CN103132006B - 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法 - Google Patents
一种等离子氢处理制备黑色y2o3陶瓷涂层的方法 Download PDFInfo
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- CN103132006B CN103132006B CN201110396196.7A CN201110396196A CN103132006B CN 103132006 B CN103132006 B CN 103132006B CN 201110396196 A CN201110396196 A CN 201110396196A CN 103132006 B CN103132006 B CN 103132006B
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CN201110396196.7A CN103132006B (zh) | 2011-12-02 | 2011-12-02 | 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法 |
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CN201110396196.7A CN103132006B (zh) | 2011-12-02 | 2011-12-02 | 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法 |
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CN103132006A CN103132006A (zh) | 2013-06-05 |
CN103132006B true CN103132006B (zh) | 2015-11-11 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20070026246A1 (en) * | 2005-07-29 | 2007-02-01 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
TW200925323A (en) * | 2007-12-06 | 2009-06-16 | Tocalo Co Ltd | Method of forming black yttrium oxide sprayed coating and member provided with black yttrium oxide sprayed coating |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20070026246A1 (en) * | 2005-07-29 | 2007-02-01 | Tocalo Co., Ltd. | Y2O3 spray-coated member and production method thereof |
TW200925323A (en) * | 2007-12-06 | 2009-06-16 | Tocalo Co Ltd | Method of forming black yttrium oxide sprayed coating and member provided with black yttrium oxide sprayed coating |
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Effective date of registration: 20201218 Address after: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee after: AoXin integrated circuit technology (Guangdong) Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Effective date of registration: 20220425 Address after: 510000 room 710, Jianshe building, No. 348, Kaifa Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |