2010-11-30 2013-02-22 (주)제니스월드 엘이디용 유기금속화학증착장비 쿼츠 실링의 코팅방법
CN103074568A (zh) * 2011-10-26 2013-05-01 中国科学院微电子研究所 一种y2o3耐侵蚀陶瓷涂层的制备方法
CN103132002B (zh) * 2011-12-02 2015-04-15 中国科学院微电子研究所 一种黑色y2o3陶瓷涂层的制备方法
CN103132006B (zh) * 2011-12-02 2015-11-11 中国科学院微电子研究所 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法
WO2013114942A1 (ja) 2012-02-03 2013-08-08 トーカロ株式会社 白色フッ化物溶射皮膜の黒色化方法および表面に黒色層を有するフッ化物溶射皮膜被覆部材
JP5623619B1 (ja) * 2013-12-02 2014-11-12 倉敷ボーリング機工株式会社 ドライエッチング用チャンバー内部材の製造方法
US9790581B2 (en) * 2014-06-25 2017-10-17 Fm Industries, Inc. Emissivity controlled coatings for semiconductor chamber components
JP6985267B2 (ja) 2015-11-16 2021-12-22 クアーズテック，インコーポレイティド 耐食性構成部品および製造方法
CN110382730B (zh) * 2017-03-01 2022-09-23 信越化学工业株式会社 喷镀被膜、喷镀用粉、喷镀用粉的制造方法和喷镀被膜的制造方法
TWI598466B (zh) * 2017-03-31 2017-09-11 A composition for a melt-blown layer and a sprayed layer
CN109468575A (zh) * 2018-11-29 2019-03-15 沈阳富创精密设备有限公司 一种应用于半导体领域的氧化钇涂层的制备方法
JP7158379B2 (ja) * 2019-04-26 2022-10-21 株式会社Fuji プラズマ処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321760A (ja) * 2003-05-19 2003-11-14 Tocalo Co Ltd プラズマ処理容器内部材およびその製造方法
JP2005256098A (ja) * 2004-03-12 2005-09-22 Tocalo Co Ltd 熱放射性および耐損傷性に優れるｙ２ｏ３溶射皮膜被覆部材およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4006596B2 (ja) * 2002-07-19 2007-11-14 信越化学工業株式会社 希土類酸化物溶射部材および溶射用粉
EP2071049A1 (en) * 2005-07-29 2009-06-17 Tocalo Co. Ltd. Y2O3 Spray-coated member and production method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321760A (ja) * 2003-05-19 2003-11-14 Tocalo Co Ltd プラズマ処理容器内部材およびその製造方法
JP2005256098A (ja) * 2004-03-12 2005-09-22 Tocalo Co Ltd 熱放射性および耐損傷性に優れるｙ２ｏ３溶射皮膜被覆部材およびその製造方法

Also Published As

Publication number Publication date
JP2009138231A (ja) 2009-06-25
TWI385277B (zh) 2013-02-11
JP4740932B2 (ja) 2011-08-03
TW200925323A (en) 2009-06-16
WO2009072318A1 (ja) 2009-06-11
KR20090101408A (ko) 2009-09-28

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