CN103194715B - 一种大气等离子喷涂技术制备非晶Y3Al5O12涂层的方法 - Google Patents
一种大气等离子喷涂技术制备非晶Y3Al5O12涂层的方法 Download PDFInfo
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- CN103194715B CN103194715B CN201210001926.3A CN201210001926A CN103194715B CN 103194715 B CN103194715 B CN 103194715B CN 201210001926 A CN201210001926 A CN 201210001926A CN 103194715 B CN103194715 B CN 103194715B
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- 238000007750 plasma spraying Methods 0.000 title claims abstract description 30
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000011248 coating agent Substances 0.000 title claims abstract description 20
- 238000002360 preparation method Methods 0.000 title description 2
- 239000000843 powder Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000005516 engineering process Methods 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000002156 mixing Methods 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 11
- 239000007921 spray Substances 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 5
- 238000002203 pretreatment Methods 0.000 claims description 4
- 238000005469 granulation Methods 0.000 claims description 3
- 230000003179 granulation Effects 0.000 claims description 3
- 239000004576 sand Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 abstract description 6
- 230000003628 erosive effect Effects 0.000 abstract description 4
- 238000005524 ceramic coating Methods 0.000 abstract description 3
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 abstract 3
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000013386 optimize process Methods 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 14
- 238000005530 etching Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 238000001816 cooling Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Coating By Spraying Or Casting (AREA)
Abstract
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CN201210001926.3A CN103194715B (zh) | 2012-01-05 | 2012-01-05 | 一种大气等离子喷涂技术制备非晶Y3Al5O12涂层的方法 |
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CN201210001926.3A CN103194715B (zh) | 2012-01-05 | 2012-01-05 | 一种大气等离子喷涂技术制备非晶Y3Al5O12涂层的方法 |
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CN103194715A CN103194715A (zh) | 2013-07-10 |
CN103194715B true CN103194715B (zh) | 2015-07-01 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10196728B2 (en) * | 2014-05-16 | 2019-02-05 | Applied Materials, Inc. | Plasma spray coating design using phase and stress control |
CN105624602B (zh) * | 2014-10-28 | 2018-11-02 | 北京美桥电子设备有限公司 | 一种应用于铝基基材的Y3Al5O12涂层的制备方法 |
CN105603352B (zh) * | 2016-01-15 | 2018-07-24 | 中国科学院上海硅酸盐研究所 | Al2O3/YAG非晶/共晶复合陶瓷涂层及其制备方法 |
CN105648386B (zh) * | 2016-02-18 | 2018-12-07 | 中国科学院上海硅酸盐研究所 | 热喷涂氧化铝–氧化钇复合陶瓷涂层及其制备方法 |
CN106048502B (zh) * | 2016-06-07 | 2019-03-01 | 苏州大学 | 纳米yag涂层、其制备方法及应用 |
CN109680241B (zh) * | 2019-02-26 | 2020-10-23 | 中国科学院上海硅酸盐研究所 | 强韧、导热与高温微结构稳定一体化的非晶氧化物陶瓷复合涂层制备方法 |
CN113584417B (zh) * | 2021-08-02 | 2022-08-02 | 重庆臻宝实业有限公司 | 一种稀土金属盐类陶瓷复合涂层及其制备方法与应用 |
CN113584420A (zh) * | 2021-08-02 | 2021-11-02 | 重庆臻宝实业有限公司 | 一种非晶Y2SiO5涂层的制备方法 |
CN113584421A (zh) * | 2021-08-05 | 2021-11-02 | 重庆臻宝实业有限公司 | 一种增强氧化钇涂层与基材表面结合强度的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101280405A (zh) * | 2008-04-30 | 2008-10-08 | 中国科学院上海硅酸盐研究所 | 等离子喷涂法制备的氧化镧-氧化铝复合涂层及其制备方法 |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101280405A (zh) * | 2008-04-30 | 2008-10-08 | 中国科学院上海硅酸盐研究所 | 等离子喷涂法制备的氧化镧-氧化铝复合涂层及其制备方法 |
Non-Patent Citations (1)
Title |
---|
机械活化一放电等离子烧结制备Y3A15012陶瓷;孟庆新 等;《粉末冶金技术》;20071231;第25卷(第6期);415-419 * |
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