CN103132001B - 一种制备y2o3陶瓷涂层的改进方法 - Google Patents
一种制备y2o3陶瓷涂层的改进方法 Download PDFInfo
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- CN103132001B CN103132001B CN201110394635.0A CN201110394635A CN103132001B CN 103132001 B CN103132001 B CN 103132001B CN 201110394635 A CN201110394635 A CN 201110394635A CN 103132001 B CN103132001 B CN 103132001B
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CN103132001A CN103132001A (zh) | 2013-06-05 |
CN103132001B true CN103132001B (zh) | 2015-07-01 |
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JP5623619B1 (ja) * | 2013-12-02 | 2014-11-12 | 倉敷ボーリング機工株式会社 | ドライエッチング用チャンバー内部材の製造方法 |
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CN1687486A (zh) * | 2005-02-17 | 2005-10-26 | 建设工业(集团)有限责任公司 | 金属材料表面镀硬铬的方法 |
WO2007013184A1 (ja) * | 2005-07-29 | 2007-02-01 | Tocalo Co., Ltd. | Y2o3溶射皮膜被覆部材およびその製造方法 |
JP4981291B2 (ja) * | 2005-09-30 | 2012-07-18 | 株式会社フジミインコーポレーテッド | 溶射用粉末及び溶射皮膜の形成方法 |
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Effective date of registration: 20201223 Address after: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee after: AoXin integrated circuit technology (Guangdong) Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Effective date of registration: 20220425 Address after: 510000 room 710, Jianshe building, No. 348, Kaifa Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510000 601, building a, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Patentee before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |
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